Regeneration of acid containing peroxy acids of sulfur

11345594 · 2022-05-31

Assignee

Inventors

Cpc classification

International classification

Abstract

A method of treating a spent oxidizing acid is provided comprising the steps of contacting a spent acid containing peroxy acids of sulfur with a quantity of SO.sub.2 in excess of an equilibrium quantity required to convert the peroxy acids to sulfuric acid. The excess SO.sub.2 is catalytically converted to SO.sub.3, and the SO.sub.3 is absorbed into the sulfuric acid stream essentially free of H.sub.2SO.sub.5 and H.sub.2O.sub.2 to make product sulfuric acid.

Claims

1. A method of treating a spent oxidizing acid, comprising the steps of: contacting a spent oxidizing acid comprising sulfuric acid and at least one of H.sub.2SO.sub.5 and H.sub.2O.sub.2 with a quantity of SO.sub.2 in excess of a stoichiometric quantity required to convert the at least one of H.sub.2SO.sub.5 and H.sub.2O.sub.2 to sulfuric acid and produce an excess SO.sub.2 stream and a sulfuric acid stream essentially free of H.sub.2SO.sub.5 and H.sub.2O.sub.2; catalytically converting SO.sub.2 in the excess SO.sub.2 stream to SO.sub.3; and absorbing the catalytically converted SO.sub.3 into the sulfuric acid stream essentially free of H.sub.2SO.sub.5 and H.sub.2O.sub.2 to make a product sulfuric acid.

2. The method of claim 1, wherein the spent oxidizing acid comprises spent Piranha solution.

3. The method of claim 1, wherein the spent oxidizing acid comprises greater than 65 wt % sulfuric acid.

4. The method of claim 1, wherein the SO.sub.2 reacts with greater than 98% of the at least one of H.sub.2SO.sub.5 and H.sub.2O.sub.2.

5. The method of claim 1, comprising contacting the spent oxidizing acid with a quantity of SO.sub.2 in a gas stream containing air and greater than 8 vol % SO.sub.2.

6. The method of claim 1, comprising contacting the spent oxidizing acid with a quantity of SO.sub.2 in a gas stream containing air and between about 9 to about 12 vol % SO.sub.2.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate one or more implementations described herein and, together with the description, explain these implementations. The drawings are not intended to be drawn to scale, and certain features and certain views of the figures may be shown exaggerated, to scale or in schematic in the interest of clarity and conciseness. Not every component may be labeled in every drawing. Like reference numerals in the figures may represent and refer to the same or similar element or function. In the drawings:

(2) FIG. 1 is a flowsheet showing treatment of spent Piranha solution in accordance with the presently disclosed inventive concepts.

(3) FIG. 2 is a flowsheet showing a prior art spent acid regeneration operation.

(4) FIG. 3 is a flowsheet showing incorporation of spent oxidizing acid such as spent Piranha solution into a spent acid regeneration operation in accordance with the presently disclosed inventive concepts.

DETAILED DESCRIPTION

(5) Before explaining at least one embodiment of the presently disclosed inventive concept(s) in detail, it is to be understood that the presently disclosed inventive concept(s) is not limited in its application to the details of construction and the arrangement of the components or steps or methodologies set forth in the following description or illustrated in the drawings. The presently disclosed inventive concept(s) is capable of other embodiments or of being practiced or carried out in various ways. Also, it is to be understood that the phraseology and terminology employed herein is for the purpose of description and should not be regarded as limiting.

(6) Unless otherwise defined herein, technical terms used in connection with the presently disclosed inventive concept(s) shall have the meanings that are commonly understood by those of ordinary skill in the art. Further, unless otherwise required by context, singular terms shall include pluralities and plural terms shall include the singular.

(7) All of the articles and/or methods disclosed herein can be made and executed without undue experimentation in light of the present disclosure. While the articles and methods of the presently disclosed inventive concept(s) have been described in terms of preferred embodiments, it will be apparent to those of skill in the art that variations may be applied to the articles and/or methods and in the steps or in the sequence of steps of the method described herein without departing from the concept, spirit, and scope of the presently disclosed inventive concept(s). All such similar substitutes and modifications apparent to those skilled in the art are deemed to be within the spirit, scope, and concept of the presently disclosed inventive concept(s).

