SIZE SELECTED CLUSTERS AND NANOPARTICLES
20220238319 · 2022-07-28
Inventors
- Paul SCHEIER (Innsbruck, AT)
- Felix LAIMER (Innsbruck, AT)
- Lorenz KRANABETTER (Aarhus C, DK)
- Fabio ZAPPA (Innsbruck, AT)
- Michael RENZLER (Innsbruck, AT)
- Lukas THIEFENTHALER (Innsbruck, AT)
- Simon ALBERTINI (Zürich, CH)
- Paul MARTINI (Stockholm, SE)
- Siegfried KOLLOTZEK (Innsbruck, AT)
Cpc classification
H01J27/205
ELECTRICITY
H01J49/0054
ELECTRICITY
International classification
Abstract
Method for producing multiply-charged helium nanodroplets and charged dopant clusters and nanoparticles out of the helium nanodroplets, the method comprising: producing neutral helium nanodroplets in a cold head (1) via expansion of a pressurized, pre-cooled, supersonic helium beam of high purity through a nozzle (3) into high vacuum with a base pressure under operation preferably below 20 mPa, ionizing the helium nanodroplets by electron impact (15), wherein the electron impact (15) leads to multiply-charged helium nanodroplets, doping the charged helium nanodroplets with dopant vapor in the pickup cell (19), wherein the doped nanodroplets form cluster ions with the initial charges acting as seeds, wherein the size of the nanoparticles can vary from a few atoms up to 105 atoms by arranging the size of the neutral helium nanodroplets, the charge of the helium nanodroplets and the density of dopant vapor in the pickup cell (19).
Claims
1. A method for producing multiply-charged helium nanodroplets and charged dopant clusters and nanoparticles out of the helium nanodroplets, the method comprising: producing neutral helium nanodroplets in a cold head via expansion of a pressurized, pre-cooled, supersonic helium beam of high purity through a nozzle into high vacuum, ionizing the helium nanodroplets by electron impact, wherein the electron impact leads to multiply-charged helium nanodroplets, doping the charged helium nanodroplets with dopant vapor in the pickup cell, wherein the doped nanodroplets form cluster ions with the initial charges acting as seeds, wherein the size of the nanoparticles can vary from a few atoms up to 10.sup.5 atoms by arranging the size of the neutral helium nanodroplets, the charge of the helium nanodroplets, and the density of dopant vapor in the pickup cell.
2. The method according to claim 1, characterized by a mass selection of the charged helium nanodroplets by an energy filter via mass-per-charge selection with an electrostatic field, wherein the charged nanodroplets are mass-selected before they get doped.
3. The method according to claim 1, wherein the pressurized high purity helium enters the cold head through a gas line, wherein the helium is pre-cooled by contact with the first cooling stage of the cold head (1) to a between about 35 and 50 K.
4. The method according to claim 1, characterized by a temperature of 4.2 to 10 K in a second cooling stage of the cold head, where the helium nanodroplets are formed after passing through the nozzle, wherein the formation occurs via fragmentation of the helium, leading to droplets containing up to several trillion helium atoms.
5. The method according to claim 1, characterized by an electron beam as the electron impact source, which ionizes the neutral helium nanodroplet beam by crossing it.
6. The method according to claim 2, wherein a polarity reversal of the quadrupole bender directs the charged helium nanodroplet beam in the direction of a secondary electron multiplier for ion current determination instead of in the direction of the pickup cell.
7. The method according to claim 1, wherein excess helium is evaporated by collision induced dissociation in an ion guide filled with helium gas, wherein the charged clusters are liberated from the nanodroplets.
8. The method according to claim 1, wherein the large, size-selected nanoparticles containing more than 10.sup.4 atoms get deposed on a surface, preferably via soft-landing with the nanoparticles inside the helium nanodroplets.
9. An apparatus for producing multiply-charged helium nanodroplets and charged dopant clusters and nanoparticles, comprising: a helium droplet source, an ion source and a pickup cell, characterized in that the ion source comprises a differentially pumped vacuum chamber comprising an electron impact ion source, preferably an energy filter, and focusing lenses, wherein the ion source is directly mounted to the helium droplet source.
