Optoelectronic component and method for producing an optoelectronic component
11430922 · 2022-08-30
Assignee
Inventors
- Jörg Frischeisen (Schwabmünchen, DE)
- Angela Eberhardt (Augsburg, DE)
- Florian PESKOLLER (Ingolstadt, DE)
- Thomas Huckenbeck (Augsburg, DE)
- Michael Schmidberger (Schwabmünchen, DE)
- Jürgen Bauer (Wielenbach, DE)
- Dominik Eisert (Regensburg, DE)
- Albert Schneider (Thalmassing, DE)
Cpc classification
H01L33/504
ELECTRICITY
C09K11/77348
CHEMISTRY; METALLURGY
International classification
C09K11/02
CHEMISTRY; METALLURGY
Abstract
An optoelectronic component and a method for producing an optoelectronic component are disclosed. In an embodiment an optoelectronic component includes a semiconductor layer sequence having an active region configured to emit radiation at least via a main radiation exit surface during operation and a self-supporting conversion element arranged in a beam path of the semiconductor layer sequence, wherein the self-supporting conversion element includes a substrate and subsequently a first layer, wherein the first layer includes at least one conversion material embedded in a matrix material, wherein the matrix material includes at least one condensed sol-gel material, wherein the condensed sol-gel material has a proportion between 10 and 70 vol % in the first layer, and wherein the substrate is free of the sol-gel material and the conversion material and mechanically stabilizes the first layer.
Claims
1. An optoelectronic component comprising: a semiconductor layer sequence having an active region configured to emit radiation at least via a main radiation exit surface during operation; and a self-supporting conversion element arranged in a beam path of the semiconductor layer sequence, wherein the self-supporting conversion element comprises a substrate and subsequently a first layer, wherein the first layer comprises at least one conversion material embedded in a matrix material, wherein the conversion material in the matrix material has a concentration gradient, wherein the first layer comprises a surface facing away from the substrate, in which particles of the conversion material are partially not covered by the matrix material, wherein the surface is smooth, wherein the matrix material comprises at least one condensed sol-gel material selected from the group consisting of water glass, metal phosphate, monoaluminum phosphate, aluminum phosphate, modified monoaluminum phosphate, alkoxytetramethoxysilane, tetraethylorthosilicate, methyltrimethoxysilane, methyltriethoxysilane, titanium alkoxide, silica sol, metal alkoxide, metal oxane and metal alkoxane, wherein the condensed sol-gel material has a proportion between 10 and 70 vol % in the first layer, and wherein the substrate is free of the sol-gel material and the conversion material and mechanically stabilizes the first layer.
2. The optoelectronic component according to claim 1, wherein the substrate is glass, glass ceramic, sapphire, a transparent ceramic or a translucent ceramic.
3. The optoelectronic component according to claim 1, wherein the self-supporting conversion element is arranged on the main radiation exit surface by an adhesive.
4. The optoelectronic component according to claim 3, wherein the adhesive is a silicone and the self-supporting conversion element is free of silicone.
5. The optoelectronic component according to claim 3, wherein the adhesive comprises a thickness of 500 nm to 15 μm.
6. The optoelectronic component according to claim 1, wherein the first layer comprises a layer thickness between 20 μm and 70 μm for partial conversion or 30 μm to 150 μm for full conversion.
7. The optoelectronic component according to claim 1, wherein the first layer is disposed on the main radiation exit surface by an adhesive, and wherein the first layer is disposed directly on the substrate.
8. The optoelectronic component according to claim 1, wherein the optoelectronic component is configured to emit the radiation with a color temperature between 2500 K and 4500 K during the operation.
9. The optoelectronic component according to claim 1, wherein the optoelectronic component is configured to emit the radiation with a color temperature between 4500 K and 8000 K during the operation.
10. The optoelectronic component according to claim 1, wherein the condensed sol-gel material comprises a proportion between 20 and 50 vol % in the first layer.
