Technique for detecting a defect in a multi-junction solar cell
20170237396 · 2017-08-17
Inventors
Cpc classification
Y02E10/50
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
International classification
Abstract
A method for detecting a defect in a multi-junction solar cell is presented. The multi-junction solar cell comprises at least two vertically stacked p-n junctions. The method comprises exciting a first p-n junction of the at least two vertically stacked p-n junctions by illuminating the solar cell with excitation light in a first excitation wavelength range, detecting photoluminescence light emitted by photoluminescence of the first p-n junction, and generating a spatially resolved first photoluminescence image of the photoluminescence light emitted by the first p-n junction. Further, a computer program product and an apparatus for detecting a defect in a multi-junction solar cell are presented.
Claims
1. A method for detecting a defect in a multi-junction solar cell comprising at least two vertically stacked p-n junctions, the method comprising: exciting a first p-n junction of the at least two vertically stacked p-n junctions by illuminating the solar cell with excitation light in a first excitation wavelength range; detecting photoluminescence light emitted by photoluminescence of the first p-n junction; and generating a spatially resolved first photoluminescence image of the photoluminescence light emitted by the first p-n junction.
2. The method of claim 1, further comprising: exciting a second p-n junction of the at least two vertically stacked p-n junctions by illuminating the solar cell with excitation light in a second excitation wavelength range.
3. The method of claim 1, further comprising: observing the first image for spatial intensity variations.
4. The method of claim 3, wherein observing the first image for spatial intensity variations comprises observing the first image for exponential intensity variations.
5. The method of claim 2, further comprising: exciting the first p-n junction of the at least two vertically stacked p-n junctions by illuminating the solar cell with excitation light in the first excitation wavelength range at a first illumination intensity that is constant over time; exciting the second p-n junction of the at least two vertically stacked p-n junctions by illuminating the solar cell with excitation light in the second excitation wavelength range at a second illumination intensity that changes over time; generating a plurality of photoluminescence images while the second illumination intensity is changed over time; and observing the generated plurality of photoluminescence images for regions in which the intensity changes over time.
6. The method of claim 2, further comprising: generating the first photoluminescence image of photoluminescence light emitted by photoluminescence of the first p-n junction under excitation of the first p-n junction at a first illumination intensity and under excitation of the second p-n junction at a second illumination intensity; generating a second photoluminescence image of photoluminescence light emitted by photoluminescence of the first p-n junction under excitation of the first p-n junction at the first illumination intensity and under excitation of the second p-n junction at a third illumination intensity different from the second illumination intensity; combining the first photoluminescence image and the second photoluminescence image to a third photoluminescence image by using a mathematical operation; and observing the third photoluminescence image for spatial intensity variations.
7. The method of claim 6, wherein the mathematical operation is a subtraction of intensity values of one of the first and second photoluminescence image from the other of the first and second photoluminescence image.
8. The method of claim 1, wherein exciting the first p-n junction of the at least two vertically stacked p-n junctions by illuminating the solar cell with excitation light in a first excitation wavelength range is carried out at a first illumination intensity that is configured to create a photocurrent in the first p-n junction in a range of 1 to 100 mA/cm2.
9. The method of claim 8, wherein the photocurrent created in the first p-n junction is in a range of 10 to 20 mA/cm2.
10. The method of claim 2, wherein exciting the second p-n junction of the at least two vertically stacked p-n junctions by illuminating the solar cell with excitation light in a second excitation wavelength range is carried out at a second illumination intensity that is configured to create a photocurrent in the second p-n junction in a range of 1 to 100 mA/cm2.
11. The method of claim 10, wherein the photocurrent created in the second p-n junction is in a range of 10 to 20 mA/cm2.
12. The method of claim 1, wherein a center wavelength of the photoluminescence light emitted by photoluminescence of the first p-n junction is not included in the first excitation wavelength range.
13. The method of claim 2, wherein a center wavelength of the photoluminescence light emitted by photoluminescence of the first p-n junction is not included in the first excitation wavelength range; a center wavelength of the photoluminescence light emitted by photoluminescence of the first p-n junction is not included in the second excitation wavelength range; and the first excitation wavelength range and the second excitation wavelength range do not overlap each other.
14. A computer program product stored on a computer-readable non-transitory storage device comprising program code portions for performing the steps of claim 1 when the computer program product is executed on a computing device.
