UTILIZING MONOLAYER MOLECULAR CRYSTALS TO IMPROVE CONTACT PROPERTIES OF ORGANIC FIELD-EFFECT TRANSISTORS
20230269995 · 2023-08-24
Inventors
Cpc classification
H10K71/621
ELECTRICITY
H10K85/6576
ELECTRICITY
International classification
Abstract
A method for manufacturing a semiconductor device having an organic semiconductor material is provided. The method includes performing a large-area solution shearing step to form a monolayer (1L) or bi-layer (2L) C.sub.10-DNTT crystals with low shearing speed and forming Au electrodes by thermal evaporation on a wafer. The large-area solution shearing step is performed at a temperature in a range between about 60° C. and about 65° C. and with a shearing speed in a range between about 2 μm/sand about 3 μm/s. The 1L or 2L crystals have single-crystalline domains extending over several millimeters. An organic field-effect transistor (OFET) comprising an active layer that comprises a monolayer (1L) or bi-layer (2L) C.sub.10-DNTT crystals formed according to the method is also provided.
Claims
1. A method for manufacturing a semiconductor device having an organic semiconductor material, the method comprising: performing a large-area solution shearing step to form a monolayer (1L) or bi-layer (2L) C.sub.10-DNTT crystals with low shearing speed; and transferring Au electrodes onto the 1L or 2L C.sub.10-DNTT crystals to build metal/semiconductor interfaces free of thermal damage.
2. The method of claim 1, wherein the large-area solution shearing step is performed at a temperature in a range between about 60° C. and about 65° C.
3. The method of claim 1, wherein the solution shearing is performed with both a shearing blade and a substrate heated to maintain a uniform temperature within the solution.
4. The method of claim 3, wherein the blade is an OTS-treated blade and/or the substrate is a PTS-treated substrate.
5. The method of claim 1, wherein an organic semiconductor solute is dissolved at a temperature of about 65° C. in 1,2,3,4-tetrahydronaphthalene solvent with a concentration of 0.2 mg/ml to form the solution.
6. The method of claim 5, wherein the solution is injected between a substrate and a blade.
7. The method of claim 1, wherein the large-area solution shearing step is performed with a shearing speed in a range between about 2 μm/s and about 3 μm/s.
8. The method of claim 1, wherein the 1L or 2L crystals have single-crystalline domains extending over several millimeters.
9. The method of claim 1, wherein the Au electrodes are transferred onto the 1L or 2L C.sub.10-DNTT crystals by thermal evaporation.
10. The method of claim 1, wherein the Au electrodes are transferred onto the 1L or 2L C.sub.10-DNTT crystals by a polymethyl methacrylate (PMMA) stamp.
11. An organic field-effect transistor (OFET), comprising an active layer comprising a monolayer (1L) or bi-layer (2L) C.sub.10-DNTT crystals formed according to the method of claim 1.
12. The OFET of claim 11, wherein the OFET is constructed so that a channel length is along an a-axis of the monolayer (1L) or bi-layer (2L) C.sub.10-DNTT crystals.
13. The OFET of claim 12, wherein the channel length of the OFET is in a range of 8 μm to 140 μm.
14. The OFET of claim 11, wherein the large-area solution shearing step is performed at a temperature in a range between about 60° C. and about 65° C.
15. The OFET of claim 11, wherein the solution shearing is performed with both a shearing blade and a substrate heated to maintain a uniform temperature within the solution.
16. The OFET of claim 15, wherein the blade is an OTS-treated blade and/or the substrate is a PTS-treated substrate.
17. The OFET of claim 11, wherein an organic semiconductor solute is dissolved at a temperature of about 65° C. in 1,2,3,4-tetrahydronaphthalene solvent with a concentration of 0.2 mg/ml to form the solution.
18. The OFET of claim 17, wherein the solution is injected between the substrate and the blade.
19. The OFET of claim 11, wherein the large-area solution shearing step is performed with a shearing speed in a range between about 2 μm/s and about 3 μm/s.
20. The OFET of claim 11, wherein the 1L or 2L crystals have single-crystalline domains extending over several millimeters.
21. The OFET of claim 11, further comprising Au electrodes transferred onto the 1L or 2L C.sub.10-DNTT crystals.
22. The OFET of claim 21, wherein the Au electrodes are transferred onto the 1L or 2L C.sub.10-DNTT crystals by thermal evaporation.
