Maintenance Apparatus

Abstract

A maintenance apparatus, in particular for lifting and moving components of a system for processing semiconductor devices. The apparatus comprises a beam and an arm with means for lifting a component, the arm being mounted to the beam via a connecting unit and so as to be pivotable in a horizontal plane, wherein the connecting unit is displaceable along the beam, and wherein the arm is displaceable perpendicularly to the beam, and wherein a load accommodation means is provided on the pivotable arm.

Claims

1. A maintenance apparatus for lifting and moving components of a system for processing semiconductor devices, the maintenance apparatus comprising a beam and an arm with means for lifting a component, wherein the arm is connected to the beam via a connecting unit so as to be pivotable in a horizontal plane, wherein the connecting unit is displaceable along the beam, and wherein the arm is displaceable perpendicularly to the beam, and wherein a load accommodation means for a component is provided on the pivotable arm.

2. The maintenance apparatus as claimed in claim 1, wherein the connecting unit has an arm seat and a beam seat, wherein the arm seat is displaceable rectilinearly relative to the beam seat.

3. The maintenance apparatus as claimed in claim 1, wherein the arm or the load accommodation means or forks are detachable.

4. The maintenance apparatus as claimed in claim 1, wherein the arm is rotatable via the connecting unit.

5. The maintenance apparatus as claimed in claim 1, wherein the load accommodation means comprises fold-out forks for supporting the component.

6. The maintenance apparatus as claimed in claim 5, wherein the arm comprises a further accommodation means for a component, which is arranged on a side of the arm facing away from the forks.

7. The maintenance apparatus as claimed in claim 1, wherein the maintenance apparatus can be folded into a portable unit or is suited for mobile use.

8. The maintenance apparatus as claimed in claim 1, wherein the maintenance apparatus has lubricant-free joints, rails and bearings.

9. A system for processing semiconductor devices, comprising a maintenance apparatus which is mounted to the system and which has means for lifting a component.

10. The system as claimed in claim 9, wherein the system has a seat for a beam of the maintenance apparatus.

11. The system as claimed in claim 9, wherein the maintenance apparatus is adapted to be mounted to the system by means of a quick-release clamping mechanism.

12. The system as claimed in claim 9, comprising two maintenance apparatuses arranged diametrically opposite to each other.

13. A method for lifting and moving a component, wherein the method comprises using a maintenance apparatus as claimed in claim 1 or a system as claimed in claim 9.

14. The method as claimed in claim 13, wherein the moving comprises moving along a trajectory including at least two different movement directions, using a controller.

15. The method as claimed in claim 13, comprising lifting and moving at least two different components or system components using the maintenance apparatus.

16. The maintenance apparatus as claimed in claim 5, wherein fold-out forks the are mounted to the arm so as to be rotatable or displaceable in a horizontal direction.

17. The maintenance apparatus as claimed in claim 8, wherein the maintenance apparatus comprises air bearings or magnetic bearings or is equipped with a particle suction unit.

18. The system as claimed in claim 9, wherein the maintenance apparatus is mounted to a frame of the system.

19. The system is claimed in claim 11, wherein the quick-release clamping mechanism includes an adapter which is mounted on the frame of the system.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0080] The subject matter of the invention will now be explained in more detail by way of exemplary embodiments and with reference to the drawings of FIGS. 1 to 40.

[0081] FIG. 1 is a perspective view of an exemplary embodiment of a maintenance apparatus according to the invention.

[0082] FIG. 2 shows the maintenance apparatus of FIG. 1 in its folded state.

[0083] FIG. 3 is a view of a detail.

[0084] FIGS. 4 to 8 are intended to illustrate in more detail the deployment of a maintenance apparatus.

[0085] FIGS. 9 to 15 are further detailed views of the maintenance apparatus, illustrating the components of the maintenance apparatus in different motion states.

[0086] FIGS. 16 to 24 show various application examples of a maintenance apparatus in a system for processing semiconductor devices, FIGS. 22 and 24 being views of details of the maintenance apparatus.

[0087] FIG. 24 is a view of a detail of the maintenance apparatus used in FIG. 23.

[0088] FIGS. 25 to 28 are intended to illustrate in more detail the installation of a maintenance apparatus according to the invention. This embodiment of a maintenance apparatus according to the invention is only temporarily mounted to the system.

