MAGNETICALLY TUNABLE RESONATOR

Abstract

Provided is a process for manufacturing magnetically tunable nano-resonators. The nano-resonators comprise nanoparticles of a crystalline magnetic material embedded into cavities of a substrate.

Claims

1. A method of manufacturing a magnetically tunable resonator, the method comprising: forming a first layer having first wells; flowing a colloid comprising colloidal nanoparticles of a crystalline magnetic material over the first layer; drying the first layer; and adding a second layer having second wells matching the first wells to the first layer.

2. The method of manufacturing a magnetically tunable resonator of claim 1, wherein the nanoparticles are spheres of yttrium-iron-garnet.

3. The method of manufacturing a magnetically tunable resonator of claim 1, further comprising: manufacturing the first layer and the second layer from flexible nanomembranes.

4. The method of manufacturing a magnetically tunable resonator of claim 1, wherein the first layer and the second layer comprise a semiconductor material.

5. The method of manufacturing a magnetically tunable resonator of claim 1, further comprising: forming the wells by applying a photolithographic process to the first and second layer.

6. The method of manufacturing a magnetically tunable resonator of claim 1, wherein the matching first and second wells form cavities.

7. The method of manufacturing a magnetically tunable resonator of claim 6, wherein the cavities form a cavity array.

8. The method of manufacturing a magnetically tunable resonator of claim 1, wherein at least one of the first and the second layer comprises electrically conductive material.

9. The method of manufacturing a magnetically tunable resonator of claim 1, wherein a cavity formed by two matching wells comprises a nanoparticle of a crystalline magnetic material, and a resonance frequency of the nanoparticle oscillating within the cavity is tunable by flowing an electrical current through an electrically conductive material that at least partially encircles the cavity.

10. The method of manufacturing a magnetically tunable resonator of claim 9, wherein the resonance frequency is tunable to frequencies above 1 Terahertz.

11. A microwave device, comprising: a plurality of magnetically tunable nano-resonators, wherein the nano-resonators comprise nanoparticles of a crystalline magnetic material embedded into cavities of a flexible sheet.

12. The microwave device of claim 11, wherein the nanoparticles are spheres of yttrium-iron-garnet.

13. The microwave device of claim 11, wherein the flexible sheet comprises a first layer bonded to a second layer, both layers being made from flexible semiconductor nanomembranes.

14. The microwave device of claim 13, wherein both layers comprise electrodes and each of said cavities is at least partially encircled by two electrodes which extend into directions that are perpendicular to each other.

15. The microwave device of claim 11, wherein the cavities form a cavity array.

16. The microwave device of claim 11, wherein different nano-resonators are independently tunable.

17. The microwave device of claim 11, wherein the microwave device is a device selected from a group consisting of a microwave receiver, a microwave emitter, a microwave filter, and a microwave mixer.

18. The microwave device of claim 11, wherein the first layer or the second layer comprises a graphene layer.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0008] The present invention will become more fully understood from the detailed description given hereinbelow and the accompanying drawings which are given by way of illustration only, and thus, are not limitive of the present invention, and wherein:

[0009] FIG. 1A, FIG. 1B, FIG. 2A, FIG. 2B, FIG. 3A, FIG. 3B, and FIG. 4A to FIG. 4D schematically illustrate a process of manufacturing a magnetically tunable nano-resonator;

[0010] FIG. 5 shows a block diagram of a microwave device in which the nano-resonator may be integrated;

[0011] FIG. 5A, FIG. 5B, FIG. 5C, and FIG. 5D show a block diagram of a receiver, an emitter, a filter and a mixer, respectively, in which the nano-resonator may be integrated;

[0012] FIG. 6 shows a flow-chart of the process; and

[0013] FIG. 7 illustrates a modification of the microwave device of FIG. 5.

[0014] Notably, the drawings are not drawn to scale and unless otherwise indicated, they are merely intended to conceptually illustrate the structures and procedures described herein.

