Ferroelectric Sensor

Abstract

A sensor (1) which consists of a first electrode (3a), a ferroelectric layer (2) and a second electrode (3b) is described. The second electrode (3b) is connected to ground and the ferroelectric layer (2) is arranged between the first and second electrodes (3a, 3b).

Claims

1. A sensor (1) having: a first electrode (3a), a ferroelectric layer (2), a second electrode (3b), wherein the second electrode (3b) is connected to ground and the ferroelectric layer (2) is arranged between the first and second electrodes (3a, 3b).

2. A sensor (1) as claimed in the preceding claim, wherein the ferroelectric layers (2) comprise a polymer, a ceramic or a polymer-ceramic matrix.

3. A sensor (1) as claimed in one of the preceding claims, wherein the first and/or second electrode (3a, 3b) comprise a transparent and thermally as well as electrically conductive material.

4. A sensor (1) as claimed in one of the preceding claims, wherein the first and/or second electrode (3a, 3b) comprise one or more metals, the one metal or the plurality of metals comprising Al, Cr, Ni, Ag, Cu, Fe and a mixture or an alloy of these elements.

5. A sensor (1) as claimed in one of the preceding claims, wherein the first and/or second electrode (3a, 3b) comprise a conductive layer which is transparent in the UV-Vis range and/or in the IR range.

6. A sensor (1) as claimed in one of the preceding claims, wherein the first and/or second electrode (3a, 3b) comprise ITO, PEDOT:PSS, silver, nanowires, graphite, carbon nanotubes or graphene.

7. A sensor (1) as claimed in one of the preceding claims, wherein the sensor (1) comprises further first electrodes (3a), second electrodes (3b) and ferroelectric layers (2), and wherein the ferroelectric layers (2) are arranged between the first and second electrodes (3a, 3b).

8. A sensor (1) as claimed in claim 7, wherein all the first electrodes (3a) are connected in parallel with one another and all the second electrodes (3b) are connected in parallel with one another, wherein an electrical signal (S) is read out between the first and second electrodes.

9. A sensor (1) as claimed in claim 7, wherein the individual ferroelectric layers (2) are contacted separately and an electrical signal is read out for each of the ferroelectric layers (2) respectively between one of the first electrodes (3a) and one of the second electrodes (3b).

10. A sensor (1) as claimed in one of the preceding claims, wherein the first electrode (3a) is arranged inside the sensor (1), the ferroelectric layer (2) encloses the first electrode (3a) and the second electrode (3b) encloses the ferroelectric layer (2).

11. A sensor (1) as claimed in one of claims 1 to 9, wherein the sensor (1) comprises an insulation layer (9) on which the first electrode (3a) or second electrode (3b) is arranged, and wherein the sensor (1) is coiled in such a way that the insulation layer (9) lies on an inner side.

12. A sensor (1) as claimed in one of claims 1 to 9, wherein the sensor (1) comprises a carrier material (4).

13. A sensor (1) as claimed in the preceding claim, wherein the first electrode (3a) or the second electrode (3b) is arranged on the carrier material (4).

14. A sensor (1) as claimed in claim 12, wherein the sensor (1) comprises an insulation layer (9) on which the first electrode (3a) or second electrode (3b) is arranged, and wherein the sensor (1) is coiled in such a way that the insulation layer (9) is arranged on the carrier material (4).

15. A sensor (1) as claimed in claim 12, wherein the carrier material (4) is arranged inside the sensor (1), and the first electrode (3a) encloses the carrier material (4), the ferroelectric layer (2) encloses the first electrode (3a) and the second electrode (3b) encloses the ferroelectric layer (2).

16. A sensor (1) as claimed in one of claims 10 and 15, wherein further first and second electrodes (3a, 3b) and further ferroelectric layers (2) enclose the second electrode (3b), wherein the first and second electrodes (3a, 3b) are arranged radially alternating, and wherein each of the ferroelectric layers (2) is respectively arranged between one of the first electrodes (3a) and one of the second electrodes (3b).

17. A sensor (1) as claimed in one of claims 12 to 16, wherein the carrier material (4) is a textile fiber or glass fiber.

