SENSOR DEVICE AND IMAGING SYSTEM FOR DETECTING RADIATION SIGNALS

Abstract

The present invention relates to a sensor device for detecting radiation signals. To enable high signal integrity and cost efficiency while maintaining the capability of being four-sidedly buttable, the proposed sensor device comprises a sensor array (22) comprising a plurality of detectors (11, 11a-d), a sensor element (14) for converting said received radiation signals (74, 74′) into a plurality of corresponding electric signals, an interposer element (16, 16a-d) extending laterally between a first side (28) and a second side (30), and an integrated circuit element (18, 18a-d). The interposer element (16, 16a-d) comprises a front surface (24) facing said sensor element (14) and a back surface (26) parallel to said front surface (24), wherein a front contact arrangement (36) is provided on said front surface (24) for directing said electric signals to a back contact arrangement (40) provided on said back surface (26). The integrated circuit element faces said back surface (26) and is electrically connected to said back contact arrangement (40).

Claims

1. Sensor device for detecting X-ray radiation signals, comprising a sensor array comprising a plurality of detectors each detector comprising: a receiver surface for receiving a plurality of radiation signals transmitted through or emanating from a subject; a sensor element for converting said received radiation signals into a plurality of corresponding electric signals; an interposer element extending laterally between a first side and a second side, said interposer element comprising a front surface facing said sensor element and a back surface parallel to said front surface, wherein a front contact arrangement is provided on said front surface for directing said electric signals to a back contact arrangement provided on said back surface; and an integrated circuit element facing said back surface and electrically connected to said back contact arrangement, said integrated circuit element comprising a circuit portion extending laterally over said back surface on said second side; wherein said front surface extending laterally over said back surface on said first side by an extrusion comprising an extrusion surface, said circuit portion of a first detector of said sensor array overlapping vertically with and being vertically spaced from said extrusion surface of a second detector adjacent to said first detector.

2. The sensor device according to claim 1, wherein said extrusion surface is arranged between said front surface and said back surface.

3. The sensor device according to claim 1, wherein said extrusion surface comprises a surface portion parallel to said front surface.

4. The sensor device according to claim 1, wherein said first side of said interposer element comprises an upper side surface connecting said front surface with said extrusion surface, and/or a lower side surface connecting said back surface with said extrusion surface, at least one of said upper side surface and said lower side surface 828b) being perpendicular to said front surface.

5. The sensor device according to claim 1, wherein said second side of said interposer element is perpendicular to said front surface.

6. The sensor device according to claim 1, wherein said detector further comprises a substrate element electrically connected to said integrated circuit element, in particular to said circuit portion.

7. The sensor device according to claim 6, wherein said substrate element is configured to extend laterally over said circuit portion.

8. The sensor device according to claim 6, wherein said substrate element is electrically connected to a contact pad provided on said circuit portion by a wire bond.

9. The sensor device according to claim 1, wherein said detector further comprises a flexible substrate.

10. The sensor device according to claim 1, wherein said integrated circuit element of said first detector is laterally spaced from said integrated circuit element of said second detector.

11. The sensor device according to claim 1, wherein said front contact arrangement comprises a plurality of front contact pads, wherein said back contact arrangement comprises a plurality of back contact pads, wherein each of said front contact pads is configured to direct one of said electric signals to a corresponding one of said back contact pads.

12. The sensor device according to claim 11, wherein each of said front contact pads is provided with a first lateral dimension and each of said back contact pads is provided with a second lateral dimension, said first lateral dimension being larger than said second lateral dimension.

13. The sensor device according to claim 11, wherein the quantity of said front contact pads the same as the quantity of said back contact pads.

14. The sensor device according to claim 1, wherein said interposer element is formed using pressed layers, in particular pressed polyamide layers.

