Disclosed is a laser discharge chamber in which useful lifetime is extended by local electrical tuning using one or a combination of design of the chamber internal geometry, placement and distribution of components within the chamber such as electrodes, current returns, and capacitors, and selective electrical isolation of portions of the components.

A laser chamber of an excimer laser apparatus includes a container including a first member and a second member and configured to accommodate a laser gas in the container and a seal member disposed between two seal surfaces facing each other, a seal surface of the first member and a seal surface of the second member. A laser-gas-side surface of the seal member is made of fluorine-based rubber, and an atmosphere-side surface of the seal member is formed of a film configured to suppress atmosphere transmission.

An optical compensation system for a laser beam and an excimer laser annealing device are provided in the present disclosure. The optical compensation system for the laser beam includes a laser source, a beam splitter and a reversion assembly. The laser beam emitted by the laser source enters the beam splitter, and is divided by the beam splitter into a first light beam and a second light beam having different transmission paths. The second light beam is reversed and reflected by the reversion assembly, enters the beam splitter, and exits from the beam splitter together with the first light beam. An asymmetry of the second light beam reversed by the reversion assembly is different from an asymmetry of the first light beam.

An apparatus for a light source includes: an electrical insulator that defines a channel; a gasket that surrounds at least a portion of the electrical insulator; and a shield between the channel and the gasket. The channel is configured to receive an electrical conductor. The gasket includes a non-metallic material.

The present invention provides a laser, including: a medium, having a ground state, an intermediate state, and an excited state in ascending order of energy; an excitation system, configured to excite electrons in the medium from the ground state to the intermediate state; and an excitation laser, configured to drive electrons in the intermediate state at different spatial positions in the medium to the ground state through a stimulated emission process with a fixed phase relationship, to generate a laser with a shorter relative wavelength. Due to the use of an excitation laser to drive electrons from the intermediate state, the photons generated by the stimulated emission have coherence, thereby forming a laser. In the present invention, an excitation system performing primary pumping combined with an excitation laser with a relatively long wavelength performing secondary pumping generate lasers with a relatively short wavelength, and the structure of the short-wavelength laser is simple, compact, and easy to be implemented. In addition, the cost of the short-wavelength laser can be reduced, and a laser with a shorter wavelength can be obtained.

Techniques are provided for scaling the average power of high-energy solid-state lasers to high values of average output power while maintaining high efficiency. An exemplary technique combines a gas-cooled-slab amplifier architecture with a pattern of amplifier pumping and extraction in which pumping is continuous and in which only a small fraction of the energy stored in the amplifier is extracted on any one pulse. Efficient operation is achieved by propagating many pulses through the amplifier during each period equal to the fluorescence decay time of the gain medium, so that the preponderance of the energy cycled through the upper laser level decays through extraction by the amplified pulses rather than through fluorescence decay.

Techniques are provided for scaling the average power of high-energy solid-state lasers to high values of average output power while maintaining high efficiency. An exemplary technique combines a gas-cooled-slab amplifier architecture with a pattern of amplifier pumping and extraction in which pumping is continuous and in which only a small fraction of the energy stored in the amplifier is extracted on any one pulse. Efficient operation is achieved by propagating many pulses through the amplifier during each period equal to the fluorescence decay time of the gain medium, so that the preponderance of the energy cycled through the upper laser level decays through extraction by the amplified pulses rather than through fluorescence decay.

An optical compensation system for a laser beam and an excimer laser annealing device are provided in the present disclosure. The optical compensation system for the laser beam includes a laser source, a beam splitter and a reversion assembly. The laser beam emitted by the laser source enters the beam splitter, and is divided by the beam splitter into a first light beam and a second light beam having different transmission paths. The second light beam is reversed and reflected by the reversion assembly, enters the beam splitter, and exits from the beam splitter together with the first light beam. An asymmetry of the second light beam reversed by the reversion assembly is different from an asymmetry of the first light beam.

A deformometer includes: a cavity body; entry and exit optical cavity optics, such that the optical cavity produces filtered combined light from combined light; a first laser that provides first light; a second laser that provides second light; an optical combiner that: receives the first light; receives the second light; combines the first light and the second light; produces combined light from the first light and the second light; and communicates the combined light to the entry optical cavity optic; a beam splitter that: receives the filtered combined light; splits the filtered combined light; a first light detector in optical communication with the beam splitter and that: receives the first filtered light from the beam splitter; and produces a first cavity signal from the first filtered light; and a second light detector that: receives the second filtered light; and produces a second cavity signal from the second filtered light.

A deformometer includes: a cavity body; entry and exit optical cavity optics, such that the optical cavity produces filtered combined light from combined light; a first laser that provides first light; a second laser that provides second light; an optical combiner that: receives the first light; receives the second light; combines the first light and the second light; produces combined light from the first light and the second light; and communicates the combined light to the entry optical cavity optic; a beam splitter that: receives the filtered combined light; splits the filtered combined light; a first light detector in optical communication with the beam splitter and that: receives the first filtered light from the beam splitter; and produces a first cavity signal from the first filtered light; and a second light detector that: receives the second filtered light; and produces a second cavity signal from the second filtered light.