OPTICAL DEVICE, METHOD FOR MANUFACTURING AN OPTICAL DEVICE AND METHOD FOR OPERATING AN OPTICAL DEVICE
20220035115 · 2022-02-03
Assignee
Inventors
Cpc classification
G02B7/00
PHYSICS
International classification
Abstract
Described herein is an optical device comprising an optical element, which is mounted on a carrier by means of a platform, in which the platform comprises a base and an elastic structure, wherein the base is connected to the optical element, the elastic structure connects the base and the carrier, the platform extends along an x-y plane defined by an x-direction and a y-direction, an actuator is arranged to apply a force to the base in a direction along the x-y-plane, the elastic structure is elastic in the x-direction and in the y-direction, and the base and the elastic structure are fabricated in a one-piece manner
Claims
1. Optical device comprising an optical element, which is mounted on a carrier by means of a platform, the platform comprises a base and an elastic structure, wherein the base is connected to the optical element, the elastic structure connects the base and the carrier, the platform extends along an x-y plane defined by an x-direction and a y-direction, an actuator is arranged to apply a force to the base in a direction along the x-y-plane, the elastic structure is elastic in the x-direction and in the y-direction, and the optical element is a transmissive optical element.
2. Optical device according to claim 1 wherein the platform has a first resonance frequency along the x-direction and a second resonance frequency along the y-direction and the first and the second resonance frequencies are essentially identical, or the first and the second resonance frequency differ from each other between 1% and 5%.
3. Optical device according to claim 1, wherein the elastic structure comprises an x-spring and a y-spring, wherein the x-spring comprises at least one bending beam of a first kind and the y-spring comprises at least one bending beam of a second kind, wherein in an undeflected state the bending beam of the first kind extends perpendicularly to the x-direction, and in an undeflected state the bending beam of the second kind extends perpendicularly to the y-direction.
4. Optical device according to claim 3, wherein the base has an outer contour, the bending beam of the first kind extends along a first region of the outer contour, the bending beam of the second kind extends along a second region of the outer contour.
5. Optical device according to claim 1, wherein the stiffness of the elastic structure for movements in a direction obliquely with respect to the x-y-plane is at least 10 times higher than the stiffness of the elastic structure for movements in a direction along the x-y-plane.
6. Optical device according to claim 1 comprising a sensor which is arranged to detect a position of the base with respect to the carrier, and a controller which is arranged to control a frequency and/or amplitude of the relative motion of the base with respect to the carrier.
7. Optical device according to claim 6, wherein the actuator is a voice coil actuator, wherein the voice coil actuator is the sensor.
8. Optical device according to claim 1 comprising a transmission element, wherein the transmission element is arranged to limit the maximum deflection of the base with respect to the carrier in all directions along the x-y-plane, wherein the maximum deflection in all directions along the x-y-plane is essentially the same.
9. Optical device according to claim 1, wherein the base and the elastic structure are fabricated in a one-piece manner.
10. Optical device according to claim 1, comprising an optical axis extending through the optical element.
11. Method for manufacturing an optical device comprising a platform with a base and an elastic structure, wherein the base and the elastic structure are fabricated from a common metal sheet the base comprises a first portion of the metal sheet and the elastic structure comprises a second portion of the metal sheet, wherein the elastic structure is manufactured by bending the first portion by 90° with respect to the second portion.
12. Method according to claim 11, wherein the elastic structure comprises the x-spring with the bending beam of the first kind and the y-spring with the bending beam of the second kind, wherein the bending beam of the first kind and the bending beam of the second kind are fabricated in a one-piece manner
13. Method for driving an optical device comprising an optical element which is mounted on a carrier by means of a platform, wherein an actuator exerts a force to deflect the optical element with respect to the carrier, the actuator is driven with a periodic excitation signal having an excitation frequency, the platform has a first resonance frequency in an x-direction and a second resonance frequency in a y-direction, wherein either the excitation frequency is larger or smaller than both the first and the second resonance frequency, or the excitation frequency is in between the first and the second resonance frequency and the absolute value of the difference between excitation frequency and the first resonance frequency and the difference of the excitation frequency and the second frequency is essentially identical.
14. Method according to claim 13, wherein the optical device comprises a sensor which is arranged to detect a position of the base with respect to the carrier, and a controller which is arranged to control a frequency and/or amplitude of the relative motion of the base with respect to the carrier, wherein the movement path of the base in relation to the carrier is controlled with a position based closed-loop control circuit comprising the sensor and the controller.
Description
BRIEF DESCRIPTION OF THE FIGURES
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[0043] Identical, identical or identically acting elements are provided with the same reference symbols in the figures. The figures and the proportions of the elements shown in the figures among one another are not to be regarded as to scale. Rather, individual elements can be exaggerated in size for better displayability and/or for better comprehensibility.
