VACUUM PUMPING SYSTEM HAVING A PLURALITY OF POSITIVE DISPLACEMENT VACUUM PUMPS AND METHOD FOR OPERATING THE SAME
20210372405 · 2021-12-02
Inventors
- Christian Spada (Turin (TO), IT)
- David Lukman (Concord, CA)
- Roberto Carboneri (Torino, IT)
- Andrea Bertallot (Cavour Torino, IT)
- Pascal Martin (Concord, CA)
Cpc classification
F04C28/02
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04C29/028
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04C23/001
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04B23/04
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04C29/04
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04C2220/10
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04C2270/78
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04C28/06
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04C2240/20
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04C23/005
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04C2270/18
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04C2270/09
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04C2270/70
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04C28/28
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04C2270/19
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04C2220/30
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04C2270/80
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04C2270/052
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04C25/02
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
International classification
F04C28/02
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04C23/00
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04C25/02
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04C28/28
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04C29/02
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
Abstract
A vacuum pumping system includes a plurality of positive displacement vacuum pumps, and more particularly a plurality of positive displacement vacuum pumps working in parallel. The vacuum pumping system includes a management unit that carries out a synchronized control of all the positive displacement vacuum pumps of the vacuum pumping system and thus allows to check possible risk of contamination of the vacuum pumping system and carry out, if needed, the necessary corrective actions without requiring any modification to the construction of the vacuum pumping system.
Claims
1. A vacuum pumping system, comprising: a plurality of positive displacement vacuum pumps, comprising at least two positive displacement vacuum pumps separately connected to a same vacuum chamber, or to two or more vacuum chambers that are mutually communicating; and a management unit for controlling the plurality of positive displacement vacuum pumps, the management unit configured to perform an operation comprising: identifying one or more operating parameters of the positive displacement vacuum pumps related to a risk of contamination of the vacuum pumping system by one or more of the positive displacement vacuum pumps; setting a threshold value or condition for each of the identified operating parameters; detecting the identified operating parameters for each of the positive displacement vacuum pumps; comparing, for each of the positive displacement vacuum pumps, the detected values or conditions of the identified operating parameters with the corresponding threshold values or conditions; and if the detected value of one or more identified operating parameter(s) of one of the positive displacement vacuum pumps exceeds the corresponding threshold value, or the detected condition of one or more identified operating parameter(s) of one of the positive displacement vacuum pumps is not consistent with the corresponding threshold condition, acting in a synchronized way on at least another one of the plurality of positive displacement vacuum pumps.
2. The vacuum pumping system according to claim 1, wherein the operating parameter(s) is/are selected from the group consisting of: the pump frequency; the power absorbed by the vacuum pump; the current absorbed by the vacuum pump; the voltage absorbed by the vacuum pump; and the temperature of one or more selected component(s) of the vacuum pump.
3. The vacuum pumping system according to claim 1, wherein the management unit is configured to carry out at least one of the following actions: carrying out corrective actions in a synchronized way on two or more of the plurality of positive displacement vacuum pumps if the detected value of one or more identified parameter(s) of one or more of the positive displacement vacuum pumps exceeds the corresponding threshold value or the detected condition of one or more identified parameter(s) of one or more of the positive displacement vacuum pumps is not consistent with the corresponding threshold condition; in case the detected value of one or more identified parameter(s) of one of the positive displacement pumps exceeds the corresponding threshold value or the detected condition of one or more identified parameter(s) of one of the positive displacement pumps is not consistent with the corresponding threshold condition, switching off in a synchronized way at least another one of the plurality of positive displacement vacuum pumps; in case the detected value of one or more identified parameter(s) of one of the positive displacement vacuum pumps exceeds the corresponding threshold value or the detected condition of one or more identified parameter(s) of one of the positive displacement vacuum pumps is not consistent with the corresponding threshold condition, carrying out corrective actions in a synchronized way on all the positive displacement vacuum pumps of the plurality of positive displacement vacuum pumps; if the detected value of one or more identified parameter(s) of one of the positive displacement vacuum pumps exceeds the corresponding threshold value or the detected condition of one or more identified parameter(s) of one of the positive displacement vacuum pumps is not consistent with the corresponding threshold condition, switching off in a synchronized way all the positive displacement vacuum pumps of the plurality of positive displacement vacuum pumps; triggering an alarm if the detected value of one or more identified parameter(s) of one or more of the positive displacement vacuum pumps exceeds the corresponding threshold value or the detected condition of one or more identified parameter(s) of one or more of the positive displacement vacuum pumps is not consistent with the corresponding threshold condition.
4. The vacuum pumping system according to claim 1, wherein the management unit is configured to carry out at least one of the following actions: detecting the identified parameters and comparing the detected values or conditions of the identified parameters with the corresponding threshold values or conditions of the plurality of positive displacement vacuum pumps simultaneously; detecting the identified parameters and comparing the detected values or conditions of the identified parameters with the corresponding threshold values or conditions of the plurality of positive displacement vacuum pumps according to a predetermined order; detecting the identified parameters and comparing the detected values or conditions of the identified parameters with the corresponding threshold values or conditions of the plurality of positive displacement vacuum pumps continuously; detecting the identified parameters and comparing the detected values or conditions of the identified parameters with the corresponding threshold values or conditions of the plurality of positive displacement vacuum pumps at predetermined time intervals.
