Device and Method for Scaling and Coating of Continuous Multi-Material Stripes and Patterns

Abstract

A hybrid scaling and patterning apparatus for producing thin films with multi-material, customized patterns is disclosed. The apparatus includes a slot die body integrated with multiple inlets and corresponding diverging channels passing materials through the die body in a planar, continuous laminar flow. The hybrid scaling and patterning apparatus may be used in a method of preparing multi-material, patterned thin film materials.

Claims

1. An apparatus for patterning thin films comprising: a slot die; at least two fluid inlets, a first fluid inlet configured for feeding a first fluid material into the slot die and a second fluid inlet configured for feeding a second fluid material into the slot die; and at least three channels formed inside of the slot die: a first inlet channel configured to receive the first fluid material; a second inlet channel configured to receive the second fluid material; and a third interaction channel; wherein each of the first and second inlet channels have a channel inlet coincident with the respective first and second fluid inlets in the slot die; and wherein the third interaction channel is fluidly connected at an upstream end to the first and second inlet channels, and at a downstream end to a fluid multi-material outlet in the slot die.

2. The apparatus of claim 1, wherein the first, second, and third channels are configured to enable fluidic communication through the slot die in a planar, continuous laminar flow.

3. The apparatus of claim 1, wherein the third interaction channel defines a volume extending in a flow direction from an upstream upper portion to a downstream lower portion; and wherein the volume of the third interaction channel has a converging cross-sectional area from the upstream upper portion to the downstream lower portion.

4. (canceled)

5. The apparatus of claim 1, comprising eight channels, the first and second inlet channels, the third interaction channel, and five additional interaction channels; wherein each of the interaction channels is fluidly connected at an upstream end to the first and second inlet channels, and at a downstream end to the fluid multi-material outlet in the slot die; wherein each of the interaction channels define a volume extending in a flow direction from an upstream upper portion to a downstream lower portion; wherein the volume of each of the interaction channels has a converging cross-sectional area from the upstream upper portion to the downstream lower portion; and wherein for each converging interaction channel, a width of the upstream end is greater than a width of the downstream end.

6. The apparatus of claim 1, comprising eight fluid inlets, the first and second fluid inlets and six additional fluid inlets; wherein each of the six additional fluid inlets is configured for feeding a fluid material into the slot die selected from the group consisting of the first fluid material, the second fluid material and a fluid material different from the first and second fluid materials.

7. The apparatus of claim 1, comprising eight channels, the first and second inlet channels, the third interaction channel, and five additional interaction channels: wherein each of the interaction channels is fluidly connected at an upstream end to the first and second inlet channels, and at a downstream end to the fluid multi-material outlet in the slot die; wherein each of the interaction channels define a volume extending in a flow direction from an upstream upper portion to a downstream lower portion; wherein the volume of each of the interaction channels has a converging cross-sectional area from the upstream upper portion to the downstream lower portion; and wherein a total width of all the upstream ends of each of the converging interaction channels is greater than a total width of all of the downstream ends of the converging interaction channels.

8. The apparatus of claim 1, wherein the first, second, and third channels are configured to enable fluidic communication through the slot die in a planar, continuous creeping flow.

9. The apparatus of claim 1, wherein the apparatus comprises a material selected from the group consisting of stainless steel, aluminum, nylon, polycarbonate and combinations thereof.

10. The apparatus of claim 1, wherein the apparatus is configured to generate a scaled alternating-stripe pattern from interaction between the first and second fluid materials within the third interaction channel.

11. A method of thin film material deposition on a substrate comprising: feeding a first fluid material into a slot die via a first fluid inlet; feeding a second fluid material into the slot die via a second fluid inlet; forming a fluid multi-material by interacting the first fluid material and the second fluid material in an interaction channel within the slot die, the interaction channel in fluidic communication with the first and second fluid inlets; and depositing the fluid multi-material onto the substrate via an outlet of the slot die in fluidic communication with the interaction channel; wherein the first and second materials flow through the slot die in a planar, continuous laminar flow.

12. (canceled)

13. The method of claim 11, wherein the interaction channels defines a volume extending in a flow direction from an upstream upper portion to a downstream lower portion; and wherein the volume of the interaction channel has a converging cross-sectional area from the upstream upper portion to the downstream lower portion.

14.-19. (canceled)

20. The method of claim 11, wherein the substrate is selected from the group consisting of paper, glass, thin plastic film, and thin metallic film.