15. An apparatus for detecting a defect in a multi-junction solar cell comprising at least two vertically stacked p-n junctions, the apparatus comprising: a first illumination unit configured to excite a first p-n junction of the at least two vertically stacked p-n junctions by illuminating the solar cell with excitation light in a first excitation wavelength range; a detecting unit configured to detect photoluminescence light emitted by photoluminescence of the first p-n junction; and an image generating unit configured to generate a spatially resolved first photoluminescence image of the photoluminescence light emitted by the first p-n junction.
16. The apparatus of claim 15, further comprising: a second illumination unit configured to excite a second p-n junction of the at least two vertically stacked p-n junctions by illuminating the solar cell with excitation light in a second excitation wavelength range.
17. The apparatus of claim 16, wherein the image generating unit is configured to generate the first photoluminescence image of photoluminescence light emitted by photoluminescence of the first p-n junction under excitation of the first p-n junction at a first illumination intensity and under excitation of the second p-n junction at a second illumination intensity and to generate a second photoluminescence image of photoluminescence light emitted by photoluminescence of the first p-n junction under excitation of the first p-n junction at the first illumination intensity and under excitation of the second p-n junction at a third illumination intensity different from the second illumination intensity, and wherein the apparatus further comprises: a combining unit configured to combine the first photoluminescence image and the second photoluminescence image to a third photoluminescence image by using a mathematical operation; and an observation unit configured to observe the third photoluminescence image for spatial intensity variations.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
[0039] Embodiments of the technique presented herein are described below with reference to the accompanying drawings, in which:
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[0056] In the following, but without limitation thereto, specific details are expounded in order to give a full understanding of the present disclosure. It is clear to persons skilled in the art, however, that the present invention can be used in other embodiments, which can differ from the details expounded in the following.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0057]
[0058]
[0059] The basic formation of the contrast of a mechanical defect in the photoluminescence image of a multi-junction cell and the basis behind the present disclosure can be understood by looking at a dual junction cell 11. An advantage of using a photoluminescence approach is that the photocurrents J.sub.ph.sup.1, J.sub.ph.sup.2 can be adjusted separately for each junction, while in electroluminescence the externally applied current is always the same in all p-n junctions. In
[0060] The cell consists of two p-n junctions A 17 and B 12. Each node is described by a simplified solar cell consisting of a current source 100, 102 and a diode 101, 103 in parallel. The vertical current J through each node in layer A is thus given by
J.sup.1=J.sub.ph.sup.1−J.sub.0.sup.1exp(e(V.sub.oc−φ)/n.sub.1kT) (1)
[0061] Where e, k and T are the electron charge, the Boltzmann constant and the temperature respectively. n denotes the diode ideality factor, J.sub.ph the photocurrent and J.sub.0 the dark saturation current. For layer B an equivalent equation is valid.
J.sup.2=J.sub.ph.sup.2−J.sub.0.sup.2exp(eφ/n.sub.2kT) (2)
[0062] The photoluminescence intensity T that is recorded is a direct measure of the voltage at each diode. The following equations hold (cf. U. Rau, Phys. Rev. B 76, 085303 (2007)):
Φ.sup.1=K.sup.1exp(e(V.sub.oc−φ/kT)
Φ.sup.2=K.sup.2exp(eφ/kT) (3)
[0063] Here, Φ.sup.1 describes the photoluminescence intensity emitted by the topmost p-n junction A 17 (subcell A) and Φ.sup.2 describes the photoluminescence intensity emitted by the p-n junction B 12 (subcell B) adjacent to the topmost p-n junction A 17. In the following, an index 1 is used for the p-n junction A and an index 2 is used for the p-n junction B.
[0064] The constant K summarizes the characteristic parameters of the detection system. The elements 107 in the solar cell between the subcell A 17 and B 12 provide a path for lateral current transport with a given sheet resistance r (in units of Ohm). The cell rearside is fully metallized and thus at a common potential of 0 V. Similarly, on the frontside the gridfinger spacing is much narrower than any spatial effect of the cell cracks on the luminescence distribution. Therefore also, the frontside is at a constant potential, defined by the open circuit voltage Voc 108 of the cell sufficiently far away from the cell crack. V.sub.oc is the sum of the open circuit voltages of layer A, V.sub.oc.sup.1 and layer B, V.sub.oc.sup.2.
