Energy Sensing and Harvesting Cantilever

Abstract

An energy harvesting cantilever formed from multiple curved sections, with each curved section wrapped within the prior curved section but in an opposing direction, is the proposed solution to the problems described above. Such an energy harvesting cantilever favors bending over torsion, can be manufactured at a small scale, and will generate useful electrical energy with low frequency inputs.

Claims

1. A micro-scale energy harvester to capture vibrational energy, the harvester comprising: a. a beam; i. the beam having a substantially planar shape; ii. the beam having a first end and a second end; 1. the first end acting as a fixed end, about which the beam oscillates; 2. the second end acting a free end; iii. the beam formed from at least a first layer; 1. the first layer comprised of piezoelectric material; iv. the beam formed from at least a first turn and a second turn; v. wherein the first turn and the second turn are curved sections of the beam, connected at their respective ends.

2. The harvester of claim 1, further comprising: a. a first electrode in contact with the piezoelectric material; and b. a second electrode in contact with the piezoelectric material; i. the first electrode and second electrode configured in d31 mode wherein the piezoelectric layer is sandwiched between the first electrode and second electrode; c. whereby deflection of the beam causes current flow from the first electrode to the second electrode.

3. The harvester of claim 1, further comprising: a. a first electrode in contact with the piezoelectric material; and b. a second electrode in contact with the piezoelectric material; i. the first electrode and second electrode configured in d33 mode wherein the first electrode and second electrode form an interdigitated pattern on a single side of the piezoelectric layer; c. whereby deflection of the beam causes current flow from the first electrode to the second electrode.

4. The harvester of claim 1, wherein: a. the first electrode and second electrode are formed from a multiplicity of finger-shaped protrusions; i. the multiplicity of finger-shaped protrusions forming a chevron pattern by bending across a centerline of the beam; ii. the chevron pattern resulting in a consistent gap between any two adjacent finger-shaped protrusions of the multiplicity of finger-shaped protrusions; iii. thereby preventing arcing between adjacent finger-shaped protrusions of the first and second electrodes.

5. The harvester of claim 1, further comprising: a. a third turn connected to the second turn; and b. a fourth turn connected to the third turn.

6. The harvester of claim 5, further comprising: a. a fifth turn connected to the fourth turn.

7. The harvester of claim 1, further comprising: a. a second layer comprised of silicon material; b. the second layer parallel to the first layer; and c. the second layer bonded to the first layer.

8. A vibration-sensing device formed from at least one layer of piezoelectric material, the beam having a circular zigzag shape, the device comprising: a. a beam formed from a first turn having first diameter, a second turn having a second diameter, and a third turn having a third diameter; i. each turn having a constant diameter; ii. the diameter of the third turn less than the second diameter, the second diameter less than the first diameter; iii. the third turn joined to the second turn, the second turn joined to the third turn; b. the beam being substantially planar; c. whereby deformation of the beam in a direction perpendicular to the plane causes deformation of the beam, thereby generating electricity.

9. The device of claim 8, further comprising: a. a first electrode in contact with the at least one layer of piezoelectric material; b. a second electrode in contact with the at least one layer of piezoelectric material; and c. the first electrode and second electrode configured in d31 mode wherein the at least one layer of piezoelectric layer is sandwiched between the first electrode and second electrode; d. whereby deflection of the beam causes current flow from the first electrode to the second electrode.

10. The device of claim 8, further comprising: a. a first electrode in contact with the at least one layer of piezoelectric material; b. a second electrode in contact with the at least one layer of piezoelectric material; and c. the first electrode and second electrode configured in d33 mode wherein the first electrode and second electrode form an interdigitated pattern within a single layer; d. whereby deflection of the beam causes current flow from the first electrode to the second electrode.

11. The device of claim 8, wherein: a. the first electrode and second electrode are formed from a multiplicity of finger-shaped protrusions; i. the multiplicity of finger-shaped protrusions forming a chevron pattern by bending across a centerline of the beam; ii. the chevron pattern resulting in a consistent gap between any two adjacent finger-shaped protrusions of the multiplicity of finger-shaped protrusions; iii. thereby preventing arcing between adjacent finger-shaped protrusions of the first and second electrodes.

12. The device of claim 8, further comprising: a. a fourth turn connected to the third turn. b. a fifth turn connected to the fourth turn.