21. An apparatus for patterning films comprising: a slot die having: a width defined from a first side of the slot die to a second side of the slot die; a thickness defined from a front face of the slot die to a rear face of the slot die; and a height defined from a top of the slot die to a bottom of the slot die; and a fluid material flow system comprising: a first fluid material inlet configured for feeding a first fluid material into the slot die; a second fluid material inlet configured for feeding a second fluid material into the slot die; a fluid multi-material outlet configured to deposit a fluid multi-material onto a substrate; and a channel system formed inside of the slot die and configured to provide fluidic communication between: the first fluid material inlet and an interaction channel; the second fluid material inlet and the interaction channel; and the interaction channel and the fluid multi-material outlet.

22. The apparatus of claim 21, wherein the interaction channel defines a volume extending in a flow direction from an upstream upper portion to a downstream lower portion; and wherein the volume of the interaction channel has a converging cross-sectional area from the upstream upper portion to the downstream lower portion.

23. The apparatus of claim 21, wherein: the first material inlet is located on one of the front and rear faces of the slot die; the second material inlet is located on one of the front and rear faces of the slot die; the interaction channel defining a volume extending in a flow direction from an upstream upper portion to a downstream lower portion, the upstream upper portion located along the height of the slot die below both the first and second material inlets, and the downstream lower portion located along the height of the slot die above the fluid multi-material outlet; and the volume of the interaction channel converging in cross-sectional area from the upstream upper portion to the downstream lower portion.

24. The apparatus of claim 23, wherein the channel system is configured to provide the fluidic communication in a planar, continuous laminar flow.

25. The apparatus of claim 23, wherein the channel system is configured to provide the fluidic communication in a planar, continuous creeping flow.

26. The apparatus of claim 23, wherein the channel system further comprises one or more additional interaction channels; and wherein each of at least a portion of the additional interaction channels is fluidly connected at an upstream end to the first and second fluid material inlets, and at a downstream end to the fluid multi-material outlet.

27. The apparatus of claim 26, wherein each of at least a portion of the additional interaction channels defines a volume extending in a flow direction from an upstream upper portion to a downstream lower portion; and wherein the volume of each of the at least a portion of the additional interaction channels has a converging cross-sectional area from the upstream upper portion to the downstream lower portion.

28. A patterning system comprising: the apparatus of claim 21; a first fluid material; and a second fluid material different than the first fluid material; wherein the first fluid material is introduced into the slot die via the first fluid material inlet; wherein the second fluid material is introduced into the slot die via the second fluid material inlet; wherein the first and second fluid materials interact within the interaction channel to form a fluid multi-material; and wherein the fluid multi-material exits the slot die via the fluid multi-material outlet.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0033] FIG. 1 illustrates a hybrid patterning apparatus in accordance with an exemplary embodiment of the disclosure.

[0034] FIGS. 2A-2B illustrate components of a hybrid patterning apparatus, in accordance with an exemplary embodiment of this disclosure

[0035] FIGS. 3A-3B illustrate the internal cavity geometry of a hybrid patterning apparatus, without internal scaling of the pattern, and corresponding deposition of a heterogeneous film pattern comprising alternating stripes of two distinct materials

[0036] FIGS. 4A-4B illustrate the internal cavity geometry of a hybrid patterning apparatus with internal scaling of the pattern, in accordance with an exemplary embodiment of this disclosure.

[0037] FIGS. 5A-5B illustrate test results related to single material deposition in narrow stripes, in accordance with an exemplary embodiment of this disclosure.

[0038] FIGS. 6A-6D illustrate results from a start and stop mechanism of the hybrid apparatus, in accordance with an exemplary embodiment of this disclosure.

[0039] FIGS. 7A-7B illustrate test results related to multi-material deposition, in accordance with an exemplary embodiment of this disclosure.

[0040] FIGS. 8A-8B illustrate a simultaneous deposition of PDMS and PVA during flow start-up and after contact between two fluid regions.

[0041] FIGS. 9A-9B illustrate alternating-stripe film structures constructed from various multi-material configurations and the static force balance for interacting stripes, in accordance with an exemplary embodiment of the disclosure.

[0042] FIG. 10 illustrates a pattern with converging internal geometry in accordance with an exemplary embodiment of the disclosure.

[0043] FIG. 11 illustrates a pattern with converging, alternating stripes in accordance with an exemplary embodiment of the disclosure.

