MOUNTING SHEET, POLISHING APPARATUS, AND METHOD FOR MAKING THE SAME

Abstract

The present invention relates to a mounting sheet comprising a mounting layer. The mounting layer comprises a mounting surface for mounting the substrate. The mounting surface comprises a first mounting area and a second mounting area, and wherein a mounting force of the first mounting area is stronger than a mounting force of the second mounting area. The sheet according to the invention has the different mounting areas, so that the substrate is easily unloaded when polishing is completed. Furthermore, the broken of the substrate due to removal and the duration and the difficulty of removal are reduced.

Claims

1. A mounting sheet, comprising a mounting layer; wherein the mounting layer comprises a mounting surface for mounting the substrate, and the mounting surface comprises: a first mounting area comprising a plurality of first mounting dots and having a first mounting force; and a second mounting area comprising a plurality of second mounting dots and having a second mounting force, wherein the first mounting force of the first mounting area is stronger than the second mounting force of the second mounting area.

2. The mounting sheet according to claim 1, wherein the first mounting area surrounds the second mounting area.

3. The mounting sheet according to claim 1, wherein the mounting surface further comprises a third mounting area comprising a plurality of third mounting dots and having a third mounting force, and the second mounting force of the second mounting area is stronger than the third mounting force of the third mounting area.

4. The mounting sheet according to claim 3, wherein the second mounting area surrounds the third mounting area.

5. The mounting sheet according to claim 1, wherein the first mounting area and the second mounting area are concentric.

6. The mounting sheet according to claim 1, wherein the mounting surface comprises a plurality of first mounting areas and a plurality of second mounting areas, an extending direction of the first mounting areas is parallel to an extending direction of the second mounting areas, and the first mounting areas and the second mounting areas are alternatively distributed.

7. The mounting sheet according to claim 1, wherein the plurality of first mounting dots or the plurality of the second mounting dots is a plurality of protrusions or recesses.

8. The mounting sheet according to claim 1, wherein an average height of the plurality of first mounting dots differs from an average height of the plurality of second mounting dots.

9. The mounting sheet according to claim 1, wherein an average area of the plurality of first mounting dots from a top view differs from an average area of the plurality of second mounting dots from a top view.

10. The mounting sheet according to claim 1, wherein an average pitch of adjacent two of the plurality of first mounting dots differs from an average pitch of adjacent two of the plurality of second mounting dots.

11. The mounting sheet according to claim 1, wherein a number density of the first mounting dots in the first mounting area differs from a number density of the second mounting dots in the second mounting area.

12. The mounting sheet according to claim 1, wherein a material of the first mounting dots differs from a material of the second mounting dots.

13. The mounting sheet according to claim 1, wherein flatness of the first mounting area differs from flatness of the second mounting area.

14. The mounting sheet according to claim 1, wherein the first mounting force is evenly distributed in the first mounting area.

15. The mounting sheet according to claim 1, wherein the second mounting force is evenly distributed in the second mounting area.

16. The mounting sheet according to claim 1, wherein the first mounting force of the first mounting area is greater than about 0.8 kg/cm.sup.2.

17. The mounting sheet according to claim 1, wherein the second mounting force of the second mounting area is less than about 0.5 kg/cm.sup.2.

18. The mounting sheet according to claim 1, which further comprises a buffer layer.

19. A polishing apparatus comprising: a base plate; the mounting sheet as claimed in claim 1 adhered to the base plate; and the substrate mounted by the mounting sheet.

20. The polishing apparatus according to claim 19 further comprising: an upper base plate positioned opposite to the base plate; a polishing pad mounted on the upper base plate for polishing the substrate; and slurry contacting the substrate for polishing.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0020] FIG. 1 shows a schematic view of a polishing device with a conventional mounting sheet.

[0021] FIG. 2 shows a schematic view of a mounting surface according to a first embodiment of the invention.

[0022] FIG. 3 shows a schematic view of a mounting surface according to a second embodiment of the invention.

[0023] FIG. 4A shows a schematic view of a mounting surface according to a third embodiment of the invention.

[0024] FIG. 4B shows a schematic sectional view of a mounting surface according to one embodiment of the invention.

[0025] FIG. 4C shows a schematic sectional view of a mounting surface according to one embodiment of the invention.

[0026] FIG. 4D shows a schematic sectional view of a mounting surface according to one embodiment of the invention.

[0027] FIG. 5 shows a schematic view of a polishing device with a mounting sheet according to the invention.