5. The vacuum pumping system according to claim 1, wherein at least one of the positive displacement vacuum pumps is an oil lubricated vacuum pump.
6. The vacuum pumping system according to claim 5, wherein the at least one oil lubricated vacuum pump is a rotary vane vacuum pump.
7. The vacuum pumping system according claim 5, wherein the at least one rotary vane vacuum pump comprises an outer housing, receiving a pump body within which a stator surrounding and defining a cylindrical pumping chamber is defined, in which pumping chamber a cylindrical rotor is accommodated and eccentrically located with respect to an axis of the pumping chamber, one or more radially movable radial vanes being mounted on the rotor and kept against the wall of the pumping chamber, an amount of oil being introduced into the outer casing for acting as a coolant and lubricating fluid, and wherein the management unit is configured to prevent oil from the at least one of the rotary vane vacuum pumps from being sucked through the vacuum pumping system by other of the rotary vane vacuum pumps.
8. A method of operating a vacuum pumping system, the vacuum pumping system comprising a plurality of positive displacement vacuum pumps, the plurality of positive displacement vacuum pumps comprising at least two positive displacement vacuum pumps separately connected to a same vacuum chamber or to two or more vacuum chambers that are mutually communicating, the method comprising: identifying one or more operating parameters of the positive displacement vacuum pumps related to a risk of contamination of the vacuum pumping system by one or more of the positive displacement vacuum pumps; setting a threshold value or condition for each of the identified operating parameters; detecting the identified operating parameters for each of the positive displacement vacuum pumps; comparing for each of the positive displacement vacuum pumps the detected values or conditions of the identified operating parameters with the corresponding threshold values or conditions; and if the detected value of one or more identified operating parameter(s) of one of the positive displacement vacuum pumps exceeds the corresponding threshold value, or the detected condition of one or more identified operating parameter(s) of one of the positive displacement vacuum pumps is not consistent with the corresponding threshold condition, acting in a synchronized way on at least another one of the plurality of positive displacement vacuum pumps.
9. The method according to claim 8, wherein the operating parameter(s) is/are selected from the group consisting of: the pump frequency; the power absorbed by the vacuum pump; the current absorbed by the vacuum pump; the voltage absorbed by the vacuum pump; and the temperature of one or more selected component(s) of the vacuum pump.
10. The method according to claim 8, comprising at least one of the following steps: in case the detected value of one or more identified parameter(s) of one of the positive displacement vacuum pumps exceeds the corresponding threshold value or the detected condition of one or more identified parameter(s) of one of the positive displacement vacuum pumps is not consistent with the corresponding threshold condition, carrying out corrective actions in a synchronized way on at least another one of the plurality of positive displacement vacuum pumps; in case the detected value of one or more identified parameter(s) of one of the positive displacement vacuum pumps exceeds the corresponding threshold value or the detected condition of one or more identified parameter(s) of one of the positive displacement vacuum pumps is not consistent with the corresponding threshold condition, switching off in a synchronized way at least another one of the plurality of positive displacement vacuum pumps; in case the detected value of one or more identified parameter(s) of one of the positive displacement vacuum pumps exceeds the corresponding threshold value or the detected condition of one or more identified parameter(s) of one of the positive displacement vacuum pumps is not consistent with the corresponding threshold condition, carrying out corrective actions in a synchronized way on all the positive displacement vacuum pumps of the plurality of positive displacement vacuum pumps; in case the detected value of one or more identified parameter(s) of one of the positive displacement vacuum pumps exceeds the corresponding threshold value or the detected condition of one or more identified parameter(s) of one of the positive displacement vacuum pumps is not consistent with the corresponding threshold condition, switching off in a synchronized way all the positive displacement vacuum pumps of the plurality of positive displacement vacuum pumps; triggering an alarm if the detected value of one or more identified parameter(s) of one or more of the positive displacement vacuum pumps exceeds the corresponding threshold value or the detected condition of one or more identified parameter(s) of one or more of the positive displacement vacuum pumps is not consistent with the corresponding threshold condition.
11. The method according to claim 8, comprising at least one of the following steps: detecting the identified parameters and comparing the detected values or conditions of the identified parameters with the corresponding threshold values or conditions of the plurality of positive displacement vacuum pumps simultaneously; detecting the identified parameters and comparing the detected values or conditions of the identified parameters with the corresponding threshold values or conditions of the plurality of positive displacement vacuum pumps according to a predetermined order; detecting the identified parameters and comparing the detected values or conditions of the identified parameters with the corresponding threshold values or conditions of the plurality of positive displacement vacuum pumps continuously; detecting the identified parameters and comparing the detected values or conditions of the identified parameters with the corresponding threshold values or conditions of the plurality of positive displacement vacuum pumps at predetermined time intervals.