10. The apparatus according to claim 9, wherein a vacuum tight shutter separates the helium droplet source and the ion source.
11. The apparatus according to claim 9, further comprising a collision cell with an ion guide and a gas inlet, wherein the ion guide is directly mounted to the outlet of the pickup cell.
12. The apparatus according to claim 9, further comprising a second electron impact source, wherein the second electron impact source is directly mounted to the outlet of the pickup cell.
13. The apparatus according to claim 9, further comprising a secondary electron multiplier in the differentially pumped vacuum chamber of the ion source, wherein the secondary electron multiplier is arranged opposite of the pickup cell preferably with the energy filter in between.
14. The apparatus according to claim 13, further comprising a conversion dynode placed in front of the secondary electron multiplier.
15. The apparatus according to claim 9, further comprising an oven and two heat shields in the pickup cell, wherein the nanodroplet beam runs through the middle of the oven, wherein the heat shields are constructed such that they protect the pickup cell from heat and wherein the oven is preferably ohmically heated and can reach preferably up to 1500 K.
16. The apparatus according to claim 9, wherein the helium droplet source comprises a cold head preferably with an inline filter, a vacuum chamber with a pumping array, a nozzle, a skimmer, and a gas line, wherein the skimmer is located at the transition of the helium droplet source to the ion source.
17. The method according to claim 1, wherein the pressurized high purity helium has a base pressure under operation below 20 mPa.
18. The method according to claim 2, wherein the energy filter is a quadrupole bender.
19. The method according to claim 5, wherein the electron beam current is between 1 μA and 2 mA, wherein the electron energy can be adjusted from close to zero eV to up to 200 eV.
20. The method according to claim 7, wherein excess the ion guide is a RF-hexapole ion guide.
Description
DETAILED DESCRIPTION AND PREFERRED EMBODIMENTS
[0072] The foregoing and other objects, features, and advantages of the invention will become more apparent from the following detailed description, which proceeds with reference to the accompanying figures.
[0073]
[0074]
[0075]
[0076]
[0077]
[0078]
[0079] Furthermore, the cold head 1 is part of a closed cycle helium cryostat.
[0080]
[0081] Moreover,
[0082] The neutral nanodroplet beam runs from the skimmer 7 to the electron impact ion source 15, where it gets charged. Then, the charged helium nanodroplets enter the energy filter 16, where they get selected according to their mass per charge ratio. The selected nanodroplets are then directed by an array of focusing lenses 17 to the pickup cell 19, where they are doped. After leaving the pickup cell 19, the doped nanodroplet beam enters the collision cell realized by an RF ion guide 20.
[0083] Further, a secondary electron multiplier 18 may be located at the left-hand side of the differentially pumped vacuum chamber of the ion source as shown in
[0084] In
[0085] The pickup cell 19 may contain an oven and two heat shields and the nanodroplet beam runs through the middle of the oven. For refractory materials, intense lasers can be used for the evaporation. If gases or liquids are used as dopants in the pickup cell, no oven is needed and the pickup cell is just heated up slightly.
[0086] In
[0087] The same dopant cluster ions formed upon electron ionization of neutral doped helium droplets are shown in the lower diagram in
[0088] For the method according to the invention up to several thousand dopant cluster ions are formed in every droplet compared to only one cluster for the conventional method using neutral doped helium nanodroplets. Furthermore, cluster sizes that can hardly be made with conventional methods due to their reduced stability, such as cluster containing ten gold atoms in the example in
[0089]
[0090]
[0091]
[0092] By comparing
[0093] The production of helium droplets from pre-cooled supersonic beams is a well-established technique, but depends a lot on the special design. A preferred embodiment of the helium droplet source is shown in
[0094] The ultra-pure helium gas expands continuously through a nozzle 3 into the vacuum chamber 14a evacuated with a pumping array 12. The nozzle 3 may be made up of 90 to 98 wt % platinum and the rest iridium. The diameter of the nozzle 3 may range from 2 to 10 μm. Preferably, the pumping array 12 consists of a turbomolecular pump, which is backed by roughing pump maintaining a base pressure under operation in the range of 5 to 20 mPa. The turbomolecular pump may be a Pfeiffer TPU 1600 with a pumping speed of 1450 l/s for helium and the roughing pump, which might also be oil free, is for example a Pfeiffer ACP 40. Without helium, the residual gas pressure is 10.sup.−7 Pa.
