Thermoelectric cooler mount
11398573 · 2022-07-26
Assignee
Inventors
- Jason Maynard (Orem, UT, US)
- Shawn S. Chin (Elk Ridge, UT, US)
- Jonathan Barron (Lehi, UT, US)
- David S. Hoffman (Draper, UT, US)
Cpc classification
H01L31/115
ELECTRICITY
H10N10/17
ELECTRICITY
H01L31/02002
ELECTRICITY
G01T1/244
PHYSICS
International classification
H01L31/024
ELECTRICITY
H01L31/115
ELECTRICITY
Abstract
An x-ray detector can be small and have efficient cooling. In one embodiment, the x-ray detector can comprise a thermoelectric cooler (TEC) with upper electrical connections, a support, a cap, and a silicon drift detector (SDD). A planar side of the support can be directly affixed to upper electrical connections of the TEC. The support can have a non-planar side, opposite of the planar side, with a raised structure. A bottom face of the cap can be affixed to the raised structure, forming a cavity between the cap and the non-planar side of the support. The SDD can be affixed to a top face of the cap. In another embodiment, the non-planar side of the support can face the TEC. In another embodiment, a PIN photodiode can be directly affixed to a plate and the plate directly affixed to upper electrical connections of the TEC.
Claims
1. An x-ray detector, comprising: a thermoelectric cooler (TEC) comprising electrical components for thermoelectric cooling, including upper electrical connections in a top region, the upper electrical connections being electrically conductive; a support carried by the TEC, the support including: a base with a planar side and a non-planar side opposite of the planar side, the planar side facing the TEC; and a raised structure on the non-planar side extending away from the base; a cap carried by the support, being electrically insulative, and having a top face and a bottom face opposite the top face; the bottom face of the cap affixed to the raised structure of the support, forming a cavity between the cap and the base of the support on the non-planar side of the support; a silicon drift detector (SDD) affixed to the top face of the cap; and the planar side of the support directly affixed to the upper electrical connections, the support being a single, solid, electrically insulative structure extending across the upper electrical connections and located between the upper electrical connections and the cap.
2. The x-ray detector of claim 1, wherein the support is a blocking ceramic, the blocking ceramic including a metal blocking layer sandwiched between a pair of ceramic layers, the metal blocking layer adjoining the pair of ceramic layers.
3. The x-ray detector of claim 2, wherein the pair of ceramic layers adjoin each other in a co-fired bond.
4. The x-ray detector of claim 1, further comprising a channel at an outer perimeter of the support, the channel is in the raised structure, and the channel extends for an equivalent distance around the outer perimeter of the support.
5. The x-ray detector of claim 1, further comprising: an electronic component carried by the bottom face of the cap and extending into the cavity; and a trace extending in a single plane along the bottom face of the cap from the electronic component to an outer perimeter of the cap.
6. The x-ray detector of claim 1, wherein the support is free of electronic circuit traces.
7. The x-ray detector of claim 1, wherein the raised structure comprises four separate posts with a post at each of four corners of the support.
8. The x-ray detector of claim 1, wherein: the raised structure extends upward from the base at an outer perimeter of the base; and the raised structure is a rib extending around 75% of a perimeter of the support.
9. The x-ray detector of claim 1, wherein: the TEC further comprises elements extending between the top region and a bottom region, the top region is a top plane and the bottom region is a bottom plane; the elements are electrically coupled in series by the upper electrical connections and by lower electrical connections in the bottom region, the lower electrical connections being electrically conductive; alternating elements are made of a different material with respect to each other; and alternating connections between adjacent elements are located alternately between the top region and the bottom region.
10. An x-ray detector comprising: a thermoelectric cooler (TEC) comprising electrical components for thermoelectric cooling, including upper electrical connections in a top region, the upper electrical connections being electrically conductive; a plate, a support, and a silicon drift detector (SDD) carried by the TEC with a sequence of the TEC, the plate, the support, then the SDD; the plate: having a top side; having a bottom side opposite of the top side, the bottom side directly affixed to the upper electrical connections of the TEC; and being a single, solid, electrically insulative structure extending across the upper electrical connections; the support comprising: a base with a planar side and a non-planar side opposite of the planar side; the planar side affixed to the SDD; the non-planar side facing the top side of the plate and including a raised structure extending towards the plate; and the raised structure including four separate posts with a post at each of four corners of the support or a rib extending around 25% and 95% of a perimeter of the support; and the raised structure of the support directly affixed to the plate, forming a cavity between the plate and the base of the support on the non-planar side of the support.