11. The optoelectronic component according to claim 1, wherein the at least one conversion material is selected from the group consisting of (Y,Gd,Tb,Lu).sub.3(Al,Ga).sub.5O.sub.12:Ce.sup.3+, (Sr,Ca)AlSiN.sub.3:Eu.sup.2+, (Sr,Ba,Ca,Mg).sub.2Si.sub.5N.sub.8:Eu.sup.2+, (Ca,Sr,Ba).sub.2SiO.sub.4:Eu.sup.2+, α-SiAlON:Eu.sup.2+, β-SiAlON:Eu.sup.2+, (Sr,Ca)S:Eu.sup.2, (Sr,Ba,Ca).sub.2(Si,Al).sub.5(N,O).sub.8:Eu.sup.2+, (Ca,Sr).sub.8Mg(SiO.sub.4).sub.4Cl.sub.2:Eu.sup.2+, and (Sr,Ba)Si.sub.2N.sub.2O.sub.2:Eu.sup.2+.
12. The optoelectronic component according to claim 1, wherein at least two different conversion materials are embedded in the matrix material.
13. The optoelectronic component according to claim 1, wherein the substrate comprises a thickness of 50 μm to 200 μm.
14. The optoelectronic component according to claim 1, wherein the matrix material is the condensed sol-gel material prepared from an aluminum phosphate solution or from a monoaluminum phosphate solution or from a modified monoaluminum phosphate solution.
15. A method for producing the optoelectronic component according to claim 1, the method comprising: providing the semiconductor layer sequence comprising the active region; and applying the conversion element at least to the main radiation exit surface, wherein the conversion element is produced as follows: introducing the at least one conversion material into the matrix material to form a dispersion, wherein the matrix material comprises at least one solution of a sol-gel material selected from the group consisting of the water glass, the metal phosphate, the monoaluminum phosphate, the aluminum phosphate, the modified monoaluminum phosphate, the alkoxytetramethoxysilane, the tetraethylorthosilicate, the methyltrimethoxysilane, the methyltriethoxysilane, the titanium alkoxide, the silica sol, the metal alkoxide, the metal oxane and the metal alkoxane; applying the dispersion to the substrate to form the first layer, wherein the substrate is free of the sol-gel material and the conversion material; heating the substrate and the first layer to a maximum of 550° C.; and optionally smoothing the surface of the first layer facing away from the substrate.
16. The method according to claim 15, further comprising separating the substrate and the first layer to produce a plurality of conversion elements, wherein at least one conversion element is arranged on the main radiation exit surface.
17. The optoelectronic component according to claim 1, wherein the conversion element is free of fillers.
18. An optoelectronic component comprising: a semiconductor layer sequence having an active region configured to emit radiation at least via a main radiation exit surface during operation; and a self-supporting conversion element arranged in a beam path of the semiconductor layer sequence, wherein the self-supporting conversion element is arranged on the main radiation exit surface by an adhesive, wherein the adhesive is a silicone and the self-supporting conversion element is free of silicone, wherein the adhesive comprises a thickness of 2 μm to 7 μm, wherein the self-supporting conversion element comprises a substrate and subsequently a first layer, wherein the first layer is disposed between the main radiation exit surface and the substrate, wherein the first layer comprises a surface facing away from the substrate, in which particles of at least one conversion material are partially not covered by a matrix material, wherein the surface is smooth, wherein the at least one conversion material is embedded in the matrix material in the first layer, wherein the matrix material comprises at least one condensed sol-gel material selected from the group consisting of water glass, metal phosphate, monoaluminum phosphate, aluminum phosphate, modified monoaluminum phosphate, alkoxytetramethoxysilane, tetraethylorthosilicate, methyltrimethoxysilane, methyltriethoxysilane, titanium alkoxide, silica sol, metal alkoxide, metal oxane and metal alkoxane, wherein the condensed sol-gel material has a proportion between 10 and 70 vol % in the first layer, and wherein the substrate is free of the sol-gel material and the conversion material and mechanically stabilizes the first layer.
19. An optoelectronic component comprising: a semiconductor layer sequence having an active region configured to emit radiation at least via a main radiation exit surface during operation; and a self-supporting conversion element arranged in a beam path of the semiconductor layer sequence, wherein the self-supporting conversion element comprises a substrate and subsequently a first layer, wherein the first layer comprises at least one conversion material embedded in a matrix material, wherein the first layer comprises a surface facing away from the substrate, in which particles of the conversion material are partially not covered by the matrix material and wherein the surface is smooth, wherein the matrix material comprises at least one condensed sol-gel material selected from the group consisting of water glass, metal phosphate, monoaluminum phosphate, aluminum phosphate, modified monoaluminum phosphate, alkoxytetramethoxysilane, tetraethylorthosilicate, methyltrimethoxysilane, methyltriethoxysilane, titanium alkoxide, silica sol, metal alkoxide, metal oxane and metal alkoxane, wherein the condensed sol-gel material has a proportion between 10 and 70 vol % in the first layer, wherein the substrate is free of the sol-gel material and the conversion material and mechanically stabilizes the first layer, and wherein the substrate comprises a decoupling foil or decoupling structure.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
(1) Further advantages, advantageous embodiments and further developments result from the exemplary embodiments described in the following in connection with the figures.
