Diffractive optical element and method of forming thereof
11204452 · 2021-12-21
Assignee
Inventors
- Ramon Jose Paniagua Dominguez (Singapore, SG)
- Egor Khaidarov (Singapore, SG)
- Arseniy Kuznetsov (Singapore, SG)
- Hanfang Hao (Singapore, SG)
- Yefeng Yu (Singapore, SG)
- Xinan Liang (Singapore, SG)
Cpc classification
B82Y20/00
PERFORMING OPERATIONS; TRANSPORTING
International classification
Abstract
There is provided a diffractive optical element including a substrate, and an array of optical nanoantennas arranged on the substrate, the array of optical nanoantennas being spaced apart periodically in a lateral direction for supporting a plurality of diffraction orders at a predetermined wavelength. In particular, each optical nanoantenna in the array of optical nanoantennas is configured to control distribution of electromagnetic energy from an incident light having the predetermined wavelength amongst the plurality of diffraction orders so as to promote scattering of the electromagnetic energy in at least a first direction and suppress scattering of the electromagnetic energy in at least a second direction, the first direction and the second direction corresponding to a first diffraction order and a second diffraction order of the plurality of diffraction orders, respectively. There also provided a corresponding method of forming the diffractive optical element and a flat optical element, such as a flat lens.
Claims
1. A diffractive optical element comprising: a substrate made of a transparent material; and an array of optical nanoantennas arranged on the substrate, the array of optical nanoantennas being spaced apart periodically in a lateral direction for supporting a plurality of diffraction orders at a predetermined wavelength, wherein each optical nanoantenna in the array of optical nanoantennas is configured to control distribution of electromagnetic energy from an incident light transmitted through the substrate and illuminated on a side of the array of optical nanoantennas that is arranged on the substrate, the incident light having the predetermined wavelength amongst the plurality of diffraction orders so as to promote scattering of the electromagnetic energy in at least a first direction and suppress scattering of the electromagnetic energy in at least a second direction, the first direction and the second direction corresponding to a first diffraction order and a second diffraction order of the plurality of diffraction orders, respectively, and wherein at least one optical nanoantenna in the array of optical nanoantennas comprises at least one of a semiconductor material and a dielectric material, and said at least one optical nanoantenna is configured on the substrate to support electric multipolar resonant modes and magnetic multipolar resonant modes.
2. The diffractive optical element according to claim 1, wherein said each optical nanoantenna is configured to promote scattering of the electromagnetic energy in at least the first direction and a third direction, and suppress scattering of the electromagnetic energy in at least the second direction and a fourth direction, the third direction and the fourth direction corresponding to a third diffraction order and a fourth diffraction order of the plurality of diffraction orders, respectively.
3. The diffractive optical element according to claim 1, wherein said each optical nanoantenna in the array of optical nanoantennas is configured to have substantially the same geometrical configuration.
4. The diffractive optical element according to claim 1, wherein said each optical nanoantenna is configured to exhibit constructive interference of the electromagnetic energy in the far-field in at least the first direction so as to enhance scattering efficiency of the electromagnetic energy in at least the first direction and to exhibit destructive interference of the electromagnetic energy in the far-field in at least the second direction so as to minimize scattering efficiency of the electromagnetic energy in at least the second direction.
5. The diffractive optical element according to claim 4, wherein said each optical nanoantenna is configured to have an asymmetrical shape, the asymmetrical shape being configured to facilitate the array of optical nanoantennas in exhibiting constructive interference of the electromagnetic energy in the far-field in at least the first direction and destructive interference of the electromagnetic energy in the far-field in at least the second direction.
6. The diffractive optical element according to claim 5, wherein said each optical nanoantenna is configured to comprise a first component having a ring shape and a second component having a cylinder shape, wherein the first and second components are configured to intersect each other.
7. The diffractive optical element according to claim 5, wherein said each optical nanoantenna is configured to comprise a first component having a cylinder shape and a second component having a cylinder shape spaced apart from the first component, wherein the first and second components are configured to have a different diameter.
8. The diffractive optical element according to claim 1, wherein the first direction has an angle with respect to a zero diffraction order in the range of about 30 to about 89 degrees.
9. The diffractive optical element according to claim 1, wherein the predetermined wavelength is selected from a visible range or an infrared range, and each optical nanoantenna has a dimension in said lateral direction that is less than the predetermined wavelength.
10. A method of forming a diffractive optical element, the method comprising: providing a substrate made of a transparent material; arranging an array of optical nanoantennas on the substrate, the array of optical nanoantennas being spaced apart periodically in a lateral direction for supporting a plurality of diffraction orders at a predetermined wavelength; and configuring each optical nanoantenna in the array of optical nanoantennas to control distribution of electromagnetic energy from an incident light transmitted through the substrate and illuminated on a side of the array of optical nanoantennas that is arranged on the substrate, the incident light having the predetermined wavelength amongst the plurality of diffraction orders so as to promote scattering of the electromagnetic energy in at least a first direction and suppress scattering of the electromagnetic energy in at least a second direction, the first direction and the second direction corresponding to a first diffraction order and a second diffraction order of the plurality of diffraction orders, respectively, wherein at least one optical nanoantenna in the array of optical nanoantennas comprises at least one of a semiconductor material and a dielectric material, and said at least one optical nanoantenna is configured on the substrate to support electric multipolar resonant modes and magnetic multipolar resonant modes.
11. The method according to claim 10, wherein said each optical nanoantenna is configured to promote scattering of the electromagnetic energy in at least the first direction and a third direction, and suppress scattering of the electromagnetic energy in at least the third direction and a fourth direction, the third direction and the fourth direction corresponding to a second diffraction order and a fourth diffraction order of the plurality of diffraction orders, respectively.
12. The method according to claim 10, wherein said each optical nanoantenna in the array of optical nanoantennas is configured to have substantially the same geometrical configuration.
13. The method according to claim 10, wherein said each optical nanoantenna is configured to exhibit constructive interference of the electromagnetic energy in the far-field in at least the first direction so as to enhance scattering efficiency of the electromagnetic energy in at least the first direction and to exhibit destructive interference of the electromagnetic energy in the far-field in at least the second direction so as to minimize scattering efficiency of the electromagnetic energy in at least the second direction.
14. The method according to claim 13, wherein said each optical nanoantenna is configured to have an asymmetrical shape, the asymmetrical shape configured to facilitate the array of optical nanoantennas in exhibiting constructive interference of the electromagnetic energy in the far-field in at least the first direction and destructive interference of the electromagnetic energy in the far-field in at least the second direction.
15. The method according to claim 14, wherein said each optical nanoantenna is configured to comprise a first component having a ring shape and a second component having a cylinder shape, wherein the first and second components are configured to intersect each other.
16. The method according to claim 14, wherein said each optical nanoantenna is configured to comprise a first component having a cylinder shape and a second component having a cylinder shape spaced apart from the first component, wherein the first and second components are configured to have a different diameter.
17. The method according to claim 10, wherein the first direction has an angle with respect to a zero diffraction order in the range of about 30 to about 89 degrees.
18. A flat optical element comprising: a substrate made of a transparent material; and an array of optical nanoantennas arranged on the substrate to form a plurality of zones, each zone comprising a sub-array of optical nanoantennas spaced apart periodically in a lateral direction for supporting a corresponding plurality of diffraction orders at a predetermined wavelength, wherein, for each zone of the plurality of zones, each optical nanoantenna in the sub-array of optical nanoantennas of the respective zone is configured to control distribution of electromagnetic energy from an incident light transmitted through the substrate and illuminated on a side of the sub-array of optical nanoantennas that is arranged on the substrate, the incident light having the predetermined wavelength amongst the corresponding plurality of diffraction orders so as to promote scattering of the electromagnetic energy in at least a respective first direction and suppress scattering of the electromagnetic energy in at least a respective second direction, the first respective direction and the second respective direction corresponding to a first diffraction order and a second diffraction order of the corresponding plurality of diffraction orders, respectively, and wherein at least one optical nanoantenna in the sub-array of optical nanoantennas of the respective zone comprises at least one of a semiconductor material and a dielectric material, and said at least one optical nanoantenna is configured on the substrate to support electric multipolar resonant modes and magnetic multipolar resonant modes.