18. A sensor (1) as claimed in the preceding claim, wherein an optically reactive sensor layer (6) is applied on a part of a lateral surface of the glass fiber.

19. A sensor (1) as claimed in one of the preceding claims, wherein the sensor (1) is configured cylindrically or wherein the sensor is configured in the shape of a plate.

20. A sensor (1) as claimed in one of the preceding claims, wherein the sensor (1) comprises at least one mechanical amplifier element (5).

21. A sensor (1) as claimed in the preceding claim, wherein the at least one mechanical amplifier element (5) is formed from the first and/or second electrode (3a, 3b).

22. A sensor (1) as claimed in claim 12 and claim 20, wherein the at least one mechanical amplifier element (5) is formed from the carrier material (4).

23. A sensor (1) as claimed in claim 12 and claim 20, wherein the at least one mechanical amplifier element (5) is formed from the first electrode (3a) and the carrier material (4).

24. A sensor (1) as claimed in one of the preceding claims, wherein the ferroelectric layer (2) and/or the first electrodes (3a) and/or second electrodes (3b) are thinner than 50 μm.

25. A sensor (1) as claimed in one of the preceding claims, wherein the ferroelectric layers (2) comprise a piezoelectric and/or pyroelectric material.

26. An arrangement having: at least one set of evaluation electronics (7), at least one sensor (1) as claimed in one of the preceding claims, wherein the evaluation electronics (7) are configured to measure an electrical signal (S) generated by the sensor (1) and to identify a piezoelectric effect, a pyroelectric effect and a capacitive effect by changes of the electrical signal (S).

27. An arrangement as claimed in the preceding claim, wherein the evaluation electronics (7) are configured to identify, with the aid of the measured changes of the electrical signal, whether an object is approaching the sensor (1) or whether an object is touching the sensor.

28. An arrangement as claimed in claim 26 or 27, wherein the measured changes of the electrical signal (S) comprise a change in the signal/time profile and/or the amplitude and/or the timescale and/or the temporal dynamics and/or the polarity.

29. An arrangement as claimed in one of claims 26 to 28, wherein the electrical signal (S) comprises a voltage and/or a charge and/or a capacitance and/or a polarity.

30. An arrangement as claimed in one of claims 26 to 29, furthermore having: a plurality of sensors (1) as claimed in one of claims 1 to 24, wherein the sensors (1) are arranged in a matrix.

31. A robot, wherein the robot has a sensor (1) as claimed in one of claims 1 to 25.

32. A collaborative system, wherein the collaborative system has a sensor (1) as claimed in one of claims 1 to 25.

33. An automatic door, wherein the automatic door has a sensor (1) as claimed in one of claims 1 to 25.

34. A method for producing a sensor as claimed in one of claims 1 to 25, wherein the ferroelectric layer (2) is applied on the first electrode (3a) by means of a thin-film method, for example CVD or PVD, by means of a combination of a sol-gel method with spin coating, or by means of screen printing.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0049] The invention will be explained in more detail below with the aid of schematic representations.

[0050] FIG. 1 shows a schematic cross-sectional view of a first exemplary embodiment of the present invention;

[0051] FIG. 2 shows a schematic arrangement with a sensor and the evaluation electronics;

[0052] FIG. 3 shows a further schematic arrangement with a sensor and the evaluation electronics;

[0053] FIG. 4 shows a structural diagram of the evaluation;

[0054] FIG. 5 shows a schematic measurement curve of a sensor;

[0055] FIG. 6 shows a measurement curve of the voltage change because of a pyroelectric effect;

[0056] FIG. 7 shows a measurement curve of the voltage change because of a piezoelectric effect;

[0057] FIG. 8 shows a measurement curve of the voltage change because of a capacitive effect;

[0058] FIG. 9 shows a schematic cross-sectional view of a multilayer-configured sensor, the electrical signal being amplified;

[0059] FIG. 10 shows a schematic cross-sectional view of a multilayer-configured sensor, a plurality of individual electrical signals being read out;

[0060] FIG. 11 shows a schematic cross-sectional view of a plate-shaped enclosed exemplary embodiment, the first electrode being arranged inside the sensor;