DETAILED DESCRIPTION

[0015] FIG. 1A and FIG. 1b show schematic cross-sectional and top views of a nanomembrane 10 (e.g., a silicon membrane with a thickness of about 50 microns or less). During a first processing step, two nanomembranes 10 may be provided with an array of wells 12. For example, the wells 12 may be etched into the nanomembranes 10 by applying a photolithographic process (e.g., dry reactive ion etching, DRIE, and/or nanoimprint lithography, NIL).

[0016] Moreover, electrically conductive traces (wiring) 14 may be added to the layers 10a, 10b as illustrated in FIG. 2A, FIG. 2B, FIG. 3A, and FIG. 3B. Notably, the wiring 14 (electrodes) of the two layers 10a, 10b may extend in directions that are perpendicular to each other to avoid (or reduce) cross coupling. Instead of integrating the wiring 14 into the layers 10a, 10b, the wiring 14 may also be integrated into (additional) adjacent layers on a chip. For example, the nanomembranes 10 may be strain engineered and then transferred on a device-compatible substrate with a patterning according to the device required. Moreover, rather than having an electrode grid (where each electrode extends over a full row/column of wells 12 as shown in FIG. 2B and FIG. 3B), one or more wells 12 in the same row/column may be provided with wiring 14 that can be operated independently from wiring 14 provided to other wells 12 in said row/column.

[0017] As illustrated in FIG. 4A, one of the layers 10a may be rinsed with a colloid including nanoparticles (metallic or semiconducting) with a magnetic moment. Such colloids are commercially available, e.g., from CAN GmbH, Hamburg, Germany. Rinsing may also be performed as batch processing, where multiple chips are rinsed in a single process step.

[0018] The chips may then be dried such that the magnetic nanoparticles 18 (e.g., spheres made from yttrium-iron-garnet, YIG, or another material) become trapped in the wells 12, as illustrated in FIG. 4B. After drying the chips, the layers 10a, 10b may be bonded together (e.g., by making use of a wafer-bonder) as illustrated in FIG. 4C, such that the magnetic nanoparticles 18 are arranged in cavities 12a formed by matching wells 12. Each cavity 12a comprising a magnetic nanoparticle 18 and wiring 14 partially encircling the cavity 12a form a nano-resonator 20 as illustrated in FIG. 4D. The wiring 14 may then be contacted on the outskirts of the chips and may be addressed in parallel or separately. The micro/millimeter-wave resonators 20 (or nano-resonators for short) may be integrated into a microwave device 21, as shown in FIG. 5A For example, nano-resonators 20 may be integrated into a receiver 22 or an emitter 24, as schematically illustrated in FIG. 5B and FIG. 5C. Furthermore, nano-resonators 20 may be integrated into a filter 25a or a mixer 25b as schematically illustrated in FIG. 5D and FIG. 5E.

[0019] The above described process allows scaling down existing YIG-microwave sources to the nanoscale, while maintaining their output power density. Furthermore, embedding the nano resonators 20 within nanomembranes 10 allows designing flexible sources/sinks of electromagnetic radiation. This may be particularly advantageous for microwave sources which require focusing the emitted radiation and for all non-planar surfaces, i.e., in sensor, smart phone, and other applications.

[0020] A flow-chart of the process is shown in FIG. 6. At step 22, the first layer 14a is formed. At step 24, a colloid 16 comprising colloidal nanoparticles 18 of a crystalline magnetic material are flown over the first layer 14a and the first layer 14a is dried such that the nanoparticles 18 become trapped in the wells 12. At step 26, the second layer 14b is added to the first layer 14a, such that the nanoparticles 18 are arranged in cavities of the flexible sheet formed by the layers 14a, 14b.

[0021] As schematically illustrated in FIG. 7, a nano-resonator 20 may be provided with a graphene layer 32 (e.g., a mono- or bilayer). The graphene layer 32 may be part of one of the nanomembrane layers 10a, 10b. Moreover, a voltage applied to the graphene layer 32 may be measured and/or controlled. Likewise, a current through the graphene layer 32 may be measured and/or controlled.

[0022] The invention being thus described, it will be obvious that the same may be varied in many ways. Such variations are not to be regarded as a departure from the spirit and scope of the invention, and all such modifications as would be obvious to one skilled in the art are to be included within the scope of the following claims.