[0095] The temperature of the helium before expansion is measured with a silicon diode 8 attached closely to the nozzle 3 on the nozzle block 2 and used as an input for a PID regulator that controls a heater 5. The heater 5 allows to control the temperature of the second cooling stage 1b of the cold head between 4.2 and 25 K preferably with ±0.1 K precision. The silicon diode 8 could be for example a Lakeshore DT-670 with CU package. The PID regulator is for example a Lakeshore Temperature Controller Model 335 and the heating resistor 5 could be a Ohmite Resistor 825F25RE, 25 Ω. As will become clear in the next paragraph, the control of the temperature in the second cooling stage 1b of the cold head 1, where the nanodroplets are formed, allows to control the size of the helium nanodroplets.
[0096] The expanding plume, where the helium droplets are formed, passes through a skimmer 7 positioned preferably about 5 mm from the nozzle 3. Preferably, the skimmer 7 has an orifice diameter of 0.5 mm. The skimmer 10 allows to protect the helium nanodroplet beam from the shock front, which emerges from the wall of the vacuum chamber. In order to optimize the throughput of helium nanodroplets the dimensions of the nozzle 3 and the skimmer 7 as well as their distance are of great importance. The inventive array of skimmer 7 and nozzle 3, depicted also in
[0097] Furthermore, the droplet formation in the expanding plume is highly dependent on the temperature of the gas and stagnating pressure. For temperatures from 10 to 25 K, the formation may occur via subcritical expansion, where the helium is still gaseous when it passes the nozzle 3, leading to droplets containing up to 10.sup.4 helium atoms. For temperatures from 4.2 to 10 K, the droplets are formed via fragmentation of the helium that liquefies near the nozzle 3, resulting in sizes up to several trillion helium atoms. Thus, the low temperature regime allows to produce the large helium nanodroplets, which contain multiply charges after getting ionized in the electron impact source.
[0098] Thermal contraction of the cold head 1 when cooling from room temperature to a few Kelvin may lead to a lateral displacement of the nozzle 3 with respect to the opening of the skimmer 7. In order to compensate for this effect, the complete cold head 1 is placed moveable on a Viton ring and can be shifted with two orthogonal pairs of adjusting screws 11.
[0099] After passing the skimmer 7, the neutral helium nanodroplet beam enters the ion source chamber 14b. The ion source comprises a differentially pumped vacuum chamber 14b. This chamber may contain an electron impact ion source 15, an energy filter 16 to select or scan the charged droplets with respect to their mass-per-charge ratio (m/z), a channel electron multiplier detector 18 to measure the yield of the charged droplets and to determine droplet size (m/z) distributions. For intense ion yields, a conversion dynode in front of the secondary electron multiplier 18 can be operated as a Faraday cup. The conversion dynode helps to prevent a gas accumulation in the detector 18.
[0100] The ion source is kept preferably at pressures around 10.sup.−4 Pa by a 700 l/s turbomolecular pump backed with an oil-free roughing pump. The neutral nanodroplet beam may be crossed with an electron beam. This electron impact source 15 in the ion source chamber 14b is placed beneath the skimmer 7. Thus, a high production rate of ions is obtained, which requires a perfect overlap of electron beam and helium nanodroplet beam. The electron beam current used for the inventive apparatus preferably ranges between 1 μA to 2 mA and the electron energy can be adjusted for optimal ion signal from close to zero eV up to 200 eV, with an energy spread of about ±0.5 eV. The electron energies at about 2 eV and 22 eV are most suitable for obtaining negatively charged droplets.
