DEVICE AND VACUUM CHAMBER

Abstract

The present invention relates to an apparatus for sliding friction free and lubricant free movement in vacuum, wherein the apparatus has a fixed position rail and a rail movable relative thereto by means of magnetic force. The invention further relates to a vacuum chamber, for example for a coating plant having an apparatus in accordance with the invention.

Claims

1.-30. (canceled)

31. An apparatus for sliding friction free and lubricant free movement in vacuum, the apparatus comprising: a fixed position rail, a rail movable by means of magnetic force, at least two, at most four, spherical-shaped bodies that are configured to enable a movement of the movable rail relative to the fixed position rail, wherein the spherical-shaped bodies are arranged between the fixed position rail and the movable rail, as well as a unit which is configured to move the movable rail by means of magnetic coupling relative to the fixed position rail and to hold the movable rail stationary after a successful movement.

32. The apparatus according to claim 31, wherein the spherical-shaped bodies are configured to enable a linear movement of the movable rail relative to the fixed position rail.

33. The apparatus in accordance with claim 31, wherein the movable rail has a separate surface for each spherical-shaped body at which separate surface the spherical-shaped body contacts.

34. The apparatus in accordance with claim 33, wherein each separate surface has two abutments.

35. The apparatus in accordance with claim 34, wherein each spherical-shaped body is configured to be guided linearly to and fro between the two abutments.

36. The apparatus in accordance with claim 34, wherein a path length which the linearly displaceable movable rail can travel is formed by a spacing between the at least two abutments.

37. The apparatus in accordance with claim 34, wherein the abutments are provided at the movable rail or at the fixed position rail.

38. The apparatus in accordance with claim 34, wherein the movable rail has at least two recesses, and wherein each recess is configured to receive one spherical-shaped body.

39. The apparatus in accordance with claim 38, wherein each recess has the separate surface and the two abutments.

40. The apparatus in accordance with claim 39, wherein the two abutments are arranged at least substantially perpendicular to the separate surface and the separate surface is arranged at least substantially in parallel to the fixed position rail.

41. The apparatus in accordance with claim 31, wherein the movable rail comprises a coupling web that is configured for the magnetic coupling with the unit; and wherein a movement of the movable rail relative to the fixed position rail is induced by a movement of the coupling web.

42. The apparatus in accordance with claim 38, wherein the movable rail has a coupling web which is configured for the magnetic coupling with the unit; and wherein a movement of the movable rail relative to the fixed position rail is induced by a movement of the coupling web; and wherein the coupling web is provided adjoining at least one recess.

43. The apparatus in accordance with claim 42, wherein the coupling web is provided between the two recesses.

44. The apparatus in accordance with claim 31, wherein at least one guide groove is provided at the movable rail in which the spherical-shaped bodies are guided in order to predefine the linear movement of the movable rail.

45. The apparatus in accordance with claim 31, wherein at least one guide groove is provided at the fixed position rail in which the spherical-shaped bodies are guided.

46. The apparatus in accordance with claim 31, wherein two spherical-shaped bodies are arranged in a plane in parallel to the linear movement direction of the movable rail.

47. The apparatus in accordance with claim 31, wherein the unit comprises magnetic material and at least a pair of oppositely polarized magnets which make available the magnetic coupling with respect to the movable rail.

48. The apparatus in accordance with claim 31, wherein the unit further comprises two rollers by means of which the unit can be displaced relative to the fixed position rail.

49. The apparatus in accordance with claim 31, wherein the unit is arranged in a guide which predefines a movement range of the unit.

50. The apparatus in accordance with claim 31, wherein the fixed position rail is arranged between the unit and the movable rail, with the unit being configured to move the movable rail relative to the fixed position rail.

51. The apparatus in accordance with claim 31, wherein the movable rail and/or the coupling web comprises a magnetic material.

52. The apparatus in accordance with claim 31, wherein the unit comprises magnets that are configured to move the movable rail and to hold the movable rail stationary.

53. The apparatus in accordance with claim 31, wherein the movable rail is configured as a push rod in order to push objects that are arranged at the push rod.