[0061] FIG. 12 shows a schematic cross-sectional view of a plate-shaped enclosed exemplary embodiment, a carrier material being arranged inside the sensor;

[0062] FIG. 13 shows a schematic cross-sectional view of a further exemplary embodiment, amplifier elements being arranged on the second electrode;

[0063] FIG. 14 shows a schematic cross-sectional view of a cylindrical exemplary embodiment, amplifier elements being arranged on the carrier material and the first electrode;

[0064] FIG. 15 shows a schematic cross-sectional view of a fourth cylindrical exemplary embodiment, the lengthened carrier material with the first electrode being used as an amplifier element;

[0065] FIG. 16 shows a schematic cross-sectional view of a cylindrical exemplary embodiment;

[0066] FIG. 17 shows a schematic cross-sectional view of a multilayer cylindrical exemplary embodiment;

[0067] FIG. 18 shows a schematic cross-sectional view of a cylindrical exemplary embodiment, an optically reactive layer being arranged on the carrier material;

[0068] FIG. 19 shows a schematic cross-sectional view of an exemplary embodiment with an insulation layer, the sensor being coiled;

[0069] FIG. 20 shows a schematic cross-sectional view of an exemplary embodiment with an insulation layer, the sensor being coiled around a carrier material;

[0070] FIG. 21 shows a robot with possible sensor positions;

[0071] FIG. 22 shows a collaborative system with possible sensor positions;

[0072] FIG. 23 shows an automatic revolving door with possible sensor positions;

[0073] FIG. 24 shows an automatic elevator door with possible sensor positions; and

[0074] Elements which are the same, similar or apparently the same are provided with the same references in the figures. The figures and the size proportions in the figures are not true to scale.

DETAILED DESCRIPTION OF ILLUSTRATIVE EMBODIMENTS

[0075] FIG. 1 shows a schematic cross-sectional view of a sensor 1. Arranged over a first electrode 3a, there is a ferroelectric layer 2, and a second electrode 3b is arranged over the latter. The second electrode 3b is electrically contacted and connected to ground.

[0076] The ferroelectric layer may in this case consist of a material which exhibits ferroelectric properties in an electric field. The layer may preferably consist of a ferroelectric material with piezoelectric properties, particularly preferably a ferroelectric material with pyroelectric properties.

[0077] The electrodes 3a, 3b are electrically contacted (not shown), and a voltage change may for example be read out between the electrodes 3a, 3b as a measurement signal. The pyroelectric layer 2, which is also piezoelectric, reacts both in relation to temperature changes and in relation to deformation by a charge separation, which leads to a voltage change at the electrodes 3a, 3b. Owing to the grounding of the second electrode 3b, the capacitance change between the second electrode 3b and an approaching object, in the event of close approach or touching, results in a voltage change between the electrodes 3a, 3b. The sensor 1 uses three different physical effects, the capacitive effect, the piezoelectric effect and the pyroelectric effect, in order to cover different detection ranges.

[0078] By virtue of the pyroelectric effect, it is possible to detect temperature changes which, depending on the heat source, may be a few meters away. The capacitive effect may likewise be used for contactless detection, but a close approach of an object to be detected within a few centimeters to the sensor 1 is required for this. The piezoelectric and capacitive effects may be used to establish touching of the sensor 1 by another object. The piezoelectric effect, however, differs from the capacitive effect in that an active spatial deformation of the pyroelectric layer 2 must take place for a voltage change at the electrodes 3a, 3b with the piezoelectric effect, while even a resting touch leads to a voltage change with the capacitive effect.

[0079] The ferroelectric layer 2 comprises PVDF or PZT. Both materials are pyroelectric. PVDF is particularly suitable as a pyroelectric plastic which is resilient, since the ferroelectric layer 2 can easily be deformed and a voltage change can therefore be induced by the piezoelectric effect. A ferroelectric layer 2 made of PVDF may for instance be applied by spin coating, screen printing or inkjet printing. PZT, on the other hand, is a pyroelectric ceramic which exhibits flexibility as a very thin layer. It is possible to dope the PZT ceramic with Na, Ca or La in order to adapt the electrical properties. PZT or other pyroelectric ceramics may be applied with the aid of a thin-film method, for example CSD or PVD. PVDF has the advantage over ceramics such as PZT that it can be applied without problems on a large area, since ceramics in the form of a large-area layer may crack because of internal stress and pressure.