(2) Show it:
(3)
(4)
(5)
(6)
(7)
(8)
(9)
(10)
(11)
(12) In the exemplary embodiments and figures, identical, similar or similarly acting elements can each be provided with the same reference numbers. The represented elements and their proportions among each other are not to be regarded as true to scale. Rather, individual elements, such as layers, components, components and areas, can be displayed in an exaggeratedly large format for better representability and/or better understanding.
DETAILED DESCRIPTION OF ILLUSTRATIVE EMBODIMENTS
(13) The
(14) The optoelectronic component 100 of
(15) The conversion element 2 comprises a first layer 22 arranged on a substrate 21. The arrangement can be direct or indirect. Direct means here that no further layers or elements are arranged between the first layer 22 and the substrate 21 (see
(16) The first layer 22 may have a structured surface 8 facing away from the substrate 21. The structuring can be carried out by polishing, grinding, etching or by coating.
(17) As shown in
(18)
(19) As shown in
(20) Alternatively, as shown in
(21)
(22)
(23)
(24)
(25) An optoelectronic component 100 can thus be made available which, like a silicone matrix, comprises all the color coordinates and a high color rendering index. In comparison to a silicone matrix, however, the component 100 can be operated at high operating currents, current densities and temperatures. As shown in
(26) The
(27)
(28) In comparison,
(29) It can be seen that by using a polished surface, the particles of the conversion material are ground down and thus the thickness of the adhesive layer 3 can also be reduced. For example, polishing can reduce the layer thickness of the adhesive layer 3 from the original 15 μm, so unpolished, to 5 μm and thus increase heat dissipation, thus enabling a higher operating current density.
(30)
(31) It can be seen from the figure that a significant reduction in the converter temperature of a polished conversion material, in which, for example, aluminum phosphate is used as matrix material, can be produced at high operating currents of 3 A/mm.sup.2. The application of a conversion material to a substrate, particularly glass, allows the use of higher operating currents and densities and a higher luminous flux per chip area for warm white applications.
(32)
(33)
(34)
(35) As matrix material 221 aluminum phosphate is used, as green conversion material 222 LuAG:Ce and as red conversion material 224 CaAlSiN:Eu. The substrate 21 is a glass substrate with a thickness of 170 μm. The glass is from the company Schott and has the trade name D263. The tests were carried out at different temperatures and operating currents or at a defined temperature and humidity with an area of the semiconductor layer sequence of approx. 1 mm×1 mm. All illustrations show that the optoelectronic components 100 described here have a high stability at high temperatures and operating currents or temperature and humidity.
(36) The
(37) The component of
(38) In the following, optoelectronic components are each described according to an embodiment.
EXAMPLE 1
Aluminum Phosphate.SUP.6 .Warm White Converter With High CRI and R9
(39) A suspension of aluminum phosphate with a warm white phosphor mixture.sup.1 is produced. Optionally, the suspension can be diluted with distilled water to adjust viscosity. The solid to liquid mass ratio should be between 1:2 and 1:0.3, in particular between 1:1.5 and 1:0.4, ideally 1:0.5. For example, the suspension is applied to a substrate.sup.2 using doctor blading. The doctor blade gap can be between 10-200 μm, in particular between 30-100 μm and ideally between 40-80 μm. The application speed is typically varied between 1-99 mm/sec. After the coating process, the freshly coated substrate is pre-dried under normal air, a clean room or a drying cabinet. The room temperature and humidity can be kept constant between 18-50° C. and 0-80 g/m.sup.3, in particular between 18-30° C. and 0-50 g/m.sup.3 and ideally between 19-23° C. and 0-30 g/m.sup.3. After pre-drying, the substrate is typically cut into equal parts with a diamond cutter and baked at temperatures between 150° C.-450° C. for 10 to 120 minutes.
(40)
(41)
(42) After baking, the substrates are further refined by polishing, lapping, grinding or a combination of the various methods.