54. The apparatus in accordance with claim 31, wherein the fixed position rail is formed by at least one chamber wall of a vacuum chamber.

55. A vacuum chamber for a coating plant having an apparatus and a push rod, the apparatus comprising: a fixed position rail, a rail movable by means of magnetic force, at least two, at most four, spherical-shaped bodies that are configured to enable a movement of the movable rail relative to the fixed position rail, wherein the spherical-shaped bodies are arranged between the fixed position rail and the movable rail, as well as a unit which is configured to move the movable rail by means of magnetic coupling relative to the fixed position rail and to hold the movable rail stationary after a successful movement, with the apparatus being configured to move the push rod in the vacuum chamber.

Description

[0051] The advantages that were discussed in connection with the apparatus in accordance with the invention are true in an analogous way for the vacuum chamber in accordance with the invention.

[0052] The invention will be described in the following purely by way of example with reference to the drawing in detail. There is shown:

[0053] FIG. 1 a schematic illustration of an apparatus in accordance with the invention in a sideview with a longitudinal section through the housing;

[0054] FIG. 2 an isometric view of the apparatus of FIG. 1;

[0055] FIG. 3 a section transverse to the longitudinal axis in the viewing direction along the sectional line A-A through the drawing of FIG. 2;

[0056] FIG. 4 a further isometric view of the apparatus of FIG. 1 with a magnetic trolley guide and a safety clip;

[0057] FIG. 5 a schematic illustration of a further apparatus in accordance with the invention;

[0058] FIG. 6 a schematic illustration of a further apparatus in accordance with the invention;

[0059] FIG. 7 a schematic illustration of a further apparatus in accordance with the invention;

[0060] FIG. 8 a schematic illustration of a further apparatus in accordance with the invention; and

[0061] FIG. 9 a schematic illustration of a further apparatus in accordance with the invention.

[0062] The FIG. 1 shows a schematic illustration of an apparatus 50 in accordance with the invention by means of the example of a shutter mechanism 50′ in a sideview with a longitudinal section through a housing 1. The housing 1 is in this exemplary design formed from an ultra-high vacuum flange 1 (stainless steel size DN CF40) having a non-magnetic stainless-steel tube 2 (size 18×1) welded thereto and a cover plate 3 welded thereto.

[0063] A movable rail 4′ configured as a push rod 4, as well as two steel bores 5 are arranged in the housing 1. The push rod 4 is composed of a magnetic, non-ferromagnetic material in the specific case of stainless steel 1.4112. The adhesion force that can be achieved in this way is sufficient to achieve a correct function of the push rod 4 and further avoids the use of material such as NdFeB or CoSm, that as permanent magnets have a significantly stronger magnetic field, but are not readily compatible with ultra-high vacuum.

[0064] The push rod 4 merely lies at two points on the steel balls 5. The steel balls 5 roll along the lower inner surface 6 of the stainless-steel tube 2 and in this way enable a linear movement of the push rod 4. The stainless-steel tube 2 forms a fixed position rail 2′ relative to which the movable rail 4′ is movable.

[0065] The apparatus 50, 50′ comprises a push rod 4, the fixed position rail 2′, a unit 7 that has a magnetic trolley 7′ and two balls 5 that are arranged between the fixed position rail 2′ and the movable rail 4′. The movable rail 4′ is simultaneously moved relative to the fixed position rail 2′ by means of the unit 7 and is held relative to this by means of a magnetic coupling. For this purpose, the unit 7 has the magnetic trolley 7′ which is equipped with two round magnets 8.

[0066] In the present example the rail magnets 8 have a diameter of 10 mm for a height of 5 mm. Generally speaking the round magnets can have a diameter selected in the range of 5 to 20 mm and can have a height of 3 to 10 mm. The round magnets 8 are manufactured of NdFeB.

[0067] The round magnets 8 couple magnetically with tappets 9 that are provided at the movable rail 4′. The tappets 9 are arranged at a coupling web 10 of the movable rail 4′, in that these project from a lower side of the coupling web 10 in a direction of the inner surface 6. A movement of the movable rail 4′ relative to the fixed position rail 2′ is induced by a movement of the unit 7′ and in this way of the coupling web 10.