12. The method according to claim 8, wherein at least one of the positive displacement vacuum pumps is an oil lubricated vacuum pump.
13. The method according to claim 12, wherein the at least one oil lubricated vacuum pump is a rotary vane vacuum pump.
14. The method according to claim 13, wherein the at least one rotary vane vacuum pump comprises an outer housing, receiving a pump body within which a stator surrounding and defining a cylindrical pumping chamber is defined, in which pumping chamber a cylindrical rotor is accommodated and eccentrically located with respect to an axis of the pumping chamber, one or more radially movable radial vanes being mounted on the rotor and kept against the wall of the pumping chamber, an amount of oil being introduced into the outer casing for acting as a coolant and lubricating fluid, and wherein the method is configured to prevent oil from the at least one of the rotary vane vacuum pumps from being sucked through the vacuum pumping system by other of the rotary vane vacuum pumps.
15. The method according to claim 8, wherein: the two or more vacuum chambers comprise a first vacuum chamber for containing a first ion guide configured to receive a plurality of ions generated by an ion source of a mass spectrometry system, and a second vacuum chamber for containing a second ion guide configured to receive at least a portion of the ions transmitted from the first ion guide; and the plurality of positive displacement vacuum pumps comprises a first positive displacement pump configured to maintain the first vacuum chamber at a first operating pressure, and a second positive displacement pump configured to maintain the second vacuum chamber at a second operating pressure.
16. A vacuum pumping system, comprising: at least one vacuum chamber; a plurality of vacuum pumps each separately connected to the at least one vacuum chamber, and a management unit configured to control operation of the plurality of vacuum pumps, the management unit further configured to monitor one or more operating parameters of the plurality of vacuum pumps and to identify, based on the one or more operating parameters, a mismatch in expected pumping between the one or more of the plurality of vacuum pumps.
17. The vacuum pumping system of claim 16, wherein the at least one vacuum chamber comprises a plurality of mutually communicating vacuum chambers, and wherein one of the plurality of vacuum pumps is in separate communication with a first vacuum chamber of the plurality of vacuum chambers and the other of the plurality of vacuum pumps is in separate communication with the other of the plurality of vacuum chambers.
18. The vacuum pumping system of claim 16, wherein at least one of the vacuum chambers is in communication with atmosphere.
19. The vacuum pumping system of claim 16, wherein the management unit is further configured to activate the plurality of vacuum pumps by: activating a first vacuum pump of the plurality of vacuum pumps; monitoring one or more operating parameters of the first vacuum pump; confirming from the monitoring, that the first vacuum pump is operating within an expected pump speed range and, based on the confirming, activating a second vacuum pump of the plurality of vacuum pumps; and monitoring one or more operating parameters of the first vacuum pump and the second vacuum pump while synchronizing operation of the first vacuum pump and the second vacuum pump to match the expected pump speed of the first vacuum pump and the expected pump speed of the second vacuum pump to prevent backflow from one of the plurality of vacuum pumps into the at least one mutually communicating vacuum chamber.
20. The vacuum pumping system of claim 16, wherein: the two or more vacuum chambers comprise a first vacuum chamber for containing a first ion guide configured to receive a plurality of ions generated by an ion source of a mass spectrometry system, and a second vacuum chamber for containing a second ion guide configured to receive at least a portion of the ions transmitted from the first ion guide; and the plurality of positive displacement vacuum pumps comprises a first positive displacement pump configured to maintain the first vacuum chamber at a first operating pressure, and a second positive displacement pump configured to maintain the second vacuum chamber at a second operating pressure.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
[0078] The invention can be better understood by referring to the following figures. The components in the figures are not necessarily to scale, emphasis instead being placed upon illustrating the principles of the invention. In the figures, like reference numerals designate corresponding parts throughout the different views.
[0079]
[0080]
[0081]
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[0084]
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DETAILED DESCRIPTION
[0090] The invention can be advantageously applied to vacuum pumping systems including two or more positive displacement pumps working in parallel and/or connected to vacuum chambers which are mutually communicating.
[0091]
[0092] Nevertheless, it shall be understood that the invention could be applied to vacuum pumping systems comprising a plurality of positive displacement vacuum pumps of any kind and structure, and possibly further comprising one or more high-vacuum vacuum pumps of any kind and structure.
[0093]
[0094]
[0095]
[0096] In the exemplary vacuum pumping systems of
[0097] It will be evident to the person skilled in the art that, in all the shown embodiment, a failure of one of the first and second rotary vacuum pumps 20, 30 involves a risk of contamination of the vacuum pumping system.
[0098] In all the shown constructions, if, for instance, when starting the vacuum pumping system, the first rotary vane vacuum pump 20 is stopped due to a failure and the second rotary vane vacuum pump 30 is switched ON, the oil vapors at the inlet of first rotary vane vacuum pump 20 will be pumped by the second rotary vane vacuum pump 30 and sucked into the vacuum chamber 60 or vacuum chambers 60, 70, thus contaminating the vacuum pumping system.