15. Imaging system for detecting radiation signals, comprising: a radiation source for generating a plurality of radiation signals; radiation directing means for directing said generated radiation signals to said subject; and a sensor device as claimed in claim 1 for detecting said directed radiation signals.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0033] These and other aspects of the invention will be apparent from and elucidated with reference to the embodiment(s) described hereinafter. In the following drawings

[0034] FIG. 1 shows a schematic representation of a sensor array comprising a plurality of detectors according to an embodiment;

[0035] FIG. 2a-b shows a schematic representation of one of the detectors in FIG. 1;

[0036] FIGS. 3a-d shows a schematic representation of the interposer element of the detector in FIG. 2;

[0037] FIG. 4 shows a schematic representation of two adjacent detectors in FIG. 1;

[0038] FIG. 5 shows a schematic representation of two adjacent detectors according to another embodiment;

[0039] FIG. 6 shows a schematic representation of an imaging system according to an embodiment; and

[0040] FIG. 7 shows a schematic representation of an imaging system according to another embodiment.

DETAILED DESCRIPTION OF THE INVENTION

[0041] FIG. 1 shows a schematic representation of a sensor device 10 for detecting radiation signals of a subject, comprising a plurality of detectors 11. Each detector 11 comprises a receiver surface 12, a sensor element 14, an interposer element 16 and an integrated circuit element 18. Preferably, each detector 11 further comprises a substrate element 20. The plurality of detectors 11 are arranged to form a sensor array 22, wherein the individual detectors 11 are aligned so that the individual receiver surfaces 12 are arranged on the same side of the sensor array 22. The sensor array 22 comprises eight detectors 11 which are arranged lineally in the embodiment shown in FIG. 1. In another embodiment, the detectors 11 are arranged at least partially along a curvature. In general, the number of the detectors 10 may be larger or smaller than eight.

[0042] FIG. 2a shows the detector 11 in more detail. The receiver surface 12 is preferably formed as a top surface of the sensor element 14. The receiving surface 12 comprises preferably top electrodes or cathodes of the sensor element 14, which additionally comprises back electrodes or anodes on it bottom surface connecting the interposer element 16. Between the cathodes and the anodes the sensor element 14 comprises a bulk made of a material suitable for direct conversion radiation sensing such as cadmium telluride (CdTe), cadmium zinc telluride (CdZnTe) gallium arsenide (GaAs), mercury iodide (HgI), etc. Preferably, the sensor element 14 is configured to convert the received radiation signals directly into corresponding electric signals such as charges or current signals. Further preferably, the sensor element 14 is configured to enable a conversion process by creating an electron-hole pair after receiving a single photon, wherein the electron and/or the hole of the electron-hole pair contributes to the electric signal converted from the radiation signal being the photon. Advantageously, such a sensor element possesses high conversion efficiency.

[0043] The interposer element 16 comprises a front surface 24 and a back surface 26, wherein the front surface 24 is parallel to the back surface 26. The interposer element 16 is disposed between the sensor element 14 and the integrated circuit element 18, while the front surface 24 of the interposer element 16 faces the sensor element 14 and the back surface 26 of the interposer element 16 faces the integrated circuit element 18. The interposer element 16 extends laterally from a first side 28a, b to a second side 30 opposite to the first side 28. The front surface 24 extends laterally over the back surface 26 on the first side 28a, b by an extrusion 32. The extrusion 32 extends vertically from the front surface 24 to an extrusion surface 34.

[0044] The integrated circuit element 18 is arranged between the back surface 26 of the interposer element 18 and the substrate element 20. The integrated circuit element 18 extends laterally from the same height of an edge of the back surface 26 on the first side 28b. Further, the integrated circuit element 18 comprises a circuit section 62 extending laterally over the back surface 26 of the interposer element 18 on the second side 30. The integrated circuit element 18 is preferably an Application Specific Integrated Circuit (ASIC), providing high compatibility and reliability of signal processing, leading advantageously to increased signal integrity of the detector 11.

[0045] In the embodiment shown in FIG. 2a, the extrusion surface 34 is arranged between the front surface 24 and the back surface 26 and is parallel to the front and back surfaces 24, 26. In this way, the interposer element 16 has a smaller thickness on the first side 28a, b than on the second side 30. In another embodiment, the interposer element 16 has a larger thickness on the first side 28a, b than on the second side 30, wherein the extrusion surface 34 extends vertically over the back surface 26 in direction to the integrated circuit element 18.