11. The x-ray detector of claim 10, wherein the plate is a blocking ceramic, the blocking ceramic including a metal blocking layer sandwiched between a pair of ceramic layers, the metal blocking layer adjoining the pair of ceramic layers.
12. The x-ray detector of claim 11, wherein the pair of ceramic layers adjoin each other in a co-fired bond.
13. The x-ray detector of claim 10, further comprising: an electronic component carried by the non-planar side of the support and extending into the cavity; and a trace, exposed to air, extending in a single plane along the non-planar side of the support from the electronic component, between the posts or through a gap in the rib, to an outer perimeter of the support.
14. The x-ray detector of claim 13, wherein the plate is a single, solid, electrically insulative structure between the electrical connections in the top region of the TEC and the electronic component.
15. The x-ray detector of claim 10, further comprising a channel at an outer perimeter of the support, a channel at an outer perimeter of the plate, or both.
16. An x-ray detector comprising: a blocking ceramic sandwiched between an x-ray detection device and a cooling mechanism; the blocking ceramic including a metal blocking layer sandwiched between a pair of ceramic layers, the metal blocking layer adjoining the pair of ceramic layers; and the metal blocking layer comprises three layers of different metals including a layer closest to the x-ray detection device with a lowest atomic number of the three layers, a middle layer with an intermediate atomic number, and a layer farthest from the x-ray detection device with a largest atomic number of the three layers.
17. The x-ray detector of claim 16, wherein: the metal blocking layer includes a top face adjoining one of the pair of ceramic layers across all of the top face; and the metal blocking layer includes a bottom face adjoining the other of the pair of ceramic layers across all of the bottom face.
18. The x-ray detector of claim 16, wherein the pair of ceramic layers adjoin each other in a co-fired bond.
19. The x-ray detector of claim 16, wherein the pair of ceramic layers adjoin each other at four outer corners.
20. An x-ray detector comprising: a blocking ceramic sandwiched between an x-ray detection device and a cooling mechanism; the blocking ceramic including a metal blocking layer sandwiched between a pair of ceramic layers, the metal blocking layer adjoining the pair of ceramic layers; one of or both of the pair of ceramic layers include a cup facing the metal blocking layer; the metal blocking layer is located in the cup; the pair of ceramic layers adjoin each other in a co-fired bond at an entire outer perimeter of each of the pair of ceramic layers; and a ground connection to the metal blocking layer through a hole in the blocking ceramic from a side of the blocking ceramic on which the x-ray detection device is located.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
(1) (Drawings Might Not be Drawn to Scale)
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DEFINITIONS
(17) As used herein, the term “adjoin” means direct and immediate contact.
(18) As used herein, the phrase “directly affixed” means the objects affixed have, at most, an adhesive, solder, or both between them, but no other structural components.
(19) As used herein, the term “μm” means micrometer(s).
(20) As used herein, the terms “trace” and “traces” mean electrically conductive layers, typically metals such as copper or gold, such as on a circuit board for conducting electricity between electronic components.
(21) The terms “top” and “bottom” are used herein as relative terms relative to the orientation of the Figures.
DETAILED DESCRIPTION
First SDD Embodiment
(22) As illustrated in
(23) The pillars 12 can be electrically coupled to the upper electrical connections 23 and to the lower electrical connections 24. Example maximum resistance between each pillar 12 and each electrical connection (each upper electrical connection 23 and each lower electrical connection 24) include ≤10.sup.−2 ohms, ≤10.sup.−3 ohms, ≤10.sup.−4 ohms, ≤10.sup.−5 ohms, or 10.sup.−6 ohms. The pillars 12 can be electrically coupled in series, and electrically coupled to each other through the upper electrical connections 23 and the lower electrical connections 24. Electrical connections between adjacent pillars 12 can alternate between the top region and the bottom region. Alternating pillars 12 can be made of a different material with respect to each other. For example, the pillars 12 can alternate between p-doped and n-doped semiconductors.
(24) The TEC 20 can be sandwiched between an electrically insulating material 11 and a support 15. The support 15 can be electrically insulative. The electrically insulating material 11, the support 15, or both can be ceramic. The TEC 20 is illustrated in
(25) The support 15, can be a single, solid, electrically insulating material. Thus, the support 15 can be free of adhesive-filled interface joints. This is in contrast to multiple ceramics bonded together which can have increased resistance to heat transfer at interfaces between the ceramics. The support 15 can include a base 16 with a planar side 16.sub.P and a non-planar side 16.sub.N opposite of the planar side 16.sub.P.