DETAILED DESCRIPTION OF THE INVENTION

[0028] The present invention provides a mounting sheet, comprising a mounting layer; wherein the mounting layer comprises a mounting surface for mounting the substrate, and the mounting surface comprises: [0029] a first mounting area and a second mounting area, and wherein a mounting force of the first mounting area is stronger than a mounting force of the second mounting area.

[0030] The “mounting sheet” as used herein refers to a structure for mounting, carrying and securing a substrate in the process of chemical mechanical polishing. Preferably, the mounting sheet comprises a mounting layer and the mounting layer comprises a mounting surface for mounting the substrate. The mounting sheet is preferably a sheet and able to be adhered to a polishing apparatus.

[0031] In one embodiment of the invention, a material of the mounting sheet is a polymer; preferably a foamed polymer. The material of the mounting layer may include different polymers as needed. In order to mount and secure the substrate, the material is exampled as polyurethane resin, polyvinyl chloride resin, polystyrene resin, polyethylene resin, polyamide resin, acrylic resin, or ethylene-vinyl acetate resin. Such polymers can be used independently or in combinations. Preferably, the material of the mounting layer is a foamed resin of the resin mentioned above.

[0032] The “substrate” as used herein refers to a polishing workpiece to be polished, preferably a panel. In one embodiment of the invention, the substrate is semiconductor, a storage medium substrate, an integrated circuit, an LCD flat-panel glass, an optical glass and a photoelectric panel.

[0033] The mounting surface according to the invention comprises a first mounting area and a second mounting area, and wherein a mounting force of the first mounting area is stronger than a mounting force of the second mounting area. For example, the first mounting area has a first mounting force, and the second mounting area has a second mounting force. The first mounting force is greater than the second mounting force. Preferably, the first mounting force or the second mounting force is greater than 0 kg/cm.sup.2. In addition, the first mounting force is preferably evenly distributed in the first mounting area. The second mounting force is preferably evenly distributed in the second mounting area. The corresponding alignment of the first mounting area and the second mounting area may be predetermined or random.

[0034] In one preferred embodiment of the invention, the first mounting area and the second mounting area are both compressible.

[0035] Referring to FIG. 2 showing a schematic view of a mounting surface 221 according to a first embodiment of the invention. A first mounting area 222 surrounds a second mounting area 223. Preferably, the first mounting area 222 completely surrounds the second mounting area 223. Because the first mounting area 222 positioned in a peripheral area of the mounting surface 221, a mounting force provided thereby is greater, which provides a sufficient mounting force when polishing. Parts of the substrate (not shown) mounted by the first mounting area 222 are easily unloaded because machining is easily applied thereon and a greater moment of force is achieved when applying a constant force. On the other hand, because the second mounting area 223 positioned closer to a center of the mounting surface 221, it has a less moment of force when applying the constant force. Parts of the substrate (not shown) mounted by the second mounting area 223 are still easily unloaded because the mounting force provided is less.

[0036] In one preferred embodiment of the invention, the mounting surface 221 further comprises a third mounting area 224 comprising a plurality of third mounting dots and having a third mounting force, and the mounting force of the second mounting area 223 is stronger than a mounting force of the third mounting area 224. The combination of the first mounting area 222, second mounting area 223 and third mounting area 224 provides a more divergent and flexible alignment of mounting force; especially for a large-sized substrate, the process is more easily. The corresponding alignment of the first mounting area 222, the second mounting area 223, and the third mounting area 224 may be predetermined or random. Preferably, the second mounting area 223 surrounds the third mounting area 224; more preferably, the second mounting area 223 completely surrounds the third mounting area 224.

[0037] A shape of the first mounting area 222 or the second mounting area 223 may be random. Preferably, the shape of the first mounting area 222 or the second mounting area 223 is the same to that of the substrate. In one preferred embodiment of the invention, the shape of the first mounting area 222 or the second mounting area 223 is a square, circle or polygon. In other aspect, the first mounting area 222 and the second mounting area 223 are concentric.

[0038] Referring to FIG. 3 showing a schematic view of a mounting surface 321 according to a second embodiment of the invention. The mounting surface 321 comprises a plurality of first mounting areas 322 and a plurality of second mounting areas 323. An extending direction of the first mounting area 322 is parallel to an extending direction of the second mounting area 323. The first mounting areas 322 and the second mounting areas 323 are alternatively distributed. Preferably, the first mounting area 322 and the second mounting area 323 are staggered. Because a mounting force of the first mounting area 322 is greater, it provides a sufficient mounting force when polishing. On the other hand, a mounting force of the second mounting area 323 is less, parts of the substrate (not shown) mounted by the second mounting area 322 are easily unloaded. The staggered alignment meets the requirements of a sufficient mounting force when polishing and easy unloading when completing polishing.