23. The OFET of claim 21, wherein the Au electrodes are transferred onto the 1L or 2L C.sub.10-DNTT crystals by a polymethyl methacrylate (PMMA) stamp.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
[0035]
[0036]
[0037]
[0038]
[0039]
[0040]
[0041]
[0042]
[0043]
[0044]
[0045]
[0046]
[0047]
[0048]
[0049]
[0050]
[0051]
[0052]
[0053]
[0054]
[0055]
[0056]
[0057]
[0058]
[0059]
[0060]
[0061]
[0062]
[0063]
[0064]
[0065]
[0066]
[0067]
[0068]
[0069]
[0070]
[0071]
[0072]
[0073]
[0074]
[0075]
[0076]
[0077]
[0078]
[0079]
[0080]
[0081]
[0082]
[0083]
[0084]
[0085]
[0086]
[0087]
[0088]
[0089]
[0090]
[0091]
[0092]
[0093]
[0094]
[0095]
[0096]
[0097]
[0098]
[0099]
[0100]
DETAILED DISCLOSURE OF THE INVENTION
[0101] Solution-processed 1L-crystals of 2,9-didecyldinaphtho[2,3-b:2′,3′-f]thieno[3,2-b]thiophene (C.sub.10-DNTT) are employed as the active layers in OFETs. By fabricating the OFETs within one single-crystalline domain, the grain boundary effects of devices are eliminated.
[0102] The non-destructive deposition of the metal contacts and molecularly flat interface between the Au electrodes and the 1L-crystals leads to Ohmic-contact properties with R.sub.c as small as 40 Ω.Math.cm, while the thermally evaporated Au electrodes show orders of magnitudes higher R.sub.c. For the 1L-devices with transferred electrodes, the R.sub.c shows no dependency on the drain-source voltage and temperature when the V.sub.DS is between 0 to −1V and temperature is between 100 K to 300 K.
[0103] The Ohmic contacts of the embodiments of the subject invention are advantageous over 1L-OFETs of Schottky contacts. The alkyl side chains of the OSC molecules may establish thin tunneling barriers that facilitate the depinning of the Fermi level at the M/OSC interfaces and the direct tunneling of the carriers. The superior contact properties allow the 1L-OFETs to operate at V.sub.DS down to −0.1 mV without affecting the effective carrier mobility. With the intrinsic mobility of 12.5 cm.sup.2V.sup.−1s.sup.−1 and a small R.sub.c, high-field and high-current operations of OFETs are further investigated. A width-normalized on-current density of 4.2 μA/μm, which is greater than results previously reported for the conventional OFETs, can be achieved by the monolayer-OFETs.
[0104] When the term “about” is used herein, in conjunction with a numerical value, it is understood that the value can be in a range of 90% of the value to 110% of the value, i.e. the value can be +/−10% of the stated value. For example, “about 1 kg” means from 0.90 kg to 1.1 kg.
Contact Resistance of 1L and 2L-OFETs
[0105] Both monolayer (1L) and bi-layer (2L) C.sub.10-DNTT crystals are obtained by a large-area solution shearing method with low shearing speed (see details in Experimental Section) for several reasons. Firstly, the C.sub.10-DNTT offers decent mobility and stability. Secondly, the enhanced solubility induced by the alkyl chains can facilitate the solution-processing approaches. Thirdly, the considerably lower interlayer adhesion compared with intralayer π-π overlapping allows formation of crystals with high aspect ratios, such as 1L or 2L crystals, while under low-speed shearing and well controlled solvent evaporation.
[0106] With a precise control of the temperature in a range from about 60° C. to about 65° C. and the shearing speed in a range from about 2 μm/s to about 3 μm/s, the 1L and 2L crystals with single-crystalline domains can extend over several millimeters can be achieved.
[0107] The structural information of the 1L-crystals obtained is measured by X-ray Reflectivity (XRR) and shown in
[0108] With such thin crystals as the active layer of the OFETs, it is more challenging for the deposition of electrodes. The thermally evaporated metal electrodes have sufficient energy to penetrate into the semiconductor films and distort the molecular packing.
[0109] When the transmission length method (TLM) characterization which is governed by Equation (1) and Equation 2 is applied to the 1L and 2L-OFETs, the width-normalized total resistance (R.sub.tot.Math.W) does not follow typical trends in TLM studies as shown in
[0110] By shortening the channel length, the total width-normalized resistance stays the same at higher overdrive voltage V.sub.ov=V.sub.G−V.sub.TH (for example, −80 V), or even becomes larger at lower V.sub.ov (for example, −40 V), suggesting that the contact resistance dominates over the channel resistance (R.sub.ch.Math.W) and the data is not suitable for TLM fitting.
