MAGNETIC MEMORY

Abstract

A magnetic memory according to an embodiment includes: at least one memory cell, the memory cell comprising: a conductive layer including a first terminal, a second terminal, and a portion located between the first terminal and the second terminal; a magnetoresistive element including: a first magnetic layer; a second magnetic layer between the portion and the first magnetic layer; and a nonmagnetic layer between the first magnetic layer and the second magnetic layer; a diode including an anode and a cathode, one of the anode and the cathode being electrically connected to the first magnetic layer; and a transistor including third and fourth terminals and a control terminal, the third terminal being electrically connected to the first terminal.

Claims

1-5. (canceled)

6. A magnetic memory comprising: a conductive layer including a first terminal, a second terminal, and a portion located between the first terminal and the second terminal; a magnetoresistive element including: a first magnetic layer having a fixed magnetization; a second magnetic layer having a changeable magnetization and being disposed between the portion and the first magnetic layer; and a nonmagnetic layer between the first magnetic layer and the second magnetic layer; a diode including a third terminal and a fourth terminal, the third terminal being electrically connected to the first magnetic layer; a transistor including fifth and sixth terminals and a control terminal, the fifth terminal being electrically connected to the first terminal; and a circuit electrically connected to the second terminal, the fourth terminal, the sixth terminal, and the control terminal, wherein when information is to be written into the second magnetic layer, the circuit switches on the transistor, applies a reverse bias to the diode, and supplies current between the second terminal and the sixth terminal, and when information is to be read from the second magnetic layer, the circuit switches off the transistor, and supplies current between the second terminal and the fourth terminal.

7. (canceled)

8. The memory according to claim 6, further comprising: a first wiring electrically connected to the second terminal, and a second wiring electrically connected to the fourth terminal, wherein a direction from a source toward a drain of the transistor intersects with respective directions in which the first wiring and the second wiring extend.

9. (canceled)

10. The memory according to claim 6, wherein the diode is a schottky diode or an MIM diode, the MIM diode having two electrodes with different work functions.

11. The memory according to claim 6, wherein the diode is a schottky diode having an uneven impurity concentration.

12. The magnetic memory according to claim 6, wherein the transistor is a recessed transistor.

13. The magnetic memory according to claim 6, further comprising: a first wiring electrically connected to the second terminal, a second wiring electrically connected to the fourth terminal, a third wiring electrically connected to the sixth terminal, and a fourth wiring electrically connected to the control terminal, wherein the first and third wirings extend in a first direction, and the second and fourth wirings extend in a second direction.

14. The magnetic memory according to claim 6, further comprising: a first wiring electrically connected to the second terminal, a second wiring electrically connected to the fourth terminal, a third wiring electrically connected to the sixth terminal, and a fourth wiring electrically connected to the control terminal, wherein a direction in which the first wiring extends intersects with respective directions in which the second and fourth wirings extend, and a direction in which the third wiring intersects with respective directions in which the second and fourth wirings extend.

15. The magnetic memory according to claim 6, wherein the circuit includes a first circuit electrically connected to the fourth terminal and the control terminal, and a second circuit electrically connected to the second terminal and the sixth terminal.

16. A magnetic memory comprising: a conductive layer including a first terminal, a second terminal, and a portion located between the first terminal and the second terminal; a magnetoresistive element including: a first magnetic layer having a fixed magnetization; a second magnetic layer having a changeable magnetization and being disposed between the portion and the first magnetic layer; and a nonmagnetic layer between the first magnetic layer and the second magnetic layer; a bidirectional diode including a third terminal and a fourth terminal, the third terminal being electrically connected to the first magnetic layer; a transistor including fifth and sixth terminals and a control terminal, the fifth terminal being electrically connected to the first terminal; and a circuit electrically connected to the second terminal, the fourth terminal, the sixth terminal, and the control terminal, wherein when information is to be written into the second magnetic layer, the circuit switches on the transistor, applies a voltage equal to or less than a threshold value to the bidirectional diode, and supplies current between the second terminal and the sixth terminal, and when information is to be read from the second magnetic layer, the circuit switches off the transistor, and supplies current between the second terminal and the fourth terminal.

17. The memory according to claim 16, further comprising: a first wiring electrically connected to the second terminal and a second wiring electrically connected to the fourth terminal, wherein a direction from a source toward a drain of the transistor intersects with respective directions in which the first wiring and the second wiring extend.