(43)
(44)
(45)
EXAMPLE 2
Aluminum Phosphate.SUP.6 .Cold White Converter
(46) A suspension of aluminum phosphate with a garnet phosphor.sup.3 is produced. Optionally, the suspension can be supplemented with at least one additional phosphor, for example, to vary the CRI, R9, the emission color or color temperature. In addition, the viscosity can be adjusted by adding distilled water. The solid to liquid mass ratio can be between 1:2 and 1:0.3, in particular between 1:1.5 and 1:0.4, ideally 1:0.5. For example, the suspension is applied to a substrate.sup.2 using doctor blading. The doctor blade gap can be between 10-200 μm, in particular between 30-100 μm and ideally between 40-80 μm. The application speed can be varied between 1-99 mm/sec. After the coating process, the freshly coated substrate is pre-dried under normal air, in a clean room or a drying cabinet. The room temperature and humidity can be kept constant between 18-50° C. and 0-80 g/m.sup.3, in particular between 18-30° C. and 0-50 g/m.sup.3 and ideally between 19-23° C. and 0-30 g/m.sup.3. After pre-drying, the substrate can typically be cut into equal parts with a diamond cutter and baked at temperatures between 150° C.-450° C. for 10 to 120 minutes.
(47) After baking, the substrates can be further refined by polishing, lapping, grinding or a combination of the various methods. After the final surface treatment, the substrate can typically be cut using a wafer or laser saw into converters measuring 1 mm×1 mm, for example.
EXAMPLE 3
Aluminum Phosphate.SUP.6 .Red Converter
(48) A suspension of aluminum phosphate with a nitridic phosphor.sup.4 is prepared. Optionally, the suspension can be supplemented with at least one additional phosphor, for example, to vary the CRI, R9, emission color or color temperature. In addition, the viscosity can be adjusted by adding distilled water. The solid to liquid mass ratio can be between 1:2 and 1:0.3, in particular between 1:1.5 and 1:0.4, ideally 1:0.5. For example, the suspension is applied to a substrate.sup.2 using doctor blading. The doctor blade gap can be between 10-200 μm, in particular between 30-100 μm and ideally between 30-70 μm. The application speed can typically be varied between 1-99 mm/sec. After the coating process, the freshly coated substrate is pre-dried under normal air, in a clean room or a drying cabinet. The room temperature and humidity can be kept constant between 18-50° C. and 0-80 g/m.sup.3, in particular between 18-30° C. and 0-50 g/m.sup.3 and ideally between 19-23° C. and 0-30 g/m.sup.3. After pre-drying, the substrate can typically be cut into equal parts with a diamond cutter and baked at temperatures between 150° C.-450° C. for 10 to 120 minutes.
(49) After baking, the substrates can be further refined by polishing, lapping, grinding or a combination of the various methods. After the final surface treatment, the substrate can typically be cut using a wafer or laser saw into converters measuring 1 mm×1 mm, for example.
EXAMPLE 4
Aluminum Phosphate.SUP.6 .Phosphors Converter
(50) A suspension of aluminum phosphate with a phosphors or conversion material is produced. Optionally, the suspension can be supplemented with at least one additional phosphor or conversion material, for example, to vary the CRI, the emission color or the color temperature. In addition, the viscosity can be adjusted by adding distilled water. The solid to liquid mass ratio can be between 1:2 and 1:0.3, in particular between 1:1.5 and 1:0.4, ideally 1:0.5. For example, the suspension is applied to a substrate.sup.2 using doctor blading. The doctor blade gap can be between 10-200 μm, in particular between 30-100 μm and ideally between 40-80 μm. The application speed can typically be varied between 1-99 mm/sec. After the coating process, the freshly coated substrate is pre-dried under normal air, in a clean room or a drying cabinet. The room temperature and humidity can be kept constant between 18-50° C. and 0-80 g/m.sup.3, in particular between 18-30° C. and 0-50 g/m.sup.3 and ideally between 19-23° C. and 0-30 g/m.sup.3. After pre-drying, the substrate can typically be cut into equal parts with a diamond cutter and baked at temperatures between 150° C.-450° C. for 10 to 120 minutes.
(51) After baking, the substrates can be further refined by polishing, lapping, grinding or a combination of the various methods. After the final surface treatment, the substrate can typically be cut using a wafer or laser saw into converters measuring 1 mm×1 mm, for example.