[0068] In order to reduce a weight of the movable rail 4′, the coupling web 10 further comprises four bores 11. In this example the sidewalls of the coupling web 10 also form the abutments 14. The recesses 12 are arranged at a side of the movable rail 4, namely on the same side of the movable rail 4′ as the tappets 9.

[0069] The coupling web 10 is arranged between two recesses 12. Each recess 12 has a separate surface 13 at which the respective ball 5 lies and two abutments 14 that are arranged perpendicular to the separate surface 13. The respective ball 4 can be linearly guided to and fro between the two abutments 14 of a recess 12. The spacing between the two abutments 14 defines a path length which the linearly displaceable movable rail 4′ can travel. The separate surface 13 is arranged in parallel to the fixed position rail 2′. A transition between the abutments 14 and the separate surface is configured as a curved surface in order to prevent fatigue breaks at this position and could also be formed as a rectangle or the like. The radius of curvature of the transition is smaller than the radius of the respective ball 5 in order to ensure that the ball 5 does not abut these transitions, but only firstly at the abutments 14.

[0070] A central body 26 (see FIG. 2) of the magnetic trolley 7 is likewise made of a magnetic material, in particular of stainless steel 1.4112. The round magnets 8 are placed with opposite polarization onto the magnetic trolley 7′ to which the round magnets 8 adhere on their own due to their magnetism. A further holder is thus not required.

[0071] Through the opposite polarization (a magnet 8 with a north pole at the top, a magnet 8 with a north pole at the bottom) the magnetic field lines close to a ring that, apart from small gaps on the air side and the vacuum side, extends through the highly permeable material and in this way creates minimal scatter fields. It is thus advantageous to use an even number of coupling magnets arranged pairwise with oppositely oriented coupling magnets 8.

[0072] By means of the field lines the two tappets 9 and in this way the movable rail 4′ is held stationary relative to the magnets 8. On movement of the unit 7 relative to the tube 2, the tappets 9 travel the movement of the unit due to the magnetic coupling in such a way that the movable rail 4′ is guided in the same direction like the unit 7, namely in the direction of the longitudinal direction L.

[0073] The magnetic strength of the magnets 8 is selected as so strong as the movable rail 4′ is drawn in the direction of the unit 7 and in this way in the direction of the balls 5 such that the balls 5 are so to say clamped between the movable rail 4′ and the fixed position rail 2′. However, this clamping is not allowed to be so strong that the balls 5 no longer elastically roll on the two rails 4′, 2′, but are compressed so strongly that the balls and the rails mutually deform one another plastically and thereby mutually destroy one another by means of the resulting material wear (“fretting”). The setting of this clamping pressure is the substantial optimizing task for achieving, on the one hand, movements at high frequencies, or minimal wear, on the other hand.

[0074] The spacing of the axes of symmetry of the magnets 8 is preferably selected differently, preferably is selected slightly smaller than the spacing of the middle planes of the tappets 9. This results in a harder coupling in the movement direction, this means a faster increase in the restoring force on a relative deflection of movable rail 4′ and unit 7′ with respect to one another. Deviations of the width of the tappets 9 in the movement direction, of the diameter of the magnets 8, as well as generally deviating shapes of tappets 9 and magnets 8 can have the same effect and can be used for the further optimization.

[0075] The FIG. 2 shows an isometric view of the apparatus of FIG. 1. In this two plastic rollers 15 are provided at the magnetic trolley 7′ in such a way that the magnetic trolley 7′ can roll on the outside of the stainless-steel tube 2.

[0076] In this connection also ball bearings can be used, it has however, been shown that rollers of polyoxymethylene (POM) have an extremely good wear resilience (with lubrication of typically more than 30 million cycles) and are significantly quieter in operation.

[0077] The magnetic trolley 7′ further has two glide plates 16 on opposites sides of which one is not visible in the shown Figure. The glide plates 16 are likewise manufactured of POM. The glide plates 16 support the magnetic trolley 7′ at the magnetic trolley guide 17 (see FIG. 4) in such a way that the magnetic trolley 7′ is moved along a straight line in parallel to the longitudinal axis L of the tube.