18. The magnetic memory according to claim 16, wherein the transistor is a recessed transistor.

19. The magnetic memory according to claim 16, further comprising: a first wiring electrically connected to the second terminal, a second wiring electrically connected to the fourth terminal, a third wiring electrically connected to the sixth terminal, and a fourth wiring electrically connected to the control terminal, wherein the first and third wirings extend in a first direction, and the second and fourth wirings extend in a second direction.

20. The magnetic memory according to claim 16, further comprising: a first wiring electrically connected to the second terminal, a second wiring electrically connected to the fourth terminal, a third wiring electrically connected to the sixth terminal, and a fourth wiring electrically connected to the control terminal, wherein a direction in which the first wiring extends intersects with respective directions in which the second and fourth wirings extend, and a direction in which the third wiring intersects with respective directions in which the second and fourth wirings extend.

21. The magnetic memory according to claim 16, wherein the circuit includes a first circuit electrically connected to the fourth terminal and the control terminal, and a second circuit electrically connected to the second terminal and the sixth terminal.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0006] FIG. 1 is a diagram for explaining a spin Hall effect.

[0007] FIG. 2 is a diagram showing a storage element of an SOT-MRAM.

[0008] FIG. 3 is an equivalent circuit diagram of a unit cell of an SOT-MRAM.

[0009] FIG. 4 is an equivalent circuit diagram of a unit cell of an SOT-MRAM according to an embodiment.

[0010] FIG. 5 is a diagram for explaining a write method in an SOT-MRAM according to the embodiment.

[0011] FIG. 6 is a diagram for explaining a read method in an SOT-MRAM according to the embodiment.

[0012] FIG. 7 is a diagram for explaining a write method in an SOT-MRAM according to a modification of the embodiment.

[0013] FIG. 8 is a diagram for explaining a read method in an SOT-MRAM according to the modification of the embodiment.

[0014] FIGS. 9 through 16 are plan views illustrating a procedure for manufacturing an SOT-MRAM according to an embodiment.

[0015] FIG. 17 is a cross-sectional view taken along the section line A-A defined in FIG. 16.

[0016] FIG. 18 is a cross-sectional view taken along the section line B-B defined in FIG. 16.

[0017] FIGS. 19A and 19B are diagrams showing the size and the characteristics of a diode.

[0018] FIGS. 20A and 20C are diagrams showing the size and the characteristics of a diode.

[0019] FIGS. 21A and 21B are diagrams showing the size and the characteristics of an MIM diode.

[0020] FIGS. 22A and 22B are diagrams showing the size and the characteristics of an MIM diode.

DETAILED DESCRIPTION

[0021] A magnetic memory according to an embodiment includes: at least one memory cell, the memory cell comprising: a conductive layer including a first terminal, a second terminal, and a portion located between the first terminal and the second terminal; a magnetoresistive element including: a first magnetic layer; a second magnetic layer between the portion and the first magnetic layer; and a nonmagnetic layer between the first magnetic layer and the second magnetic layer; a diode including an anode and a cathode, one of the anode and the cathode being electrically connected to the first magnetic layer; and a transistor including third and fourth terminals and a control terminal, the third terminal being electrically connected to the first terminal.

[0022] The following is a description of an embodiment, with reference to the accompanying drawings.

[0023] First, the background to the development of the present invention is explained before an embodiment of the present invention is described.

[0024] In an MRAM including an MTJ element as a storage element, the magnetization of the reference layer is fixed, and is always oriented in the same direction. On the other hand, the magnetization direction of the storage layer is changeable, and may be parallel or antiparallel to the magnetization direction of the reference layer. When the magnetization directions of the storage layer and the reference layer are parallel to each other, the electrical resistance between the storage layer and the reference layer via the tunnel barrier is low. When the magnetization directions of the storage layer and the reference layer are antiparallel to each other, the electrical resistance is high. This phenomenon in which the resistance value changes with the magnetization directions of magnetic members is called a magnetoresistive effect. An MRAM is a magnetic memory that stores “0” or “1” associated with the magnetization direction of the storage layer of an MTJ element, and reads the stored information about the magnetization direction by using a magnetoresistive effect.

[0025] When writing is performed on an MTJ element, the magnetization of the storage layer is switched. A principle called STT (Spin Transfer Torque) is used as the write method. By this method, current is applied from the storage layer to the reference layer, or from the reference layer to the storage layer, so that the spin moment of the reference layer is applied to the storage layer, and the magnetization direction of the storage layer becomes parallel or antiparallel to the magnetization direction of the reference layer. When current is applied from the storage layer to the reference layer, the spin torque acts in such a direction that the magnetization of the storage layer becomes parallel to the magnetization of the reference layer. When current is applied from the reference layer to the storage layer, the spin torque acts in such a direction that the magnetization of the storage layer becomes antiparallel to the magnetization of the reference layer.

