Patent classifications
H03K4/92
RF PULSING WITHIN PULSING FOR SEMICONDUCTOR RF PLASMA PROCESSING
A system and method for generating a radio frequency (RF) waveform are described. The method includes defining a train of on-off pulses separated by an off state having no on-off pulses. The method further includes applying a multi-level pulse waveform that adjusts a magnitude of each of the on-off pulses to generate an RF waveform. The method includes sending the RF waveform to an electrode.
RF PULSING WITHIN PULSING FOR SEMICONDUCTOR RF PLASMA PROCESSING
A system and method for generating a radio frequency (RF) waveform are described. The method includes defining a train of on-off pulses separated by an off state having no on-off pulses. The method further includes applying a multi-level pulse waveform that adjusts a magnitude of each of the on-off pulses to generate an RF waveform. The method includes sending the RF waveform to an electrode.
Device and method of generating nonlinear waveform signal
The present disclosure provides a device and method of generating a nonlinear waveform signal dissipating low power and operating at a high speed. The device includes: a digital preprocessing unit configured to quantize an effective input signal to generate a linear data signal and a residual signal that is a difference between the effective input signal and the linear data signal; a nonlinear digital-to-analog conversion circuit (DAC) having a nonlinear relationship between an input and an output and configured to convert the linear data signal into a first analog signal; a linear interpolation DAC configured to convert the residual signal into a second analog signal to enable a generation of a converted analog signal by an addition of the second analog signal to the first analog signal; and an output circuit configured to output the converted analog signal as a nonlinear waveform signal.
Device and method of generating nonlinear waveform signal
The present disclosure provides a device and method of generating a nonlinear waveform signal dissipating low power and operating at a high speed. The device includes: a digital preprocessing unit configured to quantize an effective input signal to generate a linear data signal and a residual signal that is a difference between the effective input signal and the linear data signal; a nonlinear digital-to-analog conversion circuit (DAC) having a nonlinear relationship between an input and an output and configured to convert the linear data signal into a first analog signal; a linear interpolation DAC configured to convert the residual signal into a second analog signal to enable a generation of a converted analog signal by an addition of the second analog signal to the first analog signal; and an output circuit configured to output the converted analog signal as a nonlinear waveform signal.
Sensing system and method for use in electromagnetic-absorbing material
Systems and methods for obtaining telemetry environmental readings from within an electromagnetic-absorbing material are disclosed herein. The system may include a self-contained power source powering a switch-mode amplifier to drive a multi-turn coil to be driven with a low-frequency carrier.
Sensing system and method for use in electromagnetic-absorbing material
Systems and methods for obtaining telemetry environmental readings from within an electromagnetic-absorbing material are disclosed herein. The system may include a self-contained power source powering a switch-mode amplifier to drive a multi-turn coil to be driven with a low-frequency carrier.
RF PULSING WITHIN PULSING FOR SEMICONDUCTOR RF PLASMA PROCESSING
A system and method for generating a radio frequency (RF) waveform are described. The method includes defining a train of on-off pulses separated by an off state having no on-off pulses. The method further includes applying a multi-level pulse waveform that adjusts a magnitude of each of the on-off pulses to generate an RF waveform. The method includes sending the RF waveform to an electrode.
RF PULSING WITHIN PULSING FOR SEMICONDUCTOR RF PLASMA PROCESSING
A system and method for generating a radio frequency (RF) waveform are described. The method includes defining a train of on-off pulses separated by an off state having no on-off pulses. The method further includes applying a multi-level pulse waveform that adjusts a magnitude of each of the on-off pulses to generate an RF waveform. The method includes sending the RF waveform to an electrode.
Sinusoidal wave formation for reduction of oscillations, harmonics and distortion using short pulses to reduce the number of required impedance injection units
A method for synchronized injection of impedance into high voltage (HV) transmission line is disclosed. The method includes generating, by a plurality of impedance injection units (IIUs) coupled to the HV transmission line, impedance injection waves that cumulatively form a pseudo-sinusoidal wave. The method further includes optimizing, by the plurality of IIUs, the pseudo-sinusoidal wave to represent a pure sinusoidal wave. The method further includes injecting, by the plurality of IIUs, the pseudo-sinusoidal wave, as impedance, into the HV transmission line. The plurality of IIUs form multiple connection configurations in sequence, each connection configuration comprising one IIU or multiple IIUs in series, parallel or combination thereof, coupled to the HV transmission line.
Sinusoidal wave formation for reduction of oscillations, harmonics and distortion using short pulses to reduce the number of required impedance injection units
A method for synchronized injection of impedance into high voltage (HV) transmission line is disclosed. The method includes generating, by a plurality of impedance injection units (IIUs) coupled to the HV transmission line, impedance injection waves that cumulatively form a pseudo-sinusoidal wave. The method further includes optimizing, by the plurality of IIUs, the pseudo-sinusoidal wave to represent a pure sinusoidal wave. The method further includes injecting, by the plurality of IIUs, the pseudo-sinusoidal wave, as impedance, into the HV transmission line. The plurality of IIUs form multiple connection configurations in sequence, each connection configuration comprising one IIU or multiple IIUs in series, parallel or combination thereof, coupled to the HV transmission line.