[0111]
[0112] The continuous organic semiconductor layer is not recognizable in the TEM image. To address this issue, the patterned Au source-drain electrodes are pre-deposited, and mechanically laminated onto the 1L and 2L-crystals. As a result, a continuous 1L-crystal in addition to the SAM with a sharp interface between the Au electrodes is detected in
[0113] With the transferred Au electrodes, TLM measurements within single crystalline domains of 1L as shown in
[0114] The devices exhibit good transfer characteristics and high reliability factors (r.sub.lin factor) for both 1L (r.sub.lin=82-90%) and 2L (r.sub.lin=73-83%) OFETs, as shown in
[0115] When the typical transfer properties of the shortest-channel OFETs for the 1L (8 μm channel length) and 2L-devices (9 μm channel length) in
[0116] The R.sub.tot.Math.W as a function of the channel length calculated at particular V.sub.ov for the 1L- and 2L-OFETs are shown in
[0117] On the other hand, the μ.sub.0 shows no strong dependence on the gate bias and is essentially stable at 12.5 cm.sup.2/V.sup.−1s.sup.−1. For the 2L-devices, the R.sub.c.Math.W at V.sub.ov=−80 V is determined to be about 186 Ω.Math.cm, which is about 2.5 times of the value of the 1L-devices, suggesting that the second ML induces an additional access resistance (R.sub.a) compared with the 1L-devices.
[0118] However, the intrinsic mobility of the 2L-devices (12.4 cm.sup.2/V.sup.−1s.sup.−1) is determined to be similar to that of the 1L-devices. The 1L semiconductor and transferred electrodes specifically address the two above-mentioned major challenges of staggered OFETs for reaching low contact resistance, that is, the access resistance across the OSC layer (R.sub.a) and interfacial resistance across the M/OSC interface (R.sub.int). The 1L semiconductor and transferred electrodes offer significant improvement at the charge injection.
[0119] As shown in
[0120] A high μ.sub.0 is also essential in suppressing the R.sub.c of OFETs as summarized by the negative correlation between μ.sub.0 and R.sub.c in
[0121] The performance of such transfer technique in a large-area and patterned manner is shown in
R.SUB.c .Dependency on V.SUB.DS .and Temperature
[0122] In the linear operation regime of FETs, the drain-current shows linear response to the V.sub.DS. Such linearity is highly desirable in accurate signal processing applications such as small-signal biosensors, backplanes drivers for display, and audio devices. However, the conventional Schottky contact in OFETs limited such linearity, especially in small V.sub.DS ranges.
[0123]
[0124] The highly linear and symmetric output curves indicate that the resistor behavior is dominant at the contact and the channel. In
[0125] Thermionic emission and field emission are the two major mechanisms for charge injection across a metal-semiconductor interface and lead to Schottky contacts and Ohmic contacts, respectively. In the scenario of thermionic emission, increasing V.sub.DS can induce stronger band bending and lower the Schottky barrier. Hence, it results in apparent saturation mobility at large V.sub.DS higher than the apparent linear mobility at small V.sub.DS.
[0126] Similarly, when the temperature goes up, the thermionic emission over the barrier may also be enhanced and lead to a negative correlation between the R.sub.c and T. Thus, the 1L-OFETs show excellent performance in low R.sub.c and high μ.sub.0. For evaluating the physical limits of the transferred electrodes in the monolayer OFET applications, the TLM measurements of the 1L-devices are conducted with V.sub.DS ranging from −1 mV to −1 V and with temperature ranging from about 340 K to about 100 K.
[0127]
[0128] Referring to the summarized R.sub.c against 1000/T plot in
High Intrinsic Gain at Saturation Regime
[0129] The intrinsic gain (A.sub.v) defines the maximum voltage gain that a single OFET can achieve, and it is an important figure of merit for OFETs working in the saturation regime. According to the definition of A.sub.v=g.sub.m/g.sub.d, the essential properties for achieving a high A.sub.v include high transconductance (g.sub.m=∂I.sub.D/∂V.sub.G) and low output conductance (g.sub.d=∂I.sub.D/∂V.sub.DS). To fulfill the demands in high density and high speed for organic electronics, short-channel OFETs with high A.sub.v values are required.
[0130] However, conventional OFETs as illustrated in
[0131] Similar to the linear regime, the transfer and output curves of a 1L-OFET in
[0132] With the g.sub.m inherently higher than that of SGTs and the g.sub.d lower than that of OFETs with multilayer channel, the 1L-OFETs with intrinsic gain up to 500 may be applied to analog or digital circuits such as logic gates, ring oscillators, or rectifiers. Although a device with longer channel of 50 μm can further improve the intrinsic gain up to 735 under the same bias condition, the magnitude of the values is comparable with the short-channel device, proving the monolayer semiconductor is advantageous in improving the intrinsic gain in short-channel devices. It is noted that given SiO.sub.2 is utilized as the material for the gate dielectric layer, changing the material of gate dielectric layer to high-k dielectric may further increase the g.sub.m and A.sub.v values by another one to two orders.
