Electrochemical device of variable electrical conductance
11250315 · 2022-02-15
Assignee
Inventors
- Valeria Bragaglia (Thalwil, CH)
- Patrick Ruch (Pratval, CH)
- Antonio La Porta (Kilchberg, CH)
- Jean Fompeyrine (Waedenswil, CH)
- Stefan Abel (Zürich, CH)
Cpc classification
H01M50/46
ELECTRICITY
H01G4/33
ELECTRICITY
H01G4/40
ELECTRICITY
H01M4/36
ELECTRICITY
H01G11/02
ELECTRICITY
H01G11/26
ELECTRICITY
H01M4/131
ELECTRICITY
Y02E60/10
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
G11C13/0009
PHYSICS
International classification
G11C13/00
PHYSICS
Abstract
An electrochemical device includes an electrochemical cell and an electric circuit. The electrochemical cell comprises a first solid component and a second solid component. The two solid components comprise same chemical elements but have different concentrations of at least one type of the chemical elements. A solid electrolyte is arranged between the two solid components. The solid electrolyte is a dielectric material. The electric circuit is connected to the electrochemical cell. The electrochemical cell may be operated according to a redox process, so as to exchange chemical elements of the at least one type between the first solid component and the second solid component and thereby change an electrical conductance of each of the two solid components.
Claims
1. An electrochemical device comprising an electrochemical cell including: a first solid component comprising one or more particular chemical elements, wherein a first chemical element of the one or more particular chemical elements is present in a first concentration in the first solid component, a second solid component comprising the one or more particular chemical elements, wherein the first chemical element of the one or more particular chemical elements is present in a second concentration in the second solid component, wherein the first and second concentrations are different, and a first solid electrolyte arranged between the first and second solid components, wherein the first solid electrolyte is a dielectric material; and an electric circuit coupled with the electrochemical cell and configured to operate the electrochemical cell, according to a redox process, to exchange the first chemical element between the first solid component and the second solid component and thereby change an electrical conductance of each of the first and second solid components, wherein the first and second solid components each comprise WO.sub.3.
2. The device of claim 1, wherein: the first and second solid components each comprise a compound of at least two of the one or more particular chemical elements, each of the first and second solid components having a different concentration of one of the at least two chemical elements.
3. The device of claim 1, wherein the electric circuit includes: a first circuit for operating electrochemical cell, the first circuit connecting the first solid component to the second solid component, and a second circuit for sensing an electrical signal, the second circuit having first and second terminals, each terminal connected to the second solid component.
4. The device of claim 3, wherein the electrochemical cell further comprises: a source contact, a drain contact, and a gate contact, wherein each of the source contact and the drain contact is in electrical communication with the second solid component, and the gate contact is in electrical communication with the first solid component, the first circuit connects to each of the source contact and the gate contact, and the second circuit connects to the source contact and the drain contact.
5. The device of claim 4, wherein: the device further comprises a substrate, the second solid component extends on top of the substrate, the source contact and the drain contact are, each, in electrical communication with the second solid component, the first solid electrolyte extends on top of the second solid component, in contact therewith, the first solid component extends on top of the first solid electrolyte, in contact therewith, and the gate contact is arranged on top of the first solid component, in contact therewith.
6. The device of claim 5, wherein: each of the source contact and the drain contact is arranged on top of the second solid component, in contact therewith, and the first solid electrolyte extends between the source contact and the drain contact.
7. The device of claim 5, wherein: the substrate comprises a doped substrate.
8. The device of claim 7, wherein: the electric circuit further includes a third circuit, the third circuit connecting the doped substrate to a ground.
9. The device of claim 7, wherein the electrochemical cell further comprises: a third solid component extending between the doped substrate and the second solid component, wherein the third solid component comprises the one or more particular chemical elements, and the first chemical element of the one or more particular chemical elements is present in a third concentration in the third solid component, wherein the third concentration is different than the second concentration, and a second solid electrolyte extending between the third solid component and the second solid component, the second solid electrolyte in contact with the third solid component and the second solid component.
10. The device of claim 9, wherein: the electric circuit further includes a third circuit, the third circuit connected to the first circuit, thereby connecting the doped substrate to the first circuit.
11. The device of claim 5, wherein: the second solid component is a fin; the source contact and the drain contact each extend on top of the substrate, laterally contacting the fin on each end thereof; and the gate contact, the first solid component, and the first solid electrolyte are at least partly wrapped around a first portion of the fin.
12. The device of claim 11, further comprising: a second gate contact, a component comprising same chemical elements in same concentrations as the first solid component, and a solid electrolyte comprising a same composition as the first solid electrolyte, the second gate contact, the component, and the solid electrolyte at least partly wrapped around a second portion of the fin, spaced away from the gate contact, the first solid component, and the first solid electrolyte that are at least partly wrapped around the first portion of the fin.
