A balancing or measuring device includes a main body which is rotatable about an axis and includes an opening for accommodating a coupling shaft of a component to be balanced or measured, and having a centering element which can be axially displaced within the main body against a spring arrangement to center the component in the main body. In order to ensure maximum concentricity also in a balancing or measuring device having a small number of parts, the spring arrangement is designed to be integral with the centering element.

A centering device for centrally chucking a rotary tool includes a socket on a mandrel of a tool holder. A tool arrangement includes a tool holder that has a mandrel, and including a rotary tool that is placed on the tool holder and includes a socket. In order to create a universal centering device that is easy to manufacture and can be used for a multitude of internal chucking units, and create a tool arrangement in which the rotary tool can be centered with high accuracy on the internal chucking unit, the centering device is designed as a closed centering ring which can be inserted between the rotary tool and the mandrel and which has an elastically deformable contour, and such a centering device is disposed between the mandrel and the rotary tool in the tool arrangement.

The invention relates to a drill chuck which has a drilling needle receptacle device for removable receiving of a drilling needle (1), a hollow cylindrical magnetic holder for the drilling needle receptacle device and a coupling device for torque transfer from a drive device to the drilling needle receptacle device. The drilling needle receptacle device, in which a drilling needle (1) having a flattened end section (1) can be received, has a receptacle element (7), at least two clamping bodies (10) and a clamping insert (6). The receptacle element (7) has at least one cylindrical section (72) having a recess (71) and the clamping insert (6) has counter-molded bodies (61) which supplement the clamping bodies (10) and which extend away from a stop disc (62). The stop disc (62) contacts a face of the cylindrical section (72) and has a lead-through opening (63) for the drilling needle (1). The counter-molded body (61) and the clamping bodies (10) are designed in respect of the dimensions and shape thereof for arrangement in the recess (71) and for clamping receiving of the flattened end section (1) of the drilling needle (1) between the clamping bodies (10) and the counter-molded bodies (61). The invention further relates to a drilling needle and to a drilling needle-drill chuck assembly.

The present invention relates to a substrate gripping apparatus includes a base, a plurality of support posts which are vertically movable relative to the base, a lifting mechanism configured to lift the support posts, and a substrate holder and a substrate guide member mounted to each of the support posts. Each of the support posts includes a relative movement mechanism configured to move the substrate holder in such a direction that the substrate holder releases a peripheral portion of a substrate, while raising the substrate guide member relative to the substrate holder, when the support post moves upward, and to move the substrate holder in such a direction that the substrate holder grips the peripheral portion of the substrate, while lowering the substrate guide member relative to the substrate holder, when the support post moves downward.

A work holder includes: a first holding part having three attracting members that are arranged circumferentially apart from each other to attract an axial end face of an annular work; and a second holding part having a contacting member that is held in contact with an inner periphery or outer periphery of the work and restricts radial movement of the work.

A device for locating and engaging a notch on the perimeter of a circular wafer includes a notch locating component and a first plate. The notch locating component is configured to move linearly along a first axis and includes a front elongated component extending along a second axis perpendicular to the first axis and having a front surface, a back surface opposite to the front surface and a first protrusion extending from the front surface of the elongated component. The first protrusion has a shape complementing the shape of a notch formed on the perimeter of a circular wafer. As the notch locating component is driven toward the perimeter of the circular wafer along the first axis, a distance between the back surface of the elongated component and a front surface of the first plate is measured and the value of the measured distance is used to determine engagement of the first protrusion with the notch.

The invention relates to a clamping fixture comprising a chuck (1) and for locking thereto a workpiece pallet (2). The chuck (1) comprises first centering members in the form of centering spigots (5) whilst said workpiece pallet (2) is provided with a main body (20) and secured thereto a centering disk (23). The centering disk (23) is provided with second centering members in the form of centering openings (24). The centering spigots (5) of the workpiece pallet (2) are adapted to the centering openings (24) of the workpiece pallet (2) that the latter is alignable in the X-direction and Y-direction on clamping to the chuck (1). Provided topping the chuck (1) is a sealing member assembly (7). Disposed between the centering disk (23) and the main body (20) of the workpiece pallet (2) is a sealing disk (21) which overhangs the centering disk (23) radially. The portion of the sealing disk (21) overhanging the centering disk (23) radially is configured such that said portion sealingly comes into contact with a sealing member of the sealing member assembly (7) when clamping the workpiece pallet (2).