PFA material and preparation method thereof

Abstract

The present invention provides a polymer film on array (PFA) material and a preparation method thereof. The PFA material includes a polymer film on array (PFA) resin, a polysiloxane resin dispersion liquid, and a solvent, wherein the PFA resin ranges from 1 to 25% by weight relative to a total weight of the PFA material, and the polysiloxane resin dispersion liquid ranges from 1 to 30% by weight relative to a total weight of the PFA material.

Claims

1. A polymer film on array (PFA) material, comprising: a polymer film on array (PFA) resin, a polysiloxane resin dispersion liquid comprising polysiloxane and an acrylic resin, and a solvent, wherein the PFA resin ranges from 1 to 25% by weight relative to a total weight of the PFA material, and the polysiloxane resin dispersion liquid ranges from 1 to 30% by weight relative to the total weight of the PFA material.

2. The PFA material according to claim 1, wherein the polysiloxane ranges from 1 to 30% by weight relative to a total weight of the polysiloxane resin dispersion liquid, and the acrylic resin ranges from 1 to 10% by weight relative to the total weight of the polysiloxane resin dispersion liquid.

3. The PFA material according to claim 1, wherein the PFA material further comprises a thermally conductive insulating agent.

4. The PFA material according to claim 3, wherein the thermally conductive insulating agent comprises at least one of aluminum nitride, beryllium nitride, aluminum oxide, silicon nitride, aluminum oxide, and boron nitride.

5. The PFA material according to claim 3, wherein the thermally conductive insulating agent is a boron nitride nanoparticle dispersion liquid.

6. The PFA material according to claim 5, wherein the boron nitride nanoparticle dispersion liquid ranges from 0.1 to 10% by weight relative to the total weight of the PFA material.

7. The PFA material according to claim 5, wherein the boron nitride nanoparticle dispersion liquid comprises an acrylic resin and boron nitride nanoparticles.

8. The PFA material according to claim 7, wherein the acrylic resin ranges from 1 to 10% by weight relative to a total weight of the boron nitride nanoparticle dispersion liquid, and the boron nitride nanoparticle ranges from 0.1 to 40% by weight relative to the total weight of the boron nitride nanoparticle dispersion liquid.

9. The PFA material according to claim 1, wherein the PFA material further comprises an additive comprising an adhesion aid and a leveling agent.

10. The PFA material according to claim 9, wherein the additive ranges from 0.01 to 5% by weight relative to the total weight of the PFA material.

11. The PFA material according to claim 1, wherein when the PFA material is a positive photoresist material, the PFA material further comprises a photoinitiator.

12. The PFA material according to claim 1, wherein when the PFA material is a negative photoresist material, the PFA material further comprises an unsaturated polyfunctional monomer and a photoinitiator.

Description

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS

(1) In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following figures described in the embodiments will be briefly introduced. It is obvious that the drawings described below are merely some embodiments of the present invention, other drawings can also be obtained by the person ordinary skilled in the field based on these drawings without doing any creative activity.

(2) FIG. 1 is a general formula of a polysiloxane provided in an embodiment of the present invention.

(3) FIG. 2 is a compositional diagram of one embodiment of a PFA material provided in an embodiment of the present invention.

(4) FIG. 3 is a flow chart of one embodiment of a method of preparing a PFA material provided in an embodiment of the present invention.

DETAILED DESCRIPTION OF PREFERRED SPECIFIC EMBODIMENTS OF THE INVENTION

(5) The following description of the various embodiments is provided to illustrate the specific embodiments of the invention. Directional terminology mentioned in the present invention, such as “upper”, “lower”, “front”, “behind”, “left”, “right”, “inside”, “outside”, “side”, etc., are merely directions of the drawings. Therefore, the directional terminology used is for the purpose of illustration and understanding of the invention. In the drawings, structurally similar elements are denoted by the same reference numerals.

