Thermally assisted magnetic recording medium and magnetic storage device

Abstract

Disclosed is a thermally assisted magnetic recording medium comprising a substrate, a plurality of underlayers formed on the substrate, and a magnetic layer which is formed on the underlayers and predominantly comprised of an alloy having a L1.sub.0 structure, characterized in that at least one of the underlayers is predominantly comprised of MgO and comprises at least one oxide selected from SiO.sub.2, TiO.sub.2, Cr.sub.2O.sub.3, Al.sub.2O.sub.3, Ta.sub.2O.sub.5, ZrO.sub.2, Y.sub.2O.sub.3, CeO.sub.2, MnO, TiO and ZnO. The thermally assisted magnetic recording medium has a magnetic layer comprised of fine magnetic crystal grains, exhibiting a sufficiently weak exchange coupling between magnetic grains, and having a minimized coercive force dispersion.

Claims

1. A thermally assisted magnetic recording medium comprising a substrate, a plurality of underlayers formed on the substrate, and a magnetic layer which is formed on the underlayers, is (001)-orientated and predominantly comprised of an alloy having a L1.sub.0 structure, wherein at least one of said underlayers is predominantly comprised of MgO and comprises at least one oxide selected from the group consisting of SiO.sub.2, TiO.sub.2, Cr.sub.2O.sub.3, Al.sub.2O.sub.3, Ta.sub.2O.sub.5, ZrO.sub.2, Y.sub.2O.sub.3, CeO.sub.2, MnO, TiO and ZnO, and the underlayer predominantly comprised of MgO and at least one oxide contacts with the magnetic layer and is (100)-orientated to orient the magnetic layer.

2. The thermally assisted magnetic recording medium according to claim 1, wherein a content of the at least one oxide contained in the underlayer predominantly comprised of MgO is in the range of 2 mol to 40 mol %, based on the underlayer predominantly comprised of MgO.

3. The thermally assisted magnetic recording medium according to claim 1, wherein the underlayer predominantly comprised of MgO is formed on an underlayer which is comprised of Cr, or a Cr alloy predominantly comprised of Cr and having a BCC structure.

4. The thermally assisted magnetic recording medium according to claim 1, wherein the underlayer predominantly comprised of MgO is formed on an underlayer comprised of Ta.

5. The thermally assisted magnetic recording medium according to claim 1, wherein the underlayer predominantly comprised of MgO has an average particle diameter of not larger than 10 nm.

6. The thermally assisted magnetic recording medium according to claim 1, wherein the magnetic layer is predominantly comprised of a FePt or CoPt alloy having a L1.sub.0 structure, and comprises at least one oxide or element, selected from the group consisting of SiO.sub.2, TiO.sub.2, Cr.sub.2O.sub.3, Al.sub.2O.sub.3, Ta.sub.2O.sub.5, ZrO.sub.2, Y.sub.2O.sub.3, CeO.sub.2, MnO, TiO, ZnO and carbon.

7. The thermally assisted magnetic recording medium according to claim 6, wherein a content of said at least one oxide in the magnetic layer is in the range of 10 mol % to 40 mol %, based on the magnetic layer.

8. The thermally assisted magnetic recording medium according to claim 6, wherein a content of carbon in the magnetic layer is in the range of 10 atomic % to 70 atomic %, based on the magnetic layer.

9. A magnetic recording storage device comprising, in combination: a magnetic recording medium; a driving part for rotating the magnetic recording medium; a magnetic head comprising a laser emitting means for heating the magnetic recording medium, a waveguide for guiding laser from the laser-emitting means to a tip of the magnetic head, and an evanescent light-emitting means provided at the tip of the magnetic head part; means for moving the magnetic head; and a recording-and-reproducing signal treating means; wherein the magnetic recording medium is characterized as being a thermally assisted magnetic recording medium as claimed in claim 1.

10. The thermally assisted magnetic recording medium according to claim 1, wherein a content of the at least one oxide contained in the underlayer predominantly comprised of MgO is in the range of 2 mol to 20 mol %, based on the underlayer predominantly comprised of MgO.

Description

BRIEF DESCRIPTION OF THE DRAWING

(1) FIG. 1 is an enlarged sectional view illustrating an example of the multilayer structure of the thermally assisted magnetic recording medium of the present invention.