[0080] Preferably, the first and second electrodes 3a, 3b consist of a transparent conductive material, for example ITO, PEDOT:PSS, silver, graphite, metallic nanowires, carbon nanotubes or graphene. Materials which have transparency in the UV-Vis range and/or in the IR range and/or with a good thermal conductivity are particularly highly suitable as electrodes 3a, 3b. This facilitates the heat input into the ferroelectric layer 2 since infrared thermal radiation impinges directly on the ferroelectric layer 2. The sensitivity of the sensor 1 is therefore increased, especially with respect to the pyroelectric effect. The electrodes 3a, 3b may consist of metals such as Al, Cr, Ni, Ag, Cu, a mixture of metals, an intermetallic compound or an alloy. Since metals have a high electrical and thermal conductivity, they are likewise suitable as electrode material.

[0081] The layers of the sensor 1 are respectively thinner than 50 μm, so that the overall sensor 1 is flexible and pliable. The sensor 1 can therefore be easily deformed, which leads to a voltage change between the first and second electrodes 3a, 3b because of the piezoelectric effect. Since the sensor 1 is extremely thin, it has a low thermal mass and so the response time is shortened and the sensitivity of the sensor 1 in relation to temperature changes is increased.

[0082] The sensor 1 need not be configured with only one pyroelectric layer 2, as shown in FIG. 1, but may be produced with a plurality of pyroelectric layers 2 and a plurality of first and second electrodes 3a, 3b in a multilayer structure. In this case, the pyroelectric layers 2 are always arranged between first and second electrodes 3a, 3b, the first and second electrodes 3a, 3b alternating with one another in the stack direction. Both the sensitivity and the accuracy of the sensor 1 may be increased by implementing the sensor 1 as a multilayer component.

[0083] The measurement signal, which is tapped as a voltage change at the first and second electrodes 3a, 3b, is forwarded to evaluation electronics. The evaluation electronics 7 may in this case be arranged on the same carrier material 4 as the sensor 1, as represented in FIG. 2, or not on the same carrier material 4, as represented in FIG. 3. The evaluation electronics 7 are contacted either directly on the sensor 1 or via the carrier material 4, as shown in FIG. 3. If a voltage change occurs at the sensor 1 because of a measurement event, this voltage change is forwarded in analog fashion to the evaluation electronics 7, as may be seen in FIG. 4. The evaluation electronics 7 inter alia have signal amplifiers, comparators and microprocessors and are configured to allocate a measurement curve to the piezoelectric, pyroelectric or capacitive effect. Subsequently, the signal is sent digitally to digital evaluation 8, which in turn delivers an output signal.

[0084] FIG. 5 shows an exemplary curve which depicts a voltage change after a mechanical or thermal stimulation of the sensor 1. In the diagram in FIG. 5, as in the diagrams in FIGS. 6, 7 and 8, the voltage is plotted against time. FIG. 6 shows a voltage change which is due to a purely pyroelectric effect. At the point Y1, a heat source is turned on, and at the point Y2 it is turned off. FIG. 7 represents a measurement curve which originates only from the piezoelectric effect. At the point X1, a deformation is induced by a pressure application, and at the point X2 the pressure application is released. The measurement curve in FIG. 8 shows a voltage change at the sensor 1, which originates exclusively from a capacitive effect.

[0085] An excursion of the measurement curve because of the pyroelectric effect is, for example, slower than an excursion because of the piezoelectric or capacitive effect, as revealed by a comparison of FIG. 6 with FIGS. 7 and 8. Furthermore, the curve profile for the pyroelectric effect, as may be seen in FIG. 6, may have irregularities when a heat source acts on the sensor 1 (Y1) or is subsequently turned off or shielded (Y2). In this case, turning off the heat source acts as a negative temperature difference, so that the polarity is changed and the measurement curve experiences an abrupt sign change.