(6) The invention provides a PFA material and a preparation method thereof, which can simultaneously ensure dispersibility and electric field uniformity to solve the technical problem that the current PFA material has a large reduction in the effective breakdown field strength due to structural unevenness and electric field unevenness.

(7) A polymer film on array (PFA) material provided by an embodiment of the invention includes a polymer film on array (PFA) resin, a polysiloxane resin dispersion liquid, and a solvent. Specifically, the content of each component of the PFA material is:

(8) The total weight of the PFA material is 100% by weight; the content of the polysiloxane resin dispersion liquid is preferably 1-30% by weight, more preferably 1-20% by weight; the content of the PFA resin is preferably 1-25% by weight; and the remainder is a solvent.

(9) In the embodiment of the present invention, the PFA material is selected from the PFA resin, that is, a perfluoroalkoxy resin, and the main filler is selected from the polysiloxane. The polysiloxane is a polymer which has a repeating Si—O bond as its main chain, and an organic group is directly bonded to the silicon atom. As shown in FIG. 1, wherein the organic group is denoted by R.sub.1 and R.sub.2, and R.sub.1 and R.sub.2 can be any of an alkyl group, an alkenyl group, an aryl group, a cycloalkyl group, an alkoxy group, an alkylene oxide group, an alkylsilyl group, and an alkylamino group. Both the perfluoroalkoxy resin and the polysiloxane are organic, and the problem of poor dispersibility in the prior art can be solved.

(10) In the embodiment of the present invention, the solvent can be selected from the common solvent of PFA. Specifically, the solvent is preferably, but not limited to, organic ketones, ethers and aromatic hydrocarbons, such as one or more of methyl ethyl ketone (MEK), 2-heptanone (MAK), cyclohexanone, cyclopentanone, butyl phenyl ether, 4-methyl anisole, and cyclohexyl benzene.

(11) Specifically, the polysiloxane resin dispersion liquid may include a polysiloxane, an acrylic resin, and a solvent, wherein a composition content of each component of the polysiloxane resin dispersion liquid can be:

(12) The total weight of the polysiloxane resin dispersion liquid is 100% by weight; the content of the acrylic resin is preferably 1-10% by weight, more preferably 1-5% by weight; and the content of the polysiloxane is preferably 1-30% by weight, more preferably 5-25% by weight; and the remainder is a solvent.

(13) Of course, in the embodiments of the present invention, the PFA material may also be optimized by adding adjuvants and additives. Thus, based on the above embodiments, in another embodiment of the present invention, the PFA material may include: a PFA resin, a polysiloxane resin dispersion liquid, an adjuvant, an additive, and a solvent.

(14) In the embodiment of the present invention, an adjuvant and an additive are newly added, wherein the adjuvant may be a thermal conductive insulating agent. The thermal conductive insulating agent may include one or more of aluminum nitride, tantalum nitride, aluminum oxide, silicon nitride, aluminum oxide, and boron nitride. The thermal conductive insulating agent can improve the thermal conductivity of the PFA material and reduce the heat generated by the surface discharge to accumulate at the discharge site, thereby improving the ESD breakdown resistance of the PFA material. It is to be understood that in other embodiments of the present invention, other materials besides the thermal conductive insulating agent may be selected as the adjuvant, which is not limited herein.

(15) Preferably, a boron nitride nanoparticle dispersion liquid can be selected in the embodiment of the present invention. In some embodiments of the invention, the additives may include an adhesion aid and a leveling agent, the adhesion aid is used to increase the adhesion of the coating film to the substrate, and the leveling agent is used to reduce the surface tension of the coating film and improve its leveling and uniformity.

