LAMINATED CERAMIC MOLDED ARTICLE HAVING RECESSES

Abstract

The invention relates to a ceramic molded article (1) that has recesses (2) and comprises at least two plates (joined parts) (3) made of a ceramic material, i.e. a lower base plate (9), an upper cover plate (8) and, optionally, one or more intermediate plates (7) which are stacked on top of each other and are joined to each other on the surfaces thereof to form the molded article (1); a joining material (paste) is placed between the plates (joined parts) (3).

Claims

1. A ceramic molded article with recesses, wherein the molded articles have at least two plates (joining parts) of ceramic material, namely a lower base plate, and upper cover plate, and optionally one or more intermediate plate(s), which are stacked on one another and are connected in a planar manner to the molded article, and wherein a joining material (paste) is situated between the plates (joining parts).

2. The ceramic molded article according to claim 1, wherein structures such as channels or meanders are molded as recesses in the plates.

3. The ceramic molded article according to claim 1, wherein the individual joining parts have a thickness of less than 2 mm, preferably 1 mm.

4. The ceramic molded article according to claim 1, wherein the base plate and the cover plate have boreholes and in the base plate or the intermediate plate(s) there are channels and/or depressions, wherein the boreholes are connected to the channels and the depressions.

5. The ceramic molded article according to claim 1, wherein that the molded article has a metallizing element on its surface.

6. The ceramic molded article according to claim 1, wherein the molded article has an inner metallizing element, in particular made of platinum, molybdenum, or tungsten.

7. The ceramic molded article according to claim 1, wherein in the individual levels of the molded article there are openings with different diameters, wherein the openings may be of equal size through the molded article or are progressive or are optionally alternating.

8. The ceramic molded article according to claim 1, wherein a cooling or heating structure, which comprises flow paths (cooling or heating channels) for the cooling or heating medium, is provided in the molded articles and the cooling or heating medium can be pumped through the cooling or heating structure, wherein there are at least two openings in the base plate or in the cover plate, which can be connected to attachment flanges.

9. The ceramic molded article according to claim 8, wherein the cooling and heating channels are in the axial direction parallel to the surface faces of the cover plate and the base plate.

10. The ceramic molded article according to claim 8, wherein the attachment elements or closure elements are connected to the molded article, preferably fused, that are connected to the recesses.

11. The ceramic molded article according to claim 10, wherein the fastening elements are fastening pipes, which have a projecting flange, which in the region of the recesses is connected the molded article, or which is fused between the two ceramic plates.

12. The ceramic molded article according to claim 1, wherein at least one elevation is situated in the base plate, which is at the same height as the edge region of the base plate, thus has the full height of the base plate.

13. The ceramic molded article according to claim 1, wherein the ceramic base material of the plates is selected from aluminum oxide, aluminum nitride, silicon nitride, and/or silicon carbide or from a mixed ceramic of aluminum oxide and zirconium oxide or silicon oxide and possibly contains a sintering agent.

14. The ceramic molded article according to claim 1, wherein the joining material is selected from aluminum oxide, aluminum nitride, silicon nitride, and/or silicon carbide or from a mixed ceramic of aluminum oxide and zirconium oxide or silicon oxide, and contains a sintering agent.

15. The ceramic molded article according to claim 1, wherein the joining material contains Y.sub.2O.sub.3 or CaO as the sintering agent.

16. The ceramic molded article according to claim 1, wherein the ceramic base material is aluminum nitride

17. The ceramic molded article according to claim 1, wherein the sintering agent of the joining material has a slightly increased or decreased concentration in comparison with the sintering agent of the ceramic base material.

18. The ceramic molded article according to claim 1, wherein the sintering agent of the ceramic base material is contained in a concentration of 2 to 5%, and the joining material has an increased concentration of sintering agent in comparison with the base material of around +1 to +5%.

19. The ceramic molded article according to claim 1, wherein the sintering agent is Y.sub.2O.sub.3 or CaO.

20. A method for producing a flat ceramic molded article according to claim 1, wherein a. flat ceramic green-body plates possibly with recesses are produced from a ceramic base material that is mixed with green-body-sintering agents, and these are subsequently sintered to create flat ceramic plates, b. the necessary recesses are provided in the ceramic plates, c. a paste from the stirred ceramic base material mixed with sintering agents is applied to the sintered ceramic plates, and the ceramic plates coated in this way, also called joining parts, are piled in a stack and this stack is sintered.

21. The method according to claim 20, wherein the individual joining parts have a thickness of less than 2 mm, preferably 1 mm.

22. The method according to claim 20, wherein before or after sintering of the stack, metallizing elements are applied to the joining parts.

23. The method according to claim 20, wherein the recesses are made in the ceramic plates in such a way that in the joined molded article, structures such as channels or meanders are formed.

24. The method according to claim 20, wherein fastening elements or closing elements are connected to the molded article, preferable fused, that are connected to the recesses.

25. The method according to claim 24, wherein the fastening elements are fastening pipes, which have a projecting flange, which is connected to the molded article in the region of the recesses, or is fused between two ceramic plates.

Description

EXAMPLE

[0029] Three semicircular, film-injected and sintered plates—1 mm thick, radius 100 mm—made of AlN with Y.sub.2O.sub.3 as the sintering agent are lasered. Here different-size circles are cut out of each plate in such a way that after placement of the 3 plates over one another, different-width openings also lie centrally one over the other.