[0086] In the case of the piezoelectric effect, a sign change as shown in FIG. 7 may likewise take place in the measurement curve, for example when releasing (X2) the sensor 1 after it has previously been deformed (X1). In contrast to the pyroelectric effect, however, the curve profile is continuous and may be very much more rapid. The amplitude or voltage change is typically less by a factor of 10 to 100 for the pyroelectric effect than for the piezoelectric effect, although this is not apparent from a comparison of FIG. 6 with FIG. 7 since the curves have been correspondingly amplified beforehand.

[0087] The capacitive effect may on the other hand not induce a sign change in the measurement curve, and an excursion may be temporally faster than an excursion because of the piezoelectric effect, as may be seen in FIG. 8. The two measurement curves in FIG. 8 were acquired with a sensor 1 in which the second electrode 3b was connected to ground in one case and not in the other case. Since no voltage change occurs in the measurement curve without a ground connection of the second electrode 3b, it may be established that the voltage change is attributable only to the capacitive effect, and no piezoelectric effect, which would lead to a voltage change independently of the ground connection of the second electrode 3b, occurs. By analysis of the measurement curve in respect of these different characteristics, the evaluation electronics 7 may carry out an allocation to the physical effects.

[0088] If, as shown in FIG. 9, the sensor 1 is in the form of a multilayer component, all the first electrodes 3a may be electrically contacted by the same first electrical contact element and all the second electrodes may be electrically contacted by the same second electrical contact element. The individual first and second electrodes are therefore connected in parallel. In this way, an amplified electrical signal S1 may be employed for the evaluation in the scope of a signal addition from the electrical signals S of the individual functional layers.

[0089] In the alternative embodiment as shown in FIG. 10, individual functional layers are contacted separately. In this case, the first electrodes are electrically contacted by respectively separate first contact elements and the second electrodes are electrically contacted by respectively separate second contact elements. In this way, a separate electrical signal (S1, S2, S3, S4) may be evaluated for the respective functional layer, it being additionally possible to tap different types of sensor signals, and to distinguish them according to the physical effects, for the individual functional layers.

[0090] Figure ii shows a schematic cross-sectional view of a plate-shaped enclosed exemplary embodiment in which the first electrode 3a is arranged inside the sensor 1, the ferroelectric layer 2 enclosing the first electrode 3a and the second electrode in turn enclosing the ferroelectric layer 2. Such a sensor 1 may be constructed layer-by-layer with the aid of suitable production processes for flat layers, for instance screen printing. It may in this case be advantageous to print over inner layers with a larger-area layer in order to achieve enclosure. During the production of the enclosure, it may however also be expedient first to apply a layer arranged above on one side of the inner layer, then to turn the component over and apply the same type of layer on the other side. Before turning over, the applied layer is dried.

[0091] FIG. 12 shows a schematic cross-sectional view, similar to FIG. 11, of a plate-shaped enclosed exemplary embodiment of a sensor 1, a carrier material 4 in this case being arranged inside the sensor. This exemplary embodiment may also, as in FIG. 11, be produced by a production process for flat layers, either with the layers being applied successively or by turning the component over for each enclosing layer.

[0092] The carrier material 4 may be either nonresilient or resilient. By a nonresilient carrier material 4, for instance a substrate, the stability of the sensor 1 is increased. For selected applications, arrangement on a carrier material 4 consisting of for example glass, concrete or steel may be preferred. Resilient materials which are envisioned as carrier material 4 may inter alia be rubber, a plastic or a textile, for example a cotton yarn.

[0093] FIG. 13 shows a schematic cross-sectional view of a sensor 1 similar to FIG. 1, the sensor 1 being arranged on a carrier material 4 and comprising mechanical amplifier elements 5 on the second electrode 3b. The mechanical amplifier elements 5, which are represented in FIG. 13 as hair- or bristle-shaped projections, can mechanically transmit a touch to the second electrode 3b. Since the ferroelectric layer 2 adheres on the second electrode 3b, this touch is also forwarded to the ferroelectric layer 2 and thus deforms the ferroelectric layer 2. This increases the detection range which can be covered with the piezoelectric effect. The mechanical amplifier elements 5 are made either of a composite material or of plastics such as PET, thermoset or PTFE.