19. The flat optical element according to claim 18, wherein: each optical nanoantenna in the sub-array of optical nanoantennas of the respective zone is configured to have substantially the same geometrical configuration; the first diffraction order and the second diffraction order belong to the same order level at opposing sides with respect to a zero diffraction order; and the plurality of zones are a plurality of angular zones, and the sub-array of optical nanoantennas of the respective zone is configured such that an angle which the respective first direction makes with an axis increases as the respective zone is further from the axis for focusing the incident light towards the axis.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
(1) Embodiments of the present invention will be better understood and readily apparent to one of ordinary skill in the art from the following written description, by way of example only, and in conjunction with the drawings, in which:
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DETAILED DESCRIPTION
(34) Various embodiments of the present invention provide a diffractive optical element and a method of forming the diffractive optical that seek to overcome, or at least ameliorate, one or more of the deficiencies of conventional diffractive optical elements. In particular, various embodiments of the present invention provide a diffractive optical element, or more specifically, a diffraction grating, with controlled distribution (scattering) of energy (i.e., electromagnetic energy from an incident light illuminated on the diffractive optical element) amongst a plurality of diffraction orders supported by the diffractive optical element at a predetermined or particular wavelength. For example, the diffractive optical element according to various embodiments of the present invention is able to achieve a highly directional scattering pattern (which may also be referred to as the angular distribution of electromagnetic energy), as well as an exceptionally large maximum bending angle (θ.sub.max), such as up to 89 degrees, thereby advantageously overcoming various limitations or deficiencies associated with conventional optical elements, such as those as described hereinbefore in the background. The improved diffractive optical element according to various embodiments of the present invention may in turn be applied or implemented to realize various optical devices or elements (components), such as, but not limited to, lenses, polarizers, polarization beam splitters, and so on, resulting in improved optical devices. For example, according to various embodiments of the present invention, the diffractive optical element with highly directional scattering pattern and exceptionally large maximum bending angle is advantageously applied to realize a flat optical lens with significantly improved numerical aperture, such as an ultra-flat (sub-wavelength thick) lens with ultra-high (near-unity) numerical aperture.
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(36) The array of nanoantennas 204 may be spaced apart periodically by a predetermined distance (d) on the substrate 202 in the lateral direction 206 (e.g., in the direction of the diffractive period). That is, adjacent/neighboring pairs of nanoantennas 204 in the array 203, such as every adjacent/neighboring two nanoantennas 204, in the lateral direction 206 may be spaced apart periodically by the predetermined distance. It will be appreciated by a person skilled in the art that the configuration of the array of nanoantennas 204 shown in
(37) Accordingly, by configuring each nanoantenna 204 in the array 203 to promote scattering of the electromagnetic energy in at least the first direction 210, while suppressing scattering of the electromagnetic energy in at least the second direction 212, a highly directional scattering pattern can be achieved by the diffractive optical element 200, such as in a direction of a desired diffraction order amongst different diffraction orders supported by the array of nanoantennas 204 for various purposes. As a non-limiting example, as the array of nanoantennas 204 may be configured to produce an exceptionally large maximum bending angle of an incident light 208 (such as up to 89 degrees) in a direction of a desired diffraction order, various embodiments of the present invention advantageously enable an improved flat optical lens with an ultra-high (near-unity) numerical aperture to be realized.
(38) In various embodiments, each optical nanoantenna in the array of nanoantennas 204 may be configured to promote scattering of the electromagnetic energy in at least the first direction 210 and a third direction 220, and suppress scattering of the electromagnetic energy in at least the second direction 212 and a fourth direction 222, the third direction 220 and the fourth direction 222 corresponding to a third diffraction order and a fourth diffraction order of the plurality of diffraction orders, respectively. Similarly, it will be appreciated by a person skilled in the art that the third and fourth directions 220, 222 shown in
(39) In various embodiments, each nanoantenna 204 in the array 203 is configured to have substantially the same geometrical configuration, such as at least substantially identical or uniform. In various embodiments, the geometrical configuration of a nanoantenna comprises a form (e.g., shape and/or size) and an orientation of the nanoantenna. For example, each nanoantenna 204 in the array 203 is configured on the substrate 202 to have identical geometrical configuration, including its identical form and orientation. In this regard, according to various embodiments, since each nanoantenna (nanoantenna unit-cell) is specifically configured to promote scattering of the electromagnetic energy in at least the first direction 210, while suppressing scattering of the electromagnetic energy in at least the second direction 212, to obtain a highly directional scattering pattern (i.e., to achieve angle-suppressed scattering), each nanoantenna 204 in the array 203 may advantageously be configured to have substantially the same geometrical configuration while still being able to obtain the highly directional scattering pattern.
(40) In various embodiments, the first direction 210 and the second direction 212 may correspond to diffraction orders belonging to the same order level (e.g., the same m.sup.th order level), such as the first order level (e.g., m=±1), the second order level (e.g., m=±2), the third order level (e.g., m=±3), and so on, in transmission and/or reflection. For example, the first direction 210 and the second direction 212 may correspond to diffraction orders belonging to the same order level at opposing sides with respect to a zero diffraction order in transmission, namely, the positive first diffraction order (e.g., m=+1) and the negative first diffraction order (m=−1), respectively.
(41) In various embodiments, to promote scattering of the electromagnetic energy in at least the first direction 210 and suppress scattering of the electromagnetic energy in at least the second direction 212, each optical nanoantenna 204 in the array 203 is configured to exhibit constructive interference of the electromagnetic energy in the far-field in at least the first direction 210 so as to enhance scattering efficiency of the electromagnetic energy in at least the first direction 210 and to exhibit destructive interference of the electromagnetic energy in the far-field in at least the second direction 212 so as to minimize scattering efficiency of the electromagnetic energy in at least the second direction 212.
(42) In various embodiments, to facilitate each optical nanoantenna 204 in the array 203 in exhibiting constructive interference of the electromagnetic energy in the far-field in at least the first direction 210 and destructive interference of the electromagnetic energy in the far-field in at least the second direction 212, each optical nanoantenna of the array of optical nanoantennas 204 is configured to have an asymmetrical shape. In various embodiments, the asymmetrical shape of a nanoantenna may be with respect to a plane (e.g., vertical plane) passing through the nanoantenna (e.g., a center thereof) and at least substantially perpendicular to the lateral direction (e.g., the direction of the diffractive period) in which the nanoantennas are spaced apart in the array 203. In various other embodiments, the asymmetrical shape of a nanoantenna may alternatively or additionally be with respect to a plane (e.g., horizontal plane) passing through the nanoantenna (e.g., a center thereof) and at least substantially parallel to the array 203 (that is, parallel to the surface of the substrate 202 on which the array of nanoantennas is arranged). For example, the first diffraction order and the second diffraction order may belong to the same order level as described hereinbefore. In this regard, the asymmetrical shape of the optical nanoantennas 204 produces electromagnetic energy from the incident light thereto that is asymmetrical (e.g., with respect to a plane (e.g., vertical plane) perpendicular to the direction of the diffraction period). Therefore, the asymmetrical shape of each optical nanoantennas 204 may be configured such that the array of nanoantennas 204 as a whole (that is, taking into account the interactions amongst the nanoantennas 204 in the array 203) produce the above-mentioned constructive and destructive interferences of the electromagnetic energy in the far-field to provide the desired distribution of the electromagnetic energy amongst the different diffraction orders, such as a highly directional scattering pattern in one or more desired directions corresponding to one or more diffraction orders.