Current Saturation Effect at Large Bias
[0133] In addition to the intrinsic gain, the channel-width-normalized on-state drain current (I.sub.D/W) is another effective parameter that is able to describe the capability of a transistor in transporting carriers and driving other electronic components. Herein, the long-channel (for example, with a 140 μm channel length) and short-channel (for example, with a 8 μm channel length) 1L-OFETs from the same monolayer single crystal are utilized to compare the I.sub.D/W values at a larger bias. At V.sub.DS=−1 V and V.sub.G=−80 V which are higher than the range for the A.sub.v evaluation, the short-channel device shows a I.sub.D/W value (0.59 μA/μm) that is one order of magnitude higher than that of the long-channel device (0.054 μA/μm), as indicated by the transfer curves in
[0134] However, when a larger V.sub.DS is applied to further increase the I.sub.D/W, the short-channel device shows only about 2 times (for example, 4.2 μA/μm as shown in
[0135] For the long-channel device as shown in
[0136]
[0137] The unfavorable degradation plays a significant role in the current saturation effect observed in the short-channel devices. This observation can be confirmed by two experiments. Firstly, the source/drain electrodes of the devices are peeled off after applying small and large I.sub.D/W, and the monolayer is profiled under AFM. The AFM images in
[0138] There are a number of factors limiting the drain current. First and the dominating one is the thermal degradations at the M/OSC interface caused by the high current density in the short-channel 1L-OFETs. The degradations act as a negative feed-back to the drain current, and the current is thus limited to certain values before it reaches theoretical values. The degraded interface adds extra capacitance to the overall contact. However, such degradation only limits at the M/OSC interface and is able to recover after a certain standby period. At the same time, the high current density achieved has not yet reached the physical limitation of organic semiconductor materials and the contact resistance (dynamic contact resistance during operation) is investigated. Secondly, due to the reverse bias nature, the capacitive effect at contact can also be induced by the formation of depletion region under the source contact. However, this depletion effect would disappear once the bias is removed. The relatively long recovery time in the device suggests the depletion effect is a less important reason for the current saturation in the short-channel 1L-OFETs. Lastly, similar to the recently reported transistors based on 2D material, as the applied drain-source field (F) is as large as 7.5 V/μm for the short-channel device, the velocity saturation effect behavior of the carriers may exist and increase the channel resistance. The analysis on velocity saturation effect is shown in
[0139] The thermal behaviors of these monolayer transistors are discussed below. The thermal effects are usually ignored for the OFETs because of the low mobility and current. However, when the mobility and contact resistance keep showing promising improvement, these high-performance OFETs may face challenges from thermal aspects, where the mechanisms and physics may be very different with inorganic FETs. The self-heating effect in short-channel OFETs would limit the current density and demean the Ohmic contact into gated-Schottky contact. Herein, a finite element simulation is utilized to reveal the temperature rise of the OFETs during high-current operations. By assuming increasing proportion of R.sub.c in R.sub.tot, the heating effect at the metal/semiconductor interfaces becomes more significant than that in the channel. The ΔT.sub.contact (for example, from 6.75 K to 24.50 K) rises more rapidly than the ΔT.sub.channel (for example, 14.53 K to 15.91 K) for the case of L.sub.injection=35 μm (i.e. entire interface equally inject current), as shown in
[0140] If L.sub.injection=L.sub.T/2≈4 μm is used to mimic the current crowding effect near the channel, the ΔT.sub.contact may be as great as 57.15 K shown in
[0141] The monolayer single crystals as active layers are suitable for the staggered OFETs in terms of high mobility and low contact resistance. The lower mobility of monolayer OSCs compared with the thicker counterparts previously reported may arise from the thermal damage caused by the electrode deposition process. R.sub.c.Math.W as low as about 40 Ω.Math.cm and μ.sub.0 of about 12.5 cm.sup.2V.sup.−1s.sup.−1 are achieved by the 1L-OFETs. The charge injection is mainly through field emission instead of thermionic emission when the channel is turned on, proving an apparent Ohmic contact of the 1L-devices. The 1L-OFET may operate linearly from V.sub.DS=−1 V to V.sub.DS as small as −0.1 mV, and exhibit large intrinsic gain at saturation regime thanks to the good pinch-off behavior brought by the monolayer semiconductor. At a higher drain-source bias load, the 1L-OFET may transport with a current density as high as 4.2 μA/μm, with a current saturation effect being observed. Such high current density effect may only emerge with the fulfillment of: (i) high-mobility OSC crystals; (ii) low contact resistance; (iii) short channel length; and (iv) stable dielectric/OSC interface. The findings suggest that even when OFETs with low contact resistance are achieved, their degradations in high current operations may still limit their performances.