(2) FIG. 2 is an enlarged sectional view illustrating another example of the multilayer structure of the thermally assisted magnetic recording medium of the present invention.

(3) FIG. 3 is a perspective illustration showing an example of the magnetic recording storage device of the present invention.

(4) FIG. 4 is an enlarged view of a magnetic head provided in the magnetic recording storage device of the present invention.

LIST OF REFERENCE NUMERALS

(5) 101: Glass substrate 102: NiTi underlayer 103: Soft magnetic underlayer 104: Cr underlayer 105: Layer predominantly comprised of MgO 106: Magnetic layer 107: Carbon overcoat 201: Glass substrate 202: NiTa underlayer 203: Soft magnetic underlayer 204: Ta underlayer 205: Layer predominantly comprised of MgO 206: Magnetic layer 207: Carbon overcoat 701: Magnetic recording medium 702: Driving part for magnetic recording medium 703: Magnetic head 704: Means for moving magnetic head 705: Recording-and-reproducing signal treating means 801: Recording head part 802: Upper magnetic pole 803: Lower magnetic pole 804: PSIM (Planar solid immersion mirror) 805: Evanescent light-emitting means 806: Grating part of PSIM 807: Laser-emitting means 808: Semi-conductor laser 809: Evanescent light 810: Medium 811: Reproducing head part 812: Upper shield 813: Lower shield 814: TMR element

MODES FOR CARRYING OUT THE INVENTION

(6) The thermally assisted magnetic recording medium according to the present invention and the magnetic recording storage device provided with the magnetic recording medium will be described in detail with reference to the accompanying drawings. The drawings are made in a fashion such that, when appropriate, some parts or portions are drawn in a large scale and the scales of dimension of all parts are altered from the actual scales so that the features of the invention can easily be understood.

(7) The thermally assisted magnetic recording medium according to the present invention comprising a substrate, a plurality of underlayers formed on the substrate, and a magnetic layer which is formed on the underlayers and predominantly comprised of an alloy having a L1.sub.0 structure, is characterized in that at least one of said underlayers is predominantly comprised of MgO and comprises at least one oxide selected from the group consisting of SiO.sub.2, TiO.sub.2, Cr.sub.2O.sub.3, Al.sub.2O.sub.3, Ta.sub.2O.sub.5, ZrO.sub.2, Y.sub.2O.sub.3, CeO.sub.2, MnO, TiO and ZnO.

(8) If a magnetic layer comprised of a plurality of magnetic crystal grains is formed on an underlayer comprised of magnetic particles so that a plurality of magnetic crystal grains are located on one large MgO particle in the MgO underlayer, the exchange coupling between magnetic crystal grains cannot be lowered sufficiently to the desired extent. In contrast, if the size of MgO particles in the MgO underlayer is rendered fine, “one-by-one growth” of the magnetic crystal grains, i.e., growth of one particle of the magnetic crystal grains on one MgO crystal particle, can be promoted. This one-by-one growth enhances discretion of magnetic crystal grains in the magnetic layer and desirably lowers the exchange coupling. Further, the one-by-one growth renders uniform the particle diameters of magnetic crystal grains, which results in the reduction of the coercive force dispersion.

(9) The size of MgO particles in the MgO underlayer can be rendered fine by incorporating an oxide selected from the group consisting of SiO.sub.2, TiO.sub.2, Cr.sub.2O.sub.3, Al.sub.2O.sub.3, Ta.sub.2O.sub.5, ZrO.sub.2, Y.sub.2O.sub.3, CeO.sub.2, MnO, TiO and ZnO.

(10) To enhance the discretion of magnetic crystal grains in the magnetic layer, the particles in the MgO-containing underlayer are preferably rendered fine so that an average particle diameter is not larger than approximately 10 nm. However, to realize a plane recording density of approximately 1 Tbit/inch.sup.2 or more, the average particle diameter of the magnetic crystal grains should be approximately 6 nm or smaller. For these small particle diameters of the magnetic crystal grains, the average particle diameter in the MgO-containing underlayer should also be approximately 6 nm or smaller.

(11) The amount of the oxide or oxides incorporated in the MgO-containing underlayer is not particularly limited, provided that the NaCl structure and (100)-orientation in the MgO underlayer are not greatly deteriorated. But, the amount of the oxide or oxides incorporated in the MgO underlayer is preferably in the range of 2 mol % to 40 mol % based on the MgO underlayer. When the amount of oxide is smaller than 2 mol %, MgO particles cannot be rendered fine to the desired extent. In contrast, when the amount of oxide is larger than 40 mol %, the NaCl structure of the MgO underlayer is deteriorated.