(43) According to various embodiments of the present invention, the optical nanoantenna 204 may be configured to have various asymmetrical shapes as long as the asymmetrical shape facilitates the optical nanoantenna 204 to exhibit the desired constructive and destructive interference of the electromagnetic energy in the far-field to produce an overall scattering/radiation pattern having large or sufficient component(s) in one or more desired directions and zero or minimized component(s) in one or more non-desired directions. That is, various embodiments of the present invention is not limited to any specific asymmetrical shapes of the optical nanoantenna, and that various asymmetrical shapes as appropriate that satisfy the above-mentioned conditions are within the scope of the present invention.
(44) In various embodiments, the amount or percentage of the electromagnetic energy transmitted from the array that are concentrated or scattered in the at least a first direction 210 (i.e., the desired one or more directions) is about 60% or more, about 70% or more, about 80% or more, about 90% or more, or about 95% or more, and the amount of the electromagnetic energy that are concentrated or scattered in the at least a second direction 212 is about 40% or less, about 30% or less, about 20% or less, about 10% or less, or about 5% or less.
(45) In various embodiments, however, particular asymmetrical shapes of the optical nanoantenna 204 have been found to be particularly advantageous (e.g., greatly facilitate) in satisfying the above-mentioned conditions.
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(47) In a preferred example embodiment, the second component 308 is configured to intersect the first component 306 in a lateral direction (e.g., in the direction of the diffractive period or the direction in which the nanoantennas 304 are spaced apart in the array). Further, the diameters of the first and second components 306 and 308 are different so as to enhance asymmetry to facilitate the array of nanoantennas to exhibit the desired constructive and destructive interference of the electromagnetic energy in the far-field to produce a desired overall scattering pattern. For example, as shown in
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(49) In a preferred example embodiment, the first and second components 406, 408 are spaced apart in a lateral direction (e.g., in the direction of the diffractive period or the direction in which the nanoantennas 402 are spaced apart in the array). For a better understanding, exemplary configuration (e.g., dimensions) of the nanoantenna 404 will be described in further details later according to various example embodiments of the present invention.
(50) In various embodiments, the first direction 210 has an angle with respect to a zero diffraction order 214 (or an axis perpendicular to the surface of the substrate 202 on which the array of nanoantennas 204 is arranged) in the range of about 30 to about 89 degrees. In various further embodiments, the angle may be in the range of about 40 to about 89 degrees, about 50 to about 89 degrees, about 60 to 89 degrees, about 65 to 89 degrees, about 70 to 89 degrees, about 75 to 89 degrees, about 80 to 89 degrees, about 85 to 89 degrees, or about 87 to 89 degrees.
(51) In various embodiments, the nanoantennas 204 may each be made of metallic, semiconductor, and/or dielectric materials. In various example embodiments, the metallic material may be selected from one or more of silver, gold, aluminum or copper. In various example embodiments, the semiconductor material may be selected from one or more of silicon, germanium, gallium phosphide, gallium arsenide, gallium nitride, indium phosphide, boron phosphide or other III-V semiconductors. In various example embodiments, the dielectric material may be selected from one or more of titanium dioxide, zinc oxide, copper oxide, tellurium dioxide, or hafnium dioxide. In various embodiments, the optical nanoantennas 204 may each be made of non-conductive material(s) (i.e., semiconductor and/or dielectric materials) having a refraction index ‘n’ larger than two.
(52) In various embodiments, at least one nanoantenna in the array 203 of nanoantennas 204 (e.g., all optical nanoantennas in the array 203) comprises at least one of a semiconductor material and a dielectric material. For example, it has been identified according to embodiments of the present invention that the use of semiconductor and/or dielectric materials are advantageous in that such materials have lower dissipative losses and even with simple nanoantenna shapes, such materials are able to support two sets of resonant modes, namely, electric and magnetic, in several multipolar orders. This is greatly beneficial because electromagnetic radiation from the different modes can interfere with each other, allowing the generation of complex, directional and asymmetric, scattering patterns, and therefore, allowing more flexibility to control the energy distribution in the diffractive optical element. Furthermore, in various embodiments, such at least one nanoantenna 204 supports at least one of electric multipolar resonant modes and magnetic multipolar resonant modes.
(53) In various embodiments, the predetermined wavelength is selected from a visible range or an infrared range. Furthermore, each nanoantenna 204 has a dimension in the lateral direction 206 (e.g., in the direction in which the nanoantennas are spaced apart or the direction of the diffractive period) that is less than the predetermined wavelength (i.e., sub-wavelength). For example, each nanoantenna 204 has a largest dimension that is sub-wavelength.
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(55) It will be appreciated by a person skilled in the art that the terminology used herein is for the purpose of describing various embodiments only and is not intended to be limiting of the present invention. As used herein, the singular forms “a”, “an” and “the” are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms “comprises” and/or “comprising,” when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof.
(56) In order that the present invention may be readily understood and put into practical effect, various example embodiments of the present invention will be described hereinafter by way of examples only and not limitations. It will be appreciated by a person skilled in the art that the present invention may, however, be embodied in various different forms or configurations and should not be construed as limited to the example embodiments set forth hereinafter. Rather, these example embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the present invention to those skilled in the art.
(57) As described hereinbefore, various embodiments of the present invention provide a diffractive optical element, or more specifically, a diffraction grating, with controlled distribution (scattering) of energy (i.e., electromagnetic energy from an incident light illuminated on the diffractive optical element) amongst a plurality of diffraction orders supported by the diffractive optical element at a predetermined or particular wavelength (λ). Such a diffractive optical element may then be applied or implemented to realize various optical devices or elements (components), such as, but not limited to, lenses, diffraction gratings, polarizers, polarization beam splitters, and so on, resulting in improved optical devices. For example, the diffractive optical element with highly directional scattering pattern and exceptionally large maximum bending angle can advantageously be applied to realize a flat optical lens with significantly improved numerical aperture, such as an ultra-flat (sub-wavelength thick) lens with ultra-high (near-unity) numerical aperture.
(58) Various example embodiments provide a two-dimensional diffraction grating with controlled energy distribution among the different diffraction modes supported by the grating at a given wavelength, λ. The grating comprises periodic arrangements (array) of nanoantennas (inclusions) designed/configured to have angle-suppressed scattering patterns when irradiated with an incident light having that given wavelength (λ). In various example embodiments, the operating principle is based on configuring/designing each nanoantenna in an array such that their scattering ability is inhibited/suppressed at angle(s) coinciding with (corresponding to) the diffraction order(s)/mode(s) for which energy suppression is desired and non-zero/not suppressed at angle(s) coinciding with (corresponding to) the diffraction order(s)/mode(s) for which energy-concentration is desired. In various example embodiments, the nanoantennas are made of a semiconductor material or a dielectric material, or a combination thereof. In various example embodiments, angle-suppressed scattering is produced by configuring each nanoantenna in an array forming the diffraction grating to produce angular interference of the multipolar modes or resonances excited in the nanoantennas when the grating is irradiated by the incident light. In various embodiments, at least one (e.g., all) of the nanoantennas in the array supports at least one of electric multipolar resonant modes and magnetic multipolar resonant modes.
(59) As will be described later in further details, example embodiments of the present invention are advantageously able to produce an ultra-flat optical lens (thickness<λ/3) with near-unity numerical aperture (NA>0.99).
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(61) In various example embodiments, the array 203 of nanoantennas 204 may be arranged in a one-dimensional or two-dimensional lattice and each nanoantenna 204 configured to provide a desired angle-suppressed scattering pattern, such as the scattering pattern as schematically shown in
(62) In a grating formed by the periodic arrangements (array) of nanoantennas 204, the diffraction angles are determined by the periods of the array of nanoantennas 204 and the amount of electromagnetic energy going into each diffraction order is related to the scattering efficiency of the nanoantennas in the corresponding angle. In various example embodiments, in order to concentrate the electromagnetic energy into particular desired diffraction order(s), the nanoantennas are configured such that their scattering efficiencies are non-zero at the corresponding angle(s), and are suppressed (e.g., as close as possible to zero) at the corresponding angles that coincide with the diffraction angle(s) for which no energy is desired, thus inhibiting diffraction (scattering) of the electromagnetic energy into such directions. Scattering from each nanoantenna in the array into any angle apart from those of diffraction modes is irrelevant (may be disregarded) because it is compensated (or cancelled) by the scattering from the remaining nanoantennas in the array, leading to zero energy radiated in such directions.