(52) .sup.1Warm white phosphor mixture for high CRI and R9 applications: Garnet phosphor (e.g., (Lu,Y,Gd,Tb,Ce).sub.3(Al,Ga).sub.5O.sub.12, especially (Y,Lu,Ce).sub.3(Al,Ga).sub.5O.sub.12, especially (Lu,Ce).sub.3(Al.sub.1-xGax).sub.5O.sub.12 with a Ga content of 0%<=x<=60%) with at least one ⋅“258”: M.sub.2(Al,Si).sub.5(N,O)8-like phosphor doped with Eu (M=Ca, Sr, Ba, Mg) or a phosphor derived therefrom and/or “(S)CASN”: phosphor as in EP 1696016 A1 or
(53) WO 2005052087 A1, the disclosure content of which is hereby taken up by withdrawal, for example (Sr,Ca)AlSi(N,O).sub.3:Eu and/or A “226” phosphor with an activator content of >=0.5%, especially >=2%, especially >=3% with divalent metals such as Sr and/or Ca, for example Sr(Sr,Ca)Si.sub.2Al.sub.2N.sub.6:Eu The suspension is typically produced in a speed mixer or ball mill.
(54) .sup.2Alternative Substrate Materials sapphire (reflective) metal substrate Polymer film or substrate ceramic substrate Pre-coated substrates, e.g., glass substrate with Al.sub.2O.sub.3 coating Before coating, for example, a plasma process can be carried out to clean or activate the surface.
(55) .sup.3Chemical Composition of a Garnet Phosphor Garnet phosphor (e.g., (Lu,Y,Gd,Tb,Ce).sub.3(Al,Ga).sub.5O.sub.12, especially (Y,Lu,Ce).sub.3(Al,Ga).sub.5O.sub.11, especially (Lu,Ce).sub.3(Al.sub.1-xGax).sub.5O.sub.12 with a Ga content of 0%<=x<=60%)
(56) .sup.4 Chemical Compositions of a Nitride Phosphor ⋅“258”: M.sub.2(Al,SO.sub.5(N,O)8-like phosphor doped with Eu (M=Ca, Sr, Ba) or phosphor derived therefrom, for example (Sr,Ba,Ca,Mg).sub.2Si.sub.5N8:Eu (S)CASN”: phosphor as described in EP1696016 A1/WO 2005052087 A1, for example (Sr,Ca)AlSi(N,O).sub.3:Eu and/or A “226” phosphor with an activator content of >=0.5%, especially >=2%, especially >=3% with divalent metals such as Sr and/or Ca, for example Sr(Sr,Ca)Si.sub.2Al.sub.2N.sub.6:Eu
(57) .sup.5Phosphor
(58) (Y,Gd,Tb,Lu).sub.3(Al,Ga).sub.5O.sub.12:Ce.sup.3+
(59) (Sr,Ca)AlSiN.sub.3:Eu.sup.2+
(60) (Sr,Ba,Ca,Mg).sub.2Si.sub.5N.sub.8:Eu.sup.2+
(61) (Ca,Sr,Ba).sub.2SiO.sub.4:Eu.sup.2+
(62) α-SiAlON:Eu.sup.2+
(63) β-SiAlON:Eu.sup.2+
(64) (Sr,Ca)S:Eu.sup.2
(65) (Sr,Ba,Ca).sub.2(Si,Al).sub.5(N,O).sub.8:Eu.sup.2+
(66) (Ca,Sr).sub.8Mg(SiO.sub.4).sub.4Cl.sub.2:Eu.sup.2+
(67) (Sr,Ba)Si.sub.2N.sub.2O.sub.2:Eu.sup.2+
(68) .sup.6Alternative Matrix Materials Potassium water glass with aluminum phosphate hardener lithium water glass mixed water glass, for example, lithium water glass:potassium water glass with a mass fraction of 1 to 1
(69) The exemplary embodiments described in connection with the figures and their features can also be combined with each other according to further exemplary embodiments, even if such combinations are not explicitly shown in the figures. Furthermore, the exemplary embodiments described in connection with the figures may have additional or alternative features as described in the general part.
(70) The invention is not limited by the description based on the exemplary embodiments of these. Rather, the invention includes any new feature as well as any combination of features, which in particular includes any combination of features in the patent claims, even if this feature or combination itself is not explicitly mentioned in the patent claims or exemplary embodiments.