(12) The magnetic layer is preferably comprised of an alloy such as FePt alloy or CoPt alloy, which has an L1.sub.0 structure.

(13) Grain boundary segregation material can be incorporated in the FePt alloy or CoPt alloy. As examples of the grain boundary segregation material, there can be mentioned oxides selected from SiO.sub.2, TiO.sub.2, Cr.sub.2O.sub.3, Al.sub.2O.sub.3, Ta.sub.2O.sub.5, ZrO.sub.2, Y.sub.2O.sub.3, CeO.sub.2, MnO, TiO and ZnO, and carbon. These oxides and carbon may be used either alone or in combination.

(14) When the grain boundary segregation material is incorporated in the FePt or CoPt alloy layer having an L1.sub.0 structure, the magnetic layer has a granular structure wherein the magnetic crystal grains are separated by the grain boundary segregation material.

(15) The amount of the grain boundary segregation material to be incorporated in the magnetic layer is preferably at least 30% by volume based on the total volume of the magnetic layer. To render magnetic crystal grains discrete to more desired extent, the grain boundary segregation material is used preferably in an amount of at least 40% by volume. However, if the amount of the grain boundary segregation material is too much, the L1.sub.0 structure tends to be deteriorated, and therefore, the amount of the grain boundary segregation material is preferably not larger than 60% by volume.

(16) The volume per mole % of the above-mentioned oxides for the grain boundary segregation material varies depending upon the particular kind of material. Therefore, the amount in mol % of the oxides used should be chosen so that the above-mentioned volume % can be obtained. For example, when SiO.sub.2 is used as the grain boundary segregation material, its amount is preferably in the range of approximately 10% by mol to approximately 30% by mol based on the total magnetic layer. For the other oxides, their amounts are preferably in the range of approximately 10% by mol to approximately 40% by mol, based on the total magnetic layer.

(17) When carbon is used as the boundary segregation material, its amount is preferably in the range of approximately 10 atomic % to approximately 70 atomic % based on the total magnetic layer.

(18) By the incorporation of the boundary segregation material, crystal grain diameter of the FePt alloy or CoPt alloy can be rendered 6 nm or smaller and simultaneously the grain boundary width can be 1 nm or larger, with the result of reduction in the exchange coupling between the magnetic crystal grains.

(19) The underlayer predominantly comprised of MgO is preferably (100)-orientated so that the FePt or CoPt alloy with an L1.sub.0 structure be (001)-orientated. The (100)-orientated MgO-containing underlayer can be realized, for example, by forming a Ta underlayer on a glass substrate, and then, forming the underlayer predominantly comprised of MgO on the Ta underlayer.

(20) In the case when an underlayer comprised of Cr, or a Cr alloy predominantly comprised of Cr and having a BCC structure is formed on a heated glass substrate, the formed Cr or Cr alloy underlayer is (100)-orientated. A MgO-containing layer formed on the Cr or Cr alloy underlayer can also be (100)-orientated. The Cr alloy used includes, for example, CrTi, CrMo, CrV, CrW, CrMo, CrRu and CrMn.

(21) In the thermally assisted magnetic recording medium according to the present invention, which has a plurality of underlayers formed on the substrate, it is essential that at least one of the underlayers is comprised of MgO and comprises at least one specific oxide. The other underlayers are not particularly limited and can be conventional underlayers widely used in general magnetic recording mediums.

(22) As specific examples of the underlayers other than the underlayer predominantly comprised of MgO and comprising the specific oxide, there can be mentioned the above-mentioned orientation-controlling layer comprised of Ta; the above-mentioned underlayer comprised of Cr, or a Cr alloy predominantly comprised of Cr and having a BCC structure; a heat sink layer comprised of metal having a high thermal conductivity such as Cu, Ag, Al or alloys predominantly comprised of these metals; and soft magnetic underlayer comprised of Cr or a Cr alloy provided for improving write characteristics; and an adhesion layer for enhancing adhesion between a substrate and other layers.

EXAMPLES

(23) The present invention will now be specifically described by the following examples. The examples should not limit the scope of the invention. The invention can also be practiced in accordance with embodiments modified from the examples within the scope of the invention.

