CdSeTe PHOTOVOLTAIC DEVICES WITH INTERDIGITATED BACK CONTACT ARCHITECTURE
20220190191 · 2022-06-16
Inventors
- David Scott ALBIN (Denver, CO, US)
- Marco NARDONE (Bowling Green, OH, US)
- Gregory Frank PACH (Denver, CO, US)
Cpc classification
H01L31/022441
ELECTRICITY
H01L31/072
ELECTRICITY
Y02E10/50
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
H01L31/07
ELECTRICITY
H01L31/073
ELECTRICITY
International classification
Abstract
Disclosed herein are CdSeTe photovoltaic devices having interdigitated back contact architecture for use in polycrystalline thin films in photovoltaic devices.
Claims
1. A method for making a polycrystalline CdSeTe device comprising an interdigitated back contact architecture.
2. The method of claim 1 wherein the CdSeTe device comprises a CdSeTe film.
3. The method of claim 2 wherein the CdSeTe device exhibits a minority carrier lifetime of at least 100 ns.
4. The method of claim 2 wherein the CdSeTe device exhibits a lateral diffusion length of at least 5 μm.
5. The method of claim 2 wherein the CdSeTe device exhibits a minority carrier lifetime of at least 100 ns and a lateral diffusion length of at least 5 μm.
6. A method for making a polycrystalline CdSeTe device comprising an interdigitated back contact architecture wherein the method comprises a first step of a deposition of a first metal layer to a thickness of from about 100 to about 500 nm onto a substrate; and a second step of a deposition of an electrically insulating layer onto a metal/metal oxide layer; and a third step of a deposition of a 100 nm to 500 nm metal contact layer; and a fourth step of cutting through a top metal/metal oxide and insulating layers to expose a bottom metal/metal oxide layer.
7. The method of claim 6 wherein the CdSeTe device comprises a CdSeTe film.
8. The method of claim 7 wherein the CdSeTe device exhibits a minority carrier lifetime of at least 100 ns.
9. The method of claim 7 wherein the CdSeTe device exhibits a lateral diffusion length of at least 5 μm.
10. The method of claim 7 wherein the CdSeTe device exhibits a minority carrier lifetime of at least 100 ns and a lateral diffusion length of at least 5 μm.
11. A method for making a polycrystalline CdSeTe device comprising an interdigitated back contact architecture wherein the method comprises, a first step of a vacuum deposition of Cd(Se.sub.xTe.sub.1-x) onto an interdigitated back contact structure heated to about 450° C.; and a second step of annealing the interdigitated back contact and Cd(Se.sub.xTe.sub.1-x) structure at 500-600° C. while suspended over a powder comprising Cd(Se.sub.xTe.sub.1-x) wherein x is from zero to 0.4; and a third step of annealing the interdigitated back contact and Cd(Se.sub.xTe.sub.1-x) structure at from about 450 to about 525° C. while suspended over a CdCl.sub.2 containing powder in an inert gas atmosphere for about 10 to 20 minutes; and a fourth step of coating the interdigitated back contact and Cd(Se.sub.xTe.sub.1-x) structure with a transparent passivation Al.sub.2O.sub.3 layer of from about 20 nm to about 100 nm thickness; and a fifth step of treating the resulting device structure to a CdCl.sub.2 anneal at a temperature of between about 400 and about 450° C.
12. The method of claim 11 wherein the fifth step of treating the resulting device structure to a CdCl.sub.2 anneal at a temperature of between about 400 and about 450° C. occurs in an atmosphere containing oxygen.
13. The method of claim 11 wherein the fifth step of treating the resulting device structure to a CdCl.sub.2 anneal at a temperature of between about 400 and about 450° C. occurs in an atmosphere lacking oxygen.
14. The method of claim 11 wherein the second step of annealing the interdigitated back contact and Cd(Se.sub.xTe.sub.1-x) structure at 500-600° C. while suspended over a powder comprising Cd(Se.sub.xTe.sub.1-x) wherein x is from zero to 0.4 results in an increase in the density of the Cd(Se.sub.xTe.sub.1-x).