(26) The upper electrical connections 23 can be formed on the planar side 16.sub.P of the support 15 by depositing a thin metal film then patterning traces needed for attachment to the pillars 12, and for electrical current flow between adjacent pillars 12. The upper electrical connections 23 and the support 15 can be attached to the pillars 12 by solder or other suitable means.
(27) A raised structure 17 on the non-planar side 16.sub.N can extend away from the base 16. A purpose of the raised structure 17 is to provide a cavity 57 as described below. The raised structure 17 can have various shapes. It can be beneficial for the raised structure 17 to be long with a large surface area for contact with the cap 55 described below, to allow increased heat transfer between the raised structure 17 and the cap 55. It can also be useful, however, for the raised structure 17 to have openings or gaps to allow improved evacuation of the cavity 57 during sealing of the detector. The design of the raised structure 17 for each application can be based on a balance of these competing interests.
(28) For example, the raised structure 17 can be a rib 17.sub.r extending around some or all of a perimeter of the support 15. The raised structure 17 of cooler 10 in
(29) As illustrated on cooler 40 in
(30) As illustrated in
(31) Also illustrated in
(32) The bottom face 55.sub.b of the cap 55 is illustrated in
(33) The support 15 can be free of electronic circuit traces. Thus, the function of the support 15 can be to electrically isolate the upper electrical connections 23 from the electronic components 51 and to provide the cavity 57 for containing the electronic components 51 and the wire bonds 62.
Second SDD Embodiment
(34) As illustrated on x-ray detector 70 in
(35) The support 15 can include a base 16 with a planar side 16.sub.P. The planar side 16.sub.P can face the TEC 20. The support 15 can include a non-planar side 16.sub.N opposite of the planar side 16.sub.P. A raised structure 17 on the non-planar side 16.sub.N can extend away from the base 16, as described above.
(36) A cap 55, as described above, can be carried by the support 15. The cap 55 can be electrically insulative. The cap 55 can include a top face 55.sub.t and a bottom face 55.sub.b opposite the top face 55.sub.t. The bottom face 55.sub.b of the cap 55, the top face 55.sub.t of the cap 55, or both, can be flat, planar surfaces. The bottom face 55.sub.b of the cap 55 can be affixed to the raised structure 17 of the support 15, forming a cavity 57 between the cap 55 and the base 16 of the support 15 on the non-planar side 16.sub.N of the support 15. A silicon drift detector (SDD) can be affixed to the top face 55.sub.t of the cap 55. Electronic component(s) 51 can be carried by the bottom face 55.sub.b of the cap 55. The electronic component(s) 51 can extend into the cavity 57.
(37) The support 15 can be metallic. One benefit of using a metallic support 15 is increased thermal conductivity, which can assist heat transfer away from the SDD 56. Another benefit is lower cost (metal can be formed easily into the shapes of the support 15 described above). Another benefit is that an electrically conductive metal can shield the SDD 56 and the electronic component(s) 51 from electromagnetic interference from the TEC 20. Another benefit is that a metallic support 15 can block fluoresced x-rays from the TEC 20 from interfering with the SDD 56.
(38) It can be helpful for the support 15 to be made of low atomic number elements, to minimize interference in the SDD 56 by x-rays fluoresced from the support 15. Example materials for the support include aluminum, nickel, or both. For example, a material composition of the support 15 can be ≥20 mass percent, ≥50 mass percent, ≥75 mass percent, ≥90 mass percent, or ≥95 mass percent aluminum.
(39) Nickel can be useful by blocking higher energy x-rays. X-rays fluoresced by nickel can also cause more interference with the SDD 56 than x-rays fluoresced by lower atomic number elements. The blocking ability of nickel can be achieved with reduced interference by embedding the nickel within or between lower atomic number material(s), such as aluminum. For example, a layer of aluminum can be deposited on each of two opposite faces of the nickel, or the nickel support 15 can be plated (electroplated or electroless) with aluminum or other low atomic number metal or metalloid.
Third SDD Embodiment
(40) As illustrated on x-ray detector 80 in
(41) The plate 81 can be a single, solid, electrically insulative structure extending across the upper electrical connections 23. The plate 81 can be free of adhesive-filled interface joints.