Examples 1-1 to 1-14, and Comparative Example 1

(24) Thermally assisted magnetic recording mediums having a multilayer structure as illustrated in FIG. 1 were manufactured as follows.

(25) A Ni-50 atomic % Ti alloy underlayer (102) having a thickness of 30 nm was formed on a heat-resistant glass substrate (101). Then a soft magnetic underlayer (103) having a thickness of 25 nm comprised of Co-20 atomic % Ta-5 atomic % B alloy was formed on the Ni—Ti alloy underlayer-formed substrate. Then the soft magnetic underlayer-formed substrate was heated to 250° C., and a Cr layer (104) having a thickness of 10 nm was formed thereon. Then an underlayer (105) predominantly comprised of MgO and having a thickness of 5 nm was formed, and then the substrate was heated to 420° C. Thereafter, (Fe-55 atomic % Pt)-18 mol % TiO.sub.2 magnetic layer (106) having a thickness of 6 nm and then a carbon protective overcoat (107) having a thickness of 3 nm were formed in this order.

(26) As the underlayer (104) predominantly comprised of MgO, each of the following compositions was adopted.

(27) MgO-10 mol % SiO.sub.2 (Example 1-1)

(28) MgO-2 mol % TiO.sub.2 (Example 1-2)

(29) MgO-5 mol % SiO.sub.2-5 mol % TiO.sub.2 (Example 1-3)

(30) MgO-8 mol % Cr.sub.2O.sub.3 (Example 1-4)

(31) MgO-5 mol % Al.sub.2O.sub.2 (Example 1-5)

(32) MgO-2 mol % Ta.sub.2O.sub.5 (Example 1-6)

(33) MgO-5 mol % SiO.sub.2-5 mol % Ta.sub.2O.sub.5 (Example 1-7)

(34) MgO-15 mol % ZrO.sub.2 (Example 1-8)

(35) MgO-10 mol % Y.sub.2O.sub.2 (Example 1-9)

(36) MgO-10 mol % Y.sub.2O.sub.2-10 mol % TiO (Example 1-10)

(37) MgO-5 mol % CeO.sub.2 (Example 1-11)

(38) MgO-12 mol % MnO (Example 1-12)

(39) MgO-20 mol % TiO (Example 1-13)

(40) MgO-15 mol % ZnO (Example 1-14)

(41) For comparison, an MgO underlayer to which an oxide had not been added was used in Comparative Example 1.

(42) Each of the magnetic recording mediums manufactured in Examples 1-1 to 1-14 and Comparative Example 1 was analyzed by X-ray diffractometry. A strong BCC (200) peak attributed to the Cr underlayer was observed. A strong diffraction peak attributed to L1.sub.0-FePt (001) in the magnetic layer was observed. Further, a mixed peak of L1.sub.0-FePt (002) peak with FCC—FePt (200) peak was observed in the magnetic layer. Integral intensity ratio of the former L1.sub.0-FePt (001) peak to the latter mixed peak of L1.sub.0-FePt (002) with FCC—FePt (200) was in the range of 1.6 to 1.8. This shows that L1.sub.0 type FePt alloy crystal having a high regularity was formed.

(43) The coercive force Hc and the dispersion of coercive force ΔHc/Hc of the magnetic recording mediums of the examples according to the invention and those of the comparative example were measured. The results are shown in Table 1.

(44) Measurement of the dispersion of coercive force ΔHc/Hc was conducted by the method described in IEEE Trans. Magn., vol. 27, pp 4975-4977, 1991, at room temperature. More specifically, magnetic fields were measured when the magnetization reached 50% of the saturated value in the major loop and the minor loop. The ΔHc/Hc was calculated from the difference between the two magnetic fields on the presumption that the distribution of Hc shows Gauss distribution.

(45) The ΔHc/Hc of the magnetic recording mediums of the examples was not larger than 0.3, but the ΔHc/Hc of the comparative example was 0.52, i.e., far larger than those of the examples. Thus, it is seen that the ΔHc/Hc can be decreased to the desired extent by incorporating in the MgO underlayer an oxide such as SiO.sub.2.