[0065] By applying Kirchhoff's laws for the current and voltage at each node, the following differential equation can be derived for the voltage φ at the intermediate layer as a function of the position x:
[0066] At a distance x 110 sufficiently far away from the site of the crack located at x=0, each node is at its respective open circuit voltage V.sub.oc.sup.1 and V.sub.oc.sup.2. By defining
y=φ−V.sub.oc.sup.2 (5)
[0067] and using a linear approximation for the exponential terms in the preceding equation 4, taking into account that under open circuit condition the relations
J.sub.ph.sup.1=J.sub.0.sup.1exp(eV.sub.oc.sup.1/n.sub.1kT)
and
J.sub.ph.sup.2=J.sub.0.sup.2exp(eV.sub.oc.sup.2/n.sub.2kT) (3)
hold, the following equation is derived
[0068] The new semiconductor surface created at the crack site results in a recombination current I.sub.S.sup.1 106 and I.sub.S.sup.2 105 across the crack site. This is the physical reason why mechanical defects are visible in luminescence images (cf. C. G. Zimmermann, J. Appl. Phys. 100, 023714 (2006)). Its magnitude is given by
[0069] where S denotes the surface recombination velocity, n.sub.i the intrinsic carrier density and t the thickness of the p-n junction. w is an arbitrary distance 113 parallel to the crack. The difference between the two surface recombination currents results in a lateral current between the two layers A and B, which is proportional to the first derivative of the local voltage φ:
[0070] Evaluating this equation further, again using a linear approximation for the exponential terms, results in
[0071] Solving equation 6 with the boundary condition according to equation 9 yields the voltage y as a function of position x:
[0072] The photoluminescence intensity Φ is thus given (again in linear approximation) according to equation 3 by:
φ.sub.0.sup.1=K.sup.1exp(eV.sub.oc.sup.1/kT)
and
Φ.sub.0.sup.2=K.sup.2exp(eV.sub.oc.sup.2/kT)
denote the photoluminescence intensities away from the crack in undisturbed areas of the cell.
[0073] This model is applied to the first two junctions of a triple junction III-V solar cell. There layer A is a Ga.sub.0.5In.sub.0.5P cell and layer B is a GaAs cell. The influence of the bottom Ge cell is neglected. Their typical parameters are summarized in Table 1:
TABLE-US-00001 TABLE 1 Typical parameters of a Ga0.5In0.5P cell as layer A and a GaAs cell as layer B. J0 thickness layer [A/cm2] n t [μm] S [cm/s] ni [cm-3] r [Ohm] A 5.55E−24 1.12 0.6 8.00E+04 3.00E+03 B 4.95E−19 1.03 1.5 5.50E+05 2.10E+06 1.70E+02
[0074] With these parameters, the relative deviation [Φ(x)−Φ0]/Φ0 of the photoluminescence intensity for layer A is plotted as a function of the distance x away from the crack located at x=0 in
[0075] It should be pointed out that the method outlined also applies to all other features in the cell, which locally result in a dissipation of current. One example of these electrical defects are growth defects, which are areas of disturbed, non-epitaxial growth. They will affect the photoluminescence contrast in a similar way. In the photoluminescence image they can be distinguished from mechanical defects by their shape. Mechanical defects are line-like, essential 1-dimensional, whereas growth defects have a rounded, 2-dimensional appearance.
[0076] In case of illuminating only one p-n junction there is a limited possibility of adjusting the contrast of the defect. For a cell with an ideality factor n=1, the contrast a x=0 is not affected by changing J.sub.ph.sup.1 according to Equation 11, since the J.sub.ph.sup.1 dependence in the pre-exponential factor cancels out, and only the distance over which a change in contrast occurs can be adjusted in a limited range according to the square root dependence on J.sub.ph.sup.1 in the exponential term. This is visualized in
[0077] Layer B, however, can be illuminated in addition. This is shown in
[0078] In
[0079] The behavior of layer B is similar. The expected contrast according to the model is illustrated in
[0080] The resulting middle cell photoluminescence images acquired at a photocurrent J.sub.ph.sup.2 of 8 mA/cm.sup.2 is shown in
[0081] Therefore, illuminating a subcell in a multi-junction cell stack, adjacent to the cell whose photoluminescence emission is imaged, provides a possibility to tune the contrast of a mechanical defect in a wide range according to the needs of the detection system.
[0082] Furthermore, the photoluminescence emission in the remainder of the cell, at a sufficient distance from the crack, is not affected at all by the illumination level of the adjacent cell. This provides an excellent opportunity in isolating solely the cell crack in the photoluminescence image.