[0046] The first side of the interposer element comprises an upper side surface 28a and a lower side surface 28b, wherein the upper side surface 28a connects the front surface 24 with the extrusion surface 34 and the lower side surface 28b connects the back surface 26 with the extrusion surface 34. In the embodiment shown in FIG. 2, both the upper side surface 28a and the lower side surface 28b are perpendicular to the front surface 24 and the back surface 26. In addition, the second side 30 is also perpendicular to the front and back side 24, 26. At least one of the upper side surface 28a, the lower side surface 28b and the second side 30 can be non-perpendicular to the front and the back surface 24, 26, as shown in detail in FIG. 3.

[0047] As shown in FIG. 2a, a front contact arrangement 36 is provided on the front surface 24 of the interposer element 16 comprising a plurality of front contact pads 38. The front contact pads 38 are arranged so that adjacent contact pads 38 are laterally spaced from each other. The front contact pads 38 are configured to receive the electric signals converted from the radiation signals by the sensor element 14. Furthermore, the front contact pads 38 are configured to direct or route the electric signals through the interposer element 16 to a back contact arrangement 40 provided on the back surface 26 of the interposer element 16. The back contact arrangement 40 comprises a plurality of back contact pads 42, which are arranged so that adjacent back contact pads 42 are laterally spaced from each other. It is understood that the quantity of the front and back contact pads 38, 42 may vary in different embodiments of the sensor device 10.

[0048] The back contact pads 42 are configured to direct the electric signals routed through the interposer element 16 further to the integrated circuit element 18. Every electric signal is routed by one of the front contact pads 38 via the interposer element 16 to a corresponding one of the back contact pads 42.

[0049] The front contact pads 38 are provided with a first lateral dimension 48 and the back contact pads 42 are provided with a second lateral dimension 50. Preferably, the first lateral dimension 48 is larger than the second lateral dimension 50. Further preferably, the quantity of the back contact pads 42 is the same as the quantity of the front contact pads 38.

[0050] As shown in FIG. 2b, every front contact pad 38 and its corresponding back contact pad 42 are connected by a routing path 44a, b, as shown in FIG. 2b. Each routing path 44a, b connects a pair of contact pads comprising a front contact pad 38a, b and a corresponding back contact pad 42a, b. Each routing path 44a, b as shown in FIG. 2b comprises one or more vertical routing sections and one or more lateral routing sections. In general, the routing path may comprise one or more vertical routing sections, while it may be extended by one or more lateral routing sections. In a preferable embodiment, the vertical routing sections are realized as vias which are compatible to any interposer technology such as based on polyimide, ceramic, FR4, etc.

[0051] Each front contact pad 38a, b is configured to route an electric signal corresponding to an image element, such as a pixel, of an image generated by processing the pixel signals to one or more image generation means (not shown). The pixel of the sensor device 10, or device pixel, is defined by the electrodes of the sensor element, wherein each electrode is connected to one of the front contact pads 38a, b. Hence, each front contact pad 38 corresponds to a sensor pixel. The electrical signals directed by the front contact pads 38 are also known as pixel signals and the first lateral dimension 48 is known as pixel pitch of the sensor element 14, or sensor pixel pitch. Generally, the device pixel of the sensor device 10 may comprise a larger lateral size than the front contact pad. For instance, the lateral size of the device pixel may be 300 μm, while the lateral size of the front contact pad 38, i.e. the first lateral dimension 48, may be 100 μm.

[0052] Each back pad 42a, b is configured to direct the electric signal routed through the interposer element 16 further to the integrated circuit element 18, where the electric signal will be processed. Each back contact pad 42 corresponds to a circuit pixel and the second lateral dimension 50 may be referred to as circuit pixel pitch. By configuring the first and the second lateral dimensions 48, 50 to have different sizes, the detector 11 is provided with different sensor and circuit pixel pitches.