DETAILED DESCRIPTION

[0044] Referring now to the figures, wherein like reference numerals represent like parts throughout the several views, exemplary embodiments of this disclosure will be described in detail. Throughout this description, various components may be identified having specific values or parameters; however, these items are provided as exemplary embodiments. Indeed, the exemplary embodiments do not limit the various aspects and concepts of this disclosure as many comparable parameters, sizes, ranges, and/or values may be implemented.

[0045] The various embodiments of this disclosure relate to a system and apparatus for the patterning of thin films. The methods of manufacturing patterned thin films using the hybrid system are also described herein.

[0046] Referring now to FIG. 1, there is shown a coating tool 100 (e.g. slot die, hybrid patterning apparatus), a heterogeneous liquid film 101 comprising two or more liquid materials in a horizontally-patterned configuration, an array of two or more fluid inlets 102; a flow of ink or other coating fluid 103 into the hybrid coating apparatus, and a region of outflow of ink or other coating fluid 104 out of hybrid coating apparatus 100 and onto a substrate to form a liquid film. As shown in cross-section view 105, hybrid patterning apparatus can further include substrate 106, ink or coating fluid 107 outflow from hybrid patterning apparatus 100, liquid bridge 108 between coating tool outlet region and deposited liquid film, and a die plate 109 of the hybrid patterning apparatus 100.

[0047] During operation, one or more liquid bridges form between the coating tool outlet and the substrate. The transfer of fluid through each liquid bridge, in turn, forms a patterned liquid film on the substrate surface. The volumetric flow rate Q, substrate velocity V relative to the coating tool, and the coating gap H between tool outlet and substrate are input parameters that can be varied during operation.

[0048] FIGS. 2A-2B shows slot die components in certain embodiments of the disclosure. As shown in FIG. 2A, the hybrid slot coating tool can include a slot die that includes a die body having two halves, or first and second plates, 201a, 201b, separated by one or more shims 202 with cutout(s) forming a slot-shaped cavity 202 positioned between first and second plates 201a, 201b for containing fluid to be deposited. It further includes an array of inlets 203 for delivering coating fluid to discrete regions of the internal geometry, an external manifold or distribution chamber 204 for coating fluid delivered to inlet array 203. FIG. 2B shows an alternate view of this embodiment of the hybrid patterning apparatus, with first and second plates, 205a, 205b, separated by one or more shims 206 with cutout(s) forming an internal slot-shaped cavity, internal distribution chambers, channels or cavities with inlet ends 207 integrated into one or more of the plates, 205a, 205b. In some embodiments, the internal distribution chambers, channels or cavities are converging. The purpose of shim(s) 206 is to create a slot gap between first and second plates 205a, 205b through which the fluid may flow. In some embodiments, slot gap can lead from cavity to an opening or a series of channel outlet ends. In some embodiments, cutouts in the shims define the geometry of the slot, and the shims can be interchanged to implement different flow behaviors and patterning strategies. At least two fluid inlets can be used to feed fluid to the slot. However, in some embodiments, multiple separate fluid inlets can be used (e.g. 3 inlets, 4 inlets, 5 inlets, 6 inlets, 7 inlets, 8 inlets, 9 inlets, 11 inlets, 13 inlets, 15 inlets, 17 inlets, 20 inlets).

[0049] As shown in FIGS. 3A-3B, the shim configuration can be used for simultaneous deposition of two coating materials as alternating stripes. As illustrated, a heterogeneous alternating-stripe pattern is produced when two fluids are fed into alternating inlets of the hybrid slot coating tool. While slot coating has previously been adapted for deposition of narrow stripes of a single material, depositing two or more coating fluids simultaneously into a single-layer pattern is at least one novelty to this disclosure. FIG. 3A shows a shim material with cutout or cavity in a die plate forming an internal slot cavity. It further illustrates a region of cavity 301 corresponding to flow through each of fluid inlets 203, or from each of fluid outlets 207. Separation between different coating fluid species throughout the internal cavity is shown at 302. In some embodiments, the separation between the different coating fluid species is a physical separation. Separate outlet regions 303 correspond to separate flow streams within the coating apparatus. As shown in FIG. 3B, in some embodiments, hybrid patterning apparatus 304 can be assembled using the internal geometry shown in FIG. 3A. FIG. 3B further illustrates inflow of first coating fluid species 305, inflow of a second coating fluid species 306, and outflow of a heterogenous film comprising stripe-shaped regions of composition alternating between the first and second fluid species 307.