[0026] A problem with STT writing lies in the fact that the tunnel barrier might break at the time of writing, since writing is performed by applying current to the tunnel barrier. Current is also applied at the time of data reading. Therefore, read disturb might occur, since the magnetization of the storage layer is switched by SIT when data is read.

[0027] An SOT-MRAM that switches the magnetization of the storage layer of an MTJ element by using a spin Hall effect or SOT (Spin Orbit Torque) is known as a magnetic memory to solve the above problems. As shown in FIG. 1, a spin Hall effect is a phenomenon in which current is applied to a nonmagnetic layer 10 made of a material with a large spin-orbit interaction so that electrons having spin angular momenta (hereinafter also referred to simply as the spin) of the opposite orientations from each other are scattered in the opposite directions, and a spin current Is is generated. At this point, the spin s, the spin current Is, and the electron stream Ie (of the opposite direction from the current) satisfy the relationship:

Is∝s×Ie  (1)

That is, the spin stream Is is proportional to the outer product of the spin s and the electron stream Ie.

[0028] As shown in FIG. 2, a magnetoresistive element (an MTJ element, for example) 20 is stacked on the above described nonmagnetic layer 10. In this manner, spin torque (SOT) is applied to the storage layer 22 of the MTJ element 20 by virtue of the spin current generated in the nonmagnetic layer 10, and the magnetization of the storage layer 22 can be reversed. The MTJ element 20 includes the storage layer 22, a reference layer 26, and a nonmagnetic insulating layer 24 interposed between the storage layer 22 and the reference layer 26. When the polarity of the current being applied to the nonmagnetic layer 10 is switched, the spin torque (SOT) acting on the storage layer 22 of the MTJ element 20 is also reversed. That is, this current is controlled so that the magnetization direction of the storage layer 22 can be adjusted to a desired direction that is parallel or antiparallel to the magnetization direction of the reference layer 26. An MRAM that performs writing by using this principle is called an SOT-MRAM.

[0029] An SOT-MRAM includes at least one memory cell, and an example of the equivalent circuit of this memory cell 1 is shown in FIG. 3. The MTJ element 20 is stacked on the nonmagnetic layer 10. As shown in FIG. 2, the storage layer 22 of the MTJ element 20 is located on the side of the nonmagnetic layer 10, and the reference layer 26 is disposed on the opposite side from the nonmagnetic layer 10. A transistor 32 is connected to a terminal 10a that is one of the two terminals of the nonmagnetic layer 10, and a transistor 36 is connected to a terminal 20a of the MTJ element 20 on the side of the reference layer 26.

[0030] Meanwhile, a terminal 10b of the nonmagnetic layer 10 on the side to which any transistor is not connected is a common terminal. With this structure, each memory cell of the SOT-MRAM has three terminals, and therefore, two or three transistors need to be connected to each memory cell as shown in FIG. 3. As a result, the area of each memory cell becomes larger, and the smallest limit of the cell size is approximately 12 F.sup.2.

[0031] To counter this, the inventors have made intensity studies, and successfully invented a magnetic memory with a reduced cell size. This magnetic memory is described below as an embodiment.

Embodiment

[0032] A magnetic memory according to an embodiment is an SOT-MRAM that includes at least one memory cell. This memory cell is shown in FIG. 4. The memory cell 1 of this embodiment includes a nonmagnetic layer (conductive layer) 10, a magnetoresistive element 20 disposed on the nonmagnetic layer 10, a transistor 32, and a diode 40. The magnetoresistive element 20 is an MTJ element, for example, and, as shown in FIG. 2, includes a storage layer 22 provided on the nonmagnetic layer 10, a reference layer 26 provided above the storage layer 22, and a nonmagnetic insulating layer 24 interposed between the storage layer 22 and the reference layer 26. The nonmagnetic layer 10 includes two terminals 10a and 10b. The terminal 10b of the nonmagnetic layer 10 is a common terminal. Although an MTJ element is used as the storage element 20 in the above description, the storage element 20 may be a giant magnetoresistive (GMR) element or a magnetoresistive element using a nonmagnetic metal layer in place of the nonmagnetic insulating layer 24.

[0033] The transistor 32 has one terminal of the source and the drain connected to the terminal 10a of the nonmagnetic layer 10, has the other terminal connected to a bit line, and has the gate (also called the control terminal) connected to a write word line.

