A vibration device includes: a piezoelectric unit including a piezoelectric element; a housing that holds the piezoelectric unit; a wiring member electrically connected to the piezoelectric unit; and a joining member that joins the housing to an external device. The housing includes a bottom surface portion to which the piezoelectric unit is fixed, and a side surface portion standing at an edge portion of the bottom surface portion. The side surface portion has a first surface formed on a top portion of the side surface portion, and a second surface that is one step lowered from the first surface by a cutout portion formed in the top portion. The joining member extends along the first surface to bridge over the cutout portion. The wiring member is joined to the joining member at a position of the first surface, and passes through the cutout portion in a state where the wiring member is not joined to the second surface.

A vibration device includes: a piezoelectric unit including a piezoelectric element; and a housing made of metal that holds the piezoelectric unit. The housing includes a bottom surface portion to which the piezoelectric unit is fixed, and side surface portions that stand at an edge portion of the bottom surface portion to surround the piezoelectric unit. The side surface portions are continuous with the bottom surface portion, and are inclined to open outward from the edge portion with respect to the bottom surface portion.

An array of piezoelectric micromachined ultrasound transducers (PMUTs) has a layer of piezoelectric material that requires poling during fabrication in order to properly align the piezoelectric dipoles to create a desired ultrasonic signal. The PMUT may have an interconnected set of lower electrodes that are fabricated between a processing layer of the PMUT and the piezoelectric layer. An upper electrode is fabricated overlaying the piezoelectric layer, and a poling voltage is applied between the upper electrode and the interconnected set of lower electrodes. After poling is complete, portions of the interconnected set of lower electrodes are removed to permanently isolate permanent lower electrodes from each other.

Provided are a flexible body and a method for controlling the flexible body to deform. The flexible body comprises one or more flexible units, wherein each of the flexible units comprises: a first electrode, a second electrode, an electroactive polymer layer, and a thin film transistor, wherein a source electrode or a drain electrode of the thin film transistor is electrically connected to the second electrode. The first electrode and the second electrode are configured to provide an electric field acting on the electroactive polymer layer, and the electroactive polymer layer is configured to deform in response to the electric field provided by the first electrode and the second electrode.

A semiconductor device may include: a substrate wafer, a bonding layer at least partially covering a front surface of the substrate wafer, a plurality of silicon pillars bonded to the front surface of the substrate wafer by the bonding layer, a single-crystal piezoelectric film having a first surface and an opposing second surface, a top electrode arranged adjacent to the first surface of the single-crystal piezoelectric film, and a bottom electrode arranged adjacent to the second surface of the single-crystal piezoelectric film. The single-crystal piezoelectric film may be supported by the plurality of silicon pillars such that the second surface of the piezoelectric film and the front surface of the substrate wafer enclose a cavity therebetween.

Provided are a laminated piezoelectric element and an electroacoustic transducer capable of obtaining high piezoelectric characteristics and easily ensuring an electric contact to an electrode layer. A plurality of layers of piezoelectric films, each of which is formed by laminating a first protective layer, a first electrode layer, a piezoelectric layer, a second electrode layer, and a second protective layer in this order, are laminated. Each of the piezoelectric layers is polarized in a thickness direction. In each of the piezoelectric films, the first electrode is disposed on an upstream side in a polarization direction of the piezoelectric layer, and the second electrode is disposed on a downstream side. Each of the plurality of piezoelectric films has a cemented portion which is cemented to an adjacent piezoelectric film and a protruding portion which is not cemented to the adjacent piezoelectric film and in which at least the first electrode layer and the first protective layer or the second electrode layer and the second protective layer protrude from the cemented portion toward the outside in a plane direction. At the protruding portion of each of the piezoelectric films, at least one of a first contact, to which the first electrode layers of the piezoelectric films are electrically connected to each other, or a second contact, to which the second electrode layers of the piezoelectric films are electrically connected to each other, is formed.

A piezoelectric element includes a piezoelectric element body including a first principal surface and a second principal surface opposing each other, and a plurality of external electrodes disposed on the first principal surface. A vibration member includes a third principal surface opposing the second principal surface. The piezoelectric element is joined to the third principal surface. A wiring member is electrically connected to the piezoelectric element. The wiring member includes a region located on the plurality of external electrodes and joined to the plurality of external electrodes. The region of the wiring member monolithically covers the plurality of external electrodes when viewed from a direction orthogonal to the first principal surface.

Embodiments described herein include a resonant process monitor and methods of forming such a resonant process monitor. In an embodiment, the resonant process monitor includes a frame that has a first opening and a second opening. In an embodiment, a resonant body seals the first opening of the frame. In an embodiment, a first electrode on a first surface of the resonant body contacts the frame and a second electrode is on a second surface of the resonant body. Embodiments also include a back plate that seals the second opening of the frame. In an embodiment the back plate is mechanically coupled to the frame, and the resonant body, the back plate, and interior surfaces of the frame define a cavity.

The present invention is directed to a method for manufacturing an ultrasonic fingerprint sensor by using a nanorod structure, the method including: a conductive mold generating step of generating a plurality of rod generation holes; a nanorod generating step of generating nanorods by filling the plurality of rod generation holes with a nano-piezoelectric material; a side electrode generation portion marking step of marking side electrode generation portions; a conductive mold etching step of generating nanorods and side electrodes by performing primary etching on the conductive mold; an insulating material filling step of filling portions with an insulating material; a lower electrode forming step of performing secondary etching and forming lower electrodes; a dummy substrate bonding step of bonding a dummy substrate to a surface on which the lower electrodes are formed; and an upper electrode forming step of removing the conductive substrate base and forming upper electrodes.

A cartridge for a high intensity focused ultrasound (HIFU) device and a piezoelectric linear motor are disclosed. By using the cartridge for a HIFU device according to the present invention, a transducer module is coupled to a piezoelectric linear motor driveable in water and embedded in the cartridge, heat generated when a conventional step motor is driven is fundamentally removed, an additional cooling fan is not needed, ultra-low power consumption and ultra-precise transfer can be realized, and thus an effective procedure can be performed. A skin beauty device may include ultrasound and high frequency units, apply a high frequency to a skin to be treated so as to crack a stratum corneum, and apply ultrasound to the skin to be treated, and thus a medicament drug can easily penetrate the treated skin. In addition, the piezoelectric linear motor in which a piezoelectric actuator and a moving shaft are stably coupled is provided.