[0078] The FIG. 3 shows a section transverse to the longitudinal axis L in the viewing direction backwardly along the sectional line A-A through the drawing of FIG. 2. The surfaces 13 rolling on the balls 5 of the push rod 4 are manufactured curved as a guide groove 18. The guide groove 18 has a radius which is approximately 4% larger than the radius of the balls 5. This ratio of radii is used in most ball bearings and has also proven to be successful in this case. The difference of the radii is too small for this to be seen in the images.

[0079] The lateral guidance of the push rod 4 thus takes place through the outer positioning of the magnets which, besides the contact force of the movable rail 4′ onto the balls and from the balls onto the fixed position rail 2′ and the movement transition, can also exert a lateral restoring force, both through the inner curvature of the movable rail 4′ lying on the balls 5 and the inner curvature of the tube 2 in which the balls 5 roll. The curvature of the tube 2 in this way takes on the function of a lower guide rail which is still realized in the state of the art by a further separate component and in this way forms a guide groove that is provided at the fixed position rail 2′.

[0080] The fixed position rail 2′ is arranged between the unit 7 and the movable rail 4′, with the movable rail 4′ being movable relative to the fixed position rail 2′.

[0081] The FIG. 4 shows a further isometric view of the apparatus of the FIG. 1 with a magnetic trolley guide 17. The magnetic trolley guide 17 is typically manufactured of an anodized aluminum. It can be removed by means of two knurled screws (not shown) together with the magnetic trolley 7′ without tools when the vacuum chamber 1 with a shutter mechanism 50′ connected thereto should be heated.

[0082] The magnetic trolley guide 17 comprises a guide frame 21 and a holding ring 20 arranged perpendicular thereto. The guide frame 21 comprises an opening 24 in which the unit 7 having the magnetic trolley 7′ is guided. The opening 24 is only marginally (approximately 0.2 mm) wider than the magnetic trolley 7′, this means the spacing between outer surfaces 16′ of the glide plate 16, in such a way that no significant lateral displacement is possible, hereby possibly resulting in deviations from a linear movement. The length of the opening 24 defines a path length which the magnetic trolley 7′ can travel. The length of the opening in this way also corresponds to the path length that the movable rail 4′ can travel in the tube 2. Since the magnetic coupling is not rigid, the length of the opening 24 is advantageously selected slightly smaller than the path length of the movable rail 4′, before the balls 5 contact the abutments 14. In this way an overexcitation of the movable rail 4′ on achieving the end position is possible without a ball 5 contacting an abutment 14.

[0083] A curved groove 22 for the connection screws (not shown) between the holding ring 20 and the guide frame 21 allows a stepless setting of the azimuthal position of the magnetic trolley 7′. The curved groove 22 is configured in such a way that it comprises more than one angular hole spacing on the partial circle of the fastening holes 23 of the flange 1′ (in this case 60°) in such a way that the housing can be screwed practically in any arbitrary orientation onto the vacuum chamber; however, the shutter mechanism 10 can then always be operated in the shown vertical arrangement with the push rod 4 perpendicular over the balls. This is advantageous in order to ensure a uniform wear of the mechanical parts and in this way the maximum lifetime.

[0084] It has also been shown that the lifetime can be further increased when after a longer operating time the azimuthal position of the magnetic trolley is moved by a few degrees, whereupon the wear track on the fixed rail 2′ is displaced onto a previously non-used surface.

[0085] The FIG. 4 further shows a safety clip 19 that prevents a falling out of the movable rail 4′ and of the balls 5 for a decoupled magnetic trolley 7′ from the tube 2, in particular when the apparatus 50 is coupled perpendicular to a vacuum chamber (not shown). The safety clip 19 is fastened in a groove at the inner surface 6 of the tube 2. The safety clip 19 can thus typically be inserted with plyers provided for this purpose and can then be removed again.