[0034] The diode 40 has the anode connected to a read word line, and has the cathode electrically connected to the reference layer of the MTJ element 20. Here, “electrically connected” means that the cathode and the reference layer may be connected directly to each other, and some other conductor may exist between the cathode and the reference layer. The diode 40 may be connected in the opposite manner from that shown in FIG. 4. In that case, the cathode is connected to the read word line, and the anode is electrically connected to the reference layer of the MTJ element 20. When the write and read operations described later are performed on a memory cell 1.sub.11 in this case, the same operations as described later can be performed if the polarities of the voltages to be applied to a word line WL2.sub.1 and bit lines BL1.sub.1 and BL2.sub.1 are reversed from the respective polarities of a case where the connections are made as shown in FIG. 4.

[0035] In this embodiment, one diode 40 and one MTJ element 20 are connected to the nonmagnetic layer 10. The transistor 32 is connected to the terminal 10a of the nonmagnetic layer 10, and the diode 40 is connected to the reference layer side of the MTJ element 20. As the diode 40 is a thin-film diode, and the diode 40 and the MTJ element 20 are stacked, the size of the memory cell can be reduced to 6F.sup.2.

[0036] (Write Method)

[0037] Referring now to FIG. 5, a write method in the magnetic memory according to this embodiment is described.

[0038] The magnetic memory shown in FIG. 5 includes 2×2 memory cells 1.sub.11 through 1.sub.22 arranged in a matrix form. Each memory cell 1.sub.ij (i, j=1, 2) includes a nonmagnetic layer 10.sub.ij, a magnetoresistive element 20.sub.ij disposed on the nonmagnetic layer 10.sub.ij, a transistor 32.sub.ij, and a diode 40.sub.ij. Each nonmagnetic layer 10.sub.ij (i, j=1, 2) includes a first terminal 10a and a second terminal 10b.

[0039] The magnetoresistive element 20.sub.ij (i, j=1, 2) is an MTJ element, for example, and has a structure in which a storage layer 22 is disposed on the nonmagnetic layer 10.sub.ij, a reference layer 26 is provided above the storage layer 22, and a nonmagnetic insulating layer 24 is interposed between the storage layer 22 and the reference layer 26, as shown in FIG. 2.

[0040] The transistor 32.sub.ij (i, j=1, 2) has one terminal of the source and the drain connected to the first terminal 10a of the nonmagnetic layer 10.sub.ij, has the other terminal connected to a first bit line BL1.sub.i, and has the gate connected to a first word line WL1.sub.j.

[0041] The diode 40.sub.ij (i, j=1, 2) has the anode connected to a second word line WL2.sub.j, and has the cathode electrically connected to a terminal 26a of the reference layer of the MTJ element 20.sub.ij.

[0042] The second terminal 10b of the nonmagnetic layer 10.sub.ij (i, j=1, 2) is connected to a second bit line BL2.sub.i.

[0043] The first word lines WL1.sub.1 and WL1.sub.2, and the second word lines WL2.sub.1 and WL2.sub.2 are connected to a word line drive circuit 60, and are driven by the word line drive circuit 60. The first bit lines BL1.sub.1 and BL1.sub.2, and the second bit lines BL2.sub.1 and BL2.sub.2 are connected to a bit line drive circuit 70, and are driven by the bit line drive circuit 70. Both the word line drive circuit 60 and the bit line drive circuit 70 conduct write and read operations. The bit line drive circuit 70 includes a driver that applies a write current for performing a write operation to the first bit lines BL1.sub.1 and BL1.sub.2 or to the second bit lines BL2.sub.1 and BL2.sub.2, and a sinker that draws in the write current. The driver is connected to one end of each of the first bit lines BL1.sub.1 and BL1.sub.2 and/or the second bit lines BL2.sub.1 and BL2.sub.2, and the sinker is connected to the other end of each of the first bit lines BL1.sub.1 and BL1.sub.2 and/or the second bit lines BL2.sub.1 and BL2.sub.2.

[0044] A write method in an example case where writing is performed on the memory cell 1.sub.11 is now described. FIG. 5 shows the voltages to be applied to the first and second word lines to be driven by the word line drive circuit 60, and to the first and second bit lines to be driven by the bit line drive circuit 70 when this writing is performed.