[0053] As shown in FIG. 2b, the interposer element 16 comprises a plurality of interposer layers 46, 46′ stacked vertically on top of each other. Both routing paths 44a, b are configured to route the electric signal from the front contact pads 38a, b first through a plurality of upper interposer layers 46 beginning from the front surface 24 before the electric signal is routed vertically through a plurality of lower interposer layers 46′ arranged more deeply than the upper interposer layers 46 and subsequently to the corresponding back contact pads 42a, b. In FIG. 2b, the lateral routing sections of the routing paths 44a, b extend along the interfaces between adjacent layers 46, 46′. In general, the routing paths from the sensor pixels to the circuit pixels may have any track required for routing all pixel signals, wherein the routing paths 44a, b may extend within one layer 46, 46′. In particular, each routing path may extend laterally and vertically, thereby bridging the extrusion 32 within the upper interposer layers 46. In an embodiment, the length of the routing paths decreases from the first side 28 towards the second side 30 of the interposer element 30. On the second side, the connection of the sensor pixel to the circuit pixel is preferably 1:1. The longest routing is given by the need to route the leftmost sensor pixels on the first side 28 to the leftmost circuit pixels on the first side 28 in the representation shown in FIG. 2b.

[0054] Depending on the actual design rules for a given technology, it may be necessary to resort to a plurality of layers in order to allow routing all electric signals. Hence, the interposer element 16 is preferably made of two or more layers, wherein the minimum being two forming the top and the bottom layer. Each layer 46, 46′ is used for lateral routing of the electric signals, thus accommodating the lateral routing sections. The vertical routing of the electric signals are facilitated preferably by vias, such as metal-filled holes.

[0055] The front contact pads 38 and/or the back contact pads 42 may in general be formed with different lateral dimensions. In particular, the integrated circuit element 18 has a smaller lateral dimension than the sensor element 14, which enables the I/O and/or power signals to be directed out of the integrated circuit element 18 and/or the detector 11 within the total area of the detector 11. Advantageously, any two detectors 11 can be easily arranged adjacent to each other to enable the four-sided tileability of the sensor device 10. In the preferable embodiment where the front and the back contact pads 38, 42 are provided with the same quantity, the first lateral dimension 48 is larger than the second lateral dimension 50.

[0056] The front and the back contact pad 38, 42 may comprise a conductive material such as metal and/or semiconductor. The interposer elements 16 may comprise a semiconductor material and/or a polymeric material. In particular, the interpose elements 16 may be formed using pressed layers of polyamide, polyimide, ceramic, glass, FR4 and/or silicon. The number of interposer layers 46, 46′ is 6 in the embodiments shown in FIG. 2b. In general, this number may be different from 6. The number of layers is a trade off between the number of signals, the difference in pitch and the technology. For instance, in the case ceramic is used as pressed layers, the pixel signals can be routed in fewer layers than if FR4 is used, while the routing feature sizes such as width and spacing maybe better resolved. In a preferable embodiment, the lateral routing sections comprise a length of about 6 mm, while the present application is not restricted to this length. In another preferable embodiment, the integrated circuit element 18 comprises an area covered by one or more contact pads used for directing I/O and/or power signals, wherein the lateral dimension of the area is preferably but not restricted to 4-6 mm. Further preferably, the integrated circuit element 18 comprises an ASIC, wherein the lateral dimension of the ASIC is 4-6 mm smaller than that of the interposer element 16 and/or the sensor element 14. In another preferable embodiment, the lateral dimension of the extrusion 32 of the interposer 16 is, but not restricted to, 4-6 mm.

[0057] FIGS. 3a-b shows the interposer element 16 of FIGS. 2a-c. In addition, several alternative forms are shown for the extrusion 32 using dashed lines. In FIG. 3a, a first alternative embodiment of the extrusion 32 comprises an extrusion surface 52 which is formed as an inclined surface connecting the front surface 24 and a back surface 26 on a first side 28, wherein the extrusion surface 52 is provided by the first side 28. In another embodiment, the extrusion 32 comprises an extrusion surface 54 which is formed as a devious surface connecting the front surface 24 and the back surface 26 on a first side 28, wherein the extrusion surface 54 is provided by the first side 28.