Experimental Section
[0142] Si wafers (for example, having a thickness of 525 μm, from Namkang Hi-Tech) with 300-nm-thick thermal oxide layer are cleaned by oxygen-plasma (for example, 30 W, from Harrick Plasma) for 30 minutes. The wafers are loaded into a vacuum oven with 50 μL (for example, from J&K Scientific) aside. The oven is evacuated to <0.01 bar, heated to 150° C., stayed at 150° C. for 60 minutes, and cooled to the room temperature. The RMS roughness of the PTS-treat SiO.sub.2/Si wafers is about 0.28 nm (5 μm×5 μm area). The PTS-treated 300-nm-thick thermal SiO.sub.2 has an area capacitance of 11 nF/cm.sup.2 measured at 1 kHz.
[0143] During the solution-shearing process, the PTS-treated substrate and OTS (for example, from Sigma Aldrich) treated blades (also SiO.sub.2/Si) are heated up to 60-65° C. A 40 μL C.sub.10-DNTT solution (for example, 0.2 mg/ml in tetralin, heated to 70° C. to help dissolving) is injected between the substrates having a size of 2 cm by 2 cm and a blade having a width of 2 cm, the two being spaced apart from each other by a gap of 100 μm and at an angle of 15°. The shearing rate is controlled by a linear translation stage (for example, ILC 100 CC, New port) at about 2-3 μm/s, depending on whether the 1L or 2L crystals are needed. After the deposition, the samples are stored in a vacuum oven (OV-12, Jeio Tech) for at least overnight to remove the residual solvent. Before the electrode deposition or transfer, the 1L-crystals are transferred into a glovebox (for example, water and oxygen content lower than 1 ppm, from MBraun) and heated to 80° C. for 15 minutes to further remove adsorbed moisture and oxygen.
[0144] The Au electrodes (for example, 180 nm thick) are formed by thermal evaporation on OTS-treated SiO.sub.2/Si wafers. The rectangular shape of Au stipes is formed by using special TEM grids as shadow masks. The resulting Au stripes each has a length of about 200 μm and a width of about 35 μm. The Au stripes are transferred in the ambient air by a probe station equipped with a microscope. The CuBe probe is controlled to lift one end of the Au stripe and slowly lift off the whole stripe. The freestanding stripe is then released onto the crystal surface to form the source and drain electrodes. When the stripes are to attach the surface of 1L-crystal, the length of the stirpes are controlled to be perpendicular to the a-axis of the crystal, detailed method in determining the a-axis is shown in
[0145] All measurements are performed in the glove box environment, except the low-temperature tests. A dual-channel sourcemeter (for example, from Keithley 2636A) is employed to test the transfer and output characters of the OFETs. The voltage scanning rate is set to be, for example, 10V/s for the forward and reverse transfer scan to ensure proper electrical contacts between the probes and the transferred electrodes. Flexible Au wires having, for example, a diameter of 15 μm are attached to the ends of the probes by conductive Ag paste. The TLM is performed by linear fitting of total channel resistance (width normalized) of OFETs with difference channel lengths at the same V.sub.DS and V.sub.ov. The error bars in the TLM plots represent the resistance different in the forward and reverse bias (i. e. hysteresis). The error bars in the R.sub.c plots are calculated from the standard errors of regression slopes. For the low-temperature test, a thin layer of Cytop is formed by a spin coating of a 2.25 wt % Cytop solution at 2500 revolutions per minute (RPM) followed by an annealing at about 80° C. for about 1 hour. The vacuum cyrogeneic probestation is evacuated overnight to <1×10.sup.−3 Pa and liquid nitrogen is ejected to cool down the sample at a maximum cooling rate of about 1 K/min.
Supplement: Velocity Saturation Effect in 1L-OFETs
[0146] The velocity saturation effect describes a phenomenon that occurs when a high lateral field (F) is applied to the semiconductor. In a classic model, the drifting velocity of the carriers follows the Equation (3)
v.sub.d=μ.sub.LFF (3)
where μ.sub.LF is the low-field mobility. This low-field mobility is consistent with the linear field-effect mobility (for example, V.sub.DS=−1 V of
[0147] For the output curves measured at T=340 K and V.sub.G=−80 V, the fitted v.sub.sat is determined to be 6.08±0.03×10.sup.4 cm/s, as shown in
Supplement: Modeling for the Channel Self-Heating Effect
[0148] To simulate the temperature rise of the device, COMSOL Multiphysics® is used to model the joule heating effect by applying inward heat flux into the semiconductor layer, at a constant ambient temperature and under forced air convection at corresponding boundaries.