[0045] When information “0” or “1” is to be written into the selected memory cell 1.sub.11, current is applied to the nonmagnetic layer 10.sub.11 in one of the directions that are the opposite of each other. For example, when the information “0” is to be written, the bit line drive circuit 70 drives the first bit line BL1.sub.1 and the second bit line BL2.sub.1 to apply current to the memory cell 1.sub.11 from left to right. When the information “1” is to be written, the bit line drive circuit 70 drives the first bit line BL1.sub.1 and the second bit line BL2.sub.1 to apply current to the memory cell 1.sub.11 from right to left. In the case of the “0” write to apply current to the nonmagnetic layer 10.sub.11 of the memory cell 1.sub.11 in FIG. 5, the first bit line BL1.sub.1 is set at high level “H” (activated), and the second bit line BL2.sub.1 is set at low level “L” (inactivated). The first bit line BL1.sub.2 and the second bit line BL2.sub.2, which are not connected to the selected memory cell 1.sub.11, are both set at low level “L”. The first word line WL1.sub.1 connected to the gate of the transistor 32.sub.11 in the selected memory cell 1.sub.11 is set at high level “H”, to switch on the transistor 32.sub.11. The first word line other than the first word line WL1.sub.1, or the first word line WL1.sub.2, is set at low level “L”, to switch off the transistors 32.sub.12 and 32.sub.22. The second word line WL2.sub.1 connected to the diode 40.sub.11 sets the voltage at such a polarity as to apply a reverse bias to the diode 40.sub.11, and apply no current in a direction perpendicular to the film plane of the MT) element 20.sub.11. That is, in a case where the diode 40.sub.11 is connected in the direction shown in FIG. 5, the second word lines WL2.sub.1 and WL2.sub.2 are both set at low level “L”. As the voltages are set in this manner, current flows into the nonmagnetic layer 10.sub.11 of the selected memory cell 1.sub.11 from left to right, and no current flows into the nonmagnetic layers 10.sub.12, 10.sub.21, and 10.sub.22 of the other memory cells 1.sub.12, 1.sub.21, and 1.sub.22.

[0046] Further, to apply current to the nonmagnetic layer 10.sub.11 from right to left so as to write “1” into the selected memory cell 1.sub.11, the potentials of the first bit line BL1.sub.1 and the second bit line BL2.sub.1 are switched, so that the first bit line BL1.sub.1 is set at low level “L”, and the second bit line BL2.sub.1 is set at high level “H”. The voltage of the other wiring lines is set at the same voltage as that in the “0” write operation, so that current flows into the nonmagnetic layer 10.sub.11 of the selected memory cell 1.sub.11 from right to left, and no current flows into the nonmagnetic layers 10.sub.12, 10.sub.21, and 10.sub.22 of the other memory cells 1.sub.12, 1.sub.21, and 1.sub.22.

[0047] (Read Method)

[0048] Referring now to FIG. 6, a read method in the magnetic memory according to this embodiment is described. FIG. 6 shows the voltages to be applied to the first and second word lines to be driven by the word line drive circuit 60, and to the first and second bit lines to be driven by the bit line drive circuit 70 in a read operation in the magnetic memory shown in FIG. 5.

[0049] In the example case described below, information is read from the memory cell 1.sub.11 by the read method of this embodiment. First, the memory cell 1.sub.11 is selected, and current is applied to this selected memory cell 1.sub.11 in the direction of the stacking of the storage layer, the nonmagnetic insulating layer, and the reference layer of the MTJ element. As a result, a forward current flows into the diode 40.sub.11 of the selected memory cell 1.sub.11, but no current flows into the unselected memory cells since a reverse bias is applied to the unselected memory cells. That is, the second write wiring line WL2.sub.1 is set at high level “H”, and the second write wiring line WL2.sub.2 is set at low level “L”, as shown in FIG. 6. Meanwhile, the first word lines WL1.sub.1 and WL1.sub.2 are set at low level “L”, to switch off the transistors 32.sub.11 and 32.sub.22. The first bit line BL1.sub.1 and the second bit line BL2.sub.1, which are connected to the selected memory cell 1.sub.11, are both set at low level “L”. As a result, current can be applied to the MTJ element 20.sub.11 of the selected memory cell 1.sub.11. As for the first bit line BL1.sub.2 and the second bit line BL2.sub.2, which are not connected to the selected memory cell 1.sub.11, the first bit line BL1.sub.2 is set at low level “L”, and the second bit line BL2.sub.2 is set at high level “H”. As the voltages are set in this manner, current can be applied to the MTJ element 20.sub.11 of the selected memory cell 1.sub.11, and data can be read from the MTJ element 20.sub.11.