(46) The above-mentioned procedures were repeated wherein a magnetic layer was made from each of FePt—SiO.sub.2, FePt—Cr.sub.2O.sub.3, FePt—Al.sub.2O.sub.3, FePt—Ta.sub.2O.sub.5, FePt—ZrO.sub.2, FePt—Y.sub.2O.sub.3, FePt—CeO.sub.2, FePt—MnO, FePt—TiO and FePt—ZnO, instead of FePt—TiO.sub.2, with all other conditions remaining the same. The dispersion of coercive force of the magnetic recording mediums could also be reduced by formation of the MgO underlayer having a specific oxide incorporated therein.

(47) The above-mentioned procedures were repeated wherein a magnetic layer was made from a mixture of a CoPt alloy having a L1.sub.0 structure, instead of the FePt alloy, with each of the above-mentioned oxides, with all other conditions remaining the same. The dispersion of coercive force of the magnetic recording mediums could also be reduced by formation of the MgO underlayer having a specific oxide incorporated therein.

(48) The above-mentioned procedures were repeated wherein a magnetic layer was made from a mixture of the FePt or CoPt alloy with carbon instead of the above-mentioned oxides, with all other conditions remaining the same. The dispersion of coercive force of the magnetic recording mediums could also be reduced by formation of the MgO underlayer having a specific oxide incorporated therein.

(49) TABLE-US-00001 TABLE 1 Hc Examples Composition of underlayer (kOe) Δ Hc/Hc Ex. 1-1 MgO—10 mol % SiO.sub.2 14.2 0.25 Ex. 1-2 MgO—2 mol % TiO.sub.2 15.6 0.29 Ex. 1-3 MgO—5 mol % SiO.sub.2—5 mol % TiO.sub.2 14.2 0.21 Ex. 1-4 MgO—8 mol % Cr.sub.2O.sub.3 13.8 0.23 Ex. 1-5 MgO—5 mol % Al.sub.2O.sub.3 13.9 0.26 Ex. 1-6 MgO—2 mol % Ta.sub.2O.sub.5 15.2 0.28 Ex. 1-7 MgO—5 mol % SiO.sub.2—5 mol % Ta.sub.2O.sub.5 14.9 0.23 Ex. 1-8 MgO—15 mol % ZrO.sub.2 15.7 0.22 Ex. 1-9 MgO—10 mol % Y.sub.2O.sub.3 16.1 0.28 Ex. 1-10 MgO—10 mol % Y.sub.2O.sub.3—10 mol % TiO 15.5 0.29 Ex. 1-11 MgO—5 mol % CeO.sub.2 16.1 0.25 Ex. 1-12 MgO—12 mol % MnO 15.5 0.26 Ex. 1-13 MgO—20 mol % TiO 15.1 0.25 Ex. 1-14 MgO—15 mol % ZnO 14.4 0.23 Com. Ex. 1 MgO 15.6 0.52

Examples 2-1 to 2-8

(50) Thermally assisted magnetic recording mediums having a multilayer structure as illustrated in FIG. 2 were manufactured as follows.

(51) A Ni-50 atomic % Ta alloy seed layer (202) having a thickness of 10 nm was formed on a heat-resistant glass substrate (201). Then a soft magnetic underlayer (203) having a thickness of 50 nm, comprised of Co-28 atomic % Fe-5 atomic % Zr-3 atomic % Ta alloy, was formed on the Ni—Ta alloy seed layer-formed substrate. Then a Ta underlayer (204) having a thickness of 7 nm was formed thereon. Thereafter an underlayer (205) predominantly comprised of MgO and having a thickness of 3 nm was formed, and then the substrate was heated to 450° C. Thereafter (Fe-50 atomic % Pt-10 atomic % Cu)-40 atomic % C magnetic layer (206) having a thickness of 10 nm and then a carbon protective overcoat (207) having a thickness of 3 nm were formed in this order.

(52) As the underlayer (205) predominantly comprised of MgO, each of the following compositions was adopted.

(53) MgO-18 mol % SiO.sub.2 (Example 2-1)

(54) MgO-5 mol % SiO.sub.2-5 mol % Cr.sub.2O.sub.3 (Example 2-2)

(55) MgO-5 mol % TiO.sub.2—Cr.sub.2O.sub.3 (Example 2-3)

(56) MgO-4 mol % TiO.sub.2-3 atomic % ZrO.sub.2 (Example 2-4)

(57) MgO-8 mol % Cr.sub.2O.sub.5 (Example 2-5)

(58) MgO-10 mol % Al.sub.2O.sub.3-3 atomic % Ta.sub.2O.sub.5 (Example 2-6)

(59) MgO-5 mol % Y.sub.2O.sub.3 (Example 2-7)

(60) MgO-10 atomic % TiO-2 mol % ZnO (Example 2-8)

(61) For comparison, an underlayer which is predominantly comprised of MgO but to which an oxide had not been added was used in Comparative Example 2.