[0089] FIGS. 29 to 31 illustrate the installation of a maintenance apparatus using a quick-release clamping mechanism.

[0090] FIGS. 32 and 33 are views of details of the quick-release clamping mechanism.

[0091] FIG. 34 shows a maintenance apparatus which has a hinge for leveling out the angle of the arm of the maintenance apparatus.

[0092] FIG. 35 is a view of a detail of the maintenance apparatus shown in FIG. 34.

[0093] FIG. 36 is a perspective view of an embodiment of a maintenance apparatus as an alternative to the preceding drawings, which comprises two vertical drives.

[0094] FIG. 37 is a view of a detail of a maintenance apparatus with a reader and a memory including teaching data.

[0095] FIGS. 38 to 40 are intended to illustrate in more detail a method for moving components, for which a maintenance apparatus according to the invention is employed.

DETAILED DESCRIPTION

[0096] FIG. 1 shows a first exemplary embodiment of a maintenance apparatus 1. The maintenance apparatus 1 comprises a beam 2 which is adapted for being mounted to a system for processing semiconductor devices, for example.

[0097] Beam 2 has a rail-like configuration and may be aligned horizontally in the installed state of the maintenance apparatus, that means the main extension direction of beam 2 lies horizontally. In this view with the coordinate system indicated this is the x-y plane. The spatial direction designated z is the vertical direction in space in the sense of the invention.

[0098] An arm 3 is pivotably mounted to beam 2 via a connecting unit 5 which may include a vertical drive for an arm seat 7.

[0099] In this exemplary embodiment, arm 3 is mounted to beam 2 so as to be pivotable horizontally, that is to say about axis 4. For this purpose, the connecting unit 5 includes a hinge.

[0100] In this exemplary embodiment, the arm 3 can be pivoted through 180°, so it can be pivoted to abut against beam 2 with either side thereof.

[0101] Connecting unit 5 further comprises an arm seat 7 and a beam seat 6.

[0102] Beam seat 6 can be moved horizontally along beam 2. The corresponding movement is symbolized by arrow 12.

[0103] Furthermore, the arm seat 7 can be moved vertically relative to beam seat 6, which is symbolized by arrow 13.

[0104] By raising arm seat 7, the arm 3 and hence a component to be moved is lifted and can then be moved out of the system area by a horizontal movement.

[0105] In this exemplary embodiment, arm 3 is composed of segments 3a and 3b which can be telescoped into each other, i.e. segment 3b can be slid into segment 3a in order to shorten or lengthen the arm 3.

[0106] In an alternative embodiment of the invention (not shown here), the arm 3 may only consist of segment 3a to which the forks 8 are mounted in this case.

[0107] In order to pick up a component, the arm 3 comprises the forks 8 at one side thereof, which are shown in an unfolded state here. Forks 8 consist of an upper portion 8b and a lower portion 8a which can be folded so as to be received in a recess 10 of the upper portion.

[0108] However, the component may as well be picked up without the forks, for example by being directly secured to the arm 3a.

[0109] One fork 8 is mounted to segment 3a and the other fork is mounted to segment 3b.

[0110] In this exemplary embodiment, forks 8 are furthermore displaceable horizontally along arm 3 or along the respective segment 3a, 3b, which is symbolized by arrow 14.

[0111] In this way it is possible to modify the spacing between the forks 8.

[0112] Furthermore, in this embodiment the upper portion 8b of the forks is mounted to arm 3 for rotation about a rotation axis 9 that extends perpendicularly to the top of arm 3.

[0113] In an alternative embodiment of the invention, which is not illustrated here, the upper portions cannot be rotated.

[0114] Thus, the forks 8 can be rotated so that their main extension direction coincides with the main extension direction of arm 3. The maintenance apparatus 1 can be compacted in this manner.

[0115] On the side of arm 3 facing away from forks 8, an accommodation means 11 is provided at the end of arm 3 or of segment 3b in this exemplary embodiment, which serves to lift heavy loads. In this exemplary embodiment, accommodation means 11 is in the form of a simple elbow.

[0116] It will be appreciated that both the forks 8 and the accommodation means 11 may comprise further locking means for securing the component during transportation, which are not illustrated here.