[0050] As is apparent from the above description, the word line drive circuit 60 and the bit line drive circuit 70 serve as both write circuits and read circuits. The first word lines WL1.sub.1 and WL1.sub.2 serve as write word lines, and the second word lines WL2.sub.1 and WL2.sub.2 serve as read word lines. The first bit lines BL1.sub.1 and BL1.sub.2 serve as normal bit lines, and the second bit lines BL2.sub.1 and BL2.sub.2 serve as common bit lines.

[0051] The voltages to be applied to the respective wiring lines WL1.sub.1, WL1.sub.2, WL2.sub.1, WL2.sub.2, BL1.sub.1, BL1.sub.2, BL2.sub.1, and BL2.sub.2 in the write operation and the read operation shown in FIGS. 5 and 6 are based on the assumption that the select transistors 32.sub.11 through 32.sub.22 are n-channel MOS transistors.

[0052] As described above, this embodiment can provide memory cells with a reduced cell size, and a magnetic memory including the memory cells.

[0053] (Modification)

[0054] Referring now to FIGS. 7 and 8, a magnetic memory according to a modification of this embodiment is described. The magnetic memory of this modification is the same as the magnetic memory of this embodiment shown in FIGS. 5 and 6, except that the diodes 40.sub.11 through 40.sub.22 are replaced with bidirectional diodes 42.sub.11 through 42.sub.22, respectively. These bidirectional diodes 42.sub.11 through 42.sub.22 may be ovonic threshold switches (OTS), for example. FIG. 7 is a diagram showing the voltages to be applied to the first and second word lines, and to the first and second bit lines in a case where writing is to be performed on the memory cell 1.sub.11 of the magnetic memory of this modification. FIG. 8 is a diagram showing the voltages to be applied to the first and second word lines, and to the first and second bit lines in a case where data is to be read from the memory cell 1.sub.11 of the magnetic memory of this modification.

[0055] When the potential difference between the polarities of both sides exceeds a threshold, current can be applied to the bidirectional diodes 42.sub.11 through 42.sub.22. When the potential difference is not larger than the threshold, current is not applied to the bidirectional diodes 42.sub.11 through 42.sub.22.

[0056] As shown in FIG. 7, in setting the voltages in a write operation, the second word lines WL2.sub.1 and WL2.sub.2 to serve as read wiring lines are set at a potential of H/2, so that no current flows thereinto. Here, the potential of H/2 is half the potential of high level “H”. The other aspects are the same as in the case shown in FIG. 5.

[0057] In a read operation, the second word line WL2.sub.2 that is connected to the unselected memory cells and serves as a read wiring line, and the second bit line BL2.sub.2 that is connected to the unselected memory cells and serves as a common bit line are set at H/2, as shown in FIG. 8. The other aspects are the same as in the case shown in FIG. 6.

[0058] Like the embodiment, this modification can also provide memory cells with a reduced cell size, and a magnetic memory including the memory cells.

[0059] (Manufacturing Method)

[0060] Referring now to FIGS. 9 through 16, a method of manufacturing the magnetic memory of this embodiment is described. This manufacturing method is designed to manufacture a magnetic memory that includes memory cells arranged in a matrix fashion as shown in FIG. 5.

[0061] First, as shown in FIG. 9, active regions 110.sub.1 through 110.sub.6 for transistors are formed on a semiconductor layer 100. These active regions 110.sub.1 through 110.sub.6 turn into the source and drain regions of the transistors 32.sub.11 through 32.sub.22 of the memory cells 1.sub.11 through 1.sub.22 shown in FIG. 5. These active regions 110.sub.1 through 110.sub.6 extend in a direction at a predetermined angle Θ with respect to the direction (the transverse direction in the drawing) in which the first bit lines BL1.sub.1 through BL1.sub.4 described later with reference to FIG. 12 extend. This angle Θ is set at approximately tan.sup.−1 (0.5), or approximately 26 degrees. In this manner, the distance between the memory cells can be shortened, and the memory cell size can be reduced.

[0062] As shown in FIG. 10, first word lines WL1.sub.0 through WL1.sub.8 are then formed on the semiconductor layer 100 having the active regions 110.sub.1 through 110.sub.6 formed thereon. These first word lines WL1.sub.0 through WL1.sub.8 are formed in a direction that intersects with or is perpendicular to the direction (the transverse direction in the drawing) in which the first bit lines BL1.sub.1 through BL1.sub.4 described later with reference to FIG. 12 extend, for example.