[0050] Slot die body can be made of any machinable material typically used in making slot die. These include but are not limited to stainless steel, aluminum, titanium, nylon, polycarbonate and combinations thereof. The material used to make slot die body generally is a function of the fluid that will be deposited. There should be compatibility between the slot die and the fluid with respect to chemical, electrical, mechanical, and physical properties.

[0051] In some embodiments, as shown in FIGS. 4A-4B, a pattern-scaling mechanism can cause interaction between different coating fluids without a shim, which is not disruptive to the pattern formation. In FIG. 4A, a shim material with cutout or cavity in die block forms an internal slot cavity. Cavity region 400 corresponds to flow through each of inlets 401, or from each of outlets 407. Region 402 corresponds to maximum width W.sub.1 of channels where multiple coating fluid species interact. In some embodiments, the species interact physically. Region 403 corresponds to width W.sub.2 of channels and is connected to outlet region of the hybrid patterning apparatus. In some embodiments, W.sub.2<W.sub.1. Region 404 corresponds to varying width channels connecting cavity regions 402 and 403. In some embodiments, as shown in FIG. 4B, hybrid patterning apparatus 405 can be assembled using the internal geometry shown in FIG. 4A. FIG. 4B further illustrates inflow of first coating fluid species 406, inflow of a second coating fluid species 407, and outflow of a scaled heterogenous alternating-stripe-patterned film 408. Compared to the coating apparatus configuration of FIG. 3, the internal tool geometry is considerably reduced. Rather, an alternating-stripe phase field is established by the array of inlet channels opening into a single-wide slot, without a physical barrier separating the fluids in the channels. Narrowing of the channel width along the primary axis of flow produces a proportional narrowing of each phase region, a useful phenomenon that single-phase slot extrusion cannot exploit. This represents an improvement over previous tool designs, where the minimum achievable center-to-center distance of the narrow stripe pattern is essentially attributable to the precision of tool fabrication and assembly.

[0052] In some embodiments, the feature size capability of the hybrid slot coating can be tied to the minimum stripe width that can be deposited through an isolated liquid bridge. FIG. 5A illustrates the coating tool configuration used to produce this pattern feature under steady flow conditions. The fractional deviation in stripe width from tool inlet spacing, expressed as w*≡(w−w.sub.0)/w.sub.0, is plotted in FIG. 5B against the dimensionless quantity Q*≡Q/(VGw.sub.0), which represents fluid volume per unit width of substrate. Correlations between w* and Q*, and between H and Q* comprise a two-parameter process input domain for controlling stripe geometry. Variations across the different coating fluids in FIG. 5B indicate the influence of both viscosity and wettability on the process control. For comparison, 20% aqueous polyvinyl alcohol (PVA) is more viscous than the other fluids by an order of magnitude, and both surface tension and contact angle of a surfactant-doped 1.3% aqueous dispersion of poly(3,4-ethylenedioxythiophene) polystyrene sulfonate (PEDOT:PSS) is significantly lower than that of aqueous PVA.

[0053] In some embodiments, the coating tool 100 can include mechanisms to start and stop the scaling and patterning process. FIG. 6A shows a configuration of the hybrid slot coating tool used to produce a segmented narrow stripe of 15% aqueous PVA on flexible PET substrate. The break in the stripe is produced by periodic flow cutoff and startup through a single inlet. FIG. 6B shows a comparison of actuation performance for various control schemes, measured as the length of the tapering at the leading and trailing edges of each stripe segment. The sum of l.sub.START and l.sub.STOP can be considered a lower limit on the minimum feature size along the x-axis. FIG. 6B compares the severity of this measurement for the various flow actuation schemes.

[0054] These relationships between coating bead behavior and feature size control can be understood in the context of a balance of viscous, interfacial, and inertial forces at the dynamic liquid bridge beneath the tool. Viscous shear appears to limit lateral spreading of the coating bead along the coating outlet. Surface tension at the liquid-gas interface limits spreading counter to interfacial forces associated with the solid-liquid interfaces. The balance between liquid-gas and solid-liquid interfacial force is also a function of the shape of the liquid bridge, which provides an intuitive explanation for the positive correlation between H and w*.

[0055] The substrate can be moved at any suitable velocity to enable coating of the substrate. For example, according to embodiments of the present invention, a velocity of 25-100 feet per second is particularly preferred.