[0149] The 2-D heat transfer of the device is investigated. First, a geometry is drawn according to the physical dimensions of each layer in the device. The dimensions of each layer are summarized in the following Tables 1 and 2.
TABLE-US-00001 TABLE 1 Modeling Geometry for the 8-μm Device. Material Width Thickness Silicon 78 μm 500 μm Silicon Oxide 78 μm 300 nm C.sub.10-DNTT 78 μm 4 nm Gold 35 μm × 2 180 nm
[0150] After the completion of the geometries, materials are added to the corresponding layers according to respective thermal properties. Meanwhile, thermal boundary layers are inserted between each contacted pair to represent the thermal boundary resistance (TBR). Herein, as the reported TBR values of organic semiconductor materials are insufficient. The TBR values are adopted from similar pair of materials. For example, the TBR between pentacene and SiO.sub.2 is used to estimate the TBR between C.sub.10-DNTT and SiO.sub.2. The TBR between Ag and DNTT is used to represent the TBR between Au and C.sub.10-DNTT. The thermal properties of each layer are summarized in the following Table 2.
TABLE-US-00002 TABLE 2 Material Parameters for the Model. Thermal Heat Thermal Conductivity Density Capacity Resistance Material k(W/m/K) (kg/m.sup.3) (J/kg/K) R.sub.th (m.sup.2K/W) Silicon 130 2329 700 3.84 × 10.sup.−6 SiO.sub.2-Si (TBR1) N/A N/A N/A 2 × 10.sup.−9 Silicon oxide 1.4 2200 730 2.14 × 10.sup.−7 C.sub.10-DNTT-SiO.sub.2 N/A N/A N/A 1.6 × 10.sup.−7 (TBR2) C.sub.10-DNTT 0.31 1300 500 1.29 × 10.sup.−8 Gold- C.sub.10-DNTT N/A N/A N/A 1.14 × 10.sup.−7 (TBR3) Gold 317 19300 129 .sup. 5.68 × 10.sup.−10
[0151] After selecting the corresponding materials, inward heat flux, constant ambient temperature and natural air convection are added to be the corresponding boundary conditions. For the 8-μm device, an inward heat flux of 7.88×10.sup.15 W/m.sup.3 (corresponding to P.sub.channel=32 W/mm.sup.2) is added in the semiconductor layer. At the bottom of the substrate, a constant ambient temperature 300 K is set to model a perfect heat sink condition. The rest of the boundary conditions are set to be natural air convection. The coefficient of convection h is set to be 10.sup.4 W/m.sup.2K.
[0152] Considering that the heating takes place both at channel and at the contact parts, different cases are simulated by assuming proportions of R.sub.c in R.sub.tot as 0%, 20%, 40%, 60%, 80%, and 100%. These values can be linearly converted to the input power ratio between the channel and contact. Difference with the volumetric power density for the channel part, the thickness of the contact is evaluated as 1.1 nm, which is the thickness of the upper alkyl chains. Two cases with L.sub.injection of 35 μm shown in
[0153] All patents, patent applications, provisional applications, and publications referred to or cited herein are incorporated by reference in their entirety, including all figures and tables, to the extent they are not inconsistent with the explicit teachings of this specification.
[0154] It should be understood that the examples and embodiments described herein are for illustrative purposes only and that various modifications or changes in light thereof will be suggested to persons skilled in the art and are to be included within the spirit and purview of this application. In addition, any elements or limitations of any invention or embodiment thereof disclosed herein can be combined with any and/or all other elements or limitations (individually or in any combination) or any other invention or embodiment thereof disclosed herein, and all such combinations are contemplated with the scope of the invention without limitation thereto.
