Vacuum pump

Abstract

A vacuum pump comprises stator elements in a pump housing. The stator elements cooperate with rotor elements. The rotor elements are held by a rotor shaft, wherein the rotor shaft is mounted in the pump housing via bearing elements. The bearing element is surrounded by a supporting element, wherein the supporting element comprises an inner portion, an outer portion and a plurality of spring arms connecting the inner portion (28) to the outer portion. Each spring arm comprises at least one hollow space.

Claims

1. A vacuum pump, comprising: a stator element arranged in a pump housing; a rotor element cooperating with the stator element; a rotor shaft holding the rotor element; bearing elements arranged in the pump housing and holding the rotor shaft; at least one supporting element surrounding at least one of the bearing elements; and wherein each supporting element has an inner portion connected to the bearing element and an outer portion connected to the pump housing; wherein each supporting element comprises a plurality of spring arms connecting the inner portion to the outer portion; wherein the plurality of spring arms are separated from each other by a slot; wherein each spring arm comprises at least one hollow space within each spring arm; and wherein the at least one hollow space is completely enclosed.

2. The vacuum pump according to claim 1, wherein the at least one hollow space is filled with a damping material.

3. The vacuum pump according to claim 2, wherein the damping material is a powdery material.

4. The vacuum pump according to claim 1, wherein, for each said spring arm, the at least one hollow space or a plurality of hollow spaces jointly account for at least 5% of the volume per spring arm.

5. The vacuum pump according to claim 1, wherein the spring arms are configured as annular segments or helical segments.

6. The vacuum pump according to claim 1, wherein a plurality of said spring arms at least partially overlap each other in a radial direction of the supporting element.

7. The vacuum pump according to claim 1, wherein all said spring arms are fixedly connected to the inner portion and/or the outer portion.

8. The vacuum pump according to claim 1, wherein the spring arms, the inner portion and the outer portion are integrally formed.

9. A supporting element for a bearing element of a rotor shaft of a vacuum pump, comprising: an inner portion adapted to be connected to the bearing element; an outer portion adapted to be connected to a pump housing; a plurality of spring arms connecting the inner portion to the outer portion; wherein the plurality of spring arms are separated from each other by a slot; wherein each said spring arm comprises at least one hollow space within each spring arm; and wherein the at least one hollow space is completely enclosed.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) The disclosure will be explained in detail on the basis of a preferred embodiment with reference to the accompanying drawings in which:

(2) FIG. 1 shows a highly simplified schematic view of a portion of a turbomolecular pump,

(3) FIG. 2 shows a schematic top view of a supporting element, and

(4) FIG. 3 shows a schematic sectional view along a line III-III in FIG. 2.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT

(5) In the highly simplified sectional view in FIG. 1, a turbomolecular pump is illustrated as a vacuum pump. The pump comprises a pump housing 10.

(6) The pump housing 10 holds a stator element which, in the illustrated exemplary embodiment, comprises a plurality of stator disks 12. Further, in the pump housing 10, a rotor shaft 14 is arranged which holds a rotor element 16. In the illustrated exemplary embodiment, said rotor shaft comprises a plurality of rotor disks 16. The rotor shaft 14 is driven via a schematically illustrated electric motor 18. The rotor shaft 14 is mounted in a cover of the housing 10 via a bearing 20. On the opposite side, at the inlet of the vacuum pump, another rolling bearing or a bearing element may be provided.

(7) An inner race 22 of the rolling bearing 20 is connected to the rotor shaft 14. An outer race 24 of the rolling bearing 20 is connected to a supporting element 26.

(8) The supporting element 26 (FIGS. 2 and 3) comprises an inner portion 28 and an outer portion 30. In the illustrated exemplary embodiment, the inner portion 28 is connected to the outer portion 30 via four spring arms 32. In the illustrated exemplary embodiment, the overall supporting element 26 is of an integral configuration.

(9) The spring arms 32 configured as helical segments are separated from each other by slots 34. The slots 34 extend over the overall thickness of the supporting element 26 (FIG. 3).

(10) In each spring arm 32 a hollow space 36 is provided, wherein a plurality of hollow spaces 36 can be provided in each spring arm 32. The hollow spaces 36 are filled with a powder for defining the damping characteristics.

(11) The supporting element according to the disclosure allows for damping axial and radial forces occurring relative to an axis of rotation 38 (FIG. 1).