[0101] The ionization cross sections of the helium droplets above ionization threshold are known to scale approximately as the geometrical cross section, which can be up to several thousand square nanometers. Therefore, large droplets can be ionized multiple times when sufficiently high electron currents are used.
[0102] Being charged species, the trajectories of the helium droplets can now be manipulated using electromagnetic fields. The fact that the droplets obtained from a supersonic beam exhibit a very narrow velocity spread, permits mass selection with electrostatic fields. Several geometries are possible, like parallel plates, cylindrical or spherical sector fields. A configuration that proved particularly useful is that of the quadrupole bender 16. With such a configuration as depicted in
[0103] Opposite of the electron multiplier detector 18, there is the pickup cell 19 for dopant vapor. The quadrupole bender 16 directs the mass-per-charge selected helium droplet beam with the help of an array of focusing lenses 17 towards the pickup cell 19.
[0104] For dopants that have a low vapor pressure like for example gold, the fullerene C.sub.60 or serine, an ohmically heated oven that can reach more than 1500 K is used for the inventive apparatus. This pick-up cell 19 consists of this oven and two heat shields, designed to protect the rest of the apparatus from the heat without sacrificing pumping speed. The oven is preferably made of two concentric SHAPAL-M ceramic tubes of 20 mm in length, aligned coaxially with the nanodroplet principal trajectory. The ceramic tubes have a high thermal conductivity. The inner tube has preferably an inner diameter of 10 mm, where a small amount of sample can be introduced. Around this tube, a tantalum wire of 1 mm diameter is wrapped in a helical shape. The outer ceramic tube holds the tantalum wire in place around the inner tube. Heat is obtained by applying current to the tantalum wire. The inventive oven allows to bring also hardly fusible materials like metals in the gas phase and can be reused. Moreover, the geometry of the oven allows on the one hand the helium droplet beam trajectory to go through the middle of the oven and on the other hand that no metal is condensed at the walls of the oven. When using gold as a dopant, enough vapor pressure is obtained at moderate heating power slightly above 100 W.
[0105] Each charged center in the helium nanodroplets acts as a seed for cluster growth. Thus, every large droplet is able to breed a huge number of dopant clusters simultaneously.
[0106] Furthermore, the collision of a dopant with the massive helium nanodroplet and its agglomeration to a charged dopant cluster releases energy into the surrounding helium matrix. For example, in the case of gold, the binding energy of each atom to a gold cluster is in the order of 2.6 eV to 4.7 eV. Taking the binding energy of a helium atom to a droplet as typically 0.6 meV, every addition of a gold atom is expected to result in the loss of 5000-8300 helium atoms. Since the initial number of atoms in a given droplet can be easily larger than 10.sup.8, its size is largely unaltered by the pickup events. When the desired application of the inventive apparatus is deposition of the aggregates on a surface, helium does not pose any problems and the device can be operated as is. However, when the aim of the apparatus according to the invention is to produce a beam of low-mass ions, it becomes important to shake off excess helium atoms.
[0107] For this purpose, the helium nanodroplet beam may enter the collision cell equipped with a gas inlet and an ion guide 20 after passing through the pickup cell 19. The ion guide 20 is preferably a RF-hexapole ion guide. In order to prevent exchange of adsorbed helium with other solvents, ultra-clean helium with preferably 99.9999% purity, which can be additionally purified in a filter, may be used. The gas flow can be controlled to maintain a differentially pumped, adjustable constant pressure, at room temperature. Evaporation of the droplets is expected due to their collisions with the gas and therefore as a function of the pressure. The RF-hexapole potential confines the ion beam in the axial direction as the droplets shrink and low-mass ions are liberated from it. The RF-hexapole 20 operates with a DC component on its axis that determines the potential energy of the clusters when evaporation of the helium droplet is completed. This DC potential energy therefore translates into the kinetic energy of the ions through the rest of the apparatus and it can be adjusted to obtain a beam of desired characteristics, such as surface deposition or mass analysis in a TOF mass spectrometer. Moreover, adding traces of another gas to the helium provides the possibility to solvate cluster ions with a small number of a given atom or molecule. In the case of biomolecular clusters, microsolvation with water is an important issue and often very difficult to achieve.