[0099] In some arrangements, an anti-suckback valve may be introduced between the vacuum pumps 20, 30 and the vacuum chambers 60, 70. The anti-suckback valve is operative to close when the vacuum pumps 20, 30 are inactive to prevent backflow into the vacuum chambers 60, 70. Upon activation of the vacuum pumps 20, 30, the anti-suckback valves open under the vacuum created by the vacuum pumps 20,30. The inventors have determined that in some operating conditions, the anti-suckback valves may open under activation of their associated pump 20, 30 but under certain flow conditions in the vacuum chambers 60, 70 may induce backflow from the pump 20, 30 into the vacuum chambers 60, 70. These operating conditions are typically likely to be present during uncoordinated startup of the vacuum pumps 20, 30, defective operation of the vacuum pumps 20, 30, or uncoordinated shutdown of the vacuum pumps 20, 30. Backflow from the pumps 20, 30 into the vacuum chambers 60, 70 may lead to contamination and inaccurate measurement by an analytical instrument operating within the vacuum system 100.
[0100] In some embodiments, one of the vacuum chambers 60, 70 of the vacuum system 100 may be in communication with atmosphere, such as through an aperture. In these embodiments, the vacuum chambers 60, 70 are maintained at different operating pressures during operation and fluid is continually drawn through the aperture by operation of the vacuum pumps 20, 30. Unsynchronized operation of the vacuum pumps 20, 30 when working on these embodiments has been found to create unexpected flow conditions that may lead to backflow from one or more of vacuum pumps 20, 30 into the vacuum chambers 60, 70.
[0101] In all the exemplary embodiments shown in
[0102] The management unit 90 is configured to control both the rotary vane vacuum pumps 20, 30 in a synchronized manner. By controlling the vacuum pumps 20, 30 in a synchronized manner a backflow condition from at least one of the vacuum pumps 20, 30 into the vacuum chamber 60, 70 is avoided.
[0103] In detail, the management unit 90 is intended to check whether a possible risk of contamination arises and, in the affirmative, to carry out the necessary corrective actions for avoiding that such contamination takes place.
[0104] To this purpose, the management unit 90: [0105] identifies one or more operating parameters related to a contamination of the vacuum pumping system by a positive displacement vacuum pump; [0106] sets a threshold value or condition for each of said parameters; [0107] detects the identified parameters for each positive displacement vacuum pump 20, 30; [0108] compares for each positive displacement vacuum pump 20, 30 the current values or conditions of the identified parameters with the corresponding threshold values or conditions; [0109] implements corrective actions in a synchronized way on both the positive displacement vacuum pumps 20, 30 in case the detected value of one or more identified parameter(s) of one or more of the positive displacement vacuum pumps exceeds the corresponding threshold value or the detected condition of one or more identified parameter(s) is not consistent with the corresponding threshold condition.
[0110] Preferably, the management unit 90 switches off in a synchronized way both the positive displacement vacuum pumps 20, 30 in case the detected value of one or more identified parameter(s) of one or more of the positive displacement vacuum pumps exceeds the corresponding threshold value or the detected condition of one or more identified parameter(s) is not consistent with the corresponding threshold condition.
[0111] Preferably, the management unit 90 further triggers an alarm in case the detected value of one or more identified parameter(s) of one or more the positive displacement vacuum pumps exceeds the corresponding threshold value or the detected condition of one or more identified parameter(s) is not consistent with the corresponding threshold condition.
[0112] By acting in a synchronized way on the positive displacement pumps of the vacuum pumping system, and preferably on all the positive displacement pumps of the vacuum pumping system, the management unit 90 of the vacuum pumping system according to the invention allows to effectively prevent any risk of contamination due to operation of a positive displacement vacuum pump after a failure of another positive displacement vacuum pumps of the vacuum pumping system or to slow and deactivate a positive displacement vacuum pump in a synchronized way with the slowing and deactivation of a malfunctioning pump or a pump operating outside of its expected operational parameters.
[0113] And this result is achieved by the invention without the need of introducing any additional safety components.
[0114] With reference to the exemplary construction of
[0115] More particularly, the management unit 90 may be further configured to implement corrective actions on the turbomolecular vacuum pump 40 in case the detected value of one or more identified parameter(s) of one or more of the positive displacement vacuum pumps exceeds the corresponding threshold value or the detected condition of one or more identified parameter(s) is not consistent with the corresponding threshold condition.
[0116] For instance, the management unit 90 may be further configured to switch off the turbomolecular vacuum pump 40 in case the detected value of one or more identified parameter(s) of one or more of the positive displacement vacuum pumps exceeds the corresponding threshold value or the detected condition of one or more identified parameter(s) is not consistent with the corresponding threshold condition.
[0117]
[0118] In
[0119] In the flow charts of
[0120] However, it is evident that this choice has not to be understood as limiting: positive displacement vacuum pumps are complex devices in which different operating parameters are strongly correlated such as power, current, voltage absorbed by the pump, temperatures of pump components, and so on; any of these and other parameters can be used as a control parameter. In some embodiments, the operating parameter may comprise measurement of the environment of the vacuum pumping system, such as a pressure of each of the vacuum chambers 60, 70, a flow rate through the connections between the pumps 20,30 and the vacuum chambers 60,70, or some combination of such factors. Moreover, in more complex control algorithms, several parameters may be used to check the operation of the positive displacement vacuum pumps.