(63) Various example embodiments of the present invention will now be described involving configurations of two-dimensional arrays supporting diffractive orders/modes in the direction of one of the two periods of the lattice only, while being sub-diffractive (or non-diffractive) for the other of the two periods. However, it will be appreciated by a person skilled in the art that the present invention is not limited to supporting diffractive orders in the direction of only one diffractive period of the lattice and can also be applied to control the energy distribution in gratings that are diffractive for both periods of the lattice. Furthermore, it will be appreciated that the configuration of the two-dimensional array is not limited to a square or rectangular array, and can be other types of configuration as desired or appropriate, such as circular or hexagonal.
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θ.sub.t.sup.m=arcsin[m.Math.λ/(n.sub.t.Math.P)], and (Equation 1)
θ.sub.r.sup.m=arcsin[m.Math.λ/(n.sub.i.Math.P)], (Equation 2)
where m=0, ±1, ±2, ±3, and so on, denotes the diffraction order (or order level), namely, zero diffraction order, first diffraction order, second diffraction order, third diffraction order, and so on.
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(67) It will be appreciated by a person skilled in the art that the grating 650 may be illuminated by the incident light 208 from the substrate side as shown in
(68) Accordingly, the array of nanoantennas 204 may be configured to distribute the electromagnetic energy of an incoming wave 208 into various different diffraction order(s) supported by the array of nanoantennas 204 as desired, either in transmission or in reflection. In particular, according to various example embodiments, each nanoantenna 204 in the array 203 is configured to exhibit scattering patterns with zeros (or as close as possible to zero) at the angle(s) corresponding to the diffracted order(s) that is desired to be inhibited and to exhibit appropriate or sufficient efficiency at the angle(s) corresponding to diffracted order(s) where energy concentration is desired. In various example embodiments, such a technique may be applied to obtain the bending of the electromagnetic waves at the interface of the array of nanoantennas 204 by any desired angle in the range of 0 to 89 degrees, provided that the size of each nanoantenna in the array is sub-wavelength in the direction of the diffractive period.
(69) In various example embodiments, forming a diffractive optical element includes a first step of arranging an array of nanoantennas on a substrate such that the array of nanoantennas support the diffraction order(s) at the desired angular position(s) at the operating wavelength, and a second step of configuring the nanoantennas (each nanoantenna) in the array to control the distribution of electromagnetic energy into the diffraction order(s) at such desired angular position(s).
(70) For example, in relation to the above-mentioned first step, it is noted that in a given grating (e.g., one- or two-dimensional array of nanoantennas), various parameters/properties, including the lattice symmetry (e.g., square, hexagonal, and so on), the lattice periods, and the index of refraction of the surrounding media (e.g., substrate and covering medium, determine the angular position of the different diffraction orders (in reflection and transmission) supported by the grating under a particular wavelength and angle of incidence. Accordingly, the array of nanoantennas may be arranged on the substrate based on appropriate parameters/properties determined in order to support the diffraction order(s) at the desired angular position(s) at a particular wavelength. In this regard, it will be appreciated by a person skilled in the art that the appropriate parameters/properties for the grating may be determined for achieving the diffraction order(s) at the desired angular position(s), and the present invention is not limited to any specific values of parameters/properties. For a better understanding, exemplary configurations of the grating, including exemplary parameters/properties for achieving certain diffraction order(s) at desired angular position(s) according to various embodiments of the present invention will be described later below by way of examples only for illustration purposes and without limitations.
(71) In relation to the above-mentioned second step, given the desired angular position(s) of the diffraction order(s) supported by the grating (array), the nanoantennas (each nanoantenna) in the array may then be configured based on the following factors/conditions according to example embodiments of the present invention such that the grating is able to control distribution of the electromagnetic energy into the desired diffraction order(s) supported by the grating. In various embodiments, as mentioned hereinbefore, each nanoantenna in the array of nanoantennas may be configured to have substantially the same geometrical configuration. For example, each nanoantenna in the array is configured on the substrate to have identical geometrical configuration, including identical form and orientation.
(72) As a first factor, the overall scattering/radiation pattern of each of the nanoantennas in the array is zero or minimized (e.g., as close to zero as possible) at the angle(s) that correspond to diffraction order(s) into which no energy concentration is desired. The overall scattering/radiation pattern of each nanoantenna in the array refers to the scattering/radiation pattern of the nanoantenna taking into account the interactions with all of the nanoantennas in the array.
(73) As a second factor, the overall scattering/radiation pattern of each of the nanoantennas in the array is non-zero or with sufficient efficiencies at the angle(s) that correspond to diffraction order(s) into which energy concentration is desired.
(74) As a third factor, the energy distribution among the non-zero diffraction orders (i.e., how much energy is desired to be concentrated into each order) is determined by the scattering/radiation intensity from the nanoantennas at those angles. Therefore, according to various example embodiments, each of the nanoantennas in the array is configured to produce scattering/radiation intensity at the desired angle(s) with an amount corresponding to or proportional to the electromagnetic energy that is desired to be concentrated in those desired angle(s). For example, if it is desired to concentrate double energy in a positive first diffraction order as compared to a positive second diffraction order, then each of the nanoantennas in the array is configured such that the scattering/radiation intensity into the positive first diffraction order is double at the angle corresponding to the positive first diffraction order than the angle corresponding to the positive second diffraction order.
(75) As a fourth factor, in the case of the diffraction order corresponding to direct transmission (i.e., zero diffraction order), the contribution of the incident wave should be taken into account. For example, the electromagnetic energy into the T.sub.0 diffraction order results from summing up the amplitudes of the incident light directly transmitted from the substrate into the covering medium, as if the nanoantennas were not present, and the overall scattering from the nanoantennas in the direction corresponding to this direct transmission. It will be appreciated that, when summing up the amplitudes, the phase of the electromagnetic waves, both directly transmitted and scattered by the nanoantenna array, should be taken into account. As a consequence, if suppression of electromagnetic energy into the T.sub.0 diffraction order is desired, the nanoantenna array may be configured in such a way that the scattering from the nanoantenna array into the direction of the directly transmitted light has the same amplitude but opposite phase as the directly transmitted light, as to produce a destructive interference between them.
(76) By way of examples only for illustration purposes and without limitations, a number of exemplary configurations of the diffractive optical elements for controlling distribution of electromagnetic energy from an incident light to promote scattering of the electromagnetic energy in certain desired direction(s) and suppress scattering of the electromagnetic energy in certain non-desired direction(s) will now be described according to various example embodiments to demonstrate how the diffractive optical elements may be formed to achieve angle-suppressed scattering at certain desired angle(s).
(77) In the exemplary configurations to be described below, the nanoantennas in the array are made of dielectric and semiconductor materials. In this regard, as explained hereinbefore, although the nanoantennas may be realized using metallic material, the use of semiconductor and/or dielectric materials may be advantageous in that such materials have lower dissipative losses and, even with simple nanoantenna shapes, such materials can support two sets of resonant modes, namely, electric and magnetic resonances, in several multipolar orders. This is greatly beneficial because electromagnetic radiation from the different modes can interfere with each other, allowing the generation of complex, directional and angle-suppressed scattering patterns and, therefore, allowing more flexibility to control the energy distribution in the diffractive optical element.
(78) The exemplary configurations were characterized by electromagnetic simulations using the Finite Difference Time Domain (FDTD) method, and one of the exemplary configurations was also verified experimentally.