(8) As utilized in accordance with the present disclosure, the following terms, unless otherwise indicated, shall be understood to have the following meanings:

(9) The use of the word “a” or “an” when used in conjunction with the term “comprising” in the claims and/or the specification may mean “one”, but it is also consistent with the meaning of “one or more,” “at least one,” and “one or more than one.” The use of the term “or” in the claims is used to mean “and/or” unless explicitly indicated to refer to alternatives only or that the alternatives are mutually exclusive, although the disclosure supports a definition that refers to only alternatives and “and/or.” Throughout this application, the term “about” is used to indicate that a value includes the inherent variation of error for the device, the method being employed to determine the value, or the variation that exists among the study subjects. For example, but not by way of limitation, when the term “about” is utilized, the designated value may vary by plus or minus twelve percent, or eleven percent, or ten percent, or nine percent, or eight percent, or seven percent, or six percent, or five percent, or four percent, or three percent, or two percent, or one percent. The use of the term “at least one of X, Y, and Z” will be understood to include X alone, Y alone, and Z alone, as well as any combination of X, Y, and Z. The use of ordinal number terminology (i.e., “first,” “second,” “third,” “fourth,” etc.) is solely for the purpose of differentiating between two or more items and is not meant to imply any sequence or order or importance to one item over another or any order of addition, for example.

(10) As used in this specification and claim(s), the words “comprising” (and any form of comprising, such as “comprise” and “comprises”), “having” (and any form of having, such as “have” and “has”), “including” (and any form of including, such as “includes” and “include”) or “containing” (and any form of containing, such as “contains” and “contain”) are inclusive or open-ended and do not exclude additional, unrecited elements or method steps.

(11) The term “or combinations thereof” as used herein refers to all permutations and combinations of the listed items preceding the term. For example, “A, B, C, or combinations thereof” is intended to include at least one of: A, B, C, AB, AC, BC, or ABC, and if order is important in a particular context, also BA, CA, CB, CBA, BCA, ACB, BAC, or CAB. Continuing with this example, expressly included are combinations that contain repeats of one or more item or term, such as BB, AAA, AAB, BBC, AAABCCCC, CBBAAA, CABABB, and so forth. The skilled artisan will understand that typically there is no limit on the number of items or terms in any combination unless otherwise apparent from the context.

(12) As used herein, the term “substantially” means that the subsequently described event or circumstance completely occurs or that the subsequently described event or circumstance occurs to a great extent or degree. For example, when associated with a particular event or circumstance, the term “substantially” means that the subsequently described event or circumstance occurs at least 80% of the time, or at least 85% of the time, or at least 90% of the time, or at least 95% of the time. The term “substantially adjacent” may mean that two items are 100% adjacent to one another, or that the two items are within close proximity to one another but not 100% adjacent to one another, or that a portion of one of the two items is not 100% adjacent to the other item but is within close proximity to the other item.

(13) As used herein, the phrase “essentially free” means that the subsequently described composition is completely free of the referenced matter or that the subsequently described composition is free of the referenced matter to an extent that one skilled in the art would consider it to be functionally completely free of the referenced matter or that the subsequently described composition contains less than 0.1 wt % of the referenced matter.

(14) The term “associate” as used herein will be understood to refer to the direct or indirect connection of two or more items.

(15) The term “oxidizing acid” refers to any sulfuric acid solution containing H.sub.2SO.sub.5 or other peroxy acid(s) of sulfur.

(16) The term “Caro's acid” as used herein refers to H.sub.2SO.sub.5.

(17) The term “Piranha solution” refers to any sulfuric acid solution, usually concentrated, containing H.sub.2SO.sub.5, H.sub.2O.sub.2, other peroxy acid(s) of sulfur and used for cleaning components in the electronics industry.