[0094] Mechanical amplifier elements 5 may likewise be applied or formed on cylindrical sensors 1 and sensors 1 which are not arranged on a carrier material 4. The amplifier elements 5 are preferably applied in the axial direction as an extension of the first electrode 3a and/or the carrier material 4, as shown in FIG. 14. The amplifier element 5 is in this case preferably not additionally applied but produced by the first electrode 3a and the carrier material 4, no further ferroelectric layers 2 and no further second electrodes 3b being applied on the first electrode 3a and the carrier material 4 in a region which is used as an amplifier element 5. A representation of a cross section of a sensor configured in such a way is represented in FIG. 15. For additional signal amplification, such cylindrical sensors 1 provided with amplifier elements 5 may be combined as bundles of a plurality of individual sensors 1.

[0095] As an alternative, the amplifier element 5 may also be formed only from the carrier material 4. In a cylindrical exemplary embodiment in which the carrier material 4 is arranged on the inside, the first electrodes 3a are then omitted in the region of the amplifier element 5. If the sensor 1 is arranged on a carrier material 4 which has a greater extent than the sensor 1 itself, the protruding part of the carrier material 4 also acts as an amplifier element 5. In embodiments in which the first electrode 3a instead of a carrier material 4 is arranged on the inside, the amplifier element 5 may also be formed only from the first electrode 3a. The first electrode 3a then protrudes from the sensor 1, a ferroelectric layer 2 and a second electrode 3b being omitted.

[0096] FIG. 16 shows a schematic cross-sectional view of a cylindrically configured sensor 1. Arranged on the inside, there is the first electrode 3a, which is enclosed by a ferroelectric layer 2. The ferroelectric layer 2 is in turn enclosed by the second electrode 3b. The second electrode 3b is grounded, this not being represented in FIG. 16.

[0097] The first electrode 3a may be a commercially available wire. The first electrode 3a is preferably kept very thin with a diameter of about 150 μm to 250 μm in order to reduce the thermal mass of the sensor 1. The ferroelectric layer 2 is configured to be thin with a thickness of less than 5 μm for the same reason. The second, in this embodiment outermost, electrode needs to be balanced in the selection of the thickness of the layer between the sensitivity of the sensor 1 and the protection of the ferroelectric layer 2. In practice, a thickness of about 10 μm has been found as an advantageous compromise.

[0098] The cylindrical shape of the sensor 1 is particularly advantageous for applications in which the sensor 1 is intended to be inserted into a narrow opening. Furthermore, a cylindrical geometry of the sensor 1 is helpful for increasing the sensitivity in relation to deformations. In addition, the cylindrical embodiment makes it possible to produce the sensor 1 in an endless process, in a similar way to wire or cable manufacturing. This simplifies production and reduces the production costs.

[0099] FIG. 17 shows a schematic cross-sectional view of a cylindrically configured sensor 1 similar to FIG. 14. A carrier material 4 is arranged on the inside. Two first and second electrodes 3a, 3b respectively alternatingly enclose the carrier material 4, a ferroelectric layer 2 respectively being arranged between the first and second electrodes 3a, 3b. The layers inside the sensor 1 are also thinner than 5 μm in this exemplary embodiment. The second electrode 3b, which forms the outermost layer, is preferably 10 μm thick. By the use of a plurality of ferroelectric layers 2, the accuracy of the sensor 1 is increased in comparison with an exemplary embodiment with one ferroelectric layer 2.

[0100] The carrier material 4 may for example be a textile fiber, glass fiber or fiber Bragg grating. If a textile fiber is used as the carrier material 4, it may be woven into clothing, coverings, carpets and other textile products. Textile fibers made of plastic, for instance polyester, are outstandingly suitable as carrier material 4. Natural fibers, for example of cotton, may likewise be used. A glass fiber as a carrier material 4 may be used for displaying the system state, for instance whether a direct touch or an approach is taking place, by light of a particular color being transmitted through the glass fiber. The use of fiber Bragg gratings is also possible as carrier material 4. This may expand the sensing arrangement, for example by using it as a force sensor. In this case, however, it should be noted that further optical evaluation equipment is required for this.