[0039] Referring to FIG. 4A showing a schematic view of a mounting surface 421 according to a third embodiment of the invention. A first mounting area 422 comprises a plurality of first mounting points 424 and a second mounting area 423 comprises a plurality of second mounting points 425. The mounting points provide a mounting force.

[0040] In some embodiments, the first mounting area comprises a plurality of first mounting dots, and the second mounting area comprises a plurality of second mounting dots; wherein the plurality of first mounting dots or the plurality of the second mounting dots is a plurality of protrusions or recesses. The term “a dot” indicates a dot-like structure which can be distinguished from its surroundings. For example, the first mounting dot according to the invention is a protrusion which slightly protrudes from the mounting surface. Alternatively, the mounting dot according to the invention is a recess which slightly recessed from the mounting surface.

[0041] In some embodiments, the protrusion or recess described above is made by transfer printing. In other embodiments, the mounting dot is made of a material different from that of its surroundings. Accordingly, the mounting dots are adhered to the mounting sheet by an adhesive. In still another embodiments, the mounting dot includes a portion embedded in the mounting sheet.

[0042] Preferably, the first mounting dots are evenly distributed in the first mounting area, such that the first mounting area is evenly distributed in the first mounting area. Similarly, the second mounting dots are preferably evenly distributed in the second mounting area, such that the second mounting force is evenly distributed in the second mounting area.

[0043] In one preferred embodiment of the invention, the difference of the mounting forces of the first mounting area and the second mounting area is adjusted by adjusting flatness of the first mounting area and the second mounting area; wherein flatness of the first mounting area differs to flatness of the second mounting area. The term “flatness” of a surface is defined as the distance between two parallel planes within which all elements of the surface lie.

[0044] In some embodiments, since the plurality of mounting dots is provided in the first mounting area, the strength of the mounting force in the first mounting area can be adjusted by varying the average height of the first mounting dots, the average area of the first mounting dots from a top view, the average pitch between two adjacent first mounting dots, or the number density of these first mounting dots. For example, a greater average height or average area of the first mounting dots, a smaller pitch between two adjacent first mounting dots, or a greater number density of the first mounting dots may provide a stronger mounting force. Similarly, the strength of the mounting force in the second mounting area can be adjusted by varying the average height of the second mounting dots, the average area of the second mounting dots from a top view, the average pitch between two adjacent second mounting dots, or the number density of these second mounting dots. Specifically, the average height of the first mounting dots can be different from that of the second mounting dots. The average area of the first mounting dots can be different from that of the second mounting dots. The average pitch of two adjacent first mounting dots can be different from that of two adjacent second mounting dots. The number density of the first mounting dots can be different from the number density of the second mounting dots.

[0045] For example, as shown in FIG. 4B, the first mounting area 422a comprises the plurality of first mounting points 424a, and the second mounting area 423a comprises the plurality of second mounting points 425a. The average height H.sub.1 of the first mounting points 424a is greater than the average height H.sub.2 of the second mounting points 425a, thus providing the first mounting force of the first mounting area 422a greater than the second mounting force of the second mounting area 423a.

[0046] In some embodiments as shown in FIG. 4C, the first mounting area 422b comprises the plurality of first mounting points 424b, and the second mounting area 423b comprises the plurality of second mounting points 425b. The average width W.sub.1 of the first mounting points 424b is greater than the average width W.sub.2 of the second mounting points 425b. The average area of the first mounting points 424b is greater than the average area of the second mounting points 425b. Accordingly, the first mounting force of the first mounting area 422b is greater than the second mounting force of the second mounting area 423b.

[0047] In some embodiments, as shown in FIG. 4D, the first mounting area 422c comprises the plurality of first mounting points 424c, and the second mounting area 423c comprises the plurality of second mounting points 425c. The average pitch P.sub.1 between two adjacent first mounting points 424c is less than the average pitch P.sub.2 between two adjacent second mounting points 425c, thus providing the first mounting force of the first mounting area 422c greater than the second mounting force of the second mounting area 423c.

[0048] Besides, as shown in FIG. 4D, the number density of the first mounting dots 424c in the first mounting area 422c is also greater than that of the second 425c mounting dots in the second mounting area 423c, providing the first mounting force of the first mounting area 422c greater than the second mounting force of the second mounting area 423c.

[0049] Preferably, in order to meet the requirements of a sufficient mounting force when polishing and easy unloading when completing polishing, the first mounting force of the first mounting area is greater than about 0.8 kg/cm.sup.2 and the second mounting force of the second mounting area is less than about 0.5 kg/cm.sup.2. More preferably, the mounting force is from about 0.05 kg/cm.sup.2 to about 1.3 kg/cm.sup.2.