(18) The phrase “spent acid(s) containing Caro's acid” and “spent oxidizing acid(s)” are meant to include spent Piranha solution as well as spent gas-scrubbing and other solutions containing Caro's acid, hydrogen peroxide, and/or other peroxy acid(s) of sulfur.

(19) Regarding applications using Piranha solution for cleaning silicon wafers and the like, the spent Piranha solution is diluted with water, but is otherwise relatively free of impurities. Thus, one might consider the acid to be relatively easily recycled for other uses. However, as discussed above, the presence of H.sub.2SO.sub.5 makes chemical operators hesitant to use spent Piranha solution for fear the remaining oxidant may trigger unwanted and possibly uncontrollable side reactions. Although Piranha solution has been used for electronic chip manufacture for many years, during that time the spent piranha acid has been disposed of most commonly via neutralization, the traditional sulfuric acid regeneration (SAR) process or, more rarely, in simple applications such as waste water pH control. Few alternatives to neutralization or standard regeneration exist for these waste acids.

(20) It has been discovered that a spent oxidizing acid containing sulfuric acid and H.sub.2SO.sub.5 and/or H.sub.2O.sub.2 can be treated with SO.sub.2 to eliminate the H.sub.2SO.sub.5, for example, by reacting to form H.sub.2SO.sub.4 according to the reaction H.sub.2SO.sub.5+SO.sub.2.fwdarw.H.sub.2SO.sub.4. Referring now to FIG. 1, a method and process 10 is shown for treating a spent oxidizing acid 12 containing sulfuric acid and at least one of H.sub.2SO.sub.5 and H.sub.2O.sub.2. The process 10 includes contacting the spent oxidizing acid 12 in a contacting tower 14 with a quantity of reactant SO.sub.2 gas 16 in excess of the stoichiometric quantity required to convert the H.sub.2SO.sub.5 and/or H.sub.2O.sub.2 to sulfuric acid. Unreacted or excess SO.sub.2 leaves the contacting tower 14 as an SO.sub.2 gas stream 18 and is introduced to a catalytic oxidation step 20 wherein SO.sub.2 is catalytically oxidized to SO.sub.3. The resulting SO.sub.3 stream 22 is fed to an absorption tower 24 wherein the SO.sub.3 is absorbed into sulfuric acid which includes recycle acid and stream 26 to produce a sulfuric acid product 28 that is essentially free of H.sub.2SO.sub.5 and H.sub.2O.sub.2.

(21) The spent oxidizing acid 12 can be any acid containing sulfuric acid and H.sub.2SO.sub.5, H.sub.2O.sub.2, or other peroxy acid(s) of sulfur. For example, Piranha solution is a mixture of sulfuric acid and hydrogen peroxide and is used to clean organic residues from substrates such as silicon chips and glassware. A typical mixture is three parts of concentrated sulfuric acid and one part of 30% hydrogen peroxide solution. Mixing the solution is quite exothermic. It should be used fresh as it generates gas and cannot be stored in a closed container. Since it reacts violently with any residues on the substrates, substrates are usually pre-cleaned prior to contact with the Piranha solution. After cleaning, the substrates are washed with purified water to remove adhering Piranha solution. Spent Piranha solution contains purified water used to wash the Piranha-cleaned substrate, but very low concentrations of other impurities. Because it reacts so violently with many materials commonly disposed of as chemical waste, it must be neutralized with care or recycled to a sulfuric acid regeneration operation.

(22) Caro's acid, peroxymonosulfuric acid, is an equilibrium product of hydrogen peroxide and sulfuric acid and the major reactive component of the Piranha solution described above. Caro's acid has many uses other than Piranha solution. For example, it has been used in the mining and hydrometallurgical fields for destroying cyanide residuals. Spent solutions containing Caro's acid can have some of the same problematic issues as spent Piranha solution. Spent sulfuric acid solutions containing Caro's acid and having sulfuric acid concentrations of 30 wt % or more are suitable feeds for the presently disclosed and claimed inventive methods and processes. In some embodiments, spent solutions containing Caro's acid and having sulfuric acid concentrations of 50 wt % or more are treated by the presently disclosed and claimed inventive methods and process.