REFERENCES
[0155] [1] C. Liu, Y. Xu, Y.-Y. Noh, Mater. Today 2015, 18, 79-96. [0156] [2] D. Natali, M. Caironi, Adv. Mater. 2012, 24, 1357-1387. [0157] [3] C. Liu, G. Li, R. Di Pietro, J. Huang, Y.-Y. Noh, X. Liu, T. Minari, Phys. Rev. Appl. 2017, 8, 034030. [0158] [4] H. H. Choi, K. Cho, C. D. Frisbie, H. Sirringhaus, V. Podzorov, Nat. Mater. 2018, 17, 2-7. [0159] [5] E. G. Bittle, J. I. Basham, T. N. Jackson, O. D. Jurchescu, D. J. Gundlach, Nat. Commun. 2016, 7, 10908. [0160] [6] K. Pei, X. Ren, Z. Zhou, Z. Zhang, X. Ji, P. K. L. Chan, Adv. Mater. 2018, 30, 1706647. [0161] [7] X. Ren, K. Pei, B. Peng, Z. Zhang, Z. Wang, X. Wang, P. K. L. Chan, Adv. Mater. 2016, 28, 4832-4838. [0162] [8] H. Sirringhaus, Adv. Mater. 2005, 17, 2411-2425. [0163] [9] T. Hamai, S. Arai, H. Minemawari, S. Inoue, R. Kumai, T. Hasegawa, Phys. Rev. Appl. 2017, 8, 054011. [0164] [10] H. Dong, X. Fu, J. Liu, Z. Wang, W. Hu, Adv. Mater. 2013, 25, 6158-6183. [0165] [11] X. Zhang, H. Dong, W. Hu, Adv. Mater. 2018, 30, e1801048. [0166] [12] B. Stadlober, U. Haas, H. Gold, A. Haase, G. Jakopic, G. Leising, N. Koch, S. Rentenberger, E. Zojer, Adv. Func. Mater. 2007, 17, 2687-2692. [0167] [13] Z. Zhou, Z. Zhang, Q. Wu, X. Ji, J. Wang, X. Zeng, S. P. Feng, P. K. L. Chan, ACS Appl. Mater. Interfaces 2018, 10, 35395-35403. [0168] [14] M. C. Gwinner, R. D. Pietro, Y. Vaynzof, K. J. Greenberg, P. K. H. Ho, R. H. Friend, H. Sirringhaus, Adv. Func. Mater. 2011, 21, 1432-1441. [0169] [15] A. Yamamura, S. Watanabe, M. Uno, M. Mitani, C. Mitsui, J. Tsurumi, N. Isahaya, Y. Kanaoka, T. Okamoto, J. Takeya, Sci. Adv. 2018, 4, eaao5758. [0170] [16] B. K. Sarker, S. I. Khondaker, ACS Nano 2012, 6, 4993-4999. [0171] [17] Z. Liu, M. Kobayashi, B. C. Paul, Z. Bao, Y. Nishi, Phys. Rev. B 2010, 82. 035311. [0172] [18] N. B. Kotadiya, H. Lu, A. Mondal, Y. Ie, D. Andrienko, P. W. M. Blom, G. A. H. Wetzelaer, Nat. Mater. 2018, 17, 329-334. [0173] [19] B. Peng, Z. Wang, P. K. L. Chan, J. Mater. Chem. C 2016, 4, 8628-8633. [0174] [20] B. Peng, S. Huang, Z. Zhou, P. K. L. Chan, Adv. Func. Mater. 2017, 27, 1700999. [0175] [21] Z. Zhou, Q. Wu, S. Wang, Y. T. Huang, H. Guo, S. P. Feng, P. K. L. Chan, Adv. Sci. 2019, 6, 1900775. [0176] [22] M. Chen, B. Peng, S. Huang, P. K. L. Chan, Adv. Func. Mater. 2020, 30, 1905963 [0177] [23] X. Wang, K. D. Parrish, J. A. Malen, P. K. L. Chan, Sci. Rep. 2015, 5, 16095. [0178] [24] J. Zhang, J. Wilson, G. Auton, Y. Wang, M. Xu, Q. Xin, A. Song, P. Natl. Acad. Sci. USA 2019, 116, 4843-4848. [0179] [25] R. A. Sporea, K. M. Niang, A. J. Flewitt, S. R. P. Silva, Adv. Mater. 2019, 31, 1902551. [0180] [26] K. Pei, M. Chen, Z. Zhou, H. Li, P. K. L. Chan, ACS Appl. Electron. Mater. 2019, 1, 379-388. [0181] [27] S. Fabiano, C. Musumeci, Z. Chen, A. Scandurra, H. Wang, Y.-L. Loo, A. Facchetti, B. Pignataro, Adv. Mater. 2012, 24, 951-956. [0182] [28] K. Asadi, Y. Wu, F. Gholamrezaie, P. Rudolf, P. W. M. Blom, Adv. Mater. 