15. The method of claim 11 wherein the CdSeTe device further comprises a CdSeTe film.
16. The method of claim 15 wherein the CdSeTe device exhibits a minority carrier lifetime of at least 100 ns and a lateral diffusion length of at least 5 μm.
17. A method for making a polycrystalline CdSeTe device comprising an interdigitated back contact architecture wherein the method comprises a first step of a non-vacuum deposition of colloidal nanocrystalline Cd(Se.sub.xTe.sub.1-x) onto an interdigitated back contact structure.
18. The method of claim 17 wherein the interdigitated back contact structure is made by a method comprising a first step of depositing colloidal Cd(Se.sub.xTe.sub.1-x) nanocrystals through layer-by-layer spincoating on interdigitated back contact substrates; and a second step of drying Cd(Se.sub.xTe.sub.1-x) films at about 150° C.; and a third step of dipping the interdigitated back contact and Cd(Se.sub.xTe.sub.1-x) structure in a saturated solution of CdCl.sub.2 in methanol and rinsing with isopropanol; and a fourth step of sintering nanocrystalline films through thermal annealing at about 350° C. for about 20 to about 30 seconds; and repeating the first step, the second step, the third step and the fourth step until the deposited layer is from about 1 μm to about 2 μm; and a final step of coating the interdigitated back contact and Cd(Se.sub.xTe.sub.1-x) structure with a transparent passivation Al.sub.2O.sub.3 layer of from about 20 nm to about 100 nm thickness.
19. The method of claim 18 wherein the first step of depositing colloidal Cd(Se.sub.xTe.sub.1-x) nanocrystals is through layer-by-layer bladecoating on interdigitated back contact substrates.
20. The method of claim 18 wherein the CdSeTe device further comprises a CdSeTe film and wherein the CdSeTe device exhibits a minority carrier lifetime of at least 100 ns and a lateral diffusion length of at least 5 μm.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
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DETAILED DESCRIPTION
[0021] Disclosed herein are CdSeTe photovoltaic devices with IBC architecture as a novel approach for using polycrystalline thin films in photovoltaic solar cell devices. To date, all viable thin film devices based on polycrystalline thin films have used a heterojunction structure based upon the use of a front contact, transparent conducting oxide (TCO), a n-type semiconductor (n-SC), a p-type semiconductor (p-SC), and an appropriate back contact (BC) which may or may not be transparent. In this structure, the usual arrangement of layers is TCO/n-SC/p-SC/BC. If the TCO is deposited onto a supporting transparent substrate (e.g. glass), the corresponding structure, glass/TCO/n-SC/p-SC/BC is referred to as a superstrate geometry in which sunlight is incident on the glass side (see
[0022] In the IBC architecture, as disclosed in embodiments herein, the electric field used to separate electrons and holes generated by absorption in a semiconductor is induced by placing the semiconductor between two different metals. One metal (arbitrarily labeled as metal 1) is a low work function metal while the other (arbitrarily labeled as metal 2) is a high work function metal. These metals are hypothetically placed coplanar, in an interdigitated pattern onto a substrate upon which the semiconductor is next deposited (see
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[0025] In an embodiment, both the IBC and the QIBC structures involve long metal fingers (or combs). Without being bound by theory, breakage of fingers would likely reduce current collection and fabrication problems may arise due to mechanical stress.