[0117] Also not illustrated is an optional locking means for locking the arm 3 in its respective pivotal position and segments 3a, 3b relative to each other.

[0118] In one embodiment, maintenance apparatus 1 is operated completely manually. The connecting unit 5 may be displaced along beam 2 by means of a crank drive, for example.

[0119] Preferably, a crank drive is also provided for driving the arm 3 in vertical direction, via arm seat 7.

[0120] The pivoting of arm 3 and extraction of segment 3b and unfolding of forks 8 may be effected manually.

[0121] In an alternative embodiment of the invention, the translational movements along arrows 12 and 13 and optionally also the extension of segment 3b are effected in motorized manner. In one embodiment of the invention, the pivoting movement of arm 3 is also effected in motorized manner.

[0122] Control may be effected via keys at a controller or via an interface and an external unit. Such control is only necessary if the axes are not controlled manually and no further actuators or sensors of the maintenance apparatus need to be controlled.

[0123] Optionally, maintenance apparatus 1 may additionally include sensors, in particular in order to permit to level out the height of a lifted component.

[0124] FIG. 2 shows the maintenance apparatus 1 in its folded-up state.

[0125] It can be seen that the segments of arm 3 have been telescoped together and that the arm 3 now rests against beam 2.

[0126] Forks 8 are also folded up and rest against arm 3.

[0127] From this view it will be apparent that the maintenance apparatus 1 can be easily folded-up into a compact portable unit.

[0128] Only the connecting unit 5 is protruding laterally from the beam. Preferably, however, it has a significantly shorter length, preferably less than ⅓ of the length of beam 2. A connecting unit 5 laterally protruding beyond beam 2 is required for vertically lifting the component that is to be displaced, if the maintenance apparatus has vertical driving means.

[0129] FIG. 3 is a detailed view of the arm 3 illustrated in FIG. 2, which is mounted to beam 2 via connecting unit 5.

[0130] In this view it can be seen that arm seat 7 is rotatable relative to beam seat 6.

[0131] Rotation axis 15 extends in the horizontal plane along the main extension direction of arm 3. By virtue of the fact that the arm 3 is mounted for rotation, it can be rotated through 90° relative to the position shown in FIG. 1, and can then be pivoted so as to extend upwards or downwards, so that the main extension direction of the arm 3 will then be aligned vertically.

[0132] With reference to FIGS. 4 to 8, the unfolding of a maintenance apparatus 1 will be explained.

[0133] FIG. 4 shows the maintenance apparatus 1 in its folded-up state, like FIG. 2.

[0134] In FIG. 5, the connecting unit 5 of maintenance apparatus 1 has now been moved from the left end of arm 3 to the right end of arm 3. The user now has good access to arm 3 and to forks 8 provided in this exemplary embodiment and arranged on the arm.

[0135] As shown in FIGS. 6 and 7, the forks 8 can now be pivoted through 90° so that the main extension direction of the forks 8 still folded together is vertical.

[0136] Subsequently, as illustrated in FIG. 8, the lower portion 8a of the forks (which is foldable in this exemplary embodiment) can be folded out, so that the forks 8 form an L-shaped configuration.

[0137] FIG. 9 shows how the arm 3 is now pivoted horizontally, for example in order to be positioned above a system area in which a component to be lifted is located.

[0138] As shown in FIG. 10, the arm 3 (of extendable configuration in this exemplary embodiment) can then be telescoped out, so that the forks 8 are now spaced from one another.

[0139] As can be seen in FIG. 11, at least one fork 8 is displaceable horizontally along arm 3 in this exemplary embodiment.

[0140] FIG. 12 shows a further detailed view in which the arm 3 is being rotated in this exemplary embodiment, for example in order to arrange forks 8 and seat 11 so as to face the respective opposite direction in space.

[0141] Furthermore, as shown in FIG. 13, the arm 3 may as well be rotated so as to be no longer pivotable horizontally relative to beam 2, but can be pivoted upwards or downwards.

[0142] FIG. 14 illustrates the arm 3 in a position completely pivoted downwards. In this position, the arm 3 is not adapted to be laterally pivoted into a system area. Rather, the arm is horizontally displaced via the connecting unit. In this position, a heavy load can be laterally engaged and lifted using accommodation means 11.

[0143] In this manner, considerably heavier loads can be moved than in the laterally pivoted position, since the arm 3 now does not form a long lever relative to the beam 2.