[0056] Any suitable film forming polymer can be used in the coating dispersion used in the process of this invention. Typical film forming polymers include, for example, but are not limited to, polycarbonates, polyesters, polyamides, polyurethanes, polystyrenes, polyarylethers, polyarylsulfones, polybutadienes, polysulfones, polyethersulfones, polyethylenes, polypropylenes, polyimides, polymethylpentenes, polyphenylene sulfides, polyvinyl butyral, polyvinyl acetate, polysiloxanes, polyacrylates, polyvinyl acetals, polyamides, polyimides, amino resins, phenylene oxide resins, terephthalic acid resins, epoxy resins, phenolic resins, polystyrene and acrylonitrile copolymers, polyvinylchloride, vinylchloride and vinyl acetate copolymers, acrylate copolymers, alkyd resins, cellulosic film formers, poly(amideimide), styrene-butadiene copolymers, vinylidenechloride-vinylchloride copolymers, vinylacetate-vinylidenechloride copolymers, styrene-alkyd resins, polyvinylcarbazole, and the like.

[0057] In some embodiments, the coating dispersion used in the process can include, but are not limited to, polyvinyl alcohol (PVA), Mowiol® 4-88, poly(3,4-ethylenedioxythiophene):polystyrene sulfonate (PEDOT:PSS), Clevios PH1000, doped with 1% Triton X-100 surfactant and 6% ethylene glycol; polydimethylsiloxane (PDMS), Dow Corning 200® fluid; glycerol, and used in 95% concentration, and vacuum pump oil (VPO). Solid phase materials can also be included. Polyethylene terephthalate film (PET), ES301400, can be used as a flexible substrate for deposition of patterned films. PET shim stock can also be used to define the internal geometry of the hybrid slot coater, whose die block material is polymethyl methacrylate (PMMA), optically clear cast acrylic.

[0058] This disclosure also includes a method of preparing a patterned thin film material. According to the method, a desired surface pattern is first designed. The parameters of the designed surface pattern are input into a computer. A substrate having a substrate surface is passed under a hybrid patterning apparatus, and the designed surface pattern is patterned onto the passing substrate surface using the hybrid patterning apparatus.

[0059] Substrates and fluids suitable for use in this disclosure can be any material one of ordinary skill would use in a thin film apparatus. Suitable substrates for use in accordance with this disclosure include, but are not limited to, paper, glass, thin plastic film, and thin metallic film. Plastic film is the preferred substrate. Suitable substrates can be flexible, rigid, uncoated, precoated, as desired. The substrates can comprise a single layer or be made up of multiple layers. Suitable fluids that may be deposited in the patterning of the substrate include, but are not limited to, dispersions and organic and inorganic polymer solutions.

EXAMPLES

[0060] In accordance with this disclosure, a system has been designed and fabricated for the purpose of producing customized thin films. Initial studies have been performed to demonstrate such a system and to produce basic patterns as seen in various emergent technologies.

Example 1: Feature Size control with Miscible Coating Liquids

[0061] In some embodiments, simultaneous coating of two miscible liquids can consolidate the processing of alternating-stripe patterns into a single step. Deposition of each liquid species separately, in rows of narrow non-overlapping stripes, is the more conventional approach. Both strategies are compared with 10% aqueous PVA solutions coated on flexible PET substrate. FIG. 7A shows a process response of stripe width for narrow stripes of 10% aqueous PVA using the conventional approach, and for FIG. 7B alternating stripes of PVA and un-doped 1.3% aqueous PEDOT:PSS using the hybrid patterning apparatus. The volumetric flow-rate, Q, is specified as the average value per stripe. The single-phase approach shown in FIG. 7A requires multiple coating beads in the deposition region, each corresponding to an individual stripe. In the case with two miscible liquid phases illustrated in FIG. 7B, deposition flow behaves as a single coating bead with local variations in liquid phase. Consequentially, spreading effects at the coating bead edges are less significant, resulting in a more robust patterning capability. Whereas the widths of single-phase narrow stripes vary significantly across inputs, as shown in FIG. 7A the results for simultaneously-coated alternating stripes in FIG. 7B are largely independent of H and Q.