(79) A first exemplary configuration of the diffractive optical element according to a first example embodiment will now be described. In the first exemplary configuration, each nanoantenna 304 of the array of nanoantennas is configured to comprise a first component 306 having a ring shape (or in the form of a longitudinally hollow cylinder) and a second component 308 having a cylinder shape (or in the form of a full cylinder), whereby the first component 306 and the second component 308 are configured to intersect each other, as shown in the unit-cell of the nanoantenna 304 depicted in
(80) In the first exemplary configuration, the nanoantenna 304 is made of silicon, and is supported by a transparent SiO.sub.2 substrate 202 on one side and surrounded by air 310 on an opposite side. The nanoantenna 304 may be made of any other material(s) with refraction index n>2, such as one or more of TiO.sub.2, ZnO, GaN, GaAs, InP, Ge, other group IV and III-V semiconductors, and so on. The substrate 202 may be made of any other transparent material, such as glass, quartz, SiN, and so on. The surrounding air 310 covering the nanoantenna 304 may instead be any transparent material(s), such as one or more of glass, quartz, SiN, and so on. It can be understood that different specific materials may require different geometrical parameters of the nanoantenna to be adjusted/modified for the nanoantenna to operate at the desired wavelength of incidence.
(81) The nanoantenna 304 is formed by the intersection of cylinder 308 and a non-concentric ring 306. In the first exemplary configuration, the exemplary dimensions of the nanoantenna 304 indicated in
(82)
(83) In the diffractive optical element according to the first exemplary configuration, each nanoantenna 304 supports different multipolar modes. Due to the asymmetry of the nanoantenna 304, and induced by the retardation of the wave, some of these multipoles are asymmetric with respect to the incident direction (e.g. generating a tilting of induced dipoles). The scattered electromagnetic fields from each of those modes may constructively or destructively interfere in the far-field leading to the appearance of lobes or nodes (suppression) in the total radiation at certain angles. As a consequence of the asymmetry of the multipoles, the associated scattering pattern may also be asymmetric. The nanoantennas 304 are configured/designed to make the angles at which the scattering is suppressed coincide with those angles corresponding to the T.sub.0 diffraction order (which includes also contribution from the directly transmitted incident wave) and the T.sub.+1 order (thus inhibiting the diffraction into these diffraction orders), but having a non-zero contribution in the T.sub.−1 diffraction order (the diffraction order at which concentration of energy (or bending of energy) is desired). The calculated radiation pattern (power versus angle) at the working wavelength of 799.56 nm from one of the unit-cells of the grating is shown in
(84) A better illustration of the amount of power radiated at each diffraction angle is obtained by enlarging the shaded area 1010 shown in
(85) A second exemplary configuration of the diffractive optical element according to a second example embodiment will now be described. In the second exemplary configuration, each nanoantenna 404 of the array of nanoantennas is configured to comprise a first component 406 having a cylinder shape (or in the form of a full cylinder shape) and a second component 408 also having a cylinder shape (or in the form of a full cylinder) spaced apart from the first component 406, as shown in the unit-cell of the nanoantenna 404 depicted in
(86) In various example embodiments, the nanoantenna 404 may further include one or more additional components, each also having a cylinder shape, spaced apart from the second component (in the same or similar manner as the second component 408 is spaced apart from the first component 406) for various purposes, such as to facilitate in obtaining certain desired bending angles as will be shown later below in Tables 3 and 4.
(87) In the second exemplary configuration, the nanoantenna 404 is made of silicon (i.e., pair of electromagnetically coupled silicon nano-cylinders), and is supported on one side by a transparent SiO.sub.2 substrate 202 and covered on an opposite side by surrounding air 310. Similar to the first exemplary configuration, the nanoantenna 404 may be made of any other material with refraction index n>2, such as TiO.sub.2, ZnO, GaN, GaAs, InP, Ge, other group IV and III-V semiconductors, and so on. The substrate 202 may be made of any other transparent material, such as glass, quartz, SiN, and so on. The surrounding air 310 covering the nanoantenna 404 may instead be any transparent material, such as glass, quartz, SiN, and so on. It can be understood that different specific materials may require different geometrical parameters of the nanoantenna to be adjusted/configured for the nanoantenna to operate at the desired wavelength of incidence.
(88) In the second exemplary configuration, each nanoantenna 404 of the array is configured with the following exemplary dimensions such that the array of such nanoantennas 404 is operable to concentrate the transmitted energy into the T.sub.−1 diffraction order at 713.9 nm wavelength when illuminated from the substrate side: the height (H) of the pair of electromagnetically coupled cylinders is 250 nm, the inter-cylinder gap (g) is 50 nm, and the diameters (D.sub.1, D.sub.2) of the large and small cylinders 408, 406 are 190 nm and 150 nm, respectively. The diffractive period (P.sub.1) is 721 nm and the non-diffractive period (P.sub.2) is 260 nm.
(89)
(90) The diffractive optical element according to the second exemplary configuration operates similarly to the first exemplary except that in the second exemplary configuration, each nanoantenna (unit-cell) having a pair of electromagnetically coupled cylinders supports different multipolar modes that interact. The scattered electromagnetic fields from each of the different multipolar modes interfere in the far-field leading to the suppression of the total radiation at certain angles, which are configured to coincide with the particular angles corresponding to the T.sub.0 diffraction order and the T.sub.+1 diffraction order, but having a non-zero contribution in the T.sub.−1 diffraction order. The calculated scattering/radiation pattern (power versus angle) at the working wavelength of 713.9 nm from one of the unit-cells of the grating in the second example embodiment is shown in
(91) A third exemplary configuration of the diffractive optical element according to a third example embodiment will now be described to demonstrate that the operating principle holds for different spectral ranges by, for example, setting appropriate dimensions and selecting suitable material(s). In the third exemplary configuration, each nanoantenna of the array is formed by a pair of electromagnetically coupled nano-cylinders as described hereinbefore in the second example embodiment, except that they are made of titanium dioxide (TiO.sub.2) instead of silicon. In this third example embodiment, experimental verification of the operation of the diffractive optical element will also be presented. As will be shown later below, the grating formed by such nanoantennas according to the third exemplary configuration is able to bend transmitting light having a wavelength of 560 nm at an angle of about 51 degrees, corresponding to the T.sub.−1 diffraction order, and experimentally, with an overall transmission into the desired T.sub.−1 diffraction order exceeding 62% (which translates into about 72% efficiency, i.e., of the transmitted power being concentrated into this desired T.sub.−1 diffraction order).
(92)
(93) Accordingly, in the third exemplary configuration, the electromagnetically coupled cylinders have a designed height (H) of 305 nm, the diameters (D.sub.1, D.sub.2) of the larger and smaller disks are 235 nm and 160 nm, respectively. The inter-particle gap (g) is 100 nm. The diffractive period (P.sub.1) is set to 720 nm and the non-diffractive period (P.sub.2) is set to 365 nm. For illustration purpose only, scanning electron microscope (SEM) images of the actual fabricated sample of the diffractive optical element according to the third exemplary configuration are shown in
(94) For the diffractive optical element 1400 according to the third exemplary configuration, to characterize the capacity of the diffractive optical element to concentrate the electromagnetic energy into the desired diffraction order, the transmission power into the different diffraction orders as a function of the wavelength was simulated and also measured experimentally based on the sample fabricated. The simulated results are plotted in
(95) At the operating wavelength, the simulated transmission power into the different diffraction orders are T.sub.−1=65.51%, T.sub.0=8% and T.sub.+1=22.83%, while the experimental transmission power into the different diffraction orders are T.sub.−1=62.9%, T.sub.0=11.8% and T.sub.+1=12.7%.
(96) In the third example embodiment, it should be noted that the value of the bending angle of about 51 degrees was chosen in such a way that it could be accurately measured by the experimental setup. However, such a bending angle is far from the higher bending angle that is achievable by the diffractive optical element according to various example embodiments of the present invention. For example, as illustrated hereinbefore in the first and second embodiments, bending angles of about 88 and 82 degrees can be achieved, along with high transmission and large scattering efficiencies, based on the configurations of the array of nanoantennas.