(62) Further, in order for conducting plane TEM observation of the underlayers (205) predominantly comprised of MgO, test specimens were prepared by the same procedures as in Examples 2-1 to 2-8 wherein the magnetic layer has not been formed on each of the underlayers (205) predominantly comprised of MgO with all other conditions remaining the same.

(63) Plane TEM observation of the underlayer (205) predominantly comprised of MgO conducted on the test specimens revealed that the underlayers (205) predominantly comprised of MgO formed in Examples 2-1 to 2-8 had an average particle diameter in the range of approximately 5 nm to 10 nm. The observation further revealed that the MgO underlayer in Comparative Example 2, to which an oxide had not been added, had an average particle diameter larger than 30 nm.

(64) Plane TEM observation of each magnetic layer of the magnetic recording mediums manufactured in Examples 2-1 to 2-8 and Comparative Example 2 was conducted. The average particle diameter <D> and the particle diameter dispersion, standardized by the average particle diameter, σ/<D> are shown in Table 2. The average particle diameters <D> in magnetic layer of the magnetic recording mediums manufactured in Examples 2-1 to 2-8 were in the range of 5.5 nm to 6.4 nm. The particle diameter dispersions, standardized by the average particle diameter, σ/<D>, in magnetic layer of the magnetic recording mediums manufactured in Examples 2-1 to 2-8 were small, i.e., not larger than 0.22. In contrast, the average particle diameter <D> in magnetic layer of the magnetic recording medium of Comparative Example 2 was approximately the same as those of Examples 2-1 to 2-8, but, the particle diameter dispersions, standardized by the average particle diameter, σ/<D>, in magnetic layer of the magnetic recording medium of Comparative Example 2 was 0.32, i.e., far larger than those of Examples 2-1 to 2-8.

(65) The above mentioned difference in the average particle diameter, σ/<D>, between the magnetic layer of the mediums of the inventive examples and the magnetic layer of the medium of comparative example is presumed that the difference of σ/<D> is due to the fact the crystal grain diameter in the MgO underlayer to which an oxide has not been added is larger than that in the MgO underlayer in the present invention to which an oxide is added.

(66) Thus, it is apparent that the average particle diameter in the magnetic layer can be minimized and the particle size in the magnetic layer can be substantially uniform by forming an underlayer predominantly comprised of MgO and comprising a specific oxide.

(67) TABLE-US-00002 TABLE 2 <D> Examples Composition of underlayer (nm) σ/<D> Ex. 2-1 MgO—18 mol % SiO.sub.2 6.2 0.19 Ex. 2-2 MgO—5 mol % SiO.sub.2—5 mol % Cr.sub.2O.sub.3 6.4 0.21 Ex. 2-3 MgO—5 mol % TiO.sub.2—Cr.sub.2O.sub.3 5.5 0.18 Ex. 2-4 MgO—4 mol % TiO.sub.2—3 at. % ZrO.sub.2 5.8 0.22 Ex. 2-5 MgO—8 mol % Cr.sub.2O.sub.3 6.2 0.22 Ex. 2-6 MgO—10 mol % Al.sub.2O.sub.3—3 at. % Ta.sub.2O.sub.5 6.0 0.21 Ex. 2-7 MgO—5 mol % Y.sub.2O.sub.3 5.9 0.19 Ex. 2-8 MgO—10 at. % TiO—2 mol % ZnO 6.1 0.20 Com. Ex. 2 MgO 6.2 0.32

(68) Evaluation of Electromagnetic Conversion Characteristics

(69) Each of the thermally assisted magnetic recording mediums manufactured in Examples 2-1 to 2-8 was coated with a perfluoropolyether lubricant. Using each lubricant-coated magnetic recording medium, a magnetic recording storage device having a structure as illustrated in FIG. 3 was manufactured. The magnetic recording storage device had, in combination: a thermally assisted magnetic recording medium (701), a driving part (702) for rotating the thermally assisted magnetic recording medium (701), a magnetic head (703), means (704) for moving the magnetic head, and a recording-and-reproducing signal treating means (705).