[0121]
[0122] Under this operative condition, the rotary vane vacuum pumps 20, 30 run at nominal frequency, the pressure(s)s in the vacuum chamber(s) 60,70 match the expected operating pressure(s), and the flow into each of the vacuum pumps 20,30.
[0123] The management unit 90 identifies two parameters related to a possible risk of contamination of the vacuum pumping system: [0124] first parameter: failure of a rotary vane vacuum pump; [0125] second parameter: pump frequency of a rotary vane vacuum pump.
[0126] The first parameter can assume two conditions, i.e. YES or NO. The management unit 90 sets NO as a condition in which there is no risk of contamination and YES as a condition in which a risk of contamination arises.
[0127] The second parameter can assume a range of values and the management unit 90 sets a threshold minimum value, below which a risk of contamination arises.
[0128] Therefore, the operation of the management unit 90 under this first operative condition is as follows: [0129] rotary vane vacuum pumps 20, 30 run at nominal frequency (step 101); [0130] the management unit 90 checks the actual frequency of the pumps 20, 30 and, for each pump, compares the actual frequency to the nominal frequency (step 103); [0131] if the actual frequency is equal to the nominal frequency, no corrective action is implemented and a new control cycle is initiated; [0132] if not, the management unit checks, for each pump, if the pump is derating (step 105); [0133] if either of the pumps is derating, the management unit 90 further detects the pump frequency of each pump 20, 30 and compares the detected frequency with the minimum threshold value (step 107); [0134] if the detected frequency for both pumps 20, 30 is higher than the minimum threshold value, the management unit 90 triggers an alarm, indicating that the pump frequency of one of the pumps is different form the nominal frequency (step 109); [0135] if the detected frequency for one of the pumps 20, 30 is lower than the minimum threshold value, the management unit 90 detects a dangerous situation and triggers a synchronized shut-down procedure of both the pumps 20,30 (step 111); [0136] if none of the pumps is derating, the management unit 90 further checks if one of the pumps is in fail (step 113); [0137] if either of the pumps is in fail, the management unit 90 detects a dangerous situation and triggers a synchronized shut-down procedure of both the pumps 20,30 (step 111); [0138] if none of the pump is in fail no corrective action is implemented and a new control cycle is initiated.
[0139] The above control cycle can be carried out continuously or at predetermined time intervals.
[0140]
[0141] Under this operative condition, the rotary vane vacuum pumps 20, 30 will normally stop and the anti-suckback valve (ASBV) will close. This ensures that the vacuum system is not contaminated unless the ASBV malfunctions. Therefore, risk of contamination during the vent phase is relatively low.
[0142] In this condition, the management unit 90 identifies a single parameter related to a possible risk of contamination of the vacuum pumping system, i.e. the rotary vacuum pump is still running.
[0143] This parameter can assume two conditions, i.e. YES or NO. The management unit 90 sets NO as a condition in which there is no risk of contamination and YES as a condition in which a risk of contamination arises.
[0144] Therefore, the operation of the management unit 90 under this second operative condition is as follows: [0145] the vent phase is initiated (step 201); [0146] rotary vane vacuum pumps 20, 30 are simultaneously switched off (step 203); [0147] the management unit 90 checks, for each pump, if the pump has stopped (step 205); [0148] if both the pumps 20, 30 have stopped, the management unit does not implement any corrective action and the vacuum pumping system is brought to air, e.g atmospheric pressure (step 207); [0149] if not, the management unit 90 triggers an alarm, for indicating to the operator that either or both vacuum pumps 20, 30 have to be manually switched off (step 209).
[0150]
[0151] The starting phase is the most critical phase in view of risks of vacuum pumping system contamination, because at atmospheric pressure the ASBV for pumps 20, 30 are open.
[0152] If during the starting phase, one of the pumps 20, 30 achieves the target frequency while the other pump 30, 20 for any reason is stopped, then the running pump is able to suck the oil vapours from the other pump 20 through the vacuum chamber 60. The final effect is the vacuum pumping system is contaminated.
[0153] During the starting phase, the pumps are started at their minimum frequency and gradual ramps up to the nominal frequency are performed. During these ramps, the differences in terms of pumping speed of the pumps connected to the same vacuum chamber have to be kept at a minimum. In embodiments where different sized or model pumps are employed the pumping speed of each pump may be different in synchronized operation, however their effective pumping on the vacuum is matched to avoid one pump drawing a backflow through another pump. The pumping speed or effective pumping of a pump may be reflected by one or more operating parameters including, for instance, the pump frequency, power draw, etc.
[0154] In this condition, the management unit 90 identifies two parameters related to a possible risk of contamination of the vacuum pumping system: [0155] first parameter: failure of a rotary vane vacuum pump; [0156] second parameter: difference between the pump frequency of the first rotary vane vacuum pump 20 and the pump frequency of the second rotary vane vacuum pump 30 at a certain delay after the rotary vane vacuum pumps have been turned on.