13. The device of claim 8, further comprising: a. a second layer comprised of silicon material; b. the second layer parallel to the at least one layer of piezoelectric material; and c. the second layer bonded to the at least one layer of piezoelectric material.

14. A device that converts mechanical energy into electrical energy, the device comprising: a. a plurality of curved cantilever beams; i. the curved cantilever beams in a nested arrangement; ii. the plurality of curved cantilever beams forming a series of parallel curves; iii. each cantilever beam of the plurality of curved cantilever beams connected to its adjacent cantilever beam at a reversal, each reversal being a point at which the direction of the curve is reversed; b. the plurality of curved cantilever beams formed from at least a first layer of piezoelectric material; c. whereby deformation of the device correspondingly deforms the piezoelectric material, causing the generation of electricity.

15. The device of claim 14, further comprising: a. a first electrode in contact with the first layer of piezoelectric material; b. a second electrode in contact with the first layer of piezoelectric material; and c. the first electrode and second electrode configured in d31 mode wherein the first layer of piezoelectric layer is sandwiched between the first electrode and second electrode; d. whereby deflection of the beam causes current flow from the first electrode to the second electrode.

16. The device of claim 14, further comprising: a. a first electrode in contact with the first layer of piezoelectric material; b. a second electrode in contact with the first layer of piezoelectric material; and c. the first electrode and second electrode configured in d33 mode wherein the first electrode and second electrode form an interdigitated pattern on a single side of the first layer of piezoelectric layer; d. whereby deflection of the beam causes current flow from the first electrode to the second electrode.

17. The device of claim 16, wherein: a. the first electrode and second electrode are formed from a multiplicity of finger-shaped protrusions; i. the multiplicity of finger-shaped protrusions forming a chevron pattern by bending across a centerline of the beam; ii. the chevron pattern resulting in a consistent gap between any two adjacent finger-shaped protrusions of the multiplicity of finger-shaped protrusions; iii. thereby preventing arcing between adjacent finger-shaped protrusions of the first and second electrodes.

18. The device of claim 14, wherein the plurality of curved cantilever beams is four cantilever beams.

19. The device of claim 14, wherein the plurality of curved cantilever beams is five cantilever beams

20. The device of claim 14, further comprising: a. a second layer comprised of silicon material; b. the second layer parallel to the first layer; and c. the second layer bonded to the first layer.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The invention can be best understood by those having ordinary skill in the art by reference to the following detailed description when considered in conjunction with the accompanying drawings in which:

[0030] FIG. 1 illustrates a schematic view of a straight beam.

[0031] FIG. 2 illustrates a schematic view of a curved beam.

[0032] FIG. 3 illustrates a schematic view of a first embodiment.

[0033] FIG. 4 illustrates a schematic view of a second embodiment.

[0034] FIG. 5 illustrates a schematic view of a third embodiment.

[0035] FIG. 6a illustrates a cross-sectional view of a piezoelectric beam of a first type.

[0036] FIG. 6b illustrates a cross-sectional view of a piezoelectric beam of a second type.

[0037] FIG. 7a illustrates an isometric view of a piezoelectric beam of a first type.

[0038] FIG. 7b illustrates an isometric view of a piezoelectric beam of a second type.

[0039] FIG. 8 illustrates a curved beam with a standard electrode pattern.

[0040] FIG. 9 illustrates a schematic view of a chevron electrode pattern.

[0041] FIG. 10 illustrates a schematic view of the first embodiment with a chevron electrode pattern.

[0042] FIG. 11 illustrates a schematic view of the second embodiment with a chevron electrode pattern.

DETAILED DESCRIPTION

[0043] Reference will now be made in detail to the presently preferred embodiments of the invention, examples of which are illustrated in the accompanying drawings. Throughout the following detailed description, the same reference numerals refer to the same elements in all figures.

[0044] Referring to FIG. 1, a schematic view of a straight beam is shown.

[0045] For a better understanding of the benefits of the disclosed invention, a discussion of a typical beam is helpful. Beam 20, has a fixed end 12 affixed at anchor 10. The free end 14 is free to deflect in response to vibration.

