A semiconductor device includes a substrate, a lower structure on the substrate, the lower structure including a first wiring structure, a second wiring structure, and a lower insulating structure covering the first and second wiring structures, a first pattern layer including a plate portion and a via portion, the plate portion being on the lower insulating structure and the via portion extending into the lower insulating structure from a lower portion of the plate portion and overlapping the first wiring structure, a graphene-like carbon material layer in contact with the via portion and the first wiring structure between the via portion and the first wiring structure, gate layers stacked in a vertical direction perpendicular to an upper surface of the substrate and spaced apart from each other on the first pattern layer, and a memory vertical structure penetrating through the gate layers in the vertical direction.

A 3D semiconductor device including: a first level including a single crystal silicon layer and a plurality of first transistors, the plurality of first transistors each including a single crystal channel; a first metal layer overlaying the plurality of first transistors; a second metal layer overlaying the first metal layer; a third metal layer overlaying the second metal layer; a second level is disposed above the third metal layer, where the second level includes a plurality of second transistors; a fourth metal layer disposed above the second level; and a connective path between the fourth metal layer and either the third metal layer or the second metal layer, where the connective path includes a via disposed through the second level, where the via has a diameter of less than 800 nm and greater than 5 nm, and where at least one of the plurality of second transistors includes a metal gate.

A 3D semiconductor device including: a first level including a single crystal silicon layer and a plurality of first transistors, the plurality of first transistors each including a single crystal channel; a first metal layer overlaying the plurality of first transistors; a second metal layer overlaying the first metal layer; a third metal layer overlaying the second metal layer; a second level is disposed above the third metal layer, where the second level includes a plurality of second transistors; a fourth metal layer disposed above the second level; and a connective path between the fourth metal layer and either the third metal layer or the second metal layer, where the connective path includes a via disposed through the second level, where the via has a diameter of less than 800 nm and greater than 5 nm, and where at least one of the plurality of second transistors includes a metal gate.

An integrated circuit (IC) is disclosed herein for adaptive power multiplexing with a power distribution network. In an example aspect, the integrated circuit includes a first power rail, a second power rail, and a load power rail. The integrated circuit also includes multiple power-multiplexer tiles and power-multiplexer control circuitry. The multiple power-multiplexer tiles are coupled in series in a chained arrangement and configured to jointly perform a power-multiplexing operation. Each power-multiplexer tile is configured to switch between coupling the load power rail to the first power rail and coupling the load power rail to the second power rail. The power-multiplexer control circuitry is configured to control a direction of current flow to prevent cross-conduction between the first power rail and the second power rail during the power-multiplexing operation.

Electrical interconnect technology for a package substrate is disclosed. A substrate can include a first conductive element at least partially disposed in a first routing layer, and a second conductive element at least partially disposed in a second routing layer. The first and second routing layers are adjacent routing layers. The substrate can also include a third conductive element having first and second portions disposed in the first routing layer, and an intermediate third portion disposed in a “sub-interconnect layer” between the first and second routing layers.

Electrical interconnect technology for a package substrate is disclosed. A substrate can include a first conductive element at least partially disposed in a first routing layer, and a second conductive element at least partially disposed in a second routing layer. The first and second routing layers are adjacent routing layers. The substrate can also include a third conductive element having first and second portions disposed in the first routing layer, and an intermediate third portion disposed in a “sub-interconnect layer” between the first and second routing layers.

This invention provides a multi-pin semiconductor device as a low-cost flip-chip BGA. In the flip-chip BGA, a plurality of signal bonding electrodes in a peripheral area of the upper surface of a multilayer wiring substrate are separated into inner and outer ones and a plurality of signal through holes coupled to a plurality of signal wirings drawn inside are located between a plurality of rows of signal bonding electrodes and a central region where a plurality of bonding electrodes for core power supply are located so that the chip pad pitch can be decreased and the cost of the BGA can be reduced without an increase in the number of layers in the multilayer wiring substrate.

This invention provides a multi-pin semiconductor device as a low-cost flip-chip BGA. In the flip-chip BGA, a plurality of signal bonding electrodes in a peripheral area of the upper surface of a multilayer wiring substrate are separated into inner and outer ones and a plurality of signal through holes coupled to a plurality of signal wirings drawn inside are located between a plurality of rows of signal bonding electrodes and a central region where a plurality of bonding electrodes for core power supply are located so that the chip pad pitch can be decreased and the cost of the BGA can be reduced without an increase in the number of layers in the multilayer wiring substrate.

A semiconductor device includes a first and a second power rails extending in a row direction, a third power rail extending in the row direction between the first and second power rail, and a first cell arranged between the first second power rails. A cell height of the first cell in a column direction perpendicular to the row direction is equal to a pitch between the first and second power rails. The semiconductor device also includes a second cell arranged between the first and third power rails. A cell height of the second cell in the column direction is equal to a pitch between the first and third power rails. A first active region of the first cell includes a first width in the column direction greater than a second width, in the column direction, of a second active region in the second cell.

A semiconductor device includes a first and a second power rails extending in a row direction, a third power rail extending in the row direction between the first and second power rail, and a first cell arranged between the first second power rails. A cell height of the first cell in a column direction perpendicular to the row direction is equal to a pitch between the first and second power rails. The semiconductor device also includes a second cell arranged between the first and third power rails. A cell height of the second cell in the column direction is equal to a pitch between the first and third power rails. A first active region of the first cell includes a first width in the column direction greater than a second width, in the column direction, of a second active region in the second cell.