[0157] The management unit 90 sets a maximum threshold value for the aforesaid difference in pump frequency.
[0158] Therefore, the operation of the management unit 90 under this third operative condition is as follows: [0159] the starting phase is initiated (step 301); [0160] the frequency of the rotary vane vacuum pumps 20, 30 is brought to a first check value (step 303); [0161] the management unit checks whether both pumps have reached the first check value after a first predetermined time interval, i.e. if the difference between the frequencies of the pumps is within a set threshold (step 305); [0162] if not, the management unit checks whether either of the pumps is in fail (step 307); if yes, the management unit switches off both the pumps 20, 30 (step 309); if not the frequency ramp of the pumps is continued and a new check is carried out; [0163] if yes (both pumps have reached the first check value after the first predetermined time interval), the frequency ramps go on and both pumps are brought to a second check value (step 311); [0164] the management unit checks whether both the pumps have reached the second check value after a second predetermined time interval, i.e. if the difference between the frequencies of the pumps is within a set threshold (step 313); [0165] if not, the management unit checks whether either of the pumps is in fail (step 315) and further checks whether the frequency of either of the pumps has dropped under the first check value (step 317); if one of these conditions is met, the management unit switches off both the pumps 20, 30 (step 309); if none of these conditions is met, the frequency ramp of the pumps is continued and a new check is carried out; [0166] if yes (both the pumps have reached the second check value after the second predetermined time interval), the frequency ramps go on and both pumps are brought to a final check value, corresponding to the nominal frequency (step 319); [0167] the management unit checks whether both the pumps have reached the final check value after a third predetermined time interval, i.e. if the difference between the frequencies of the pumps is within a set threshold (step 321); [0168] if not, the management unit checks whether either of the pumps is in fail (step 323) and further checks whether the frequency of either of the pumps has dropped under the second check value (step 325); if one of these conditions is met, the management unit switches off both the pumps 20, 30 (step 327); if none of these conditions is met, the frequency ramp of the pumps is continued and a new check is carried out; [0169] if yes (both the pumps have reached the final check value after the third predetermined time interval), the normal operation of the vacuum pumping system is reached (step 329).
[0170]
[0171] In this case, only the smaller pump is started at first, and the larger pump is started at a later stage.
[0172] Therefore, the flow chart of
[0177] Then, the operation of the management unit is the same as described with reference to
[0178] It will be evident to the person skilled in the art that the above description has been given by way of non-limiting example only, and many variants and modifications are possible without departing from the scope of the invention as defined in the following claims. Furthermore, the foregoing description is for the purpose of illustration only, and not for the purpose of limitation—the invention being defined by the claims.
[0179] For instance, it will be evident that many other operating conditions of the vacuum pumping system and corresponding parameters related to possible risk of contamination can be taken into account.
[0180] Moreover, although reference has been made to rotary vane vacuum pumps in the description of certain embodiments of the invention, it will be evident that the invention could be applied to a wide variety of vacuum pumping systems having a plurality of positive displacement vacuum pumps.
[0181] By way of example, the invention could be applied to a vacuum pumping system having a plurality of scroll vacuum pumps.
[0182] In this case, the risk of contamination would be connected to dust possibly present at the inlet of a scroll vacuum pump: if one of the scroll vacuum pumps stops due to a failure, the other vacuum pump(s) of the vacuum pumping system could suck the dust at the inlet of the scroll vacuum pump that has stopped; therefore, the sucked dust would pass through the vacuum chamber(s) to which the vacuum pumps are connected and the final effect is that the vacuum pumping system is contaminated.
[0183] With reference now to
[0184] The ion source 802 can be any known or hereafter developed ion source for generating ions and modified in accordance with the present teachings. Non-limiting examples of ion sources suitable for use with the present teachings include an atmospheric pressure chemical ionization (APCI) source, an electrospray ionization (ESI) source, a continuous ion source, a pulsed ion source, an inductively-coupled plasma (ICP) ion source, a matrix-assisted laser desorption/ionization (MALDI) ion source, a glow discharge ion source, an electron impact (EI) ion source, a chemical ionization (CI) source, or a photo-ionization (PI) ion source, among others. Additionally, as shown in
[0185] Analytes of interest, which are contained within the sample discharged from the ion source 802, can be ionized within the ionization chamber 850, which is separated from a first vacuum chamber 860 by a curtain plate 804a and an orifice plate 804b (collectively designated 804) having orifices (e.g., aperture 861) providing fluid communication between the ionization chamber 850 and the first vacuum chamber 860. In this embodiment, orifices in the curtain plate 804a and orifice plate 804b are sufficiently large to allow the incoming ions to enter the first vacuum chamber 860. By way of example, the orifices (e.g., aperture 861) can be substantially circular with a diameter in a range of about 0.6 mm to about 10 mm.