(97) As described hereinbefore, the diffractive optical element according to various embodiments of the present invention may be applied or implemented to realize various optical devices or elements (components), such as, but not limited to, lenses, diffraction gratings, polarizers, polarization beam splitters, and so on, resulting in improved optical devices.
(98) In this regard,
(99) In various embodiments, the first diffraction order and the second diffraction order may belong to the same order level, such as diffraction orders at opposing sides with respect to a zero diffraction order of the corresponding plurality of diffraction orders. For example, each zone 1606 of nanoantennas 1604 may be configured accordingly to control distribution of electromagnetic energy so as to promote scattering of the electromagnetic energy from that zone in one or more desired directions and to suppress scattering of the electromagnetic energy from that zone in one or more non-desired directions as appropriate for various purposes.
(100) It will be appreciated to a person skilled in the art that the flat optical element 1600 is not limited to the configuration as shown in
(101) As an example,
(102) To demonstrate the effectiveness of the diffractive optical element according to various embodiments of the present invention in realizing various optical devices or elements, an example implementation of the diffractive optical element to realize a spherical flat optical lens will now be described according to a fourth example embodiment of the present invention as shown in
(103) In order to mimic a lens, the array of nanoantennas should efficiently concentrate the electromagnetic energy of the incident light into a desired diffraction order and suppress all others, thus bending the light beam into the particular angle corresponding to this desired diffraction order. Furthermore, such a particular angle should be different in the different regions/zones of the array in order to produce the focusing effect of a traditional lens.
(104) As described hereinbefore, the numerical aperture of a lens is determined by the maximum bending angle achievable. In this fourth example embodiment, the nanoantennas 404 in zones requiring large bending angle are each formed by a pair of electromagnetically coupled silicon cylinders as described hereinbefore with respect to
(105) TABLE-US-00001 TABLE 1 Exemplary values of various parameters for different zones of the flat optical element according to the fourth example embodiment of the present invention Period, Δz Approx. θ (°) z.sub.0 (nm) (nm) N.sub.periods z.sub.min (nm) z.sub.max (nm) Transmission Lateral size (nm) 9.00 6675.0 4563.6 1 4393.2 8956.8 47.73 283 14.00 10507.8 2951.0 1 9032.3 11983.3 43.43 280 17.40 13207.3 2387.3 1 12013.6 14400.9 44.15 277 20.20 15506.1 2067.5 1 14472.4 16539.9 46.63 272 22.60 17543.0 1857.7 1 16614.2 18471.9 56.36 261 24.70 19384.3 1708.4 1 18530.0 20238.5 47.76 281.5 26.60 21104.4 1594.4 1 20307.2 21901.5 55.92 262 28.30 22692.4 1505.8 1 21939.5 23445.4 56.28 253 29.90 24234.1 1432.1 1 23518.1 24950.2 40.07 285 31.40 25725.1 1370.2 1 25040.0 26410.2 54.80 260 32.80 27160.2 1317.9 1 26501.3 27819.2 56.38 260 34.10 28533.9 1273.4 1 27897.2 29170.6 57.35 260 35.30 29839.9 1235.4 1 29222.2 30457.6 58.40 260 36.40 31071.5 1203.0 1 30470.0 31673.1 57.69 260 37.50 32338.6 1172.7 1 31752.2 32924.9 58.98 260 38.50 33523.2 1146.8 1 32949.8 34096.6 60.09 260 39.50 34741.2 1122.3 1 34180.0 35302.4 61.00 260 40.40 35867.7 1101.5 1 35317.0 36418.5 61.66 260 42.45 38550.6 1057.7 4 36435.2 40666.1 62.49 260 45.36 42677.4 1003.3 4 40670.7 44684.0 62.91 260 47.88 46609.4 962.5 4 44684.5 48534.4 63.41 260 50.10 50404.2 930.6 4 48543.0 52265.3 62.39 260 52.07 54078.5 905.1 4 52268.3 55888.6 60.06 260 53.84 57667.5 884.2 4 55899.0 59435.9 55.58 260 55.44 61171.7 866.9 4 59437.9 62905.6 45.29 260 56.89 64612.4 852.3 4 62907.7 66317.1 45.66 260 58.21 67998.5 839.9 4 66318.7 69678.3 45.76 260 59.43 71339.0 829.2 4 69680.7 72997.4 45.84 260 60.55 74641.9 819.8 4 73002.2 76281.6 45.87 260 61.59 77905.5 811.7 4 76282.1 79528.8 45.86 260 62.55 81138.4 804.5 4 79529.5 82747.3 45.74 260 63.45 84344.2 798.1 4 82748.1 85940.3 45.66 260 64.69 89100.9 789.7 8 85941.9 92259.8 45.56 260 66.16 95382.8 780.5 8 92260.9 98504.7 45.41 260 67.47 101600.1 772.9 8 98508.6 104691.7 45.11 260 68.64 107761.3 766.6 8 104695.1 110827.5 44.77 260 69.69 113876.2 761.2 8 110831.3 116921.1 44.43 260 70.64 119949.5 756.7 8 116922.7 122976.2 43.89 260 71.51 125992.9 752.8 8 122981.8 129004.1 43.43 260 72.29 132008.2 749.4 8 129010.6 135005.8 42.94 260 73.19 139483.5 745.8 12 135008.8 143958.1 42.55 260 74.15 148411.1 742.1 12 143958.3 152863.8 41.74 260 75.00 157298.3 739.1 12 152863.8 161732.8 40.99 260 75.89 167621.8 736.1 16 161732.8 173510.7 40.09 260 76.88 180841.8 733.0 20 173511.5 188172.1 39.02 260 77.83 195475.6 730.3 20 188172.6 202778.7 37.09 260 78.81 212967.8 727.7 28 202779.4 223156.2 35.35 260 79.88 236210.6 725.2 36 223157.4 249263.7 33.72 260 80.95 264446.2 722.9 42 249265.1 279627.3 31.82 260 82.00 299816.2 720.9 56 279630.5 300000.0 29.59 260
(106) In the fourth example embodiment, each zone is generated by rotation of the radial elements with an azimuthal angle such that the lateral size is preserved as much as possible. The approximation to the profile of the lens (relating the angle with the radial position) that results from the discretization of the lens into the different zones is plotted in
(107) For illustration purpose and by way of examples only, the configuration of the elements constituting the gratings at the different zones in the lens can be found by referring to the corresponding bending angle in Tables 2 to 5 shown below.