[0086] In this way no further tools are required for the assembly and disassembly of the apparatus 50. In particular no screwing connections, welding connections or rivet connections are required, which avoids accidental contaminations of the ultra-high vacuum by a contamination sitting in gaps or virtual leaks. With the exception of the housing 1 all parts coming into contact with the vacuum are manufactured from one piece in order to avoid this problem.

[0087] The housing 1 respectively the tube 2 which forms a chamber wall of a vacuum chamber serves as a fixed position rail 2′, in this way the apparatus 50 is simple, robust and cost-effective in its manufacture.

[0088] The FIG. 5 shows a schematic illustration of a further apparatus 50 in accordance with the invention. In this apparatus 50 the balls 5 are arranged on opposite sides of the movable rail 4′. This variant can be formed a little shorter, since the magnetic trolley T only has to maintain the spacing with respect to the balls 5 at one side in such a way that it does not have to be attracted as strongly such that it will no longer be moved. Having regard to this variant in contrast to the variants shown in FIGS. 1 to 4, the coupling web 10 is provided adjoining only one recess 12. The central abutment 14 in this case forms an abutment for both recesses 12.

[0089] However, it has also been shown that the lateral (perpendicular to the image plane in FIG. 5) position of equilibrium in this variant is instable. This can be rectified by a second magnetic trolley (not shown) on the bottom side in the region beneath the rear ball 5. However, the dimensional tolerances relative to the shape of the push rod 4, the size of the balls 5 and the inner diameter of the tube 2 are summed up in such a way that an unnecessarily precise manufacture of this variant is required. This also has effects on the reliability. The variant with oppositely disposed balls 5 can however also be extended in two planes standing perpendicular to one another (see FIG. 7) which has significant advantages for large strokes.

[0090] Having regard to the variant shown in FIG. 5, an aperture 25 is provided at the push rod 4. Such an aperture 25 can, for example, be used in a coating plant, such as for example a molecular beam deposition plant.

[0091] The movable rail 4′ is configured as a push rod 4 in order to linearly move objects, such as the aperture 25, to and fro, with the objects being arranged at the push rod 4.

[0092] FIG. 6 shows a schematic illustration of a further apparatus in accordance with the invention. Having regard to the embodiments shown in FIGS. 1 to 5 respectively exactly two balls 5 are arranged in a plane in parallel to the linear movement direction of the movable rail 4′.

[0093] Having regard to the variant shown in FIG. 6, like the variant in FIG. 7, respectively two pairs of balls 5 are provided in a rectangular tube 2. In the example of FIG. 6 a rectangular fixed position rail 2′ is provided as a tube 2. The movable rail 4′ is turned relative to the fixed position rail 2′ by 45°. The four balls 5 are arranged in the spaces between the flat sides of the movable rail 4′ and the edges of the fixed position rail 2′. In this way the four balls are provided in two planes, with the two planes standing perpendicular to one another and in parallel to the movement direction.

[0094] FIG. 7 shows a schematic illustration of a further apparatus in accordance with the invention. Having regard to this embodiment, the variant shown in FIG. 5 having oppositely disposed balls 5 is extended to a variant in which the movable rail 4′ is quasi formed by two movable rails 4′ such as they are shown in FIG. 5, standing perpendicular to one another.

[0095] In this way four recesses 12 are provided at a movable rail 4′ that are arranged crosswise at opposite sides of the movable rail 4′ with two recesses 12 being arranged in a front region of the movable rail 4′ at a right angle with respect to one another such that their separate surfaces 13 are present facing the inner surface 6 of the quadratic tube 2. The two recesses 12 are likewise arranged at a right angle with respect to one another in the rear region of the movable rail 4′ in such a way that their separate surfaces 13 are present facing the inner surface of the quadratic tube 2. A centrally arranged cross-shaped web (not shown) in this way forms an abutment 14 for all four recesses 12.

[0096] The four balls 5 are respectively arranged centrally at the flat sides of the fixed position rail 2′ and in this way support the movable rail 4′. Having regard to this variant, two individual balls are provided per plane that stand perpendicular to one another.