[0186] Although not shown in the schematic of
[0187] In various aspects, the ionization chamber 850 can be maintained at a pressure P.sub.0, which can be atmospheric pressure or a substantially atmospheric pressure (e.g., about 760 Torr). However, in some embodiments, the ionization chamber 850 can be evacuated to a pressure lower than atmospheric pressure, for example, via a pump (not shown) coupled to the ionization chamber 850.
[0188] Initially, ions generated by the ion source 802 can be successively transmitted in the direction indicated by the arrow in
[0189] The upstream ion guides 806, 810, 814 can have a variety of different configurations. By way of non-limiting example, the first ion guide 806 can comprise a set of rods arranged in a dodecapole configuration so as to provide a passageway for the transit of ions through the ion guide 806. An example of such an ion guide is described in U.S. Pat. No. 10,475,633, the teachings of which are incorporated by reference herein in their entirety. More generally, the first ion guide 806 can comprise any number of rods, for example, a plurality of rods maintained in a quadrupole, hexapole, octopole, or dodecapole configuration, or can be formed using a series of stacked rings such that the application of DC and/or RF voltages to one or more of these rods or rings, in a manner known in the art, in combination with gas dynamics can allow the ion guide 806 to focus the ions received through the aperture 861 as they pass through the ion guide 806 for transmission to downstream elements.
[0190] As described otherwise herein, operation of the vacuum pumping system can maintain the pressures in the various chambers within a desired range. By way of example, a first positive displacement vacuum pump 820 may be coupled to the first vacuum chamber 860 via an opening or port, for example, so as to apply a negative pressure to the first vacuum chamber 860 to maintain the pressure (P.sub.1) in the first vacuum chamber 860 in a range of between about 1 Torr and about 100 Torr, although other pressures can be used for this or for other purposes. In some aspects, the first vacuum chamber 860 may be maintained in a range of about 1 Torr to about 15 Torr, for example, in a range from about 4 Torr to about 8 Torr.
[0191] An aperture 871 disposed in an ion lens 808 (also referred to herein as IQ00) that is positioned downstream of the first ion guide 806 allows the passage of ions from the first vacuum chamber 860 into a second downstream vacuum chamber 870 in which another ion guide 810 is positioned. It will be appreciated that the vacuum chambers 860, 870 are therefore in fluid communication through the aperture 871 such that gas may flow therebetween depending, for example, on the differential pressures therebetween. In this embodiment, the aperture 871 in the ion lens 808 is sufficiently large to allow the ions transmitted from the first ion guide 806 to enter the second vacuum chamber 870.
[0192] The ion guide 810 can have the same or different configuration as ion guide 808 but may generally be configured to focus the ions received through the aperture 871 to downstream elements, for example, using a combination of electric fields and gas dynamics. As above, a power supply (not shown) can apply RF and/or DC voltage(s) to rods of the ion guide 810 to radially confine and focus the ions as they pass therethrough.
[0193] As shown in
[0194] An ion lens 812 (also referred to as IQ0) separates the second vacuum chamber 870 from the third vacuum chamber 880a, within which another ion guide 814 may be disposed. An aperture 881 provided within the ion lens 812 allows the passage of the ions transmitted from the ion guide 810 into the third vacuum chamber 880a. It will be appreciated that the vacuum chambers 870, 880a are therefore in fluid communication through the aperture 881 such that gas may flow therebetween depending, for example, on the differential pressures. In this embodiment, the aperture 881 in the ion lens 812 is sufficiently large to allow the ions transmitted from the second ion guide 810 to enter the third vacuum chamber 880a.
[0195] The ion guide 814 can have the same or different configuration as ion guide 810 but may generally be configured to further focus the ions received through the aperture 881 as they are transmitted through an intermediate pressure region prior to transmission to the mass spectrometer 818 through an aperture 891 in the ion lens 816 (also referred to herein as “IQ1”). In some embodiments, the ion guide 814 (also referred to herein as “Q0”) can be an RF ion guide and can comprise a quadrupole rod set. As above, a power supply (not shown) can apply RF to rods of the ion guide 814 to radially confine and focus the ions as they pass therethrough.
[0196] As shown in
[0197] The vacuum pump 840a may be any pump known in the art such as a turbomolecular pump, for example, that is generally able to maintain the chamber 880a at pressures at least below about 100 mTorr. In some embodiments, the third vacuum chamber 880a can be maintained at a pressure between about 3 to 15 mTorr, although other pressures can be used for this or for other purposes. While the positive displacement pumps 820, 830 may not be able to maintain such low pressures alone, the second positive displacement pump 830 may be coupled (e.g., in series) to the pump 840a to serve as a backing pump as shown in
[0198] Ions are transmitted from the ion guide 814 into the fourth vacuum chamber 880b containing a mass spectrometer 818, which typically operates at very low pressures (high vacuum) to reduce the chance of ions colliding with other molecules (e.g., gas molecules) within the one or more mass analyzers to enable the ions' characterization according to their mass-to-charge ratios (m/z). By way of non-limiting example, in one embodiment, the mass spectrometer 818 may comprise a detector, as well as two quadrupole mass analyzers (e.g., Q1, Q3) with a collision cell (e.g., q2) located between them. It will be apparent to those skilled in the art that the mass spectrometer 818 employed could take the form of a quadrupole mass spectrometer, triple quadrupole mass spectrometer, time-of-flight mass spectrometer, FT-ICR mass spectrometer, or Orbitrap® mass spectrometer, all by way of non-limiting example.
