H01L41/41

PIEZOELECTRIC MATERIAL, METHOD FOR PRODUCING THE SAME, PIEZOELECTRIC ELEMENT AND COMBUSTION PRESSURE SENSOR

A piezoelectric material for a combustion pressure sensor, a method for producing the piezoelectric material, and a combustion pressure sensor using the piezoelectric material are provided. The piezoelectric material of the present invention includes a single crystal containing Ca, Ta, an element M (M is Al or Ga), Si, and O, the single crystal has the same crystal structure as the crystal structure of langasite represented by La.sub.3Ga.sub.5SiO.sub.14, and at least the content of the element M is insufficient for the stoichiometric composition represented by Ca.sub.3TaM.sub.3Si.sub.2O.sub.14. Preferably, in a case where the element M is Ga, each content of the Ca and the Si is excessive for the stoichiometric composition, and in a case where the element M is Al, the content of the Ca is excessive for the stoichiometric composition, and the content of the Ta is insufficient for the stoichiometric composition.

Piezoelectric transducer, ultrasonic probe, and piezoelectric transducer manufacturing method

According to embodiment, a piezoelectric transducer includes a polarized single crystal piezoelectric body comprising a lead complex perovskite compound containing niobium oxide and at least one of magnesium oxide and indium oxide and including a first plane whose crystal orientation is [100] and a second plane which faces the first plane and whose crystal orientation is [100], and first electrode provided on the first plane side of the body and a second electrode provided on the second plane side of the body. A ratio of a second FWHM of diffracted X-rays at the Miller index (400) of the body to a first FWHM of diffracted X-rays at the miller index (400) of the body which is unpolarized or has undergone depolarization processing is not less than 0.22 and not more than 0.4.

PIEZOELECTRIC FILM, PIEZOELECTRIC DEVICE, AND METHOD FOR MAKING PIEZOELECTRIC FILM
20170092836 · 2017-03-30 · ·

A method for producing a piezoelectric film includes forming a metal film, recrystallizing a portion of the metal film by heating, forming an amorphous film of piezoelectric material on the metal film; and heating the amorphous film at a position of the recrystallized portion of the metal film.