(108) TABLE-US-00002 TABLE 2 Exemplary values of the configuration of each nanoantenna (having two coupled cylinders with respective diameters D1, D2) in different zones of the flat optical element and the associated optical properties/characteristics for angles in the range of about 49 to 87 degrees according to the fourth example embodiment of the present invention Eff. Eff. Eff. P1 P2 D1 D2 g Angle T.sub.−1 (%) T.sub.−1 (%) T.sub.−1 (%) (%) (%) (%) (nm) (nm) (nm) (nm) (nm) (deg.) (p-pol) (s-pol) (aver.) (p-pol) (s-pol) (aver.) 714.9 260 190 155 40 87.0 26.70 7.00 16.85 86.00 71.00 82.38 715.6 260 190 150 40 86.0 30.16 9.00 19.58 80.60 88.25 82.24 716.6 260 190 150 40 85.0 35.40 11.00 23.20 82.70 89.20 84.15 717.8 260 190 150 40 84.0 40.70 13.01 26.86 84.00 90.20 85.42 719.3 260 190 150 50 83.0 39.50 14.60 27.05 82.00 90.00 84.02 720.9 260 190 150 50 82.0 42.86 16.33 29.60 83.00 90.00 84.82 722.8 260 190 150 50 81.0 45.79 17.86 31.82 85.00 91.00 86.60 724.9 260 190 150 50 80.0 48.23 19.20 33.72 86.30 91.50 87.72 727.3 260 190 150 50 79.0 50.20 20.50 35.35 87.70 92.00 88.90 729.8 260 190 150 50 78.0 52.30 21.80 37.05 89.80 92.20 90.49 732.7 260 190 150 50 77.0 54.00 23.20 38.60 90.00 92.00 90.59 735.8 260 190 150 50 76.0 55.70 24.20 39.95 90.92 92.10 91.27 739.2 260 190 150 50 75.0 56.80 25.19 40.99 91.88 92.39 92.04 742.2 260 190 150 50 74.1 57.53 25.95 41.74 92.59 92.61 92.60 746.3 260 190 150 50 73.0 58.28 26.83 42.55 93.48 92.86 93.28 750.4 260 190 150 50 72.1 58.84 27.45 43.14 94.03 93.35 93.81 754.5 260 190 150 50 71.1 59.24 28.15 43.70 94.73 93.56 94.35 759.6 260 190 150 50 70.0 59.48 28.97 44.23 95.51 93.86 94.96 764.7 260 190 150 50 69.0 59.58 29.69 44.64 96.18 94.19 95.51 769.8 260 190 150 50 68.0 59.56 30.39 44.97 96.75 94.52 95.98 775.9 260 190 150 50 66.9 59.26 31.20 45.23 97.33 94.93 96.49 781.5 260 190 150 50 66.0 58.89 31.92 45.41 97.77 95.28 96.88 787.7 260 190 150 50 65.0 58.40 32.73 45.56 98.15 95.68 97.25 794.3 260 190 150 50 64.0 57.75 33.58 45.67 98.45 96.07 97.56 800.6 260 190 150 50 63.1 56.84 34.56 45.70 98.69 96.37 97.80 808.8 260 190 150 50 62.0 55.81 35.67 45.74 98.77 96.67 97.94 816.0 260 190 150 50 61.0 55.30 36.40 45.85 98.74 96.83 97.97 825.3 260 190 150 50 59.9 54.05 37.66 45.86 98.55 96.89 97.86 833.5 260 190 150 50 58.9 52.91 38.73 45.82 98.27 96.80 97.64 841.8 260 190 150 50 58.0 51.77 39.76 45.76 97.87 96.57 97.30 851.2 260 190 150 50 57.0 50.44 40.88 45.66 97.33 96.17 96.81 861.1 260 190 150 50 56.0 48.93 42.10 45.51 96.63 95.55 96.13 871.5 260 190 150 50 55.0 47.46 43.13 45.29 95.87 94.85 95.38 882.4 260 190 150 50 54.0 46.18 43.98 45.08 95.16 94.10 94.64 893.9 260 190 150 50 53.0 44.44 44.87 44.66 94.26 93.15 93.70 906.0 260 190 150 50 52.0 42.47 45.67 44.07 93.21 92.09 92.63 918.6 260 190 150 50 51.0 40.21 46.35 43.28 91.94 90.93 91.40 931.9 260 190 150 50 50.0 37.36 46.86 42.11 90.24 89.56 89.86 945.9 260 190 150 50 49.0 33.03 47.20 40.11 86.13 88.38 87.44
(109) TABLE-US-00003 TABLE 3 Exemplary values of the configuration of each nanoantenna (having three coupled cylinders with respective diameters D1, D2, D3) in different zones of the flat optical element and the associated optical properties/characteristics for angles in the range of about 36 to 53 degrees according to the fourth example embodiment of the present invention P2 D1 D2 D3 g Angle T.sub.−1 (%) T.sub.−1 (%) T.sub.−1 (%) Eff. (%) Eff. (%) Eff. (%) P1 (nm) (nm) (nm) (nm) (nm) (nm) (deg.) (p-pol) (s-pol) (aver.) (p-pol) (s-pol) (aver.) 893.9 260 190 150 130 50 53.00 68.59 49.18 58.88 82.27 91.31 85.82 906.0 260 190 150 130 50 52.00 70.38 49.74 60.06 84.17 92.20 87.32 918.6 260 190 150 130 50 51.00 72.10 50.64 61.37 86.43 93.08 89.05 931.9 260 190 150 130 50 50.00 73.30 51.50 62.40 88.11 93.78 90.36 945.9 260 190 150 130 50 49.00 74.16 52.36 63.26 89.38 94.40 91.39 960.6 260 190 150 130 50 48.00 73.69 53.14 63.41 90.47 94.66 92.17 976.1 260 190 150 130 50 47.00 73.03 53.85 63.44 91.83 93.12 92.37 992.4 260 190 150 130 50 46.00 70.92 55.07 62.99 91.58 94.19 92.71 1009.6 260 190 150 130 50 45.00 69.94 55.87 62.91 91.19 94.76 92.74 1027.7 260 190 150 130 50 44.00 68.95 56.62 62.79 90.64 95.03 92.57 1046.8 260 190 150 130 50 43.00 68.03 57.32 62.67 89.92 95.04 92.19 1066.9 260 190 150 130 50 42.00 67.17 57.82 62.49 89.09 94.78 91.63 1088.2 260 190 150 130 50 41.00 66.27 58.06 62.17 88.08 94.21 90.84 1110.6 260 190 150 130 50 40.00 65.22 58.11 61.66 86.90 93.29 89.80 1134.4 260 190 150 130 50 39.00 64.19 57.82 61.00 85.60 91.97 88.50 1159.6 260 190 150 130 50 38.00 63.01 57.19 60.10 84.07 90.25 86.90 1186.2 260 190 150 130 50 37.00 61.77 56.21 58.99 82.41 88.16 85.05 1214.6 260 190 150 130 50 36.00 60.38 55.00 57.69 80.52 85.78 82.94
(110) TABLE-US-00004 TABLE 4 Exemplary values of the configuration of each nanoantenna (having four coupled cylinders with respective diameters D1, D2, D3, D4) in different zones of the flat optical element and the associated optical properties/characteristics for angles in the range of about 31 to 35 degrees according to the fourth example embodiment of the present invention Eff. Eff. Eff. P2 D1 D2 D3 D4 g Angle T.sub.−1 (%) T.sub.−1 (%) T.sub.−1 (%) (%) (%) (%) P1 (nm) (nm) (nm) (nm) (nm) (nm) (nm) (deg.) (p-pol) (s-pol) (aver.) (p-pol) (s-pol) (aver) 1244.6 260 190 150 130 110 60 35.00 58.00 58.80 58.40 83.90 87.90 85.87 1276.7 260 190 150 130 110 60 34.00 55.60 59.10 57.35 81.40 86.50 83.95 1310.8 260 190 150 130 120 60 33.00 54.76 58.00 56.38 83.60 84.00 83.81 1347.2 260 190 150 130 120 60 32.00 54.20 57.40 55.80 82.70 83.30 83.01 1386.1 260 190 150 130 120 60 31.00 53.40 56.20 54.80 81.10 82.50 81.81
