A method of manufacturing a semiconductor structure includes forming a stack of alternating layers comprising insulating layers and spacer material layers over a semiconductor substrate, forming a memory opening through the stack, forming an aluminum oxide layer having a horizontal portion at a bottom of the memory opening and a vertical portion at least over a sidewall of the memory opening, where the horizontal portion differs from the vertical portion by at least one of structure or composition, and selectively etching the horizontal portion selective to the vertical portion.

An alternating stack of insulating layers and sacrificial material layers can be formed over a substrate. Memory stack structures and a backside trench are formed through the alternating stack. Backside recesses are formed by removing the sacrificial material layers from the backside trench selective to the insulating layers. A cobalt-semiconductor alloy portion is formed in each backside recess by reacting cobalt and a semiconductor material. Conductive material in the backside trench can be removed by an etch to electrically isolate cobalt-containing alloy portions located in different backside recesses. Electrically conductive layers including a respective cobalt-semiconductor alloy portion can be employed as word lines of a three-dimensional memory device.

A method can be used for writing in a memory location of the electrically-erasable and programmable memory type. The memory location includes a first memory cell with a first transistor having a first gate dielectric underlying a first floating gate and a second memory cell with a second transistor having a second gate dielectric underlying a second floating gate that is connected to the first floating gate. In a first writing phase, an identical tunnel effect is implemented through the first gate dielectric and the second gate dielectric. In a second writing phase, a voltage across the first gate dielectric but not the second gate dielectric is increased.

A method of making a monolithic three dimensional NAND string is provided. A stack of alternating layers of a first material and a second material different from the first material is formed over a substrate. The stack is etched to form at least one opening in the stack. A charge storage material layer is formed on a sidewall of the at least one opening. A tunnel dielectric layer is formed on the charge storage material layer in the at least one opening. A semiconductor channel material is formed on the tunnel dielectric layer in the at least one opening. The first material layers are selectively removed to expose side wall of the charge storage material layer. A blocking dielectric is formed on the exposed side wall of the charge storage material layer. Control gates are formed on the blocking dielectric.

According to one embodiment, an inter-electrode insulating film interposed between a floating gate electrode and a control gate electrode includes a lower layer insulating film disposed on a side closer to the floating gate electrode, an upper layer insulating film disposed on a side closer to the control gate electrode, and an intermediate insulating film interposed between the lower layer insulating film and the upper layer insulating film, wherein the intermediate insulating film contains a first element, and the lower layer insulating film contains the first element and a second element, such that a ratio of the first element relative to the second element is larger on a side closer to the intermediate insulating film than on a side closer to the floating gate electrode.

A flash memory device and method of making the same are disclosed. The flash memory device is located on a substrate and includes a floating gate electrode, a tunnel dielectric layer located between the substrate and the floating gate electrode, a smaller length control gate electrode and a control gate dielectric layer located between the floating gate electrode and the smaller length control gate electrode. The length of a major axis of the smaller length control gate electrode is less than a length of a major axis of the floating gate electrode.

A semiconductor arrangement and method of forming the same are described. A semiconductor arrangement includes a first gate structure on a first side of an active area and a second gate structure on a second side of the active area, where the first gate structure and the second gate structure share the active area. A method of forming the semiconductor arrangement includes forming a deep implant of the active area before forming the first gate structure, and then forming a shallow implant of the active area. Forming the deep implant prior to forming the first gate structure alleviates the need for an etching process that degrades the first gate structure. The first gate structure thus has a desired configuration and is able to be formed closer to other gate structures to enhance device density.

A memory device including a silicon semiconductor substrate, spaced apart source and drain regions formed in the substrate with a channel region there between, and a conductive floating gate disposed over a first portion of the channel region and a first portion of the source region. An erase gate includes a first portion that is laterally adjacent to the floating gate and over the source region, and a second portion that extends up and over the floating gate. A conductive word line gate is disposed over a second portion of the channel region. The word line gate is disposed laterally adjacent to the floating gate and includes no portion disposed over the floating gate. The thickness of insulation separating the word line gate from the second portion of the channel region is less than that of insulation separating the floating gate from the erase gate.

A nonvolatile memory (NVM) cell includes a selection transistor configured to have a selection gate terminal coupled to a word line and a source terminal coupled to a source line, a cell transistor configured to have a floating gate electrically isolated, a drain terminal coupled to a bit line and sharing a junction terminal with the selection transistor, a first coupling capacitor disposed in a first connection line coupled between the word line and the floating gate, and a P-N diode and a second coupling capacitor disposed in series in a second connection line coupled between the word line and the floating gate. An anode and a cathode of the P-N diode are coupled to the second coupling capacitor and the word line, respectively. The first and second connection lines are coupled in parallel between the word line and the floating gate.

A method of forming an integrated DMOS transistor/EEPROM cell includes forming a first mask over a substrate, forming a drift implant in the substrate using the first mask to align the drift implant, simultaneously forming a first floating gate over the drift implant, and a second floating gate spaced apart from the drift implant, forming a second mask covering the second floating gate and covering a portion of the first floating gate, forming a base implant in the substrate using an edge of the first floating gate to self-align the base implant region, and simultaneously forming a first control gate over the first floating gate and a second control gate over the second floating gate. The first floating gate, first control gate, drift implant, and base implant form components of the DMOS transistor, and the second floating gate and second control gate form components of the EEPROM cell.