[0144] As shown in FIG. 15, the arm 3 may even be pivoted upwards, so that accommodation means 11 is now located above the beam 2.

[0145] FIG. 16 shows a perspective view of a system 16 for processing semiconductor devices.

[0146] System 16 comprises a table 17 which is mounted on vibration isolators 18.

[0147] On table 17 which preferably is designed as a granite slab, a movable stage 19 is mounted which is a constituent part of the system 16 for processing semiconductor devices, in the present example a system 16 including a metrology device 21.

[0148] System 16 is preferably employed in a clean room.

[0149] System 16 furthermore comprises a frame 20. Inside of frame 20 the sensor of the metrology device 21 is arranged.

[0150] As can be seen in this view, the beam 2 of the maintenance apparatus 1 illustrated before is mounted to frame 20.

[0151] As illustrated in FIG. 17, the arm 3 can be horizontally pivoted away from beam 2, and in this exemplary embodiment a sensor 22, e.g. an optical sensor, is gripped from below by forks 8. The component, in this exemplary embodiment the optical sensor 22, can be secured against slipping (not shown) on the forks 8 by optional vacuum suction means or by mechanical locking means or by magnetic locking means.

[0152] As illustrated in FIG. 18, the component, in this exemplary embodiment the optical sensor 22, can be easily moved out of the system area by a pivoting movement of arm 3, and can be removed or have maintenance work done thereon. For this purpose, the connecting unit 5 was moved horizontally along beam 2.

[0153] Stage 19, optical sensor 22, or other components of the metrology system are now accessible for maintenance work.

[0154] As illustrated in FIG. 19, stage 19 may also be pivoted out of the system area by forks 8.

[0155] For this purpose, the arm 3 is extended in this exemplary embodiment by partially extracting segment 3b from segment 3a. Forks 8 now have a wider spacing compared to the condition illustrated in FIG. 17.

[0156] Referring to FIGS. 20 to 24, the displacement of heavier components will now be explained.

[0157] FIG. 20 again shows a system 16 for processing semiconductor devices.

[0158] In contrast to the preceding drawings, two maintenance apparatuses 1 are now mounted to the frame 20 of system 16, which are arranged diametrically opposite to each other.

[0159] The arms 3 of the respective maintenance apparatuses 1 are not horizontally pivoted into the system area, rather they are rotated through 90° into a position in which the arms 3 can be pivoted downwards so that the elbow-shaped accommodation means 11 defines the lower end of arm 3.

[0160] In other exemplary embodiments, the pivotable arms may as well be replaced by other in particular non-pivotable components which connect the component to be moved (in this exemplary embodiment the table 17) to the maintenance apparatus.

[0161] As illustrated in FIG. 21, the entire table 17 can be partially moved out of the system area by means of arms 3, by being lifted by arms 3 and accommodation means 11 and displacing the arms along beams 2.

[0162] For this purpose, the maintenance apparatuses 1 may include synchronized horizontal and/or vertical drives (not shown). In the case of motorized horizontal and/or vertical drives, this synchronization may be achieved via the drive controller, and in particular in the case of manual horizontal and/or horizontal drives via a mechanical link, for example a connecting shaft coupled to the movement axes.

[0163] FIG. 22 is a detailed view of the downwardly pivoted arm 3 which can be driven upwards along connecting unit 5, through arm seat 7, for lifting the table.

[0164] FIG. 23 shows that it is also possible to move heavy loads arranged above the maintenance apparatus 1 using the two maintenance apparatuses 1. For this purpose, the arms 3 are pivoted vertically upwards and are thus able to lift further components, in particular the filter module 23 of system 16 illustrated here, and to displace them laterally along beams 2.

[0165] FIG. 24 again shows a detailed view of arm 3.

[0166] It can be seen that the arm 3 is pivoted vertically upwards so that the accommodation means 11 is located at an upper end of the arm 3. The load can again be lifted by moving the arm seat 7.

[0167] Referring to FIGS. 25 to 28, the installation of a maintenance apparatus according to the invention will now be explained in more detail.

[0168] As illustrated in FIG. 25, in its folded-up state the maintenance apparatus may be accommodated in a trolley case 24 which can be brought to the system by the user.