[0026] In the IBC, QIBC, and LBC architectures, the need for lateral current flow implies high lateral electron and hole diffusion lengths for the absorbing semiconductor. In embodiments disclosed herein, the use of Al.sub.2O.sub.3 as the top passivation layer and Cd(Se,Te) as the absorbing semiconductor represents an architecture with significantly reduced non-radiative interface recombination. In an embodiment, the Cd(Se,Te) layer can be deposited by vacuum deposition techniques (e.g., common evaporation, vapor transport deposition) and non-vacuum nanocrystalline thin film processes. In vacuum deposition techniques, it is common to decrease bulk non-radiative recombination, by exposing the Cd(Se,Te) layer to a high-temperature (475-525° C.) CdCl.sub.2 treatment in non-oxidizing ambient immediately after this layer is deposited on the IBC, QIBC, or LBC structure. A post-Cd(Se,Te) anneal in a Se-containing ambient may precede the CdCl.sub.2 step in order to increase film adhesion, and thus, allow higher CdCl.sub.2 annealing temperatures. Higher temperature CdCl.sub.2 treatments also increase the grain size of evaporated Cd(Se,Te) films as shown by the electron-beam backscatter diffraction (EBSD) image in
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[0030] In an embodiment, a fabrication method for the QIBC and LBC structures is as follows: first, deposit onto an appropriate substrate, the first metal layer to a nominal thickness of 100-500 nm. This can either be the low work function metal 1, or the high work function metal 2. The substrate can either be rigid (e.g. glass) or a lightweight, flexible substrate (e.g. metal foil). This metal may or may not be subsequently coated with a thin, carrier-selective oxide. This oxide may or may not result from annealing of the metal in a controlled oxidizing environment; and second, deposit onto the metal/metal oxide layer a thin, electrically insulating layer that provides electrical isolation between this contact layer and the subsequent contact layer. For example, this layer would be 100 nm of Al.sub.2O.sub.3; and third deposit a remaining metal contact layer of nominal thickness 100-500 nm. If the layer described in (1) is a low work function metal, then this metal would be a high work function metal. If the layer described in (1) is a high work function metal, then this metal would be a low work function metal. This metal may or may not be subsequently coated with a thin (nominal thickness 2-10 nm), carrier-selective oxide. This oxide may or may not result from annealing of the metal in a controlled oxidizing environment; and fourth cut through the top metal/metal oxide and insulating layers in order to expose the bottom metal/metal oxide layer. This can be done by either lithography, laser, or mechanical scribing.
[0031] In an embodiment, representative low work function metals and electron-selective oxides include (but are not limited to) Ti, Cr, Zn, TiOx, and ZnO. In an embodiment, representative high work function metals and hole-selective oxides include (but are not limited to) Au, Ni, Pd, Pt, Mo, NiOx, MoOx.
[0032] In an embodiment, methods for the deposition of the Cd(Se.sub.xTe.sub.1-x) semiconductor absorber layer onto the IBC structure are disclosed herein. In an embodiment, the composition parameter x is 0.45 such that the film composition is CdSe.sub.0.45Te.sub.0.55. In certain embodiments, the composition parameter x can vary from 0.0 to 0.5 as in CdSe.sub.xTe.sub.1-x. In an embodiment, using evaporation, the composition parameter x is 0.2 such that the film composition is CdSe.sub.0.2Te.sub.0.8. In certain embodiments, the composition parameter x can vary from 0.1 to 0.3. In an embodiment, the method includes the following steps: first, Cd(Se.sub.xTe.sub.1-x) is deposited onto an IBC structure heated to a temperature at about 450° C.; and second, the IBC+Cd(Se.sub.xTe.sub.1-x) structure may or may not be annealed at 500-600° C. suspended over a Se-containing powder to help densify the Cd(Se.sub.xTe.sub.1-x) film; and third, the IBC+Cd(Se.sub.xTe.sub.1-x) structure is then annealed at 475-525° C. suspended over a CdCl.sub.2 containing powder in inert gas (N.sub.2, He, Ar) for 10-20 minutes to promote grain growth and minimize interface and bulk non-radiative recombination; and fourth, the IBC+Cd(Se.sub.xTe.sub.1-x) structure is then coated with a final, transparent passivation Al.sub.2O.sub.3 layer of nominal 20-100 nm thickness; and the final device structure may or may not be treated to a final CdCl.sub.2 anneal at a lower temperature of 400-450° C. with or without oxygen present.
[0033] In an embodiment, using non-vacuum techniques, the method depositing the CdSeTe includes the following steps: first, a colloidal Cd(Se,Te) mixture is spincoated or bladecoated onto an IBC structure using a layer-by-layer process. The latter involves depositing sequential layers of 50-100 nm of film where anneals are used between layers to remove excess solvent, introduce CdCl.sub.2, and to aid in film sintering. These anneals promote a wurtzite to zincblende transformation of the Cd(Se,Te) structure and allow CdCl.sub.2 to passivate individual grains in the sintered film. The sequential deposition process is continued until a final film thickness of 1-2 microns is achieved.
[0034] The foregoing disclosure has been set forth merely to illustrate the invention and is not intended to be limiting.