(16) Specifically, the boron nitride nanoparticle dispersion liquid may include an acrylic resin, boron nitride nanoparticles, and a solvent, wherein, the composition content of each component of the boron nitride nanoparticle dispersion liquid may be:

(17) The total weight of the boron nitride nanoparticle dispersion is 100% by weight; the content of the acrylic resin is preferably 1-10% by weight, more preferably 1-5% by weight; the content of the boron nitride nanoparticles is preferably 0.1-40% by weight, more preferably 0.1-30% by weight; and the remainder is a solvent.

(18) Based on the above embodiments, in another embodiment of the present invention, the provided PFA material is a positive photoresist material. As shown in FIG. 2, the PFA material may include a PFA resin, a polysiloxane resin dispersion liquid, a thermal conductive insulating agent, a first photoinitiator, an additive, and a solvent. Specifically, the composition content of each component of the PFA material may be:

(19) The total weight of the PFA material is 100% by weight, the content of the polysiloxane resin dispersion liquid is preferably 1-30% by weight, more preferably 1-20% by weight; the content of the PFA resin is preferably 1-25% by weight; the content of the boron nitride nanoparticle dispersion liquid is preferably 0.1-10% by weight, more preferably 0.1-5% by weight; the content of the first photoinitiator is preferably 0.05-10% by weight, and the content of the additive is preferably 0.01-5% by weight; and the remainder is a solvent.

(20) Based on the above embodiments, in another embodiment of the present invention, the provided PFA material is a negative photoresist material. The PFA material may include a PFA resin, a polysiloxane resin dispersion liquid, a thermally conductive insulating agent, an unsaturated polyfunctional monomer, a second photoinitiator, an additive, and a solvent. Specifically, the composition content of each component of the PFA material can be:

(21) The total weight of the PFA material is 100% by weight, and the content of the polysiloxane resin dispersion liquid is preferably 1-30% by weight, more preferably 1-20% by weight; the content of the PFA resin is preferably 1-25% by weight; and the content of the boron nitride nanoparticle dispersion liquid is preferably 0.1-10% by weight, more preferably 0.1-5% by weight; the content of the unsaturated polyfunctional monomer is preferably 1-20% by weight; the content of the second photoinitiator is preferably 0.05-8% by weight; the content of the additive is preferably 0.01-5% by weight; the remainder is a solvent.

(22) According to the above objects of the present invention, an embodiment of a method for preparing a PFA material described in the above embodiment, as shown in FIG. 3, further includes:

(23) S1, preparing a polysiloxane resin dispersion liquid; wherein the polysiloxane resin dispersion liquid may include a polysiloxane, an acrylic resin, and a solvent. In the embodiment of the present invention, when the polysiloxane resin dispersion liquid includes a plurality of components, the polysiloxane resin dispersion liquid can be prepared in a predetermined ratio.

(24) In a specific embodiment, when the polysiloxane resin dispersion liquid includes a plurality of components, the predetermined ratio of each component of the polysiloxane resin dispersion liquid can be:

(25) The total weight of the polysiloxane resin dispersion liquid is 100% by weight, and the content of the acrylic resin is preferably 1-10% by weight, more preferably 1-5% by weight; the content of the polysiloxane is preferably 1-30% by weight, more preferably 5-25% by weight, the remainder is a solvent.

(26) S2, preparing a boron nitride nanoparticle dispersion liquid; wherein the boron nitride nanoparticle dispersion liquid can include an acrylic resin, boron nitride nanoparticles, and a solvent. In the embodiment of the present invention, when the boron nitride nanoparticle dispersion liquid includes a plurality of components, the boron nitride nanoparticle dispersion liquid can be prepared in a predetermined ratio.

(27) In a specific embodiment, when the boron nitride nanoparticle dispersion liquid includes a plurality of components, the predetermined ratio of each component of the boron nitride nanoparticle dispersion liquid can be:

(28) The total weight of the boron nitride nanoparticle dispersion liquid is 100% by weight, the content of the acrylic resin is preferably 1-10% by weight, more preferably 1-5% by weight, and the content of the boron nitride nanoparticles is preferably 0.1-40% by weight, more preferably 0.1-30% by weight; the remainder is a solvent.