2009, 21, 4109-4114. [0183] [29] L. Jiang, H. Dong, Q. Meng, H. Li, M. He, Z. Wei, Y. He, W. Hu, Adv. Mater. 2011, 23, 2059-2063. [0184] [30] F. Zhang, C.-a. Di, N. Berdunov, Y. Hu, Y. Hu, X. Gao, Q. Meng, H. Sirringhaus, D. Zhu, Adv. Mater. 2013, 25, 1401-1407. [0185] [31] Y. Zhang, J. Qiao, S. Gao, F. Hu, D. He, B. Wu, Z. Yang, B. Xu, Y. Li, Y. Shi, W. Ji, P. Wang, X. Wang, M. Xiao, H. Xu, J.-B. Xu, X. Wang, Phys. Rev. Lett. 2016, 116, 016602. [0186] [32] Y. Shi, L. Jiang, J. Liu, Z. Tu, Y. Hu, Q. Wu, Y. Yi, E. Gann, C. R. McNeill, H. Li, W. Hu, D. Zhu, H. Sirringhaus, Nat. Commun. 2018, 9, 2933. [0187] [33] M. Li, D. K. Mangalore, J. Zhao, J. H. Carpenter, H. Yan, H. Ade, H. Yan, K. Mullen, P. W. M. Blom, W. Pisula, D. M. de Leeuw, K. Asadi, Nat. Commun. 2018, 9, 451. [0188] [34] M. Li, T. Marszalek, Y. Zheng, I. Lieberwirth, K. Mullen, W. Pisula, ACS Nano 2016, 10, 4268-4273. [0189] [35] L. Li, P. Gao, K. C. Schuermann, S. Ostendorp, W. Wang, C. Du, Y. Lei, H. Fuchs, L. D. Cola, K. Müllen, L. Chi, J. Am. Chem. Soc. 2010, 132, 8807-8809. [0190] [36] D. He, J. Qiao, L. Zhang, J. Wang, T. Lan, J. Qian, Y. Li, Y. Shi, Y. Chai, W. Lan, L. K. Ono, Y. Qi, J.-B. Xu, W. Ji, X. Wang, Sci. Adv. 2017, 3, e1701186. [0191] [37] I. N. Hulea, S. Russo, A. Molinari, A. F. Morpurgo, Appl. Phys. Lett. 2006, 88, 113512. [0192] [38] S. Singh, S. K. Mohapatra, A. Sharma, C. Fuentes-Hernandez, S. Barlow, S. R. Marder, B. Kippelen, Appl. Phys. Lett. 2013, 102, 153303. [0193] [39] P. Darmawan, T. Minari, Y. Xu, S.-L. Li, H. Song, M. Chan, K. Tsukagoshi, Adv. Func. Mater. 2012, 22, 45774583. [0194] [40] S. Choi, C. Fuentes-Hernandez, C.-Y. Wang, T. M. Khan, F. A. Larrain, Y. Zhang, S. Barlow, S. R. Marder, B. Kippelen, ACS Appl. Mater. Interfaces 2016, 8, 24744-24752. [0195] [41] U. Kraft, K. Takimiya, M. J. Kang, R. Rödel, F. Letzkus, J. N. Burghartz, E. Weber, H. Klauk, Org. Electron. 2016, 35, 33-40. [0196] [42] Y. Chen, R. Ren, H. Pu, X. Guo, J. Chang, G. Zhou, S. Mao, M. Kron, J. Chen, Sci. Rep. 2017, 7, 10974. [0197] [43] T. Kamiya, K. Nomura, H. Hosono, Sci. Technol. Adv. Mater. 2010, 11, 044305. [0198] [44] H. Yoshizawa, Y. Huang, G. C. Temes, IEEE International Symposium on Circuits and Systems. 1997, 457. [0199] [45] F. Yan, Y. Wang, J. Zhang, Z. Lin, J. Zheng, F. Huang, ChemSusChem 2014, 7, 101-104. [0200] [46] C. Jiang, H. W. Choi, X. Cheng, H. Ma, D. Hasko, A. Nathan, Science 2019, 363, 719-723. [0201] [47] Z. R. Wang, J. Z. Xin, X. C. Ren, X. L. Wang, C. W. Leung, S. Q. Shi, A. Ruotolo, P. K. L. Chan, Org. Electron. 2012, 13, 1223-1228. [0202] [48] Z. Wang, X. Ren, C. W. Leung, S. Shi, P. K. L. Chan, J. Mater. Chem. C, 2013, 1, 3825-3832 [0203] [49] K. K. H. Smithe, C. D. English, S. V. Suryavanshi, E. Pop, Nano Lett. 2018, 18, 4516-4522. [0204] [50] C. Canali, C. Jacoboni, F. Nava, G. Ottaviani, A. Alberigi-Quaranta, Phys. Rev. B 1975, 12, 2265-2284. [0205] [51] X. Wang, J. Zhang, Y. Chen, P. K. L. Chan, Nanoscale, 2017, 9, 2262-2271.