[0169] FIG. 26 shows the opened trolley case in which maintenance apparatus 1 is accommodated in its folded-up state.

[0170] Then, as illustrated in FIGS. 27 and 28, the beam 2 of maintenance apparatus 1 can be mounted to the frame 20 of system 16. Maintenance apparatus 1 is arranged between an upper system component 23 of the system and table 17 of system 16.

[0171] An optionally provided controller (not shown) of maintenance apparatus 1 may also be accommodated in trolley case 24. According to an alternative embodiment, the controller is a constituent part of the system itself and therefore does not have to be transported to the system. Installation may be accomplished by a screw connection on frame 20, for example.

[0172] Preferably, however, a quick-release clamping mechanism is employed, as will be described in more detail with reference to FIGS. 30 and 31.

[0173] As illustrated in FIG. 29, an adapter 25 may be used for mounting the maintenance apparatus.

[0174] It may be secured to the frame 20 in a form-fitting and/or force-locking manner, for example.

[0175] According to one embodiment, several different adapters are enclosed with the maintenance tool in order to enable it to be installed on differently designed systems. In particular adapters of different widths may be provided, which are adapted to the respective system profile of the frame 20 of different systems 16.

[0176] As illustrated in FIG. 30, the adapter 25 is fixed to the frame 20. The adapter may in particular have a clip-like configuration and can be connected to the frame in a force-locking and/or form-fitting manner.

[0177] Beam 2 of maintenance apparatus 1 can then be mounted to the adapters 25, preferably by means of a quick-release clamping mechanism.

[0178] This is shown in detail in FIGS. 32 and 33.

[0179] In this exemplary embodiment, the quick-release clamping mechanism of adapter 25 includes respective levers 26 with a cam 27. The beam 2 is arranged in a recess 28 of the adapter.

[0180] As shown in FIG. 33, the quick-release clamping mechanism of adapter 25 is locked by pivoting the levers 26.

[0181] It will be understood, however, that differently configured form-fitting or force-locking elements may be used as well.

[0182] FIG. 34 shows a further exemplary embodiment of a maintenance apparatus. In this embodiment, the connecting unit 5 comprises a compensation joint 30 arranged between arm seat 7 and beam seat 6.

[0183] As symbolized by arrow 29, an accommodated load exerts a force on arm 3, which causes the arm 3 to be deflected by an angle α, due to the long lever and the non-infinite stiffness of the system.

[0184] This causes an alteration of the height and in particular angular position of the load.

[0185] Such alteration in angular position is detected by a sensor 31 and can be compensated through compensation joint 30 using an actuator (not shown) by pivoting the arm 3 upwards via the compensation joint 30.

[0186] This is preferably automated.

[0187] A motorized actuator can be used as the actuator. In particular the use of a piezo actuator, an electric motor, or pneumatic means is suggested. A manual embodiment is also possible.

[0188] FIG. 35 is a detailed view of the compensation joint 30, which in this exemplary embodiment is embodied as a flexure bearing.

[0189] The actuator 39 is located between the two halves of this flexure bearing.

[0190] FIG. 36 shows an alternative embodiment of a maintenance apparatus 1 which is intended for lifting especially heavy loads. For this purpose, the maintenance apparatus comprises two connecting units 5 to which the beam 2 is mounted.

[0191] Like in the embodiment illustrated above, the beam 2 can be driven upwards via connecting units 5, and the component located in the system can be lifted in this manner.

[0192] Arm 3 which corresponds to the previously described embodiment is pivotably mounted to the beam by means of a further connecting unit 32.

[0193] Connecting unit 32 is displaceable in the horizontal direction, in particular in motorized manner.

[0194] The vertical movement, however, is effected via connecting units 5.

[0195] Furthermore, the arm shown here is mounted for rotation via connecting unit 32, so that it can be pivoted into the system area or aligned vertically upwards or downwards for lifting heavy loads.

[0196] The invention in particular relates to a maintenance apparatus such as for components of a processing system or components of a process inspection system (for example a measurement sensor, components of a lithography system, in particular measurement devices, lithography devices, metrology devices, optical inspection devices, electron beam-based inspection devices, coating systems and systems for processing semiconductor substrates). The invention also relates to systems for producing masks for semiconductor processing. The invention furthermore relates to handling systems of the aforementioned systems, for example to handling robots. Furthermore, use thereof in systems within clean rooms of the pharmaceutical and food industry is also conceivable, in particular in production packaging and filling systems. Furthermore, use thereof in systems of the mechanical engineering industry is also possible.

