Magnetic Spattering Coating Device and Target Device Thereof

Abstract

A target device for a magnetic spattering coating device includes: a spattering target fixture; a target bearing plate installed on the spattering target fixture, for bearing a target; a magnetic pole device fixed on one surface of the spattering target fixture backing toward the target bearing plate, for producing a horizontal magnetic field on one surface of the target. A predetermined interval is formed between the magnetic pole device and corresponding margins of the target bearing plate. The present invention can not only enhances utilization of the target but also makes the thin film deposited on the substrate highly well-distributed.

Claims

1. A target device for a magnetic spattering coating device, comprising: a spattering target fixture; a target bearing plate, installed on the spattering target fixture, for bearing a target; a magnetic pole device, fixed on one surface of the spattering target fixture backing toward the target bearing plate, for producing a horizontal magnetic field on one surface of the target; wherein a predetermined interval is formed between the magnetic pole device and corresponding margins of the target bearing plate.

2. The target device of claim 1, wherein the magnetic pole device moves backwards and forwards between a first predetermined spot outside left margins of the target bearing plate and a second predetermined spot outside right margins of the target bearing plate.

3. The target device of claim 2, wherein the magnetic pole device moves backwards and forwards between a first predetermined spot outside left margins of the target bearing plate and a second predetermined spot outside right margins of the target bearing plate.

4. The target device of claim 2, wherein a interval between the left margins of the target bearing plate and the first predetermined spot is settled as a first interval, a interval between the right margins of the target bearing plate and the second predetermined spot is settled as a second interval, and the width of the first interval is equal to the width of the second interval.

5. The target device of claim 3, wherein a interval between the left margins of the target bearing plate and the first predetermined spot is settled as a first interval, a interval between the right margins of the target bearing plate and the second predetermined spot is settled as a second interval, and the width of the first interval is equal to the width of the second interval.

6. The target device of claim 4, wherein a first accelerating/decelerating segment, an average speed segment, and a second accelerating/decelerating segment are arranged in order from the first predetermined spot to the second predetermined spot between the first predetermined spot and the second predetermined spot; the first accelerating/decelerating segment being opposite to the first interval, the average speed segment being opposite to an area occupied by the target bearing plate, and the second accelerating/decelerating segment being opposite to the second interval.

7. The target device of claim 5, wherein a first accelerating/decelerating segment, an average speed segment, and a second accelerating/decelerating segment are arranged in order from the first predetermined spot to the second predetermined spot between the first predetermined spot and the second predetermined spot; the first accelerating/decelerating segment being opposite to the first interval, the average speed segment being opposite to an area occupied by the target bearing plate, and the second accelerating/decelerating segment being opposite to the second interval.

8. The target device of claim 6, wherein the first accelerating/decelerating segment faces toward the first interval, and the width of the first accelerating/decelerating segment is equal to the width of the first interval.

9. The target device of claim 7, wherein the first accelerating/decelerating segment faces toward the first interval, and the width of the first accelerating/decelerating segment is equal to the width of the first interval.

10. The target device of claim 8, wherein the second accelerating/decelerating segment faces toward the second interval, and the width of the second accelerating/decelerating segment is equal to the width of the second interval.

11. The target device of claim 9, wherein the second accelerating/decelerating segment faces toward the second interval, and the width of the second accelerating/decelerating segment is equal to the width of the second interval.

12. The target device of claim 1, wherein the target bearing plate is fabricated from copper.

13. A magnetic spattering coating device comprising a target device, the target device comprising: a spattering target fixture; a target bearing plate, installed on the spattering target fixture, for bearing a target; a magnetic pole device, fixed on one surface of the spattering target fixture backing toward the target bearing plate, for producing a horizontal magnetic field on one surface of the target; wherein a predetermined interval is formed between the magnetic pole device and corresponding margins of the target bearing plate.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0017] For better understanding embodiments of the present invention, the following detailed description taken in conjunction with the accompanying drawings is provided. Apparently, the accompanying drawings are merely for some of the embodiments of the present invention. Any ordinarily skilled person in the technical field of the present invention could still obtain other accompanying drawings without use laborious invention based on the present accompanying drawings.

[0018] FIG. 1 is a schematic diagram of a magnetic spattering coating device according to a preferred embodiment of the present invention.

[0019] FIG. 2 is a schematic diagram of the target device according to the preferred embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0020] The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification. The drawings illustrate embodiments of the invention and, together with the description, serve to explain the principles of the invention.

[0021] For clarify, thicknesses of the layers and areas in the drawings are exaggerated. The invention is described below in detail with reference to the accompanying drawings, wherein like reference numerals are used to identify like elements illustrated in one or more of the figures thereof, and in which exemplary embodiments of the invention are shown.

[0022] The terms “first” or “second”, as used herein, are defined as one or more than one. The term “another”, as used herein, is defined as at least a second or more.

[0023] FIG. 1 is a schematic diagram of a magnetic spattering coating device according to one preferred embodiment of the present invention.

[0024] As FIG. 1 shows, the magnetic spattering coating device comprises a vacuum cavity 10, a target device 20, and a substrate bearing device 30. The target device 20 and the substrate bearing device 30 are installed in the vacuum cavity 10. The target device 20 is arranged opposite the substrate bearing device 30. The substrate bearing device 30 is used for bearing a substrate 40 waiting to be coated with a thin film. The target device 20 is used supplying spattering material. The spattering material is deposited on the substrate 40 and forms a thin film.