13. The device of claim 1, wherein: each of the first solid component and the second solid component is formed as a layer of material.
14. An electrochemical device comprising an electrochemical cell including: a first solid component comprising one or more particular chemical elements, wherein a first chemical element of the one or more particular chemical elements is present in a first concentration in the first solid component, a second solid component comprising the one or more particular chemical elements, wherein the first chemical element of the one or more particular chemical elements is present in a second concentration in the second solid component, wherein the first and second concentrations are different, and a first solid electrolyte arranged between the first and second solid components, wherein the first solid electrolyte is a dielectric material; and an electric circuit coupled with the electrochemical cell and configured to operate the electrochemical cell, according to a redox process, to exchange the first chemical element between the first solid component and the second solid component and thereby change an electrical conductance of each of the first and second solid components, wherein the first solid electrolyte comprises a high-K dielectric material.
15. An electrochemical device comprising an electrochemical cell including: a first solid component comprising one or more particular chemical elements, wherein a first chemical element of the one or more particular chemical elements is present in a first concentration in the first solid component, a second solid component comprising the one or more particular chemical elements, wherein the first chemical element of the one or more particular chemical elements is present in a second concentration in the second solid component, wherein the first and second concentrations are different, and a first solid electrolyte arranged between the first and second solid components, wherein the first solid electrolyte is a dielectric material; and an electric circuit coupled with the electrochemical cell and configured to operate the electrochemical cell, according to a redox process, to exchange the first chemical element between the first solid component and the second solid component and thereby change an electrical conductance of each of the first and second solid components, wherein the first solid electrolyte comprises: HfO.sub.2.
Description
BRIEF DESCRIPTION OF SEVERAL VIEWS OF THE DRAWINGS
(1) The accompanying figures, where like reference numerals refer to identical or functionally similar elements throughout the separate views, and which together with the detailed description below are incorporated in and form part of the present specification, serve to further illustrate various embodiments and to explain various principles and advantages all in accordance with the present disclosure, in which:
(2)
(3)
(4)
(5)
(6) The accompanying drawings show simplified representations of devices or parts thereof, as involved in embodiments. Technical features depicted in the drawings are not necessarily to scale. Similar or functionally similar elements in the figures have been allocated the same numeral references, unless otherwise indicated.
DETAILED DESCRIPTION OF EMBODIMENTS OF THE INVENTION
(7) It has been suggested to use electrochemical devices in place of usual memristive devices for synaptic elements of neuromorphic hardware. Such devices generally have low power budget. However, various difficulties stem from their scalability, the lack of CMOS-compatibility and the allowed control on the reservoir stoichiometry (the reservoir is a component that can provide or store active ions enabling the ECRAM functionality, as a consequence of chemical reactions activated by electrical stimuli). In addition, these devices often rely on liquid electrolytes or organic solid electrolytes, which make them unsuitable for integration in neuromorphic hardware.
(8) Willing to develop suitable electrochemical devices for integration in neuromorphic hardware, the present inventors came to develop various devices, which can satisfactorily be used in neuromorphic hardware. Such solutions are described in detail in the following description.
(9) In reference to
(10) The electrochemical cells 30, 31, 32, 33 include two solid components 11, 12, i.e., a first solid component 11 and a second solid component 12. The two solid components 11, 12 may comprise the same chemical elements, though one or more of the chemical elements may be present in different concentrations in the solid components 11, 12. For example, a particular chemical element is present in a first concentration in solid component 11 and the same particular chemical element is present in a second concentration in solid component 12, wherein the first and second concentrations are different. Thus, the components 11, 12 have different concentrations of at least one type of the chemical elements they have in common. In operation, this may result in a low open circuit voltage. For example, the components 11, 12 may include binary compounds differing in terms of concentration of one element.
(11) The electrochemical cells 30, 31, 32, 33 may also include a solid electrolyte 14 arranged between the two solid components 11, 12. The solid electrolyte is a dielectric material. The solid electrolyte 14 may for example comprise a high-κ dielectric material, e.g., HfO.sub.2 (Hafnium(IV) oxide), wherein oxygen ions are used as intercalation ions, i.e., ions moving between the components 11 and 12. (Kappa in “high-κ” refers to the dielectric constant.) Such ions pass through the electrolyte 14, which plays the role of an ionic conductor, but does not conduct electron current. Using oxygen as intercalation ion makes it possible to circumvent some of the problems posed by the use of Li-based devices, as mostly found in the literature (safety flaws, energy density, etc.).
