A composition for forming a patterned thin metal film on a substrate is presented. The composition includes metal cations; and at least one solvent, wherein the patterned thin metal film is adhered to a surface of the substrate upon exposure of the at least metal cations to a low-energy plasma.

The present invention provides an apparatus of charged-particle beam e.g. an electron microscope comprising a plasma generator for selectively cleaning BSE detector. In various embodiments, the plasma generator is located between a sample stage and a sample table having one or more openings or holes. The plasma generator generates plasma and distributes or dissipates the plasma through the openings of the sample table toward and onto surface of the BSE detector. Cleaning contaminants on the surface of the BSE detector frequently and selectively with in-situ generated plasma can prevent the detectors from performance deterioration such as losing resolution and contrast in imaging at high levels of magnification.

An exhaust pipe apparatus according to an embodiment includes a dielectric pipe; a radio-frequency electrode; and a plasma generation circuit. The exhaust pipe apparatus functions as a part of an exhaust pipe disposed between a process chamber and a vacuum pump that exhausts gas inside the process chamber. The radio-frequency electrode includes a thin metal plate disposed on an outer periphery side of the dielectric pipe, a buffer member disposed on an outer periphery side of the thin metal plate, and a conductive hollow structure disposed on an outer periphery side of the buffer member and a radio-frequency voltage is applied to the radio-frequency electrode. The plasma generation circuit generates plasma inside the dielectric pipe.

A plasma CVD device which comprises a substrate having a three-dimensional shape such as that of a bottle and which can form a coating on the surface of various substrates under atmospheric pressure, and a coating forming method are provided. This atmospheric pressure remote plasma CVD device is provided with a dielectric chamber which has a gas inlet, an inner space and a plasma outlet, and a plasma generation device which generates plasma in the inner space. The plasma outlet is provided with a nozzle that has an opening area smaller than the average cross-sectional area of the cross-sections perpendicular to the direction of gas flow in the inner space.

A high-frequency wave applicator for producing a plasma, including an inner conductor, and an outer conductor forming a coaxial structure, and a propagation medium of a high-frequency wave in a main propagation direction (x), including a passage dielectric of the wave having a sealing solid body disposed between the inner conductor and the outer conductor. Advantageously, the inner conductor has a first outer dimension d.sub.1 in a transverse direction (y), perpendicular to the main propagation direction (x), and the outer conductor has an inner dimension d.sub.2 in the transverse direction (y), such that 0.2<(d.sub.2−d.sub.1)/d.sub.2<0.55 allows improvement of the dissipation of the energy flows on the surface of the applicator.

A surface conditioning device for railway track rails and/or railway vehicle wheels includes a DC power supply, a supply of gas, a plasma delivery head connected to receive DC power from the power supply and gas from the gas supply, and an igniter for igniting the gas in the plasma delivery head. In use, plasma is generated within the delivery head by ignition of the gas in the delivery head. Plasma with gas is blown from the delivery head onto a railway track rail and/or railway vehicle wheel, thereby conditioning the rail and/or wheel.

Systems and methods that produce bremsstrahlung radiation may facilitate the setting of a settable composition. For example, a method may include providing a settable composition in a portion of a wellbore penetrating a subterranean formation, a portion of the subterranean formation, or both; conveying an electron accelerator tool along the wellbore proximal to the settable composition; producing an electron beam in the electron accelerator tool with a trajectory that impinges a converter material, thereby converting the electron beam to bremsstrahlung photons; manipulating the trajectory of the electron beam in a radial direction, an axial direction, or both of the wellbore with a rastoring device of the electron accelerator tool; and irradiating the settable composition with the bremsstrahlung photons.

Disclosed is an escalator sterilization device attached close to a handrail of an escalator and formed by a base and a sterilization module. The sterilization module has a cover in an arc shape, so that the cover can be attached closed to a surface of a handrail of the escalator, and the inner wall of the cover has plural electrode coils electrically coupled to a power supply device in the base. After the power supply device is conducted by an electric power, a high voltage power is generated to excite the electrode coils to form plasma, and the plasma is used to destroy polymorphic bacteria and microorganisms, so that the sterilization module can eliminate the bacteria on the surface of the handrail of the escalator and provide a deodorant effect.

According to the hydrogen peroxide plasma ionization generator device having a double-jet nozzle suggested by the present invention, the double jet nozzle forming an air passage is configured to construct the hydrogen peroxide plasma ionization generator device such that the hydrogen peroxide and ion particles are sprayed finer than that of a conventional single-jet nozzle.

A method of forming a patterned hard mask on a surface of a substrate uses an accelerated neutral beam with carbon atoms.