[0025] The target device 20 is arranged on the ceiling of the vacuum cavity 10, and the substrate bearing device 30 is arranged on the bottom of the vacuum cavity 10 in this embodiment. But it does not mean that the invention is limited. For example, the target device 20 is arranged inside the vacuum cavity 10 at the left side, and the substrate bearing device 30 is arranged inside the vacuum cavity 10 at the right side. The embodiment of the present invention details the target device below.

[0026] FIG. 2 is a schematic diagram of the target device according to the preferred embodiment of the present invention.

[0027] As FIG. 2 shows, the target device 20 comprises a spattering target fixture 21, a target bearing plate 22, and a magnetic pole device 23.

[0028] Specifically, the target bearing plate 22 is installed on the spattering target fixture 21. The target bearing plate 22 is used for bearing a target 24. The target bearing plate 22 is fixed on the spattering target fixture 21 in any appropriate fixing method in this embodiment.

[0029] The magnetic pole device 23 is fixed on one surface of the spattering target fixture 21 backing toward the target bearing plate 22. The magnetic pole device 23 is used for producing a horizontal magnetic field on one surface of the target 24.

[0030] Preferably, the magnetic pole device 23 is a magnet in this embodiment while it is not a limitation to the present invention. The magnetic pole device 23 moves backwards and forwards between a first predetermined spot outside left margins of the target bearing plate 22 and a second predetermined spot outside right margins of the target bearing plate 22. The magnetic pole device 23 (that is, a solid box as shown in FIG. 2) is set as the first predetermined spot, and a dotted box as shown in FIG. 2 is set as the second predetermined spot. Further, the magnetic pole device 23 moves backwards and forwards between the first predetermined spot and the second predetermined spot.

[0031] A interval between the left margins of the target bearing plate 22 and the first predetermined spot is settled as a first interval. A interval between the right margins of the target bearing plate 22 and the second predetermined spot is settled as a second interval. Further, the width of the first interval is equal to the width of the second interval.

[0032] Previous studies have shown that three segments will be formed between the first predetermined spot and the second predetermined spot when the magnetic pole device 23 moves backwards and forwards in a linear manner between the first predetermined spot and the second predetermined spot. The three segments are segmented according to the moving speed of the ions of the bombardment target 24 in each of the segments. Specifically, a first accelerating/decelerating segment 23a, an average speed segment 23b, and a second accelerating/decelerating segment 23c are arranged in order from the first predetermined spot to the second predetermined spot. The moving speed of the ions of the bombardment target in the first accelerating/decelerating segment 23a and the second accelerating/decelerating segment 23c is smaller than the moving speed of the ions of the bombardment target in the average speed segment 23b.

[0033] The first accelerating/decelerating segment 23a is opposite to the first interval between the first predetermined spot and the left margins of the target bearing plate 22. The average speed segment 23b is opposite to the area occupied by the target bearing plate 22. The second accelerating/decelerating segment 23c is opposite to the second interval between the second predetermined spot and the right margins of the target bearing plate 22.

[0034] Further, the first accelerating/decelerating segment 23a faces toward the first interval between the first predetermined spot and the left margins of the target bearing plate 22. The average speed segment 23b faces toward the area occupied by the target bearing plate 22. The second accelerating/decelerating segment 23c faces toward the second interval between the second predetermined spot and the right margins of the target bearing plate 22.

[0035] When the ions of the bombardment target 24 bombard the target 24, the target bearing plate of the bombardment target 24 is opposite to the 23b, and the moving speed of the ions of the bombardment target 24 is equal in the average speed segment 23b. Since the ions of the bombardment target 24 bombard the surface of the entire target 24 with equal energy, the ions of the bombardment target 24 is well-distributed on the surface of the bombardment target 24 and the material on the entire surface of the target 24 is equally consumed. In this way, the material on the two terminals of the target 24 is not consumed faster than the material on the middle of the target 24 is. It not only raises utilization of the target 24 but also makes the thin film deposited on the substrate highly well-distributed.

[0036] In addition, the width of the first accelerating/decelerating segment 23a is equal to the width of the first interval between the first predetermined spot and the left margins of the target bearing plate 22. The width of the average speed segment 23b is equal to the width of the target bearing plate 22. The width of the second accelerating/decelerating segment 23c is equal to the width of the second interval between the second predetermined spot and the right margins of the target bearing plate 22.

[0037] The target bearing plate 22 is fabricated from copper in this embodiment because copper has characteristics of excellent electrical conductivity and a higher melting point. But it is not a limitation to the present invention. In other words, the target bearing plate 22 can be fabricated from other kinds of materials as long as the materials have excellent electrical conductivity and a higher melting point.

[0038] In this embodiment, the target bearing plate 20 is arranged in the vacuum cavity 10. Based on this, the spattering target fixture 21 on the opposite side of the surface of the target bearing plate 22 is arranged on the ceiling of the the vacuum cavity 10. Also, the target bearing plate 22 of the bombardment target 24 faces toward the substrate bearing device 30 of the substrate 40.

[0039] While the present invention has been described in connection with what is considered the most practical and preferred embodiments, it is understood that this invention is not limited to the disclosed embodiments but is intended to cover various arrangements made without departing from the scope of the broadest interpretation of the appended claims.