(23) Other feed sources can be spent scrubbing solutions wherein hydrogen peroxide or other peroxy acids of sulfur are used to scrub sulfur dioxide from waste gases. The reaction between sulfur dioxide and hydrogen peroxide or Caro's acid, has long been known and has been the basis of scrubbing technologies to remove sulfur dioxide from sulfuric acid plant stack gas for many decades. Peroxide scrubbing to remove sulfur dioxide is currently being used at several US locations. The goal of these processes, however, has always been to destroy the sulfur dioxide, not the peroxide, Caro's acid or other peroxy acids of sulfur. In these instances, the liquid phase contains low levels of peroxide and typically 40-50 wt % sulfuric acid. This acid concentration is chosen for two reasons: (1) the solubility of sulfur dioxide in 40-50% acid and lower sulfuric acid concentrations is greater than in concentrated acid; and (2) the reaction rate of sulfur dioxide with peroxide or Caro's acid is faster in this strength range than it is in concentrated acid.

(24) For example, U.S. Pat. No. 3,760,061 (High-Strength Acid Containing H.sub.2O.sub.2 to Scrub SO.sub.2) discloses the need to modify the scrubber design to make the sulfuric acid containing hydrogen peroxide or other peroxy acids of sulfur the continuous phase and the gas phase contains 500-5000 ppm or higher sulfur dioxide. It is stated therein, “At sulfuric acid concentrations above about 80 percent in the aqueous scrubbing medium, the low reaction rate of SO.sub.2 with hydrogen peroxide or peroxy acids of sulfur makes the use of conventional gas-liquid contacting equipment, wherein the gas phase is continuous, impractical for significant removal of SO.sub.2 from gaseous streams.” The reason given is that “in the more concentrated solutions, the aqueous scrubbing medium more quickly becomes saturated with SO.sub.2 because of the slower reaction rate of dissolved SO2 with hydrogen peroxide and peroxy acids of sulfur present in the aqueous scrubbing medium.” However, the present inventive methods and processes use the converse reaction, removal of Caro's acid, hydrogen peroxide and other peroxy acids of sulfur from even very concentrated sulfuric acid using conventional gas-liquid contacting equipment wherein the gas phase is continuous.

(25) Regarding the reactant SO.sub.2, example sources of the SO.sub.2 gas 18 include smelters, roasting of sulfide ores and concentrates, sulfur oxidation, H.sub.2S oxidation, and decomposition of sulfuric acid. Generally, SO.sub.2 concentrations of 5-14 vol % are sufficient to convert Caro's acid and hydrogen peroxide using conventional contacting equipment and sulfuric acid concentrations above 80 wt %. However, SO.sub.2 concentrations greater than 14 vol % are also suitable and SO.sub.2 concentrations greater than 50 vol % can be present in the gas of some flash smelting processes with oxygen enrichment.

(26) In one embodiment described in a later section of this disclosure, the reactant SO.sub.2 gas 16 is provided by a spent acid decomposition furnace in a pre-existing spent acid regeneration plant.

(27) The contacting tower 14 provides gas/liquid contact such that SO.sub.2 gas contacts the spent oxidizing acid 12 to convert H.sub.2SO.sub.5 to H.sub.2SO.sub.4. (H.sub.2SO.sub.5+SO.sub.2+H.sub.2O.fwdarw.2H.sub.2SO.sub.4.) Typically, the reactant SO.sub.2 gas 16 has a concentration of about 5 vol % SO.sub.2 or higher, or about 5 vol % to about 14 vol % SO.sub.2, or about 8 vol % to about 14 vol % SO.sub.2. In some cases, the reactant SO.sub.2 gas 16 has a concentration of about 14 vol % to about 50 vol % or more SO.sub.2. For example, the reactant SO.sub.2 gas 16 can have a concentration of about 30 vol % to about 60 vol %. Concentrated recycle H.sub.2SO.sub.4 typically has a strength of about 90 wt % or higher.