[0083] If again the top cell photoluminescence image of a Ga.sub.0.5In.sub.0.5P/GaAs/Ge cell, acquired at J.sub.ph.sup.1 of 8 mA/cm.sup.2 without any illumination of the middle cell, as shown in image 300, is subtracted from the top cell photoluminescence image at J.sub.ph.sup.1 of 8 mA/cm.sup.2 with additional illumination of the middle cell J.sub.ph.sup.2 of 8 mA/cm.sup.2, as shown in image 301, only the features of the cell crack remain in the image. This resulting image 600 is shown in
[0084] For all the suggested methods which involve the illumination of at least two adjacent junctions, various illumination levels of the adjacent subcell not imaged can be used in finding the optimum image for an automated defect detection algorithm. For example, an image processing algorithm that analyses the image of one junction can have an active feedback loop that adjusts the illumination level of the junction not imaged. In addition, the analysis of the image cannot only be performed spatially by looking at changes in photoluminescence intensity with respect to the position on the cell, but also in the time domain. For example, the illumination level of the adjacent cell not imaged can be ramped up with a certain time constant. The photoluminescence image of the cell monitored is then analyzed for all pixels whose intensity changes with time. The fact that there is a correlation in the change in photoluminescence intensity as a function of time with the change in illumination intensity of the junction not imaged can be exploited in addition.
[0085] It should be pointed out here as well that the method outlined also applies to all other features in the cell, which locally result in a dissipation of current. One example of these electrical defects are growth defects, which are areas of disturbed, non-epitaxial growth. They will affect the photoluminescence contrast in a similar way. In case they penetrate more than one junction, all junctions affected by the electrical defect can be used to adjust the contrast identically to the case of mechanical defects.
[0086] The methods of a photoluminescence based crack detection for multi-junction cells described in this disclosure are based on the realizations outlined above. The methods are applicable to all multi-junction cell architectures which have at least two p-n junctions (subcells or layers). The methods are preferably applicable to junctions made of direct bandgap semiconductors, since those emit a strong photoluminescence signal.
[0087] In a first basic implementation 700, a method for detecting a defect in a multi-junction solar cell consists of the following steps, as shown in
[0088] i) The magnitude of the surface recombination velocity of the semiconductor material used for junction i. The higher this parameter is, the stronger the contrast as outlined before.
[0089] ii) The wavelength range in which junction i emits photoluminescence. Junctions which emit outside the visible wavelength range, for example in the infrared, are preferable if the inspection is to be performed under ambient light conditions, which can be easily blocked in this case.
[0090] iii) The wavelength range in which junction i absorbs radiation. The availability of suitable light sources for the chosen subcell as well as suitable optical detectors for the emitted photoluminescence radiation are to be taken into consideration as well.
[0091] In addition, the spectral distribution of the light used for illuminating junction i 702 should not have any contribution around the wavelength λ.sub.i=E.sub.g.sup.i/hc, where junction i emits photoluminescence, as it is customary for all photoluminescence applications. E.sub.g.sup.i denotes the bandgap energy of junction i. Ideally the distribution of the illuminating light is homogeneous across the cell area.
[0092] The emitted photoluminescence from junction i, occurring around λ.sub.i, is then separated from the exciting wavelength as well as other disturbing factors like ambient light or photoluminescence created through optical coupling into other junctions with the help of appropriate filters in step 703.
[0093] As a next step 704 the intensity of the illuminating light is adjusted such that the photocurrent J.sub.ph.sup.i generated in junction i is around the short circuit current of the cell under its normal operating conditions. For cells operated under the air mass zero (AM0) or air mass 1.5 (AM1.5) sun spectrum J.sub.ph.sup.i is preferably between 5-100 mA/cm.sup.2, and more preferably between 10-20 mA/cm.sup.2. For devices designed to be operated under concentrated sunlight with a concentration factor c, the range of J.sub.ph.sup.i can also be extended by a factor c.
[0094] The photoluminescence is recorded spatially resolved 705 with the help of appropriate optical detectors like CCD or CMOS cameras, for example based on Si, InGaAs or HgCdTe, depending on the required spectral sensitivity. Alternatively, other detectors like the small diameter fiber of a spectrometer can be used to scan the cell area.