[0058] In the interposer element 16 shown in FIG. 3b, an upper side surface 56a connecting the extrusion surface 34′ and the front surface 24 is formed as an inclined surface with respect to the front surface 24. A lower side surface 56b, 56b′ connecting the extrusion surface 34′ and the back surface 26 is formed as an inclined surface with respect to the back surface 26, wherein the angle 58 between the lower side surface 56b, 56b′ and the back surface 26 may be smaller or larger than 90°. It is understood that the angle between the upper side surface 56a and the front surface 24 may be smaller or larger than 90°. The extrusion surface 34′ may be parallel to the front and back surfaces 24, 26. In another embodiment, the extrusion surface 34′ is formed as an inclined surface with respect to the front and back surfaces 24, 26.

[0059] FIGS. 3c-d shows again the interposer element 16 of FIG. 2, wherein two additional embodiments for the second side 30 are shown by dashed lines. In the embodiment of FIG. 3c, a second side 60 is formed as an inclined surface with respect to the front and back surfaces 24, 26. It is understood that the angle between the second surface 60 and the front surface 24 may be smaller or larger than 90°. In the embodiment of FIG. 3d, a second side 60′ is formed as a devious surface, which enables a recess compared to the embodiment shown in FIG. 2. It is understood that the second surface 60′ may also be configured to extend laterally over the front and back surfaces 24, 26.

[0060] FIG. 4 shows two adjacent detectors 11a, 11b from the sensor array 22 of FIG. 1. The integrated circuit elements 18a, 18b comprise each a circuit portion 62a, 62b which extend laterally over the second surface 30a, 30b of the interposer element 16a, 16b. The circuit portion 62a of the first detector 11a is configured to vertically overlap with the extrusion surface 34b of the second detector 11b. The lateral dimension of the circuit portions 62a, b is preferably, but not restricted to, 4-6 mm. In addition, the circuit portion 62a of the first detector is vertically spaced from the extrusion surface 34b of the second detector 11b. This allows the first and the second detectors 11a, 10b to be staggered, enabling four-sided tileability of the sensor array 22. Further, this allows to dispose interconnections between the circuit portion 62a and the substrate element 20a of the first detector 11a.

[0061] In the embodiment shown in FIG. 4, the substrate element 20a, 20b of the first and the second detectors 11a, 10b are configured to extend laterally over the integrated circuit element 18a, 18b, respectively. In addition, a wire bond 64a, 64b is provided to connect the portion of the substrate element 20a, 20b extending laterally over the integrated circuit elements 18a, 18b with a contact pad 66a, 66b, respectively, the contact pad 66a, 66b being provided on the respective circuit portion 62a, 62b. As shown in FIG. 4, the circuit portion 62a of the first detector 11a is laterally spaced from the integrated circuit element 18b of the second detector 11b. This enables a gap between the two adjacent integrated circuit elements 18a, 18b which allows to dispose an interconnection, such as the wire bond 64a.

[0062] Preferably, the wire bond 64a is configured to direct I/O and/or power signals between the integrated circuit element 18a and the substrate element 20a. The I/O signals are for instance digital control, data readout and/or analogue signals. The electric signals, in particular the pixel signals, which have been routed through the interposer element 16a are processed by the integrated circuit element 18a. Preferably, the processed pixel signals do not need to be routed out. The result of this processing can be read out via the I/O signals. The readout data is preferably used to form an image corresponding to the processed impinged photons.

[0063] Advantageously, the I/O and/or power signals are not directed through the interposer element 16a, b. In sensor devices known in the past, both the routing paths for pixel signals (shown in FIG. 2b) and the paths for directing the I/O and/or power signals are arranged within the interposer element. This means that the routing paths for pixel signals are capacitively coupled to the directing paths for the I/O and/or power signals. In the present sensor device 10, however, signal interferences, cross-talks and noise between the I/O and/or power signals on one hand and the pixel signals on the other hand are significantly reduced. This leads to higher signal integrity while enabling the four-sided tileability.

[0064] FIG. 5 shows an alternative embodiment to that of FIG. 4. The detectors 11c, 10d are essentially the same as those shown in FIG. 4, except that the substrate element 20a, b is replaced by a flexible substrate 68c, 68d. The flexible substrates 68c, 68d are electrically connected with the corresponding circuit portion 62c, 62d of the first and the second detectors 11c, 10d, preferably each via a contact pad. In a preferable embodiment, the flexible substrates 68c, 68d comprise each a direct flip-chip and/or a printed circuit board (PCB).