(29) S3, adding the polysiloxane resin dispersion liquid and the boron nitride nanoparticle dispersion liquid to a PFA resin to prepare a modified PFA material.

(30) Based on the above embodiments, in another embodiment of the present invention, the provided PFA material is a positive photoresist material. As shown in FIG. 2, the PFA material can include a PFA resin, polysiloxane resin dispersion liquid, a thermally conductive insulating agent, a first photoinitiator, an additive, and a solvent. Specifically, the composition content of each component of the PFA material can be:

(31) The total weight of the PFA material is 100% by weight, and the content of the polysiloxane resin dispersion liquid is preferably 1-30% by weight, more preferably 1-20% by weight; the content of the PFA resin is preferably 1-25% by weight; the content of the boron nitride nanoparticle dispersion liquid is preferably 0.1-10% by weight, more preferably 0.1-5% by weight; the content of the first photoinitiator is preferably 0.05-10% by weight; the content of the additive is preferably 0.01-5% by weight, and the remainder is a solvent.

(32) Based on the above embodiments, in another embodiment of the present invention, the provided PFA material is a negative photoresist material. The PFA material can include a PFA resin, polysiloxane resin dispersion liquid, a thermally conductive insulating agent, an unsaturated polyfunctional monomer, a second photoinitiator, an additive, and a solvent. Specifically, the composition content of each component of the PFA material can be:

(33) The total weight of the PFA material is 100% by weight, and the content of the polysiloxane resin dispersion liquid is preferably 1-30% by weight, more preferably 1-20% by weight; the content of the boron nitride nanoparticle dispersion liquid is preferably 0.1-10% by weight, more preferably 0.1-5% by weight; the content of the PFA resin is preferably 1-25% by weight; the content of the boron nitride nanoparticle dispersion liquid is preferably 0.1-10% by weight, more preferably 0.1-5% by weight; the content of the unsaturated polyfunctional monomer is preferably 1-20% by weight; the content of the second photoinitiator is preferably 0.05-8% by weight; the content of the additive is preferably 0.01-5% by weight; and the remainder is a solvent.

(34) S4, coating the modified PFA material to form a film and performing a lithography process, a developing process, and a high-temperature baking process to the film to obtain the PFA material; wherein the film formation by coating, lithography, developing, and high-temperature baking processes are prior art and are not specifically limited herein.

(35) In this embodiment, the order of step S1 and step S2 can be interchanged without strict restrictions. After the PFA material is subjected to a PFA process, the polysiloxane is condensed to form a silicon oxycarbon porous polymer structure. The boron nitride nanoparticles as the thermally conductive insulating agent are completely dispersed in the lattice structure formed by the silicon oxycarbon porous polymer and the PFA resin.

(36) The beneficial effects of the present invention are:

(37) Compared with the current PFA materials and preparation methods thereof, the PFA material of the present invention and the preparation method thereof adopts polysiloxanes as a main filler of the PFA resin. Since the polysiloxane and the PFA resin are both organic, the problem of poor dispersibility in the prior art is solved. Further, the final product formed by condensation of the polysiloxane after high-temperature baking is a silicon oxycarbon polymer, which has a dielectric constant (3-5) close to the PFA resin, and it ensures the electric field uniformity of the newly prepared PFA material. Moreover, since the boron nitride nanoparticles added in the PFA material have high thermal conductivity and are non-conductive materials, the thermal conductivity of the PFA material is enhanced, and the heat generated by the surface discharge can be reduced at the discharge site, thereby improving the ESD breakdown resistance of the PFA material.

(38) The description of the above exemplary embodiments is only for the purpose of understanding the invention. It is to be understood that the present invention is not limited to the disclosed exemplary embodiments. It is obvious to those skilled in the art that the above exemplary embodiments may be modified without departing from the scope and spirit of the present invention.