[0095] In step 706 the image is then analyzed for an exponentially varying contrast. According to the model presented here, the change in contrast along a line normal to the path of the crack follows approximately a −Ae.sup.−kx dependence, where x denotes the distance along this line from the crack and A and k are constants. The contrast far away from the defect is unaffected. It decreases exponentially with e.sup.−kx towards the crack, where it is decreased by A. As demonstrated, in the example of images 300, 301, 500, and 501, the mechanical defect is easily identified visually by an operator. The exponential variation of the contrast, however, can be used as the basis of automated imaging processing algorithms 707. Other features in a cell, most notably shunts caused by growth defects or the cell edge, will cause a similar contrast. These elements can be easily distinguished by their shapes and, respectively, position. Shunts caused by growth defects have a rounded, 2-dimensional shape, in contrast to the linear, one-dimensional shape of mechanical defects. The cell edge, which also generates image contrast by dissipating current similar to a mechanical defect, can be easily removed from the analysis based on the absolute position of the cell.
[0096] Further,
[0097] It is obvious to persons skilled in the art that this method can be easily extended to illuminating more than two adjacent cells. The main requirement is that all illuminated subcells are adjacent to the subcell i of interest. The effect of optical coupling, i.e., the effect that charge carriers in one externally illuminated junction recombine and illuminate the junction underneath can be used to relax this requirement. If one junction receives significant amount of radiation via optical coupling, this radiation serves the role of an external illumination. Since this illumination cannot be adjusted externally, however, the external illumination of at least the cell underneath is required still.
[0098] In some cases, it can be beneficial not to illuminate all junctions. For example, in the case of a 4 junction cell that contains a severe shunt, illuminating all cells will result in a significantly reduced luminescence, since the shunt short circuits the entire cell by providing a low resistance path between top and rear side metallization. This can be avoided, if only two junctions are selected and illuminated for this method, for example the second and third junction. The non-illuminated top cell prevents the shunt from affecting the biasing point of the overall cell, which is still in open circuit conditions in the latter case.
[0099] The recorded photoluminescence image is then analyzed 806 manually or automatically for an abrupt change in intensity. According to the theory presented, the change in contrast along a line normal to the path of the crack follows also under these conditions approximately a −Ae.sup.−kx dependence, where x denotes the distance along this line from the crack and A and k are constants. In this case A can also be negative, i.e., the contrast increases exponentially with e.sup.−kx towards the location of the crack. This approximate functional dependence can be conveniently used in automated detection algorithms.
[0100] It is also possible to implement a dynamic image processing algorithm.
[0101] There the illumination level of junction i+1 is set to different values, while the photoluminescence image is analyzed for local changes in contrast correlated with a variation in J.sub.ph.sup.i+1. Since only the contrast of defects is affected by changes in J.sub.ph.sup.i+1, but not the remainder of the cell, defects are easily identified in this way. The image processing algorithm only has to identify pixels, that change in value with changing J.sub.ph.sup.i+1. J.sub.ph.sup.i+1 can for example, be increased stepwise from 0 mA/cm.sup.2 to 2×J.sub.ph.sup.i. This can be implemented, for example, by ramping up the illumination of junction i+1 with a constant rate, while recording the photoluminescence images of junction i. It is also possible to implement a feedback loop, which allows the image processing algorithm to change the illumination level of junction i+1 during continuous image acquisition of junction i to different values.
[0102] As before, other features in a cell, most notably shunts caused by growth defects or the cell edge will cause a similar contrast. These elements, can be easily distinguished by their shape respectively position. Electrical defects caused by growth defects have a rounded, 2-dimensional shape, in contrast to the linear, one-dimensional shape of mechanical defects. The cell edge can be easily removed from the analysis based on the absolute position of the cell.
[0103] A further implementation of a method for detecting a defect in a multi-junction solar cell is shown in
[0104] Features in this image that can be detected are electrical defects like shunts or the cell edge, as well as mechanical defects. Mechanical defects can be separated from electrical ones, caused, e.g., by growth defects, based on their shape. One-dimensional, linear objects are attributed to mechanical defects, whereas rounded, two dimensional objects are electrically active growth defects. The image analysis can be performed purely visually. Alternatively, this method, which enhances the contrast of the defects significantly, can be used to generate images most suitable for subsequent image processing for automatic defect detection. Simple image processing steps, like thresholding the image, are adequate for this purpose. This is not the case if a standard photoluminescence image is used.