(28) Suitable contacting tower designs are well known to those skilled in the art. The contactor design can be a differential gas-liquid contactor wherein mass transfer happens within the entire length of the contactor. Suitable examples of differential contactors include, but are not limited to: falling-film columns, packed columns, bubble columns, spray towers, and the like. Stagewise gas-liquid contactors can also be used, examples including but not limited to plate columns, rotating disc contactors, and the like.

(29) The excess SO.sub.2 stream 18 is of sufficient volume and strength (concentration) to ensure complete conversion of the H.sub.2SO.sub.5. Typically, the excess SO.sub.2 stream 18 has a concentration in excess of about 8 vol % SO.sub.2. In some embodiments, the excess SO.sub.2 stream 18 has a concentration of about 8 vol % to about 14 vol % SO.sub.2, or about 9 vol % to about 12 vol % SO.sub.2.

(30) Catalytic oxidation of SO.sub.2 to SO.sub.3 is well known to those skilled in the art. A catalyst, typically a vanadium-based catalyst, catalyzes SO.sub.2 oxidation at temperatures in a range of 400° to 600° C. The oxidation can be carried out in, for example, a sequence of three to five catalyst beds with gas cooling between beds.

(31) The SO.sub.3 stream 22 exiting the catalytic oxidation step 20 is fed to an absorption step or absorption tower 24 wherein the SO.sub.3 is taken up by the water in the acid stream 26 and any additional needed water according to the reaction: SO.sub.3+H.sub.2O.fwdarw.H.sub.2SO.sub.4. Acid stream 26 and any necessary additional water can be added to a circulating stream in the absorption step or absorption tower 24. In some embodiments, the SO.sub.3 is of sufficient quantity to increase the concentration of acid stream 26 to 90 wt % H.sub.2SO.sub.4 or higher. Types and designs of suitable absorption towers are well known by those skilled in the art. For example, a packed tower design can be used for absorption tower 24. The product sulfuric acid 28 can be made to have a concentration anywhere between that of the oxidizing acid 12 up to over 99 wt % H.sub.2SO.sub.4. In one embodiment, sufficient SO.sub.2 is added to make product sulfuric acid 28 in a range of about 94% to over 99 wt % H.sub.2SO.sub.4.

(32) In one embodiment, a portion of the acid stream 26 is air stripped to remove SO.sub.2, and is used as product sulfuric acid.

(33) The environmental and economic advantages of the presently disclosed inventive methods and processes should be obvious. Spent oxidizing acids are traditionally treated in conventional spent acid regeneration (SAR) plants. A traditional prior art spent acid regeneration plant 30 is outlined in FIG. 2 and includes four major processing operations: thermal decomposition 32, gas cleaning and drying 34, conversion 36, and absorption 38. In the thermal decomposition operation 32, the spent acid and spent oxidizing acid are thermally decomposed to produce sulfur dioxide in a furnace operating in excess of 1000° C. and requiring significant fuel gas or other form of energy. The thermal decomposition of spent acid 40 and spent oxidizing acid 12 produces a sulfur dioxide (SO.sub.2) process gas 42; however, equilibrium considerations limit the amount of sulfur dioxide that can be produced to about 98.5% of the total sulfur present in the waste acid 40. The remaining sulfur exits the decomposition furnace as sulfur trioxide.

(34) The sulfur dioxide (SO.sub.2) process gas 42 leaving the thermal decomposition section 32 is treated in the gas cleaning and drying section 34 to remove dust and ashes and to reduce the water vapor content to allow production of the desired acid strength. The sulfur trioxide leaving the thermal decomposition section 32 is converted to sulfuric acid during gas cleaning and leaves the process as a weak (˜5%) acid stream 44 which must be neutralized with caustic or other suitable base. This represents a yield loss and results in a waste effluent stream that must be disposed of. While most of the total sulfur is recovered, the waste stream 44 represents about 0.5% to 3% of the sulfur dioxide. The cleaned SO.sub.2 gas is dried by contacting with a concentrated recycle acid stream 46 containing 93 to over 99 wt % H.sub.2SO.sub.4. Drying is accomplished in a packed bed acid tower or drying tower to produce a dried clean sulfur dioxide process gas 48.