[0046] Beam at rest 20a shows the beam 20 location under no load, and beam deflected 20b shows the beam 20 in a deflected position in response to a load. Beam length L is the total distance from the anchor 10 to the tip of the free end 14. Deflection distance d is a measurement of the amount of free end 14 deflection, and t.sub.b is a measurement of the thickness of beam 20. The combination of L, t.sub.b, and d affect the quantity of energy generated by the deflection. An increase in any of these three variables results in an increase of generated energy.

[0047] Referring to FIG. 2, a schematic view of a curved beam is shown.

[0048] Again shown are anchor 10, fixed end 12, and free end 14. By virtue of its shape, the curved beam 20 can fit a greater length L into a smaller space.

[0049] But with the shape of a single, continuous curve, the curved beam 10 creates a new problem of excessive torsion, or twisting. A load applied to the beam 20, even the load of only the beam's weight, results in a continuous increase in torsion, or twisting, along the entire length of the beam 20. The piezoelectric composition of the beam 20 cannot convert torsion into useful energy, thus the continuous spiral shape, or circular spiral shape, is inefficient.

[0050] The solution to the excessive torsion problem is to have the beam turn back on itself, creating multiple shorter beams rather than a single continuous beam. The result is that the deflection manifests as bending rather than twisting, increasing the beam energy conversion efficiency.

[0051] Referring to FIG. 3, a schematic view of a first embodiment is shown.

[0052] The beam 20 has a circular zigzag shape. The segments, or turns, of the beam 20 are curved, taking the form of circles or arcs. But rather than an ever-decreasing diameter, as that of the circular spiral shape in FIG. 2, the turns are of a consistent diameter. At the end of each beam the shape changes direction, or zigzags, at a reversal 16, moving to a larger or smaller diameter, and thus beginning an additional turn or beam segment.

[0053] The beam 20 of the energy harvesting cantilever 1 starts at fixed end 12, which is connected to anchor 10. Beam 20 continues along length L, the beam 20 including multiple reversals 16 along its length before reaching free end 14. The result is a beam 20 of an increased length L as compared to a straight beam, while maintaining a diameter D that is a fraction of beam length L.

[0054] A reversal 16 is a point at which the beam changes direction by substantially 180 degrees, resulting in a subsequent path that is parallel to the previous portion of the beam 20. The result is a series of nested parallel curves of decreasing diameter until the beam 20 reaches the free end 14.

[0055] The reversals 16 in the first embodiment include hard or sharp corners 18. This type of corner maximizes the area of the beam 20, and thus maximizes the area of piezoelectric material available for energy conversion.

[0056] The first embodiment shown in FIG. 3 has four turns or bands. Shown are first turn 51, second turn 52, third turn 53, and fourth turn 54.

[0057] Embodiments with four or five turns are preferred, but other numbers of turns are anticipated.

[0058] Referring to FIG. 4, a schematic view of a second embodiment is shown. The second embodiment of the energy harvesting cantilever 1 is similar to the first embodiment, but with the addition of a fifth turn 55.

[0059] As described above regarding FIG. 3, FIG. 4 discloses a circular zig zag shape.

[0060] The reversals 16 in the second embodiment are also hard or sharp corners 18. This type of corner maximizes the area of the beam 20, and thus maximizes the area of piezoelectric material available for energy conversion.

[0061] Referring to FIG. 5, a schematic view of a third embodiment is shown.

[0062] The reversals 16 in the third embodiment are soft or rounded corners 18. This type of corner reduces stress concentrations at the reversal 16, but does reduce the area of piezoelectric material available for energy conversion.

[0063] Referring to FIG. 6a, a cross-sectional view of a piezoelectric beam of a first type is shown.

[0064] The illustrated configuration is referred to as a d31 mode. In this mode, the piezoelectric layer 40 is sandwiched between a positive electrode 30 and a negative electrode 32. The layers are bonded to a layer of silicon or electrically passive substrate 42. Deflection causes current flow 36 in the piezoelectric layer 40 from negative electrode 32 to positive electrode 30.

[0065] The thickness of the piezoelectric layer 40 is t.sub.pe and the thickness of the silicon 42 is t.sub.s.

[0066] Referring to FIG. 6b, a cross-sectional view of a piezoelectric beam of a second type is shown.