[0197] FIG. 37 shows a view of a detail of a maintenance apparatus which comprises two components communicating with each other, in this exemplary embodiment a reader 33 and a memory 34. Memory 34 stores teaching data. Otherwise, the maintenance apparatus is configured like the maintenance apparatus illustrated in FIG. 1.

[0198] The maintenance apparatus comprises a beam 2, which can be mounted to the system, in particular using a quick-release clamp.

[0199] In this exemplary embodiment, a reader 33 is disposed on beam 2, which is able to read out, in wireless manner, a system-side memory 34 which is mounted to the frame 20 of the system in this exemplary embodiment. Memory 34 may in particular be designed as an RFID chip.

[0200] Via reader 33 it is now possible for the maintenance apparatus to be programmed with teaching data. In particular motion profiles for moving a specific system component out of the system area may be preprogrammed.

[0201] With reference to FIGS. 38 to 40 it will now be explained in which manner an exemplary embodiment of a maintenance apparatus of the invention is used for lifting a component and moving it out of a system area, which maintenance apparatus may in particular correspond to the maintenance apparatus shown in FIG. 1 and hence comprises a pivotable arm mounted to a beam, inter alia.

[0202] As schematically illustrated in FIG. 38, a component is to be moved from an initial position 35 to a final position 36.

[0203] The component has to be moved past obstacles 37 and 38 that are located along this way.

[0204] As can be seen, the movement from initial position 35 to final position 36 is composed of two linear, i.e. translational movements at an obtuse angle to one another.

[0205] The view relates to a movement in a plane which is defined by the horizontal and vertical axes, i.e. a vertical plane. In addition, a movement along a trajectory may also be performed in the third dimension, i.e. the horizontal plane, by including the pivoting movement into the trajectory control.

[0206] A trajectory is preferably composed of at least two translational movements.

[0207] As schematically illustrated in FIG. 39, the movement from an initial position 35 to a final position 36 may as well be composed of a plurality of translational movements perpendicular to each other.

[0208] However, as illustrated in FIG. 40, it is likewise possible according to one embodiment of the invention to first perform a rotational movement or circular movement starting from an initial position 35, and then to drive the component to the final position 36 in a translational movement. Such rotational movement or circular movement may for example be achieved by a combination of translational movements in order to avoid a substantially round obstacle 37.

[0209] The movement in a vertical plane, namely the x-z plane, as illustrated in FIGS. 38 to 40, may equally be applied to the other spatial directions, in particular to the horizontal plane, i.e. the x-y plane.

[0210] In the horizontal plane, a translational movement may be composed partially from the pivoting movement of the arm and a translational movement of the connecting unit of the maintenance apparatus.

[0211] The invention permits to provide a light-weight and portable lifting apparatus, which can be applied flexibly and which is even suitable for moving heavy loads.

LIST OF REFERENCE NUMERALS

[0212] 1 Maintenance apparatus [0213] 2 Beam [0214] 3 Arm [0215] 3a, 3b Segment [0216] 4 Axis [0217] 5 Connecting unit [0218] 6 Beam seat [0219] 7 Arm seat [0220] 8 Fork [0221] 8b Upper portion [0222] 8a Lower portion [0223] 9 Rotation axis [0224] 10 Recess [0225] 11 Accommodation means [0226] 12-14 Arrows [0227] 15 Rotation axis [0228] 16 System for processing semiconductor devices [0229] 17 Table [0230] 18 Vibration isolator [0231] 19 Stage [0232] 20 Frame [0233] 21 Metrology device [0234] 22 Sensor [0235] 23 Filter module [0236] 24 Trolley case [0237] 25 Adapter [0238] 26 Lever [0239] 27 Cam [0240] 28 Recess [0241] 29 Arrow [0242] 30 Compensation joint [0243] 31 Sensor [0244] 32 Connecting unit [0245] 33 Reader [0246] 34 Memory with teaching data [0247] 35 Initial position [0248] 36 Final position [0249] 37 Obstacle [0250] 38 Obstacle [0251] 39 Actuator