(12) The electric circuits 110-140 are connected to the electrochemical cells 30, 31, 32. The electric circuit 150 is connected to the electrochemical cells of apparatus 100. The circuits are generally configured to operate the cells according to a redox process. The redox process can be chemical (e.g., in hydrogen atmosphere), or electrochemical (e.g., by applying a negative/positive bias voltage). This causes an exchange chemical elements of said at least one type between the first solid component 11 and the second solid component 12, in operation of the device. This exchange, in turn, causes a change in the electrical conductance of each of the two solid components 11, 12.
(13) Thus, the solid components 11, 12 play the role of a cathode and an anode. As they differ in terms of concentrations of one or more of the chemical elements they have in common, one of the solid components can be converted to the other one by a redox process, in operation of the devices 1-4. That is, one of the solid components is a reduced form of the other, in operation. This can be exploited so as to read out a conductance (or resistance, or changes to such a conductance or resistance) in the second solid component, as in embodiments discussed later.
(14) The devices 1-4 may be fabricated as a multilayer device, see, e.g.,
(15) All this is now described in detail, in reference to particular embodiments of the invention. To start with, the two solid components 11, 12 shall preferably comprise, each, a compound of at least two chemical elements, and have different concentrations of one of the at least two chemical elements. For example, the solid components 11, 12 may comprise exactly two elements. E.g., they may comprise WO.sub.3 (tungsten trioxide). The use of symmetric, WO.sub.3-based solid components makes the device CMOS-compatible and a device can be integrated in the back end of the line (BEOL) of a CMOS process. Incidentally, using WO.sub.3-based solid components is particularly advantageous when using a high-κ dielectric material such as HfO.sub.2, as HfO.sub.2 is a good ion conductor (but not electron conductor), allowing oxygen ions to be suitably (de-)intercalated between the two solid components of WO.sub.3.
(16) In various embodiments, other materials can be contemplated for the solid components 11, 12 and the solid electrolyte 14. For example, the solid components 11, 12 may comprise, each, strontium titanate oxide (SrTiO.sub.3, or STO for short). In variants, they may for example include Perovskites (SrFeO.sub.x, SrCoO.sub.x, CaCrO.sub.x), solid solutions: BaInO.sub.x—BaZrO.sub.x, SrTiO.sub.x—SrCoO.sub.x, other oxides (La.sub.2NiO.sub.4, La.sub.2CuO.sub.4), or non-oxygen-based compounds (such as Li.sub.xCoO.sub.2 and Na.sub.xCoO.sub.4). Moreover, the solid electrolyte 14 may, for instance, comprise Ta.sub.2O.sub.5, or yttrium-doped zirconium oxide (Y:ZrO.sub.2, or YZO), or CeO.sub.2, or a non-oxide oxygen electrolyte (LaF.sub.3), or any other electrolyte suited for the (de-)intercalated species.
(17) In embodiments such as depicted in
(18) The second circuit 120 is provided to sense some electrical signal impacted by the change of electrical conductance that notably occurs in the second solid component 12, in operation of the devices 1-4. Note, the second circuit 120 is closed by the second solid component 12 (also referred to as a “channel” in this document) and is thus impacted by electrical properties of the the second solid component 12. The second circuit 120 may for example be designed to sense a current and thereby read, e.g., a resistance or a conductance, of the second solid component 12. The change of conductance of the channel 12 is due to ions that reached or left the channel 12 due to the redox process; it can be regarded as a non-volatile change of the channel's conductivity.
(19) As shown in
(20) As such, the devices 1-4 can be regarded as a FET-like device (i.e., a device resembling a field-effect transistor), inasmuch as the flow of current can be controlled by the application of a voltage to the gate which may be supplied by the first circuit 110, which in turn alters the conductivity between the drain and the source, as measured by the second circuit 120. In particular, the electrochemical cells 30, 31, 32, 33 can be configured as a three-terminal device 1-4, i.e., a device having three electrical contacts consisting of the source contact 21, the drain contact 23, and the gate contact 22.
(21) In the example of
(22) As seen in
(23) The devices 1-3 are preferably structured as follows. The second solid component 12 extends on top of a substrate 10. The source contact 21 and the drain contact 23 are, each, in electrical communication with the second solid component 12. In addition, the solid electrolyte 14 extend on top of the second solid component 12, so as to contact the latter. Next, the first solid component 11 extends on top of the solid electrolyte 14, in contact therewith. And finally, the gate contact 22 is arranged on top of the first solid component 11, in contact with this component 11. Note, “on top” means “above, and either in contact with or at a distance of.” That is, intermediate layers of additional materials may possibly be needed, provided they do not significantly alter the desired electrical paths. “Above” is in the z direction.
(24) In the example structures shown in
(25) In the examples of
(26) In the example of
(27) In addition, in
(28) In the example of
(29) The cell 32 also includes a second solid electrolyte 16 in this example. That is, two solid electrolytes are provided in that case. The solid electrolyte 16 extends between the third solid component 13 and the second solid component 12. The second electrolyte 16 is in contact with each of the lower layer (the third solid component 13) and the upper layer (the second solid component 12).