[0063] As shown in FIG. 11, contacts 120 that connect the transistors in the respective memory cells to the first bit lines BL1.sub.1 through BL1.sub.4 described later with reference to FIG. 12 are then formed. These contacts 120 are disposed in the regions that are located between the first word line WL1.sub.1 and the first word line WL1.sub.2, between the first word line WL1.sub.4 and the first word line WL1.sub.5, and between the first word line WL1.sub.7 and the first word line WL1.sub.8, and intersect with the active regions 110.sub.1 through 110.sub.6.

[0064] As shown in FIG. 12, the first bit lines BL1.sub.1 through BL1.sub.4 extending in a direction that intersects with or is perpendicular to the first word lines WL1.sub.0 through WL1.sub.8 are then formed, for example. These first bit lines BL1.sub.1 through BL1.sub.4 are connected to the active regions 110.sub.1 through 110.sub.6 via the contacts 120.

[0065] As shown in FIG. 13, contacts 125 that connect the transistors in the respective memory cells to the nonmagnetic layers 10 described later are then formed. These contacts 125 turn into the terminals 10a shown in FIG. 5. The contacts 125 are formed in the regions that are located between the adjacent first word lines and connect to the active regions 110.sub.1 through 110.sub.6.

[0066] As shown in FIG. 14, second bit lines BL2.sub.1 through BL2.sub.4 are then formed above the first bit lines BL1.sub.1 through BL1.sub.4, respectively. In FIG. 14, each second bit line BL2.sub.j (j=1, . . . , 4) has a greater width than each corresponding first bit line BL1.sub.j. However, each second bit line BL2.sub.j may have the same width as each corresponding first bit line BL1.sub.j.

[0067] As shown in FIG. 15, the nonmagnetic layers 10.sub.11 through 10.sub.45 of the memory cells are then formed, the MTJ element 20.sub.ij are formed on the respective nonmagnetic layers 10.sub.ij (i=1, . . . , 4, j=1, . . . , 5), and the diodes 40.sub.ij are formed on the respective MTJ elements 20.sub.ij. The nonmagnetic layers 10.sub.11 through 10.sub.45 are indicated by dashed lines, and the MTJ elements 20.sub.11 through 20.sub.45 are indicated by solid lines. The respective diodes 40.sub.ij (i=1, . . . , 4, j=1, . . . , 5) overlap with the MTJ elements 20.sub.ij in the drawing. The respective nonmagnetic layers 10.sub.ij (i=1, . . . , 4, j=1, . . . , 5) are connected to the corresponding contacts 125 and to the corresponding second bit lines BL2.sub.i.

[0068] As shown in FIG. 16, second word lines WL2.sub.j=1, . . . , 5) are then formed to connect to the diodes 40.sub.1j, 40.sub.2j, 40.sub.3j, and 40.sub.4j, which are arranged in the j columns.

[0069] FIG. 17 is a cross-sectional view of the active region 110.sub.2, taken along the section line A-A defined in FIG. 16. The transistors in the memory cells, which are the transistors 32.sub.21, 32.sub.22, and 32.sub.13 shown in FIG. 17, for example, are transistors of a recessed channel array transistor (RCAT) type, or recessed transistors. However, transistors of some other type may be used. The first bit line BL1.sub.2 is connected to one region (an N.sup.+-region) of the source and drain regions of the transistor 32.sub.21 via a contact 120. To the left of this region, the gate wiring line WL1.sub.1 of the transistor 32.sub.21 and the other region of the source and drain regions are located. To the other region, a contact 125, the nonmagnetic layer 10.sub.21, the MTJ element 20.sub.21, the diode 40.sub.21, and the second word line WL2.sub.1 are connected in this order. Meanwhile, the opposite side of the nonmagnetic layer 10.sub.21 is connected to the second bit line BL2.sub.1. The site at which the nonmagnetic layer 10.sub.21 and the second bit line BL2.sub.1 are connected to each other is at a distance from the portion shown in FIG. 17.

[0070] In FIG. 17, the write current path to the MTJ element 20.sub.21 is indicated by a solid line. As the voltages are set as shown in FIG. 5, the write current is applied from the first bit line BL1.sub.2 to the nonmagnetic layer 10.sub.21 via the transistor 32.sub.21, and flows into the second bit line BL2.sub.1. Current can be applied at both polarities, and the information “0” or the information “1” can be written.

[0071] Meanwhile, the read current path is indicated by a dashed line. As the potentials are set as shown in FIG. 6, the read current is applied from the second word line WL2.sub.1 to the second bit line BL2.sub.1 via the diode 40.sub.21, the MTJ element 20.sub.21, and the nonmagnetic layer 10.sub.21.