[0065] In all embodiments shown above, the extrusion 32 of the interposer element 16, 16′, 16a-d may be realized by etching, in particular chemical etching, grinding and/or mechanical milling. Alternatively, the extrusion 32 may be formed during the manufacturing of the interposer element 16, 16′, 16a-d. One or more components of the individual detector 11 comprise preferably a rectangular, in particular squared cross-section with respect to a surface normal perpendicular to the front surface 24, while a hexagonal or circular cross-section may be realized.

[0066] FIG. 6 shows a schematic representation of an imaging system 70 for detecting radiation signals of a subject, comprising a radiation source 72 for generating a plurality of radiation signals 74, radiation directing means 76 for directing the generated radiation signals 74, in particular photons, to a subject 78, and a sensor device 10 for detecting directed radiation signals 74 transmitted through the subject 78. The radiation source 72 may be preferably a point source. The sensor device 10 may be in accordance with one of the afore-mentioned embodiments in FIGS. 1-5. The sensor device 10 is disposed on opposite side of the radiation source 72 and the radiation directing means 76 with respect to the patient 78.

[0067] Preferably, the sensor device 10 comprises an array of detectors 11 which are aligned linearly. Alternatively, as shown in the imaging system 70′ in accordance with another embodiment in FIG. 7, the sensor device 10′ comprises an array of detectors 11 which are aligned to form a curvature. Further preferably, the radiation source 72′ of the imaging system 70′ in FIG. 7 comprises an internal radiation directing means, wherein the radiation source 72′ is also formed with a curvature. For instance, the radiation source 72′ comprises a plurality of individual point sources arranged in a curved surface. Preferably, the radiation source 72′ and the sensor device 10′ are arranged on a ring and are rotatable around an axis so that the radiation signals 74′ may impinge the patient 78 in various directions. It is understood that the radiation source 72 and/or the sensor device 10 in the imaging system 70 of FIG. 6 may also be rotatable around an axis. In addition, the sensor device 10 in FIG. 6 may also comprise a curved array of detectors 11 as shown in FIG. 7.

[0068] The imaging systems 70, 70′ may be a CT imaging system, preferably a Spectral CT imaging system. To this end, the radiation sources 72, 72′ are configured to emit X-rays using one or more of the methods known in the field, such as thermionic and/or solid-state electron emitters, tungsten filament, tungsten plate, field emitter, thermal field emitter, dispenser cathode, thermionic cathode, photo-emitter, and/or ferroelectric cathode. A system controller may be integrated to the imaging system 70, 70′ which controls the power and/or signals of the imaging systems 70, 70′. One or more displays may also be integrated to display medical images generated using the imaging system 70, 70′. A CT imaging system, in particular a Spectral CT imaging system, has an area coverage of typically 1000 mm×64 mm or more. For the four-sided tileability, the individual detectors 11 are arranged to form the detector 10, 10′ in a mosaic manner.

[0069] While the invention has been illustrated and described in detail in the drawings and foregoing description, such illustration and description are to be considered illustrative or exemplary and not restrictive; the invention is not limited to the disclosed embodiments. Other variations to the disclosed embodiments can be understood and effected by those skilled in the art in practicing the claimed invention, from a study of the drawings, the disclosure, and the appended claims.

[0070] In the claims, the word “comprising” does not exclude other elements or steps, and the indefinite article “a” or “an” does not exclude a plurality. A single element or other unit may fulfill the functions of several items recited in the claims. The mere fact that certain measures are recited in mutually different dependent claims does not indicate that a combination of these measures cannot be used to advantage.

[0071] A computer program may be stored/distributed on a suitable medium, such as an optical storage medium or a solid-state medium supplied together with or as part of other hardware, but may also be distributed in other forms, such as via the Internet or other wired or wireless telecommunication systems.

[0072] Any reference signs in the claims should not be construed as limiting the scope.