[0050] The mounting sheet of the invention preferably further comprises a buffer layer. The buffer layer comprises a plurality of continuous pores and positioned under the mount layer to provide a buffer effect of the mounting sheet when polishing. Preferably, the material of the buffer layer is exampled as polyurethane resin, polyvinyl chloride resin, polystyrene resin, polyethylene resin, polyamide resin, acrylic resin, or ethylene-vinyl acetate resin.

[0051] The present invention also provides a polishing apparatus comprising: [0052] a base plate; [0053] the sheet as mentioned above adhered to the base plate; and [0054] the substrate mounted by the mounting sheet.

[0055] Preferably, the polishing apparatus further comprises: [0056] an upper base plate positioned opposite to the base plate; [0057] a polishing pad mounted on the upper base plate for polishing the substrate; and [0058] slurry contacting the substrate for polishing.

[0059] FIG. 5 shows a schematic view of a polishing device with a mounting sheet according to the invention. The polishing device 5 includes a lower base plate 51, a mounting sheet 52, a substrate 53, an upper base plate 54, a polishing pad 55 and slurry 56. The mounting sheet 52 is adhered to the lower base plate 51 through an adhesive layer 57 and is used for carrying and mounting the substrate 53. The polishing pad 55 is mounted on the upper base plate 54.

[0060] The operation mode of the polishing device 5 is as follows. First, the substrate 53 is mounted on the mounting sheet 52, and then both the upper and lower base plates 54 and 51 are rotated and the upper base plate 54 is simultaneously moved downward, such that the polishing pad 55 contacts the surface of the substrate 53, and a polishing operation for the substrate 53 may be performed by continuously supplementing the slurry 56 and using the effect of the polishing pad 55.

[0061] The present invention further provides a method for producing the sheet as mentioned above, comprising: [0062] (a) providing a polymer sheet; [0063] (b) providing a mold, wherein the mold comprises a first bump area and a second bump area; flatness of the first bump area differs to flatness of the second bump area, and the first bump area corresponds to the first mounting area and the second bump area corresponds to the second mounting area; and [0064] (c) transfer printing the polymer sheet with the mold to produce the mounting sheet.

[0065] The method according to the invention, the step (a) is to provide a polymer sheet to form the mounting layer. A material of the polymer is as mentioned above.

[0066] The method according to the invention, the step (b) is using the mold to form the different flatness of the first mounting area and the second mounting area and further to provide the different mounting forces. The mold may be chosen by artisans skilled in this field, such as an ironing wheel or glossy paper. The mold comprises a first bump area and a second bump area, and the first bump area corresponds to the first mounting area and the second bump area corresponds to the second mounting area.

[0067] The method according to the invention, the step (c) is transfer printing the polymer sheet with the mold to produce the mounting sheet. The manner of transfer printing may be chosen by artisans skilled in this field according to the mold. Preferably, the transfer printing is performed with heat.

[0068] In one preferred embodiment of the invention, when the mold is the ironing wheel, the temperature of transfer printing is from about 150° C. to about 180° C.

[0069] In one preferred embodiment of the invention, when the mold is the glossy paper, the temperature of transfer printing is from about 100° C. to about 130° C.

[0070] The following Examples are given for the purpose of illustration only and are not intended to limit the scope of the present invention.

Example

[0071] A polymer sheet is transfer printed at 180° C. with an ironing wheel with different flatness on the surface formed by blasting. Because the different flatness of the surface of the ironing wheel, a first mounting area with a mounting force of 1.1 kg/cm.sup.2 and a second mounting area with a mounting force of 0.3 kg/cm.sup.2 of a mounting sheet are formed. In the 500 mm×500 mm mounting sheet, the second mounting area with a mounting force of 0.3 kg/cm.sup.2 is 400 mm×400 mm, and the first mounting area with a mounting force of 1.1 kg/cm.sup.2 surrounds the second mounting area. Therefore, the mounting sheet with two different mounting areas are provided.

[0072] By using a conventional mounting sheet, an average duration for replacing a substrate is about 45 seconds. On the other hand, by using the mounting sheet according to the invention, an average duration for changing a substrate is decreased to about 25 seconds. The duration is shorten for about 20 seconds, i.e. a decrease of approximately 44.4% of the replacing duration.

[0073] While embodiments of the present invention have been illustrated and described, various modifications and improvements can be made by persons skilled in the art. The embodiments of the present invention are therefore described in an illustrative but not restrictive sense. It is intended that the present invention is not limited to the particular forms as illustrated, and that all the modifications not departing from the spirit and scope of the present invention are within the scope as defined in the appended claims.