(30) Preferably, the electric circuit of the device 3 also includes a third circuit 140. However, contrary to the circuit 130 of
(31) The circuit 140 is meant to operate the device using two gates, i.e., the top gate (based on circuit 110, as in
(32) The embodiment shown in
(33) The substrate is also insulating in this example, at least if only two components 11, 12 are used, which are separated by the electrolyte 14. The need of doped substrate comes into play when additional circuits are present, in order to obtain multi-gates (from the top and bottom or when use is made of the FET function).
(34) Note, however, that the device 4 may optionally comprise several wrapping structures (not shown for the clarity of depiction), each being similar to the wrapping structure shown in
(35) A structure comprising multiple wrapping structures as described above makes it possible to obtain several gates, which are separated from each other. Using several gates allows a higher density to be achieved as it enables a parallel operation of a single fin 12. In particular, this may be used to increase the tunability of synaptic weights, when the device 4 is used in a neuromorphic apparatus. The weight is, in that case, captured by a value of resistance or conductance of the channel 12. The artificial synapse carries a weight for incoming stimuli arriving from the connected nodes and therefore changes the way the signal is further processed/propagated along the nodes. The weight value impacts currents read in output, as explained later in reference to a second aspect of the invention.
(36) Many of the features described in reference to
(37) Referring to
(38) As seen in
(39) Moreover, a readout circuit 160 is provided, which is again connected to the electric circuits (e.g., circuit portions 120 as shown in
(40) Note, in
(41) The apparatus 100 may notably be configured as a neuromorphic apparatus, as assumed in
(42) In the example of
(43) The controller 170 may advantageously be an analog circuit, connected to a first circuit 110 as shown in
(44) A distinct analog circuit 150 can, for instance, be used to couple input signals (e.g., apply voltage biases) into the input lines 155, as indicated in
(45) The readout circuit 160 is configured to read out M output signals (e.g., electrical currents) obtained from the M output lines 165. The readout is typically carried out according to a multiply-accumulate operation, which takes into account signals (e.g., currents or voltages biases) coupled into each of the input lines 155. As per the multiply-accumulate operations performed, values stored on each of the electrochemical devices 4 impact the readout. The multiply-accumulate operation typically results in that signals coupled into the input lines are respectively multiplied by values stored on the devices 4 at the junctions.
(46) Note, the architecture shown in
(47) The weights as stored on the devices 4 are constant for inference purposes (they benefit from the stability of the electrochemical devices 4), whereas they need be iteratively reprogrammed for learning purposes. The computation of the weight updates is normally performed by a processing unit, whereas the crossbar array structure(s) is used to perform all the basic operations needed for the ANN (i.e., matrix vector products for the forward evaluation, products of transposed matrices and error gradient vectors for the backward evaluation, and vector outer products for updating weights), which involve large vector-matrix multiplications. For the learning phase, the analog circuit 170 can be used to re-program the devices 4, so as to alter synaptic weights stored thereon and, this, according to any suitable automatic learning process. However, a structure or neuromorphic device 100 such as shown in
(48) Referring to
(49) In S10 an electrochemical device 1-4, such as described earlier is provided. That is, a device 1-4 is provided, where in the device comprises an electrochemical cell 30, 31, 32, 33 with two solid components 11, 12 that comprise same chemical elements but have different concentrations of one or more of the chemical elements they have in common. The electrochemical cell 30, 31, 32, 33 further comprises a solid electrolyte 14 (a dielectric material) arranged between the two solid components 11, 12. The device additionally includes an electric circuit 110-150 connected to the electrochemical cell.
(50) As illustrated in the flowchart of
(51) In addition, in S30, an electrical circuit is used to sense an electrical signal impacted by the electrical conductance of the channel, i.e., the second solid component 12. The same principle can be exploited for a plurality of devices 1-4, as explained earlier in reference to
(52) While the present invention has been described with reference to a limited number of embodiments, variants and the accompanying drawings, it will be understood by those skilled in the art that various changes may be made and equivalents may be substituted without departing from the scope of the present invention. In particular, a feature (device-like or method-like) recited in a given embodiment, variant or shown in a drawing may be combined with or replace another feature in another embodiment, variant or drawing, without departing from the scope of the present invention. Various combinations of the features described in respect of any of the above embodiments or variants may accordingly be contemplated, that remain within the scope of the appended claims. In addition, many minor modifications may be made to adapt a particular situation or material to the teachings of the present invention without departing from its scope. Therefore, it is intended that the present invention not be limited to the particular embodiments disclosed, but that the present invention will include all embodiments falling within the scope of the appended claims. In addition, many other variants than explicitly touched above can be contemplated. For example, other materials than those explicitly cited herein may be used.