[0105] In addition, the image processing can not only be performed statically in one difference image, but also dynamically by identifying areas in the difference image that change while J.sub.ph.sup.i+1 is changed. It can, for example, be based on a series of difference images acquired with constant illumination of junction i, generating a photocurrent J.sub.ph.sup.i, and a stepwise increase in the illumination of junction i+1, for example from 0 mA/cm2 to 2×J.sub.ph.sup.i. This can be implemented, for example, by ramping up the illumination of junction i+1 with a constant rate, while recording the photoluminescence images of junction i. It is also possible to implement a feedback loop, which allows the image processing algorithm to change the illumination level of junction i+1 during continuous image acquisition of junction i to different values. In this fashion the image analysis algorithm becomes very simple. It only has to identify pixels in the image which vary in contrast with changing J.sub.ph.sup.i+1.
[0106]
[0107]
[0108] For the description in the following with regard to
[0109] For the implementation of method 700, the apparatus, shown in
[0110] In the above implementation, a first illumination unit (see
[0111]
[0112] In addition, the apparatus can be equipped with a feedback loop 1102 that enables the image processing unit 1103 to control the image acquisition unit 1101 such that J.sub.ph.sup.2 is adjusted by changing the illumination level of light source 13. In this feedback loop the image processing unit generates either a range of required photocurrent levels J.sub.ph.sup.2 for which images are acquired, or dynamically changes the J.sub.ph.sup.2 with a certain rate, while images are acquired continuously. In this operation mode the image processing unit 1103 identifies all pixels in the image that change with changing J.sub.ph.sup.2. These pixels are then plotted graphically and attributed to cell defects.
[0113]
[0114] The image calculation module subtracts two images with the same J.sub.ph.sup.1, but different J.sub.ph.sup.2. Optionally, the resulting image is passed on to the image processing unit 1202, which analyzes the image for features creating an abrupt change in contrast, and/or to a second processing unit 1002 that evaluates the spatial distribution of the features identified in the image calculation module 1200 or the image processing unit 1202 and attributes mechanical cell defects to essential 1-dimensional line features, whereas electrical growth defects are classified according to their rounded, 2-dimensional character. In addition, there is the option that the image processing unit 1202 also controls the current J.sub.ph.sup.2 for which images are acquired, either calculating a number of required J.sub.ph.sup.2 values or by dynamically changing J.sub.ph.sup.2 with a given rate. Via a control loop 1203 the image processing unit controls the units 1101 and 1200, such that images are acquired in the acquisition module 1101 for these J.sub.ph.sup.2 values and that the difference images are calculated in the image calculation module 1200. In this operation mode the image processing unit 1202 identifies all pixels in the difference images that change with changing J.sub.ph.sup.2. These pixels are then plotted graphically and attributed to cell defects.
[0115] In the above description and in the figures, the same reference numerals are used for corresponding features or units of different embodiments. However, the details expounded with regard to one of these features or units also hold accordingly for the features of other embodiments having the same reference sign. Further, the present invention is not limited to the concrete embodiments described above, which are merely examples how the present invention could be carried out. Other embodiments are possible, wherein it should be appreciated that features of one embodiment can be used in other embodiments as well.
[0116] In view of the above, aspects of the present disclosure are concerned with a method to detect defects, preferentially mechanical defects, in semiconductor components like solar cells comprising at least two p-n junctions stacked vertically on top of one another with the help of photoluminescence. In a first implementation only one junction is illuminated and the resulting photoluminescence image is analyzed for an exponential variation in contrast. In a modified approach, at least two adjacent junctions are illuminated and the illumination level of the junction not imaged is used to adjust the contrast of the defect in the junction imaged. Finally subtracting two photoluminescence images of one junction, acquired with the same illumination level of this junction, but with different illumination levels of at least one adjacent junction, increases the contrast of a defect significantly. This simplifies the manual or automatic detection.
[0117] While at least one exemplary embodiment of the present invention(s) is disclosed herein, it should be understood that modifications, substitutions and alternatives may be apparent to one of ordinary skill in the art and can be made without departing from the scope of this disclosure. This disclosure is intended to cover any adaptations or variations of the exemplary embodiment(s). In addition, in this disclosure, the terms “comprise” or “comprising” do not exclude other elements or steps, the terms “a” or “one” do not exclude a plural number, and the term “or” means either or both. Furthermore, characteristics or steps which have been described may also be used in combination with other characteristics or steps and in any order unless the disclosure or context suggests otherwise. This disclosure hereby incorporates by reference the complete disclosure of any patent or application from which it claims benefit or priority.