[0030] A paste of AlN and Y.sub.2O.sub.3 is produced by suspension of the solids in a suitable oil (screen print oil, organic paste). In the screen print method it is pressed onto the plates to be connected and the plates coated in this way are then placed/glued on one another.

[0031] This arrangement of three glued AlN plates is sintered at suitable temperatures in N.sub.2.

[0032] With the molded articles according to the invention, molded parts can also be produced for cooling of power components, light sources, or temperature-sensitive components.

[0033] The expression “substantially” or “around” means, within the meaning of the invention, deviations from the exact value of ±10%, preferably ±5% and/or deviations in in the form of changes that are insignificant for the function.

[0034] The molded articles according to the invention thus have several plates, each of which consists of ceramic material, lying in a stack one on the other, and connected to the molded article in a planar manner. Preferably the molded article has metallizing elements on its surface, onto which the power components can be soldered. For temperature control, in the molded article there is a cooling or heating structure, that is, flow paths for a cooling or heating medium, which are acted upon by a cooling or heating medium, preferably a cooling or heating liquid, so that the cooling or heating structure can be used for temperature control. The cooling or heating medium is pumped or suctioned through the cooling or heating structure or can flow through it under the force of gravity. So that the cooling or heating medium can be guided into the molded article, in the base plate or the cover plate there are at least two openings that can be connected by fastening flanges. In one preferable embodiment, the cooling or heating channels are in the axial direction parallel to the surface faces of the base or cover plate.

[0035] Preferably the base plate of the molded article according to the invention has at least one elevation that is at the same height as the edge region of the base plate. These elevations thus have the full height of the base plate and serve first of all for guiding the cooling and heating medium, and secondly as a support surface for the cover plate or the ceramic plate positioned above it.

[0036] The ceramic material of the ceramic plates can be selected from one or more of the following groups: aluminum oxide, aluminum nitride, silicon nitride, silicon carbide, or a mixed ceramic of aluminum oxide zirconium oxide (ATZ or ZTA) or silicon oxide (aluminosilicate).

[0037] Further developments, advantages, and use options of the invention follow from the following description of the exemplary embodiments. All of the described and/or graphically depicted features by themselves or in any combination are the subject matter of the invention, independently of their summaries in the claims or their back-references. Also the contents of the claims are made a component of the description.

[0038] The ceramic molded articles according to the invention can be used as a temperature controllable vacuum chuck for the production of Si wafers.

[0039] In addition, the ceramic molded articles according to the invention are suited for use as setter plates, for example for metal injection molding.

[0040] Apart from that, the ceramic molded articles can be used as a (heatable/coolable) module for temperature control of energy storage devices such as batteries or accumulators.

[0041] The invention is explained below in more detail with reference to the figures of exemplary embodiments.

[0042] FIG. 1 shows a cutout from a ceramic molded article 1 according to the invention, which consists of a number of ceramic plates 3. Intermediate plates from a ceramic material are marked with the reference sign 7. A ceramic cover plate 8 is placed on the topmost intermediate plate 7 and fused. Boreholes 10 are made in the cover plate 8, through which a cooling medium can be guided into the molded article. Recesses 2 are lasered in the intermediate plates 3, which recesses form boreholes, channels, and depressions 12. For connection of the temperature-control media, fastening elements 4 are connected to the molded article 1. These fastening elements in the shown embodiment have a projecting flange 6 and a through hole 17, which are connected to the recesses 2 or depressions 12. (Not shown: the fastening elements can be configured in the form of hose nozzles or pipe sections.) The projecting flange 6 may be glued to the molded article 1, but may also be sintered between two ceramic plates 3.

[0043] FIG. 2 shows the same embodiment as FIG. 1, but only with a fastening element 4.

[0044] FIG. 3 shows the same embodiment as FIGS. 1 and 2, but also with a closing element 5 and a base plate 9.

[0045] FIGS. 4 and 5 show a molded article according to the invention, which in this embodiment depicts the exemplary embodiment of a micro-pump. The micro-pump consists of 3 ceramic plates 3, a lower base plate 9 having an axis pin 13 on which a metallic or metallized impeller is arranged (shown only schematically), an intermediate plate 7, which contains a pump chamber 15 as the depression 12, and feed lines 16 or channels 11 for the medium to be pumped. An upper cover plate 8 covers the pump chamber 15 and the feed lines 16. The reference sign 18 schematically shows a paste prior to sintering. The impeller 14 is not shown in FIG. 5.

[0046] In FIGS. 6 and 7, a molded article 1 of two ceramic plates 3 is shown before sintering. Said molded article consists of a base plate 9 and a cover plate 8. A recess 2 is lasered into the base plate 9. In addition, two boreholes 10 run from the outside into the recess 2. In the recess, in the base plate 9 an elevation 19 is arranged, whose surface is at the same height as the edge region 21 of the base plate 9. This elevation 19 thus has the full height of the base plate 9 and serves first of all for guiding the cooling medium and secondly as a support surface for the cover plate 8. The elevation 19 is arranged between the boreholes 10 so that a desired flow path is formed.

[0047] In FIGS. 8, 9, and 10, a molded article 1 is shown with a channel 11, which is closed on the outside by a closing element 5. This closing element 5 can be glued on or else fused. FIGS. 11 and 12 show a fastening element 4 with radial projections 6 respectively. The fastening element 4 according to FIG. 12 consists of a flexible material, for example rubber, and with its hook 20 can close the channels.