(70) The magnetic head (FIG. 3, 703) had a constitution as illustrated in FIG. 4. The magnetic head is comprised of a recording head part (801) and a reproducing head part (811).

(71) The recording head part (801) had an upper magnetic pole (802), a lower magnetic pole (803), and a PSIM (planar solid immersion mirror) (804) sandwiched between the upper pole (802) and the lower pole (803). The PSIM has a structure as described in, for example, Jpn., J. Appl. Phys., Vol. 145, No. 2B, pp 1314-1320 (2006). The PSIM (804) had an evanescent light-emitting means (805) provided at the tip of the PSIM (804). The PSIM (804) constitutes a waveguide for guiding laser from the laser-emitting means (807) to the evanescent light-emitting means (805). The PSIM has a grating part (806) which is irradiated with semi-conductor laser (808) having a wavelength of 650 nm emitted from the laser-emitting means (807).

(72) The laser is concentrated to the evanescent light-emitting means (805), and the emitted evanescent light (809) heats the thermally assisted magnetic recording medium (810). The laser wavelength is preferably chosen so as to be close to the optimum excited wavelength which varies depending upon the material and shape of the evanescent light-emitting means (805).

(73) The reproducing head part (811) of the magnetic head has a upper shield (812), a lower shield (813), and a TMR element (814) sandwiched between the upper shield (812) and the lower shield (813).

(74) Using the above-mentioned magnetic head, each of the magnetic recording mediums manufactured in Examples 2-1 to 2-8 was heated, and recording was made at a linear recording density of 1600 kFCI (kilo Flux Changes per Inch) whereby the electromagnetic conversion characteristics were evaluated. The evaluation results are shown in Table 3. The overwrite property (OW) was measured by writing a signal of 800 kFCI and then overwriting a signal of 107 kFCI, and evaluating the reminder of the signal of 800 kFCI.

(75) High S/N ratios of at least 15.3 dB were obtained on all of the magnetic recording mediums of the invention. In contrast, the magnetic recording medium manufactured in Comparative Example 2 using the MgO underlayer not containing an oxide exhibited a greatly lowered S/N ratio and overwrite characteristics as compared with those of the magnetic recording mediums of the invention. The lowered SN ratio and overwrite characteristics of the medium of comparative example are presumed to be due to the fact that the particle diameter dispersion of magnetic crystal grains is large.

(76) Thus, it will be seen that a thermally assisted magnetic recording medium having a high S/N ratio and good overwrite characteristics can be obtained by providing the medium with a MgO underlayer having a specific oxide incorporated therein.

(77) TABLE-US-00003 TABLE 3 S/N ratio OW Examples Composition of underlayer (dB) (dB) Ex. 2-1 MgO—18 mol % SiO.sub.2 16.3 34.2 Ex. 2-2 MgO—5 mol % SiO.sub.2—5 mol % Cr.sub.2O.sub.3 15.3 30.6 Ex. 2-3 MgO—5 mol % TiO.sub.2—Cr.sub.2O.sub.3 18.0 35.0 Ex. 2-4 MgO—4 mol % TiO.sub.2—3 at. % ZrO.sub.2 17.6 30.1 Ex. 2-5 MgO—8 mol % Cr.sub.2O.sub.3 16.6 30.4 Ex. 2-6 MgO—10 mol % Al.sub.2O.sub.3—3 at. % Ta.sub.2O.sub.5 16.7 30.3 Ex. 2-7 MgO—5 mol % Y.sub.2O.sub.3 16.8 34.2 Ex. 2-8 MgO—10 at. % TiO—2 mol % ZnO 16.7 32.5 Com. MgO 13.2 26.3 Ex. 2

INDUSTRIAL APPLICABILITY

(78) The thermally assisted magnetic recording medium of the present invention has a magnetic layer characterized as being comprised of fine magnetic crystal grains with a minimized diameter dispersion, exhibiting a sufficiently weak exchange coupling between magnetic grains, and having a minimized coercive force dispersion. Therefore, a magnetic recording storage device provided with the thermally assisted magnetic recording medium having the above-mentioned benefits exhibits improved magnetic recording properties, especially a high SN ratio and good overwriting characteristics. Thus, the magnetic recording storage device is expected to be widely used as magnetic recording system providing a high density recording.