[0108] In order to determine the exact composition of low-mass cluster ions produced with the inventive apparatus, the exit of the guiding hexapole 20 is coupled to the entrance ion guide of a commercial Q-TOF Ultima mass spectrometer. This machine is equipped with a quadrupole mass filter that can be used to select the ions to enter yet another differentially pumped collision cell, as well as an orthogonal-extraction reflectron TOF mass spectrometer. All mass spectra presented in the following section were obtained utilizing this instrument.
EXAMPLES
[0109] In the following a few examples are discussed, where the size of the helium nanodroplets is relatively small, that is they contain below 10.sup.7 helium atoms. This is due to the fact that the TOF-mass spectrometer, which measures the ion signal in the end, can only operate at conditions that do not produce count rates of cluster ions exceeding 5000 cps, as otherwise the ion signal would be saturated.
[0110] Mass or size per charge distributions of charged droplet beams are measured by scanning the voltages applied to the rods of the quadrupole bender. The yield of charged droplets is measured with the secondary electron multiplier.
[0111] By measuring size per charge distributions for a wide range of source temperatures (4.4 K to 12 K) and electron ionization conditions (electron energy from 0 eV to 300 eV and electron current from 1 μA to 2 mA), information on the charged helium droplets before passing the pickup cells can be obtained when switching the polarity of the quadrupole bender.
A. Example 1
Gold Cluster Ions
[0112] Gold is vaporized in the oven in the pickup cell at temperatures around 1230 K. The first captured gold atoms will be attracted by the charged centers that are expected to be tightly bound He.sub.3.sup.+ cores, surrounded by a dense layer of helium atoms. Ion induced dipole interaction prevents helium atoms in this first layer to change their positions which is equivalent to a solid phase. Thus, such charged centers are often referred to as Atkins snowballs. The high potential energy of these charged centers efficiently leads to charge transfer to the first gold atom. Further neutral gold atoms will be attracted by a charged gold complex, which results in the growth of a gold cluster ion.
[0113] The average kinetic energy a gold atom transfers to the helium droplet via inelastic collisions is around 0.5 eV and the binding energy of one gold atom to a cluster is about 4.7 eV for clusters containing more than 30 atoms. This results in the evaporation of about 8000 helium atoms. For large droplets containing billions of helium atoms this mass loss is negligible, but for smaller droplets it will result in a substantial reduction of the capture cross section. Thereby, further pickup of gold becomes less likely and self-terminates the cluster growth.
[0114] The presence of more than one charge in a helium droplet leads to minimum energy configurations in the form of Coulomb crystals and the uniform separation of the charged centers leads to a uniform cluster growth, resulting in a narrow size distribution of the dopant clusters.
[0115] Except for really high gold pressure in the pickup cell, most gold cluster ions are still embedded in the large helium droplet. In an RF-hexapole filled with helium, this excess helium can be removed. Depending on the pressure and collision energy set, it is possible to liberate cluster ions with a few helium atoms still attached.
[0116] The total ion yield of pure gold cluster obtained with the apparatus according to the invention is more than two orders of magnitude higher than with a conventional apparatus where neutral droplets are doped with gold and ionized by electron impact and for helium tagged gold cluster ions, this factor increases up to 5000.
[0117] In the upper diagram of
B. Example 2
Fullerene Cluster Ions
[0118] The same inventive oven as above can also be utilized to vaporize fullerenes that are then picked up by size-per-charge selected helium nanodroplets. The maximum yield of fullerene ions with helium attached by electron ionization of neutral helium nanodroplets doped with C.sub.60 was below 1% of the yield of the bare ion.
[0119] With the apparatus according to the invention it is also possible to produce fullerene cluster ions with helium attached which provides for the first time a possibility for action spectroscopy of such ions.
[0120] Moreover, water or any other volatile molecule can be attached to ions embedded in large helium nanodroplets by adding trace amounts of these molecules to the helium used to liberate the ions from the large droplets in the collision cell.