DETAILED DESCRIPTION
[0044]
[0045] The elastic structure 31 comprises an x-spring and a y-spring. The x spring comprises at least one bending beam of a first kind 311 and the y-spring comprises at least one bending beam of a second kind 312. In an undeflected state the bending beam of the first kind 311 extends perpendicularly to the x-direction 101, and in an undeflected state the bending beam of the second kind 312 extends perpendicularly to the y-direction 102. The platform 30 has a first resonance frequency along the x-direction 101 and a second resonance frequency along the y-direction 102 and the first and the second resonance frequencies are essentially identical, or the first and the second resonance frequency differ from each other between 1% and 5%. The first resonance frequency essentially depends on the elasticity of the x-spring and the mass of the base 32 and the optical element 10. The second resonance frequency essentially depends on the elasticity of the y-spring and the mass of the base 32 and the optical element 10.
[0046] The platform 30 extends along an x-y plane defined by an x-direction 101 and a y-direction 102. The elastic structure 31 is elastic in the x-direction 101 and in the y-direction 102. The stiffness of the elastic structure 32 for movements in a direction obliquely, in particular perpendicularly, with respect to the x-y-plane is at least 10 time higher than the stiffness of the elastic structure 32 for movements in a direction along the x-y-plane.
[0047] An actuator 40 is arranged to apply a force to the base 32 in a direction along the x-y-plane. The actuator 40 comprises multiple voice coil actuators, wherein the coils are integrated in the carrier 20. In particular, the carrier 20 is a PCB and the conductive tracks of the PCB form a coil which is integrated in the PCB. Furthermore, the actuator 40 comprises multiple magnets (not shown in the figure) which are attached to the base 32. The voice coil actuators are used as a sensor 51 to detect a position of the base 32 with respect to the carrier 20. A controller 50 is arranged to control a frequency and/or amplitude of the relative motion of the base 32 with respect to the carrier 20.
[0048] The base 32 and the elastic structure 31 are fabricated in a one-piece manner from a common metal sheet. The base 32 comprises a first portion of the metal sheet and the elastic structure 31 comprises a second portion of the metal sheet. The elastic structure 31 is manufactured by bending the first portion by 90° with respect to the second portion. Thus, the elastic structure 31 extends perpendicularly with respect to the xy-plane.
[0049] The elastic structure comprises the x-spring with two bending beams of the first kind 311 and the y-spring with two bending beams of the second kind 312. Each bending beam of the first kind 311 is mechanically connected to one of the bending beams of the second kind 312. Each bending beam of a first kind 311 is fabricated in a one-piece manner with a bending beam of a second kind 312. In operation the actuator 40 is driven with a periodic excitation signal having an excitation frequency. Either the excitation frequency is larger or smaller than both the first and the second resonance frequency, or the excitation frequency is in between the first and the second resonance frequency and the absolute value of the difference between excitation frequency and the first resonance frequency and the difference of the excitation frequency and the second frequency is essentially identical. In operation, the actuator 40 is driven, such that the base 32 performs an elliptic, preferably circular, motion along the xy-plane with respect to the carrier 20. In particular, the controller 50 enables a closed loop control. In particular, the controller has two channels, wherein a first channel is arranged to control a force of the actuator 40 along the x-direction 101 and a second channel is arranged to control a force of the actuator 40 along the y-direction 102. The frequency of said motion is preferably between 30 Hz and 200 Hz, highly preferred between 50 Hz and 80 Hz. The peak to peak amplitude of said motion is in a range of 0.5 mm to 5 mm, while the amplitude of the motion in a direction perpendicular to the xy-plane is below 0.1 mm
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[0056] The invention is not restricted to the exemplary embodiments by the description based on these. Rather, the invention encompasses every new feature and every combination of features, which in particular includes every combination of features in the patent claims, even if this feature or this combination itself is not explicitly specified in the patent claims or exemplary embodiments.
LIST OF REFERENCE NUMERALS
[0057] 1 Optical device
[0058] 20 Carrier
[0059] 30 Platform
[0060] 31 Elastic structure
[0061] 311 Beam of first kind
[0062] 312 Beam of second kind
[0063] 32 Base
[0064] 33 Recess
[0065] 34 Fixing element
[0066] 40 Actuator
[0067] 50 Controller
[0068] 51 Sensor
[0069] 60 Transmission structure
[0070] 61 Pin
[0071] 62 Opening
[0072] 63 Axis
[0073] 64 Bearing
[0074] 65 Cam
[0075] 101 x-direction
[0076] 102 y-direction