[0199] As shown in
[0200] It will be appreciated that not only are adjacent vacuum chambers (e.g., vacuum chambers 870, 880a) fluidly coupled through an aperture (e.g., aperture 881), but each of the vacuum chambers in the example MS system 800 are indirectly coupled to one another. In this manner, depending on the relative pressures between the various chambers, it will be apparent in light of the present teachings that the operation (or failure) of one pump (e.g., pump 820) may affect the pressure within and gas flows into or out of a vacuum chamber even if not directly coupled thereto. By way of non-limiting example, if both pumps 820 and 830 were turned off in an uncoordinated manner, a flow of gas between the downstream chambers could be generated due to the pressure differential between each chamber. The synchronized control of the parallel pumps 820, 830 as discussed otherwise herein (e.g., with reference to
[0201]
[0202] The computer system 900 may be coupled via the bus 922 to a display 930, such as a cathode ray tube (CRT) or liquid crystal display (LCD), for displaying information to a computer user. An input device 932, including alphanumeric and other keys, is coupled to the bus 922 for communicating information and command selections to the processor 920. Another type of user input device is a cursor control 934, such as a mouse, a trackball or cursor direction keys for communicating direction information and command selections to the processor 920 and for controlling cursor movement on the display 930. This input device typically has two degrees of freedom in two axes, a first axis (i.e., x) and a second axis (i.e., y), that allows the device to specify positions in a plane.
[0203] A computer system 900 can perform the present teachings. Consistent with certain implementations of the present teachings, results are provided by computer system 900 in response to processor 920 executing one or more sequences of one or more instructions contained in memory 924. Such instructions may be read into memory 924 from another computer-readable medium, such as storage device 928. Execution of the sequences of instructions contained in memory 924 causes processor 920 to perform the process described herein. Alternatively, hard-wired circuitry may be used in place of or in combination with software instructions to implement the present teachings. Thus, implementations of the present teachings are not limited to any specific combination of hardware circuitry and software. For example, the present teachings may be performed by a system that includes one or more distinct software modules for synchronizing the operation of the pumps to prevent a backflow condition in accordance with various embodiments.
[0204] In various embodiments, the computer system 900 can be connected to one or more other computer systems, like computer system 900, across a network to form a networked system. The network can include a private network or a public network such as the Internet. In the networked system, one or more computer systems can store and serve the data to other computer systems. The one or more computer systems that store and serve the data can be referred to as servers or the cloud, in a cloud computing scenario. The one or more computer systems can include one or more web servers, for example. The other computer systems that send and receive data to and from the servers or the cloud can be referred to as client or cloud devices, for example.
[0205] The term “computer-readable medium” as used herein refers to any media that participates in providing instructions to the processor 920 for execution. Such a medium may take many forms, including but not limited to, non-volatile media, volatile media, and transmission media. Non-volatile media includes, for example, optical or magnetic disks, such as the storage device 928. Volatile media includes dynamic memory, such as the memory 924. Transmission media includes coaxial cables, copper wire, and fiber optics, including the wires that comprise the bus 922.
[0206] Common forms of computer-readable media or computer program products include, for example, a floppy disk, a flexible disk, hard disk, magnetic tape, or any other magnetic medium, a CD-ROM, digital video disc (DVD), a Blu-ray Disc, any other optical medium, a thumb drive, a memory card, a RAM, PROM, and EPROM, a FLASH-EPROM, any other memory chip or cartridge, or any other tangible medium from which a computer can read.
[0207] Various forms of computer readable media may be involved in carrying one or more sequences of one or more instructions to the processor 920 for execution. For example, the instructions may initially be carried on the magnetic disk of a remote computer. The remote computer can load the instructions into its dynamic memory and send the instructions over a telephone line using a modem. A modem local to the computer system 900 can receive the data on the telephone line and use an infra-red transmitter to convert the data to an infra-red signal. An infra-red detector coupled to the bus 922 can receive the data carried in the infra-red signal and place the data on the bus 922. The bus 922 carries the data to the memory 924, from which the processor 920 retrieves and executes the instructions. The instructions received by the memory 924 may optionally be stored on the storage device 928 either before or after execution by the processor 920.
[0208] The descriptions herein of various implementations of the present teachings have been presented for purposes of illustration and description. It is not exhaustive and does not limit the present teachings to the precise form disclosed. Modifications and variations are possible in light of the above teachings or may be acquired from practicing of the present teachings. Additionally, the described implementation includes software, though the present teachings may be implemented as a combination of hardware and software or in hardware alone. The present teachings may be implemented with both object-oriented and non-object-oriented programming systems.
[0209] It will be evident that the foregoing description is for the purpose of illustration only, and not for the purpose of limitation—the invention being defined by the claims.