[0067] The illustrated configuration is referred to as a d33 mode. In this mode, the piezoelectric layer 40 is directly affixed to the layer of silicon or electrically passive substrate 42. Deflection causes current flow 36 in the piezoelectric layer 40 from negative electrode 32 to positive electrode 30, but in this configuration the electrodes 30/32 are both affixed to the same surface of the piezoelectric layer 40. Each of these ‘planar’ electrodes 30/32 have a width w, and a gap between electrodes of g.

[0068] As above, the thickness of the piezoelectric layer 40 is t.sub.pe and the thickness of the silicon 42 is t.sub.s.

[0069] Referring to FIG. 7a, an isometric view of a piezoelectric beam of a first type is shown.

[0070] The illustrated configuration is referred to as d31 mode. The beam 20 includes a positive electrode 30, negative electrode 32 with piezoelectric layer 40 between. The beam 20 is affixed at anchor 10.

[0071] A beam 20 constructed with d31 mode electrodes may be curved without a loss of functionality because the electrodes 30/32 are continuous sheets. Thus, an in-plane curve does not affect the electrode shape.

[0072] Referring to FIG. 7b, an isometric view of a piezoelectric beam of a second type is shown.

[0073] The illustrated configuration is referred to as d33 mode. With this isometric view, the positive electrodes 30 and negative electrodes 32 are shown in their interdigitated pattern. An interdigitated pattern is similar to that created by two hands in a single plane, the fingers interlocking with each other without contact. With a straight beam 20, the width w of each electrode and gap g are consistent.

[0074] The beam 20 is affixed at anchor 10.

[0075] A beam 20 constructed with d33 mode electrodes, when curved, no longer operates efficiently because the electrodes 30/32 are individual protrusions. When curved in-plane, the gaps become inconsistent and affect function.

[0076] FIG. 8 illustrates a curved beam with a standard electrode pattern. As shown, the curvature of the beam affects the pattern of the electrodes 30/32. While the electrode width w remains consistent, the gap g does not. Instead, some gaps, such as g.sub.1, are greater than other gaps, such as g.sub.2. The result is inconsistent voltage generation, non-uniform poling of the piezoelectric between the electrodes and potential for electrical shorting and piezoelectric breakdown across the narrower gaps.

[0077] Referring to FIG. 9, a schematic view of a chevron electrode pattern is shown.

[0078] The chevron electrode pattern bends each electrode 30/32, or the finger-shaped protrusions of each electrode 30/32, across the centerline of the beam 20, resulting in consistent gaps g and electrode widths 2.

[0079] Referring to FIG. 10, a schematic view of the first embodiment with a chevron electrode pattern is shown.

[0080] The first embodiment of the energy harvesting cantilever 1 with chevron electrode pattern is shown, this embodiment including first turn 51, second turn 52, third turn 53, and fourth turn 54.

[0081] Also visible are the chevron-shaped electrodes associated with each turn. Specifically, positive electrode 30 and negative electrode 32. The connections between the electrodes 30/32 of each turn are also shown.

[0082] The electrodes 30/32 may be linked to each other in succession, forming a daisy chain arrangement leading to the outermost turn, here the first turn 51. Or the electrodes 30/32 of each turn 51/52/53/54 may be individually connected to the external power measurement device.

[0083] Referring to FIG. 11, a schematic view of the second embodiment with a chevron electrode pattern is shown.

[0084] The second embodiment of the energy harvesting cantilever 1 with chevron electrode pattern is shown, this embodiment including first turn 51, second turn 52, third turn 53, fourth turn 54, and fifth turn 55.

[0085] Also visible are the chevron-shaped electrodes associated with each turn. Specifically, positive electrode 30 and negative electrode 32. The connections between the electrodes 30/32 of each turn are also shown.

[0086] As above, the electrodes 30/32 may be linked to each other in succession, forming a daisy chain arrangement leading to the outermost turn, here the first turn 51. Or the electrodes 30/32 of each turn 51/52/53/55 may be individually connected to the external power measurement device.

[0087] Equivalent elements can be substituted for the ones set forth above such that they perform in substantially the same manner in substantially the same way for achieving substantially the same result.

[0088] It is believed that the system and method as described and many of its attendant advantages will be understood by the foregoing description.

[0089] It is also believed that it will be apparent that various changes may be made in the form, construction, and arrangement of the components thereof without departing from the scope and spirit of the invention or without sacrificing all of its material advantages. The form herein before described being merely exemplary and explanatory embodiment thereof.