(111) TABLE-US-00005 TABLE 5 Exemplary values of the configuration of the unit cell of the arrays used in different zones of the flat optical element, in which the conventional phase mapping approach based on phase array particles is used, and the associated optical properties/characteristics for angles in the range of about 5 to 30 degrees according to the fourth example embodiment of the present invention Eff. Eff. Eff. P2 N Angle T.sub.−1 (%) T.sub.−1 (%) T.sub.−1 (%) (%) (%) (%) P1 (nm) (nm) disks D (nm) (deg.) (p-pol) (s-pol) (aver.) (p-pol) (s-pol) (aver.) 1425.0 285 5 198.1, 178.0, 171.3, 30.07 44.14 36.00 40.07 96.43 86.00 91.45 140.2, 0.0 1475.0 295 5 198.1, 178.0, 171.3, 28.95 36.33 32.48 34.41 87.20 81.20 84.26 140.2, 0.0 1518.0 253 6 201.7, 190.3, 170.1, 28.05 58.92 53.64 56.28 88.96 85.36 87.21 151.7, 128.1, 50.0 1572.0 262 6 211.8, 190.3, 170.1, 27.01 55.84 56.00 55.92 90.74 90.40 90.57 151.7, 128.1, 50.0 1626.0 271 6 219.1, 190.3, 170.1, 26.04 51.22 54.03 52.63 89.34 91.62 90.50 151.7, 128.1, 50.0 1689.0 282 6 219.1, 190.3, 170.1, 25.00 46.00 49.53 47.76 85.24 88.42 86.86 151.7, 128.1, 50.0 1752.0 292 6 219.1, 190.3, 170.1, 24.05 40.83 44.43 42.63 79.55 84.55 82.08 151.7, 128.1, 50.0 1827.0 261 7 210.0, 197.4, 179.3, 23.00 55.87 56.84 56.36 90.96 94.19 92.56 162.5, 146.1, 123.3, 50.0 1904.0 272 7 220.0, 197.4, 179.3, 22.02 50.68 57.21 53.95 89.92 94.98 92.53 162.5, 146.1, 123.3, 50.0 1992.2 272 7 222.7, 197.4, 179.3, 21.00 44.67 54.52 49.60 87.38 94.12 90.96 162.5, 146.1, 123.3, 50.0 2087.4 272 7 222.7, 197.4, 179.3, 20.0 39.78 53.48 46.63 83.59 93.00 88.74 162.5, 146.1, 123.3, 50.0 2192.0 274 8 220.7, 203.5, 185.6, 19.0 50.84 56.02 53.43 89.21 92.66 90.99 170.1, 156.4, 141.7, 118.7, 50.0 2310.2 277 8 227.1, 203.5, 185.6, 18.0 47.13 49.79 48.46 87.11 87.93 87.53 170.1, 156.4, 141.7, 118.7, 50.0 2440.0 277 8 227.1, 203.5, 185.6, 17.0 45.65 42.64 44.15 85.72 80.98 83.36 170.1, 156.4, 141.7, 118.7, 50.0 2589.9 280 9 229.7, 208.6, 190.3, 16.0 46.78 49.09 47.94 88.15 86.75 87.43 177.3, 164.2, 151.7, 137.7, 115.6, 50.0 2758.5 280 9 229.7, 208.6, 190.3, 15.0 45.05 41.17 43.11 86.70 78.98 82.83 177.3, 164.2, 151.7, 137.7, 115.6, 50.0 2950.0 280 10 223.9, 204.6, 190.8, 14.0 38.64 48.21 43.43 84.14 89.65 87.11 180.3, 170.7, 160.9, 151.4, 140.7, 121.8, 50.0 3173.5 280 11 226.1, 207.6, 194.2, 13.0 43.46 49.11 46.29 88.37 90.27 89.37 183.9, 175.0, 166.4, 157.2, 148.6, 138.1, 119.0, 50.0 3433.7 280 11 226.1, 207.6, 194.2, 12.0 32.25 46.85 39.55 77.68 88.74 83.87 183.9, 175.0, 166.4, 157.2, 148.6, 138.1, 119.0, 50.0 3741.4 280 13 229.3, 212.8, 200.0, 11.0 44.76 49.88 47.32 88.85 90.31 89.61 189.9, 181.8, 174.3, 167.1, 159.4, 152.2, 144.4, 133.9, 113.7, 50.0 4108.0 280 13 229.3, 212.8, 200.0, 10.0 32.24 46.67 39.46 77.09 88.60 83.51 189.9, 181.8, 174.3, 167.1, 159.4, 152.2, 144.4, 133.9, 113.7, 50.0 4560.0 283 16 232.4, 218.6, 206.6, 9.0 46.17 49.29 47.73 89.56 90.37 89.98 197.3, 189.4, 182.8, 176.6, 170.7, 164.8, 158.3, 152.6, 146.3, 139.0, 128.4, 107.6, 50.0 5120.0 283 16 232.4, 218.6, 206.6, 8.0 31.60 45.42 38.51 75.15 87.61 82.03 197.3, 189.4, 182.8, 176.6, 170.7, 164.8, 158.3, 152.6, 146.3, 139.0, 128.4, 107.6, 50.0 5840.0 284 20 233.2, 223.9, 213.7, 7.0 44.50 48.92 46.71 88.24 90.07 89.19 204.6, 197.3, 190.8, 185.4, 180.3, 175.4, 170.7, 165.9, 160.9, 155.9, 151.4, 146.3, 140.7, 133.3, 121.8, 100.6, 50.0 6816.0 284 24 234.0, 227.7, 218.6, 6.0 47.95 49.76 48.86 90.24 90.49 90.37 210.2, 203.3, 197.4, 191.8, 187.2, 182.8, 178.6, 174.7, 170.7, 166.7, 162.7, 158.3, 154.5, 150.6, 146.3, 141.8, 136.0, 128.4, 116.5, 95.3, 50.0 8190.0 290 28 237.9, 230.5, 222.0, 5.0 43.77 45.84 44.81 87.48 88.20 87.85 215.2, 208.1, 202.4, 197.3, 192.5, 188.4, 184.7, 181.0, 177.5, 174.1, 170.7, 167.3, 163.9, 160.2, 156.6, 153.5, 150.0, 146.3, 142.6, 137.7, 132.0, 124.0, 111.7, 90.6, 50.0
(112) According to example embodiments of the present invention, the response of the nanoantennas to the two possible orthogonal polarizations of the incident light, namely p-polarization and s-polarization, is considered. First, because of the rotational symmetry of the lens the elements will experience both polarizations even if linearly polarized light is used. Second, because a practical lens should work for unpolarized light, by far the most common illumination conditions. Therefore, in Tables 2 to 5, it can be found the optical characteristics (transmission and efficiency) for both polarizations independently, together with the averaged optical characteristics (representing the characteristics under unpolarized illumination). For the lens simulations, the transmission and efficiency for unpolarized light (corresponding to the averaged values in the tables) were used.
(113) According to various example embodiments, for angles above about 50 degrees, the gratings may be formed by pairs of electromagnetically coupled cylinders with varying inter-particle gaps and different periodicities. For angles between about 36 and 50 degrees, the number of cylinders forming each nanoantenna may be increased to 3. For example, a reason to increase the number of cylinders may be because as the desired bending angle decreases, additional diffraction order(s) may be supported by the diffraction grating formed by the array of nanoantennas. Accordingly, the nanoantennas in these angular zones may need to be designed/configured to suppress scattering of electromagnetic energy into the corresponding direction(s) of these additional diffraction order(s). This may require an increasingly complex angle-suppressed scattering pattern from each nanoantenna, the inclusion of additional components/cylinders in the nanoantenna (unit-cell) may facilitate in achieving the required scattering pattern. In this whole range of angles (about 36 and 50 degrees), for example, the inter-particle gap (e.g., defined as the distance between the surfaces of two adjacent cylinders in the nanoantenna) and the dimensions of each cylinder may be kept constant and only the periodicity is varied. For example, as shown in Table 2, the inter-particle gap is set to about 50 nm and the individual diameters of the cylinders (D1, D2, and D3) are set to about 190 nm, 150 nm, and 130 nm, respectively. Furthermore, for angles below 30 degrees, the conventional approach of using phased array particles (e.g., as described in the background) may be used. For example, a reason to use the conventional approach may be that for small angles the number of diffraction orders supported by the nanoantenna arrays can be very large (e.g., greater than 10 for angles around 15 degrees) and designing a nanoantenna having the appropriate scattering pattern as to suppress all of these diffraction orders except for one may be cumbersome. Therefore, according to various embodiments of the present invention, for small bending angles (e.g., less than 30 degrees), it may be preferred, although not necessary, to use the phased array particles. For example, increasing cylinder sizes accumulate increasing phase delays, leading to the light bending in the device. The central region, corresponding to the zero angle bending, may be left empty, and has an associated efficiency of about 95%.
(114) While embodiments of the invention have been particularly shown and described with reference to specific embodiments, it should be understood by those skilled in the art that various changes in form and detail may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. The scope of the invention is thus indicated by the appended claims and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced.