METHOD FOR PRODUCING AN OPTOELECTRONIC COMPONENT AND OPTOELECTRONIC COMPONENT
20220209073 · 2022-06-30
Inventors
- Vesna MÜLLER (Vaterstetten, DE)
- David O'Brien (Portland, OR, US)
- Gerhard DOMANN (Würzburg, DE)
- Peer LÖBMANN (Würzburg, DE)
Cpc classification
H01L2933/0091
ELECTRICITY
H01L33/44
ELECTRICITY
International classification
H01L33/44
ELECTRICITY
H01L33/00
ELECTRICITY
Abstract
A method for producing an optoelectronic component is described with the steps of providing monomeric structural units, providing nanoparticles in a liquid medium, mixing the monomeric structural units and the nanoparticles in the liquid medium so that a starting sol is formed, introducing an acid into the starting sol to adjust a pH value, at least partial condensation of the monomeric structural units to form a network, wherein the nanoparticles are at least partially covalently bonded to the network, so that a sol-gel material is formed, applying the sol-gel material to a semiconductor chip, curing the sol-gel material to form a coating material. Furthermore, an optoelectronic component is specified.
Claims
1. Method for producing an optoelectronic component with the steps providing monomeric structural units, providing nanoparticles in a liquid medium, mixing the monomeric structural units and the nanoparticles in the liquid medium so that a starting sol is formed, introducing an acid into the starting sol to adjust a pH value, at least partial condensation of the monomeric structural units to form a network, wherein the nanoparticles are at least partially covalently bonded to the network, so that a sol-gel material is formed, applying the sol-gel material to a semiconductor chip, curing the sol-gel material so that a coating material is formed.
2. Method according to claim 1, wherein the monomeric structural units comprises a monomeric structural unit A of the following general formula: ##STR00003## wherein the substituents R.sup.1 to R.sup.4 are each independently selected from the group formed by the alkyls and phenyls.
3. Method according to claim 1, wherein the monomeric structural units comprises a monomeric structural unit B of the following general formula: ##STR00004## wherein the substituents X.sup.1 to X.sup.4 are each independently selected from the group consisting of the alkyls and phenyls.
4. Method according to claim 1, wherein the coating material comprises a silicate.
5. Method according to claim 1, in which the coating material comprises a polysiloxane bridged to the network via Si—O—Si units, and the nanoparticles comprise SiO.sub.2, ZrO.sub.2 and/or TiO.sub.2 and are covalently bonded to the polysiloxane.
6. Method according to claim 5, wherein the SiO.sub.2, ZrO.sub.2 and/or TiO.sub.2 nanoparticle is bonded to the network via Si/Zr/Ti—O units.
7. Method according to claim 1, wherein the nanoparticles in the liquid medium comprise between 5 mol % and 80 mol %, both inclusive.
8. Method according to claim 1, wherein the acid for adjusting the pH value is hydrochloric acid.
9. Method according to claim 1, wherein the pH value is adjusted to less than or equal to 5 with the acid.
10. Method according to claim 1, wherein the sol-gel material is applied to the semiconductor chip by spin coating, spray coating, doctor blading and/or ink jetting.
11. Method according to claim 1, wherein the sol-gel material is cured by heating at a temperature between 70° C. and 300° C., both inclusive.
12. Method according to claim 1, wherein after adjusting the pH value, inorganic phosphor particles are introduced into the starting sol.
13. Method according to claim 12, wherein the inorganic phosphor particles comprise a ceramic phosphor and/or a quantum dot phosphor.
14. Optoelectronic component with: a semiconductor chip which emits electromagnetic radiation of a first wavelength range during operation, and a coating material applied with a method according to claim 1.
15. Optoelectronic component according to claim 14, wherein phosphor particles, which convert the electromagnetic radiation of the first wavelength range into electromagnetic radiation of a second wavelength range, are embedded in the coating material.
16. Optoelectronic component according to claim 14, wherein the coating material is formed as a layer on a radiation exit surface of the semiconductor chip.
Description
[0059] Further advantageous embodiments and further embodiments of the optoelectronic component and the method result from the exemplary embodiment described below in conjunction with the figures.
[0060] It shows:
[0061]
[0062]
[0063]
[0064]
[0065] Elements that are identical, similar or have the same effect are marked with the same reference signs in the figures. The figures and the proportions of the elements shown in the figures are not to be regarded as true to scale. Rather, individual elements, in particular layer thicknesses, may be shown exaggeratedly large for better representability and/or for better understanding.
[0066] In the method according to the exemplary embodiment of
[0067] The nanoparticles 10 in the liquid medium 2 comprise between 5 mol % and 80 mol % inclusive. The monomeric structural units 1 comprise a combination of at least one monomeric structural unit A and at least one monomeric structural unit B. The proportion of monomeric structural units B among the monomeric structural units is between at least 1 mol % and at most 80 mol %. Here, the proportion of monomeric structural unit A in the monomeric structural units is preferably between at least 20 mol % and at most 99 mol %.
[0068] In a next method step, an acid 4 is added to the starting sol 3 to adjust a pH value (
[0069] In a further method step, the monomeric structural units 1 are at least partially condensed to form a network 9 (
[0070]
[0071] Furthermore, the network 9 forms the covalent bond 11 with the SiO.sub.2 nanoparticle 10. That is, the oxygen atoms from the nanoparticle 10 in the liquid medium 2 react nucleophilically with the silicon atom of the network 9 and/or with the monomeric structural units 1 that have not yet been condensed to date. This produces alcohols, such as methanol and/or ethanol, and water. The SiO.sub.2 nanoparticles 10 are bonded to the network 9 via Si—O units 14. In the case of ZrO.sub.2 nanoparticles, Zr—O units would be bonded to the network 9.
[0072] The sol-gel material 5 is applied to a semiconductor chip 6, for example by spin coating, spray coating, doctor blading and/or ink jetting. Subsequently, by heating at a temperature between 70° C. and 300° C. inclusive, the sol-gel material 5 is cured to form the coating material 7 (
[0073] In the method according to the exemplary embodiment of
[0074]
[0075] The exemplary embodiment shown in
[0076] The invention is not limited to the exemplary embodiments by the description thereof. Rather, the invention encompasses any new feature as well as any combination of features, which particularly includes any combination of features in the patent claims, even if that feature or combination itself is not explicitly specified in the patent claims or exemplary embodiments.
[0077] This patent application claims priority to German patent application DE 10 2019 112 955.9, the disclosure content of which is hereby incorporated by reference.
LIST OF REFERENCE SIGNS
[0078] 100 optoelectronic component [0079] 1 monomeric structural unit [0080] 2 liquid medium [0081] 3 starting sol [0082] 4 acid [0083] 5 sol-gel material [0084] 6 semiconductor chip [0085] 7 coating material [0086] 8 phosphor particle [0087] 9 network [0088] 10 nanoparticle [0089] 11 covalent bond [0090] 12 polysiloxane [0091] 13 Si—O—Si unit [0092] 14 Si—O unit [0093] 15 radiation exit surface [0094] 16 common coating