[0072] FIG. 18 is a cross-sectional view of the second word line WL2.sub.2, taken along the section line B-B defined in FIG. 16. The first bit lines BL1.sub.i (i=1, 2, 3) and the second bit lines BL2.sub.i self-align and form a protection film, so as not to come into electrical contact with the contacts 125.

[0073] (Diode)

[0074] To avoid stray current, a diode preferably has a current ratio of five or more digits between a forward voltage and a reverse bias. Also, to apply a read current, the current at the time of application of a forward voltage of about 1 V is preferably not lower than 1 μA, for example. A simulation was conducted on a schottky diode with such characteristics. FIG. 19A is a diagram showing the shape and the size of the diode used in this simulation. FIG. 19B is a graph showing the simulation results. This simulation was based on the assumption that a schottky barrier was provided at the interface of the anode electrode, and voltage was applied to the cathode to obtain the results. This simulation was also based on the assumption that donors or acceptors were uniformly distributed. As the impurity concentration was adjusted to 1×10.sup.18 cm.sup.−3, a forward current of 1 μA or higher was obtained, in spite of the small element size of 10 nm (0.01 μm)×10 nm (0.01 μm). Also, a current ratio of five digits was obtained between the forward voltage and the reverse bias.

[0075] FIG. 20A shows a thinned schottky diode, and FIGS. 20B and 20C show the results of a simulation on the thinned schottky diode. As can be seen from FIG. 20A, this schottky diode also supposedly has a schottky barrier at the interface of the anode electrode.

[0076] In a case where donors or acceptors are uniformly distributed in silicon (or polysilicon), an increase in the thickness of the silicon (or polysilicon) normally leads to a larger electrical field, if the dopant concentration is high. As a result, current cannot be applied even with the reverse bias. On the other hand, to avoid current application with the reverse bias, it is necessary to lower the dopant concentration. In such a case, however, the current at the time of forward voltage application becomes lower.

[0077] To counter this, a thin high-concentration layer is provided on the cathode side, so that a higher current can be achieved at the time of forward voltage application while the increase in current at the time of reverse bias application is reduced, as shown in FIGS. 20A through 20C.

[0078] In a diode using silicon, annealing at approximately 700 degrees centigrade might be necessary for activation. However, the anneal resistance of the magnetic materials forming an MTJ element is approximately 400 degrees centigrade. Therefore, the characteristics of the magnetic materials might be degraded due to annealing. In view of this, annealing may be performed on a diode on a different substrate from that of an MTJ element, and the substrates may be then joined to each other, to electrically connect the diode to the MTJ element.

[0079] It is also possible to use an MIM (Metal-Insulator-Metal) diode. Referring now to FIGS. 21A through 22B, this aspect is described. To achieve rectifying properties with an MIM diode, electrodes made of materials with different work functions are provided at the metals on both sides of an insulator. FIG. 21A is a perspective view of a first example of an MIM diode. In the MIM diode of the first example, the work functions of the anode electrode and the cathode electrode are 4 eV and 3 eV, respectively, and the thickness tox of the tunnel oxide film is 0.7 nm. FIG. 21B shows the I-V characteristics in this case. Where the element size is 10 nm.sup.2, a current of 1 μA is obtained with a forward voltage, and the current with a reverse bias is approximately five digits lower than the current with the forward voltage.

[0080] FIG. 22A is a perspective view of a second example of an MIM diode. In the MIM diode of the second example, the work functions of the anode electrode and the cathode electrode are 4 eV and 2.3 eV, respectively, and the thickness tox of the tunnel oxide film is 1.1 nm. FIG. 22B shows the I-V characteristics in this case. In a case where the thickness tox of the tunnel oxide film is 1.1 nm as in the second example, the work functions of the anode electrode and the cathode electrode are adjusted to 4 eV and 2.3 eV, respectively, to achieve the necessary characteristics. Because of the restrictions imposed by the simulator used in this example, a device simulation could not be conducted unless a silicon substrate was used. Therefore, a silicon substrate was doped with acceptors at a high concentration, and was regarded as a metal in the simulation.

[0081] As described above, this embodiment can provide memory cells with a reduced cell size, and a magnetic memory including the memory cells.

[0082] While certain embodiments have been described, these embodiments have been presented by way of example only, and are not intended to limit the scope of the inventions. Indeed, the novel methods and systems described herein may be embodied in a variety of other forms; furthermore, various omissions, substitutions and changes in the form of the methods and systems described herein may be made without departing from the spirit of the inventions. The accompanying claims and their equivalents are intended to cover such forms or modifications as would fall within the scope and spirit of the inventions.