(42) X-ray detector 80 can also comprise a support 15, like the support 15 described above. The non-planar side 16.sub.N of the support 15 can face the top side 81.sub.t of the plate 81. The raised structure 17 can extend towards the plate 81. The raised structure 17, such as a distal end 17.sub.d farthest from the base 16, can be directly affixed (e.g. by epoxy) to the plate 81, forming a cavity 57 between the plate 81 and the base 16 of the support 15 on the non-planar side 16.sub.N of the support 15. The planar side 16.sub.P of the support 15 can be affixed (e.g. by epoxy) to the SDD 56.
(43) Electronic component(s) 51 can be carried by the non-planar side 16.sub.N of the support 15 and can extend into the cavity 57. The non-planar side 16.sub.N of the support 15 is illustrated in
(44) The plate 81 can be a single, solid, electrically insulative structure (i.e. the only solid, electrically insulative structure) between the upper electrical connections 23 in the top region of the TEC 20 and the electronic component 51. The plate 81 and the support 15 can be free of adhesive-filled interface joints.
(45) Pin Photodiode
(46) As illustrated on x-ray detector 100 in
(47) The plate 81 can be a single, solid, electrically insulative structure extending across the upper electrical connections 23. The plate 81 can be free of adhesive-filled interface joints.
(48) As illustrated in
All Embodiments
(49) The various embodiments described herein can have reduced layers between the TEC 20 and the SDD 56 or the PIN photodiode 106. Although this can be beneficial for improved heat transfer between these components, it can also reduce x-ray shielding between these components. Thus, the various embodiments described herein can be particularly helpful for lead free detectors. In the various x-ray detector embodiments described herein, all solder bonds can be lead-free.
(50) Bonding the components of the TEC 20 or other x-ray detector components can result in solder or adhesive at least partially covering bonding pads, such as bonding pads used for wire bonds to connect the electronic components 51 and traces 61 to external circuitry. As illustrated in
(51) The channel 35 can be located in the raised structure 17 of the support 15. The raised structure 17 and the channel 35 can extend for an equivalent distance around the outer perimeter of the support 15.
(52) The channel 35 can extend all or part of the way around the perimeter of the support 15 or the plate 81. For example, the channel 35 can extend ≥25%, ≥50%, ≥75%, or ≥95% and ≤100%, ≤90%, ≤80%, or ≤60% around the outer perimeter of the support 15 or the plate 81.
(53) Blocking Metal Layer
(54) As illustrated in
(55) Electromagnetic interference from electronics in the cooling mechanism 123 can disrupt optimal operation of the x-ray detection device 122. The metal blocking layer 124 can be grounded to allow it to block this electromagnetic interference. As illustrated in
(56) The metal blocking layer 124 can block electromagnetic interference arising out of the cooling mechanism 123 from interfering with the x-ray detection device 122. The metal blocking layer 124 can block fluoresced x-rays from the cooling mechanism 123, to prevent such x-rays from interfering with the x-ray detection device 122. Materials for the x-ray detection device 122 can be selected for optimal protection of the x-ray detection device 122. For example, the metal blocking layer 124 can include one or more of the following: nickel, aluminum, tantalum, molybdenum, titanium, tungsten, cobalt, titanium, chromium, a metal with an atomic number ≥13, a metal with an atomic number ≤79, or combinations thereof.
(57) As illustrated in
(58) The metal blocking layer 124 can be affixed to the pair of ceramic layers 125 by various methods, including solder or epoxy. Each added layer to the stack (e.g. solder or epoxy) can result in undesirable impurities or reduced cooling of the x-ray detection device 122 due to increased resistance to heat transfer at junctions. As illustrated in
(59) The pair of ceramic layers 125 can adjoin or touch 141. The metal blocking layer 124 and the pair of ceramic layers 125 can be formed in a single blocking ceramic by co-firing, to bond the pair of ceramic layers 125 together at locations where they touch 141. The pair of ceramic layers 125 can adjoin each other at four outer corners as illustrated in
(60) There can be tight contact between the metal blocking layer 124 and the pair of ceramic layers 125 for improved heat transfer. Thus, the metal blocking layer 124 can include a top face 114.sub.T adjoining one of the pair of ceramic layers 125 across all of the top face 114.sub.T ≤and a bottom face 114.sub.B adjoining the other of the pair of ceramic layers 125 across all of the bottom face 114.sub.B.