(35) Dried clean sulfur dioxide process gas 48 is oxidized to sulfur trioxide (SO.sub.3) stream 50 in the conversion section 36 utilizing a vanadium catalyst in a staged converter vessel. In the absorption section 38, sulfur trioxide stream 50 from the converter vessel is subsequently absorbed in concentrated sulfuric acid and reacted with water to produce additional “virgin” sulfuric acid product 52. Due to equilibrium considerations, it is impossible to convert all of the sulfur dioxide to sulfur trioxide. Unconverted sulfur dioxide leaves the conventional SAR plant as an air emission 54. Existing SAR plants, using the modern dual absorption process and the best available catalysts, can achieve overall conversion of sulfur dioxide to sulfur trioxide in the range of 99.7% or better. This amounts to a sulfur dioxide emission rate of up to 4 lbs sulfur dioxide per ton of 100% acid produced.

(36) It has been discovered that spent oxidizing acid can be introduced directly to the drying step in a spent acid regeneration plant, thereby by-passing the decomposition step of the spent acid regeneration plant, saving significant energy and reducing emissions. For example, spent oxidizing acid such as spent Piranha solution from electronic chip manufacture or any sulfuric acid stream which contains hydrogen peroxide, Caro's acid, other peroxy acids of sulfur or mixture thereof, can be fed directly to a drying tower in a spent acid regeneration plant, thereby by-passing the decomposition step. The high concentration of dissolved sulfur dioxide in the drying tower circulating acid reacts with any hydrogen peroxide, Caro's acid and other peroxy acids of sulfur to produce sulfuric acid. The peroxide-free acid can then blend with stronger acid in the drying tower and/or SO.sub.3 absorption towers to make additional peroxide-free high-quality sulfuric acid. Unlike currently available methods for regenerating spent oxidizing acids, this invention consumes no significant energy and produces no significant waste streams.

(37) As explained previously, when spent oxidizing acid is fed to the thermal decomposition step as conventionally practiced, the spent oxidizing acid is thermally decomposed to sulfur dioxide. This requires high heat (>1000° C.) and thus requires considerable fuel in the form of natural gas or other fuel. In the proposed inventive methods and processes, the acid is not decomposed and thus, requires no fuel.

(38) Further, since thermal decomposition equilibrium limits the amount of sulfur dioxide that can be produced to about 98.5% of the total sulfur present in the acid, the remaining 1.5% of the sulfur exits the decomposition furnace as sulfur trioxide which leaves the SAR process as a weak (˜5%) acid stream which must be neutralized with caustic or another suitable base. This represents a yield loss and results in a waste effluent stream that must be disposed of. However, in the presently disclosed inventive methods and processes, the spent Piranha solution or another oxidizing acid bypasses the decomposition step, producing no sulfur trioxide requiring neutralization.

(39) Further yet, in the SAR process the recovered sulfur dioxide produced in the decomposition furnace must be catalytically oxidized to sulfur trioxide. Unconverted sulfur dioxide leaves the SAR plant as an air emission. In the presently disclosed inventive methods and processes, the oxidizing acid or Piranha solution is not decomposed to sulfur dioxide; therefore, the catalytic oxidation step is completely bypassed as well. Hence, sulfur dioxide emissions are completely avoided.

(40) Examples are provided herein below. However, the present invention is to be understood to not be limited in its application to the specific process, chemicals, equipment and results. Rather, the Example is simply provided as one of various embodiments and is meant to be exemplary, not exhaustive

Example 1

(41) A prophetic example feeds a spent Piranha solution containing 2 wt % hydrogen peroxide and 80 wt % sulfuric acid directly to an upper portion of the drying tower of an SAR plant shown in detail in FIG. 3. The sulfur dioxide concentration in the drying tower is between 4 and 14 vol %.