[0097] For this purpose, the movable rail 4′, similar to the movable rail 4′ shown in FIG. 5, is configured in each plane, this means two balls 5 of the pairs of balls are arranged in a front region of the movable rail 4′ and the other two balls 5 of the respective pair are arranged in a rear region of the movable rail 4′.

[0098] FIG. 8 shows a schematic illustration of a further apparatus in accordance with the invention 50″. Having regard to this variant the resulting movement does not take place linearly, but along a circular arc. Such arrangements are possible both with convex as well as concave curvatures, even movements that do not take place on a circular track are possible, as long as a sufficiently small spacing remains between the coupling magnet 8 and the push rod 4 in the used region in order to ensure the functional capability.

[0099] FIG. 9 shows a schematic illustration of a further apparatus 50′ in accordance with the invention similar to FIG. 6. In contrast to that of FIG. 6, the balls 5 are placed in a cylindrical tube 2 rather than in a rectangular tube 2 as a fixed position rail 2′. Respectively two pairs of balls 5 are arranged at oppositely disposed sides of the movable rail 4′. The four balls 5 are likewise provided in two planes, with the two planes standing perpendicular to one another and being arranged in parallel to the movement direction. Through the arrangement in a cylindrical outer tube 2, the balls 5 each only have contact by means of one contact point at the fixed position rail 2′. In FIG. 6 the balls respectively lie at two contact points at the fixed position rail 2′. Through the arrangement in FIG. 9 a rolling movement without the additional rotation about the contact points, similar to the rolling movement of the embodiment in FIG. 7, results for a reduction of the friction and wear.

[0100] Additionally, the movable rail 4 can be rotated into any arbitrary rotated position about the axes standing perpendicular to the plane of the drawing for a corresponding co-rotation of the forces required for stabilization.

[0101] Depending on the variant the fixed position rail 2′ can have a round, quadratic or rectangular cross-section perpendicular to a movement axis of the movable rail 4′.

[0102] A non-shown vacuum chamber for a coating plant that can be used with an apparatus 50, 50′, 50″ as described in the foregoing can comprise at least one vacuum pump by means of which the vacuum of ≤0.1 Pa, preferably ≤5×10.sup.−3 PA≤5×10.sup.−7 Pa can be produced in the chamber, as well as a flange to which the housing 1 of the apparatus 50, 50′, 50″ can be connected in order to move the movable rail 4′ of the push rod 4 in order to move, for example, the aperture 25 in the vacuum chamber.

[0103] In this connection it should be noted that the balls 5 can have a ball diameter of 0.5 mm up to 1 m, however preferably balls 5 having a ball diameter in the range of 3 mm up to 15 mm are used. Having regard to the balls 5 shown here diameters of 8 mm are used.

[0104] The coupling magnets shown here have a magnetic field strength of 0.5 T. In dependence on the material of the tube 2, as well as of the wall thickness of the tube 2, a magnetic field strength in the range of 0.2 T to 1 T can be used.

[0105] Preferably balls 5 of stainless steel are used in the apparatus 50, 50′, 50″, however, balls 5 of silicon or silicon alloys or ceramic balls for example of zirconium dioxide can be used as balls 5.

LIST OF REFERENCE NUMERALS

[0106] 1, 1′ housing, flange [0107] 2, 2′ stainless steel tube, fixed position rail [0108] 3 cover plate [0109] 4, 4′ push rod, movable rail [0110] 5 ball [0111] 6 inner surface of 2 [0112] 7, 7′ unit, magnetic trolley [0113] 8 round magnet [0114] 9 tappet [0115] 10 coupling web [0116] 11 bore [0117] 12 recess [0118] 13 separate surface [0119] 14 abutment [0120] 15 roller [0121] 16, 16′ glide plate, outer surface [0122] 17 magnetic trolley guide [0123] 18 guide groove [0124] 19 safety clip [0125] 20 holding ring [0126] 21 guide frame [0127] 22 groove [0128] 23 fastening apertures [0129] 24 opening [0130] 25 aperture [0131] 26 central body [0132] 50, 50′, 50″ apparatus, shutter mechanism, apparatus [0133] L longitudinal axis