[0101] FIG. 18 shows a longitudinal cross-sectional view of a cylindrically configured sensor 1. Arranged on the inside, there is a glass fiber, which is enclosed by a first and second electrode 3a, 3b, a ferroelectric layer 2 being arranged between the first and second electrodes 3a, 3b. On a part of the lateral surface of the glass fiber, an optically reactive sensor layer 6 has been applied instead of the first and second electrode 3a, 3b and the ferroelectric layer 2. This optically reactive layer 6 may for example react to the pH or O.sub.2 content in the environment by a color change or fluorescence change. This color change may be measured with the aid of evanescent light waves which emerge from the glass fiber. In this way, the sensing arrangement and the potential application field for the sensor 1 may be expanded.

[0102] FIG. 19 shows a schematic cross-sectional view of an exemplary embodiment with an insulation layer 9, the sensor 1 being coiled in such a way that the insulation layer 9 is located on the inside. The insulation layer is an electrically insulating flexible layer, which may consist of a flexible thin carrier material 4. The insulation layer 9 prevents the first and second electrodes 3a/3b from short-circuiting when coiled.

[0103] A coiled embodiment makes it possible to produce a cylindrical sensor 1 even with flat production processes. By the sensor 1 being coiled repeatedly, a multiple-layer component may be produced, although it should be noted that the radially successive electrodes are not electrically separated from one another as in an enclosed sensor 1, but are connected to one another. The coiled sensor 1 therefore has an increased capacitance in comparison with an enclosed sensor 1, and the capacitive effect is more pronounced.

[0104] In a similar way to FIG. 19, FIG. 20 shows a schematic cross-sectional view of an exemplary embodiment with an insulation layer 9, the sensor 1 being coiled around a carrier material 4. The mechanical properties of the coiled sensor 1 can be influenced with the aid of the carrier material 4.

[0105] A combination of the various embodiments is likewise possible. For example, enclosed sensors 1 may be used as carrier material 4, a further sensor being coiled around the enclosed sensor 1. The pronounced capacitive effect of the coiled sensor 1 may therefore be combined with the advantages of an enclosed sensor 1.

[0106] All the exemplary embodiments may furthermore be provided with a protective layer, for instance of plastic, in order to protect the sensor 1 from a harmful environment.

[0107] FIG. 21 shows an autonomous transport robot by way of an example of robots in general. The boxes in the lower region of the robot show advantageous positions for fitting a sensor 1. If the robot approaches a human, for example, at a distance of a few meters a voltage change at the electrodes 3a, 3b of the sensor 1 is established on the basis of the pyroelectric effect, and the robot may for example consequently reduce its speed. If the robot continues to approach the human, from a distance of about one meter a voltage change which occurs because of the capacitive effect is established. At this position, because of the proximity to the human, the robot may change its movement direction. If the robot nevertheless then collides with the human, the sensor 1 is deformed and a voltage change as a result of the piezoelectric effect is detected. In order to cause no damage, the robot could then remain stationary or reverse. If it remains stationary and the deformation of the ferroelectric layer therefore does not change, the voltage change because of the piezoelectric effect disappears. The touching may nevertheless continue to be detected by the capacitive effect.

[0108] FIG. 22 shows a collaborative system in which sensors 1 are integrated. In particular the ends of the robot arms, which may come particularly close to a collaborating human, are suitable for positioning the sensors 1. FIGS. 23 and 24 show the advantageous positions for the sensors 1 on automatic doors. An automatic revolving door could for instance reduce its rotational speed in the event of an approach, and increase the rotational speed again in the event of touching the sensor 1. An automatic elevator door as shown in FIG. 24 could for example already make the doors open if a person approaches. As a result, safety may be increased in comparison with the photoelectric barriers often used, since the sensors can already establish an approach of a person to the door rather than not reacting until this person is already standing in the door.

[0109] Although the invention has been illustrated and described in detail by means of the preferred embodiment examples, the present invention is not restricted by the disclosed examples and other variations may be derived by the skilled person without exceeding the scope of protection of the invention.