H01S5/0057

Pulsed light generation device, pulsed light generation method, exposure apparatus having pulsed light generation device and inspection apparatus having pulsed light generation device
11303091 · 2022-04-12 · ·

A pulsed light generation device, includes: a first optical fiber through which first pulsed light and second pulsed light, having an intensity that decreases while an intensity of the first pulsed light increases, and increases while the intensity of the first pulsed light decreases, having been multiplexed and entered therein, are propagated; and a second optical fiber at which the first pulsed light, having exited the first optical fiber and entered therein, is amplified while being propagated therein, wherein: at the first optical fiber, phase modulation occurs in the first pulsed light due to cross phase modulation caused by the second pulsed light; and self-phase modulation occurring in the first pulsed light at the second optical fiber is diminished by the phase modulation having occurred at the first optical fiber.

LASER SYSTEMS AND METHODS FOR PROVIDING HIGH-FREQUENCY AND LOW-FREQUENCY LASER PULSE TRAINS
20210305768 · 2021-09-30 ·

Laser systems are described that each include at least one excitation laser, a high frequency laser pulse source, and a beam switchover device. The beam switchover device is configured to be switched, in order a) in a high-frequency functional position to guide at least one GHz laser pulse train with a pulse repetition rate of individual pulses in the GHz laser pulse train of at least 0.5 GHz from the high frequency laser pulse source to a target position, and b) in a low-frequency functional position to guide at least one low-frequency laser pulse train with a pulse repetition rate of individual pulses in the low-frequency laser pulse train of less than 0.5 GHz from the at least one excitation laser to the target position.

Wavelength-tunable light source and wavelength control method for the same

A wavelength-tunable light source includes a wavelength-tunable laser including a first region and a second region each of which includes at least one of heaters, a frequency locker configured to receive output light of the wavelength-tunable laser and output two electric control signals whose phases are mutually different by 90° and having frequency period with respect to frequency of the output light, a thermal electric cooler on which the wavelength-tunable laser and the frequency locker are mounted, and a controller configured to control temperature of the heaters, and the thermal electric cooler on the basis of any one of the two electric control signals.

Pulsed laser for lidar system

A lidar system comprising with a light source, an optical link, and a sensor head. The light source can include a seed laser to produce pulses of light and an optical preamplifier to amplify the pulses of light. The optical link can convey amplified pulses of light to the sensor head remotely located from the light source. The sensor head can include an optical booster amplifier, a scanner to scan amplified output pulses of light across a field of regard, and a receiver to detect pulses of light scattered by a target located a distance from the sensor head.

TOP EMITTING VCSEL ARRAY WITH INTEGRATED GRATINGS
20210167580 · 2021-06-03 · ·

Top emitting vertical cavity surface emitting lasers (VCSELs) are described with various top side optical gratings, etched into and/or fabricated over the VCSELs, to configure optical emission properties to suite a wide range of applications. Top side gratings are configured for spanning one or multiple emitters in any desired alignment/misalignment, using a wide range of refractive index materials and arrangements, levels of dimensionality (1D, 2D or 3D), forms of chirping of the grating, various grating periods, transmissive/reflective properties and in-plane coupling, ranges of diffractive orders, different relative amplitudes of transmitted and reflected orders, different polarizations, different levels of collimation, different levels of divergence, different diffraction and reflection, different beam diffusion, fixed or varied rotation of optical output, and far field engineering of the optical output.

Stimulated Raman scattering spectroscope based on passive Q-switch and use thereof in industrial molecular analysis
10921184 · 2021-02-16 · ·

The present application describes embodiments of a stimulated Raman scattering (SRS) spectroscope based on a passive Q-switch system for high-resolution, real-time, on-site and multi-point industrial molecular analysis.

Amplifier assembly with semiconductor optical amplifier

In one embodiment, a laser system includes a seed laser diode configured to produce a free-space seed-laser beam and a seed-laser focusing lens configured to focus the seed-laser beam. The laser system also includes a semiconductor optical amplifier (SOA) that includes a front facet, a back facet, and a waveguide extending from the front facet to the back facet. The SOA is configured to: receive, at the front facet, light from the focused seed-laser beam; amplify the received light as the received light propagates along the SOA waveguide from the front facet to the back facet; and emit, from the back facet, an amplified free-space beam that includes the amplified received light. The laser system further includes a mounting platform, where one or more of the seed laser diode, the seed-laser focusing lens, and the SOA are mechanically attached to the mounting platform.

OPTICAL DEVICE BASED ON SERIES PUSH-PULL OPERATION

Provided is an optical device including a radio frequency (RF) signal source configured to electrically provide an RF signal, a first diode configured to operate as a laser diode (LD) or an electro-absorption modulator (EAM) in response to the RF signal, a second diode configured to share an N region of the first diode, be serially connected to the first diode, and have a P region connected to a ground to operate as a capacitor for series push-pull operation with the first diode, and a resistor connected between the N region and the ground.

PULSED LIGHT GENERATION DEVICE, PULSED LIGHT GENERATION METHOD, EXPOSURE APPARATUS HAVING PULSED LIGHT GENERATION DEVICE AND INSPECTION APPARATUS HAVING PULSED LIGHT GENERATION DEVICE
20200153193 · 2020-05-14 · ·

A pulsed light generation device, includes: a first optical fiber through which first pulsed light and second pulsed light, having an intensity that decreases while an intensity of the first pulsed light increases, and increases while the intensity of the first pulsed light decreases, having been multiplexed and entered therein, are propagated; and a second optical fiber at which the first pulsed light, having exited the first optical fiber and entered therein, is amplified while being propagated therein, wherein: at the first optical fiber, phase modulation occurs in the first pulsed light due to cross phase modulation caused by the second pulsed light; and self-phase modulation occurring in the first pulsed light at the second optical fiber is diminished by the phase modulation having occurred at the first optical fiber.

STIMULATED RAMAN SCATTERING SPECTROSCOPE BASED ON PASSIVE Q-SWITCH AND USE THEREOF IN INDUSTRIAL MOLECULAR ANALYSIS
20200141799 · 2020-05-07 ·

The present application describes embodiments of a stimulated Raman scattering (SRS) spectroscope based on a passive Q-switch system for high-resolution, real-time, on-site and multi-point industrial molecular analysis.