Example 2: Wetting-Derived Limitation for Immiscible Coating Liquids

[0062] FIGS. 8A-8B illustrates the behavior of two immiscible liquids, PDMS and 24% aqueous PVA, processed simultaneously using the alternating-stripe patterning approach. Here, the concentration of aqueous PVA has been selected to match the kinematic viscosity of 1000 cSt of the PDMS solution. The developing flow sequence begins in FIG. 8A with fully-developed deposition flow of PVA, followed by flow startup of PDMS. PDMS accumulates within localized coating beads until interaction between the two liquid phases occurs, resulting in unsteady deposition flow characterized by enhanced spreading of both liquids along the width of the coating tool as shown in FIG. 8B. While complete description of liquid bridge dynamics observed above is beyond the scope of this investigation, the enhanced spreading aspect follows intuitively from the wetting transition illustrated below. Spreading of the lower-surface tension liquid over the surface of the higher-surface tension liquid is evident for three representative cases in FIG. 9A. Here, the surface tension of 24% aqueous PVA, PDMS, 95% glycerol, and VPO are 42 mN/m, 20 mN/m, 63 mN/m, and 31 mN/m, respectively. The interfacial tensions are 5.2 mN/m for aqueous PVA and PDMS, 8.2 mN/m for PVA and VPO, and 9.1 mN/m for glycerol and VPO. Given these interfacial properties, Young's equation for wetting predicts the observed spreading behavior due to formation of the liquid-liquid interface. At the liquid-liquid-gas contact line in FIG. 9B, Young's equation can be applied as follows:

0=σ.sub.AB−σ.sub.A cos φ.sub.A+σ.sub.B cos φ.sub.B   (1)

0=σ.sub.A sin φ.sub.A−σ.sub.B sin φ.sub.B   (2)

[0063] Here, σ.sub.A and σ.sub.B are the surface tensions of the two liquids, σ.sub.AB denotes the interfacial tension between liquid phases, and their contact angles are given by φ.sub.A and φ.sub.B. Similarly, at the liquid-liquid-solid contact line, the force balance can be expressed as:

0=−γ.sub.Aγ.sub.B+σ.sub.AB cos θ.sub.B,A   (3)

[0064] Thus, where the interfacial tension σ.sub.AB is small compared to forces at the other interfaces, equations (1)-(3) predict the formation of the shallow sloped cross section illustrated in FIG. 9D. In essence, the contact angles predicted for the liquid-liquid-gas contact line correspond to preferential wetting of the lower-surface tension liquid along the surface of the higher surface tension liquid. Similarly, equilibrium contact angles at the solid surface arise from movement of the unpinned liquid-liquid-solid contact line.

Example 3: Internal Flow and Pattern Scaling

[0065] The shim configuration illustrated in FIG. 10 generates an internal flow field for alternating-stripe patterns at high resolution. The converging section of the slot acts as a mechanism for scaling of the entire pattern, reducing the average width of stripes from an initial value, w1≡W.sub.1/N to a smaller value near the outlet region, Here, w2≡W.sub.2/N is the total number of stripes, W.sub.1 is the overall slot width upstream from the converging section, and W.sub.2 is the slot width near the outlet. The angle ϕ is relevant to design of the channel length L required for a given inlet configuration and desired pattern, although both the inlet configuration and L are kept fixed in this study for purposes of comparison.

[0066] FIG. 11 shows internal flow through a converging slot of alternating stripes of 10% PVA. Initial experiments with two 10% aqueous PVA solutions, one with less than 2% food dye added, and one dye-free, demonstrate viability for this patterning approach. Optical images of internal flow are organized in FIG. 11 for various permutations of W.sub.1/W.sub.2 and ϕ. The channel depth, equal to the slot gap G, is kept fixed at 76 μm. Volumetric flow-rate per stripe is 140 μL is in the top row of FIGS. 11, and 40 μL is in the bottom row of FIG. 11. In addition to these flow-rates, values as low as 5 μL/s produce the same results without any resolvable variation. Uniformity of stripe width is apparent in most cases, although some variation across the width of the slot is observed for ϕ=60°, 75°, with narrower stripes located at the channel periphery. This implies reduced flow-rate near the outer edge of the slot compared with the center, due to flow in the outer region experiencing the same pressure drop over a longer distance. At 46 gm, the smallest feature size achieved, the aspect ratio of each individual stripe is approximately unity (w.sub.1/G≈1).

[0067] While this invention has been described in conjunction with specific embodiments described above, it is evident that many alternatives, modifications and variations will be apparent to those skilled in the art. Accordingly, the preferred embodiments of the invention, as set forth above, are intended to be illustrative not limiting. Various changes may be made without departing from the spirit and scope of the invention.