(42) The spent Piranha contains impurities at the ppb level; thus, no impurities need be removed in the gas cleaning section of the SAR plant. Hydrogen peroxide and Caro's acid present in the spent Piranha solution are chemically destroyed to form sulfuric acid according to the following reactions:
H.sub.2O.sub.2+SO.sub.2.fwdarw.H.sub.2SO.sub.4
H.sub.2SO.sub.5+SO.sub.2+H.sub.2O.fwdarw.2H.sub.2SO.sub.4

(43) Treatment of the spent Piranha solution produces no waste, as the sulfuric acid produced by the above reactions becomes part of the plant's product.

Example 2

(44) In this example, 5 gpm of a spent piranha acid at 80% total acidity is added to an existing spent acid recovery plant. Conventionally, this acid is included as spent acid feed to the decomposition furnace and the changes to conventional production are shown in Table 1 below. Also shown are the changes when 5 gpm of the piranha acid were added to the drying tower as shown in FIG. 3. All numbers are per day.

(45) TABLE-US-00001 TABLE 1 Addition of 5 gpm 80% Piranha Acid Conventional Feed to Feed to Drying Furnace Tower Increased Production, tons acid (100%) 40.8  41.4 Natural Gas Consumption, scf 197.8 0 Process Water for acid dilution, gal — −2376*   Waste Acid to Neutralization, lbs 1240 0 Liquid Effluent, gal 2971 0 SO2 Air Emissions, lbs 32-160** 0 *This is saved water. Water in the piranha acid replaces water needed for processing other spent acids in the SAR plant resulting in a reduced process water consumption. **The reduction in SO2 emissions depends on the plant age and configuration. The initial value is for the new present plant. However, the higher value is given to describe older plants

(46) Feeding the acid to the decomposition furnace requires natural gas (or other fuel) to provide the heat to decompose the acid. Conversion of the acid to SO.sub.2 is only about 98.5%. The unconverted acid is scrubbed from the gas stream and neutralized to produce an aqueous sulfate waste that is discharged as a liquid effluent. Conversion of the resulting SO.sub.2 to SO.sub.3 is very high, but not 100%. In the present plant, SO.sub.2 emissions are about 0.8 lb SO.sub.2/ton of acid. In older existing plants, the emissions can be as high as 4 lb SO.sub.2/ton acid. Finally, converting SO.sub.3 to product acid requires process water. There is actually an excess of water in the piranha acid which reduces the total water requirement of the SAR plant.

Example 3

(47) In this example, 5 gpm of a spent piranha acid at 90% total acidity is added to an existing spent acid recovery plant. As explained in Example 2, conventionally, this acid is included as spent acid feed to the decomposition furnace and the changes to conventional production are shown in Table 2 below. Also shown are the changes when 5 gpm of the piranha acid were added to the drying tower as shown in FIG. 3. All numbers are per day.

(48) TABLE-US-00002 TABLE 2 Addition of 5 gpm 90% Piranha Acid Conventional Feed to Feed to Drying Furnace Tower Increased Production, tons acid (100%) 48.3 49  Natural Gas Consumption, scf 200.2 0 Process Water for acid dilution, gal — −1555*   Waste Acid to Neutralization, lbs 1470 0 Liquid Effluent, gal 3523 0 SO2 Air Emissions, lbs 39-193** 0 *This is saved water. Water in the piranha acid replaces water needed for processing other spent acids in the SAR plant resulting in a reduced process water consumption. **The reduction in SO2 emissions depends on the plant age and configuration. The initial value is for the new present plant. However, the higher value is given to describe older plants.

(49) Although the presently disclosed inventive concept(s) has been described in conjunction with the specific language set forth herein above, it is evident that many alternatives, modifications, and variations will be apparent to those skilled in the art. Accordingly, it is intended to embrace all such alternatives, modifications, and variations that fall within the spirit and broad scope of the presently disclosed inventive concept(s). Changes may be made in the construction and the operation of the various components, elements, and assemblies described herein, as well as in the steps or the sequence of steps of the methods described herein, without departing from the spirit and scope of the presently disclosed inventive concept(s).