Distribution System for a Process Fluid for a Chemical and/or Electrolytic Surface Treatment of a Substrate

Abstract

The disclosure relates to a distribution system for a process fluid for a chemical and/or electrolytic surface treatment of a substrate and a manufacturing method for a distribution system for a process fluid for a chemical and/or electrolytic surface treatment of a substrate. The distribution system for a process fluid for a chemical and/or electrolytic surface treatment of a substrate comprises a distribution body and a distribution medium. The distribution body comprises several openings for a process fluid and/or an electric current. The distribution medium covers at least some of the openings of the distribution body. The distribution medium comprises a netted framework with passages to distribute the process fluid and/or the electric current from the distribution body.

Claims

1. A distribution system for a process fluid for a chemical and/or electrolytic surface treatment of a substrate, comprising: a distribution body, and a distribution medium, wherein the distribution body comprises several openings for a process fluid and/or an electric current, wherein the distribution medium covers at least some of the openings of the distribution body, and wherein the distribution medium comprises a netted framework with passages to distribute the process fluid and/or the electric current from the distribution body.

2. The distribution system according to claim 1, wherein the netted framework forms a sponge with randomly distributed passages.

3. The distribution system according to claim 1, wherein the netted framework forms a grid with evenly distributed passages.

4. The distribution system according to claim 1, wherein the distribution medium is porous.

5. The distribution system according to claim 1, wherein the distribution medium has a porosity in a range of 0.1 to 0.95, preferably 0.4 to 0.9 and more preferably 0.6 to 0.85.

6. The distribution system according to claim 1, wherein the distribution medium has a hydraulic conductivity in a range of 104 to 10 m/s, preferably 10.sup.−3 to 1 m/s and more preferably 10.sup.−3 to 10.sup.−1 m/s.

7. The distribution system according to claim 5, wherein the porosity and/or the hydraulic conductivity is anisotropic.

8. The distribution system according to claim 1, wherein the netted framework comprises a single layer of cells and passages.

9. The distribution system according to claim 1, wherein the netted framework comprises at least two layers of cells and passages.

10. The distribution system according to claim 1, wherein the passages of adjacent layers of cells and passages are partially displaced relative to each other.

11. The distribution system according to claim 1, wherein the passages are interconnected.

12. The distribution system according to claim 1, wherein the openings covered by the distribution medium are jet holes configured to direct the process fluid towards the substrate.

13. The distribution system according to claim 1, wherein the openings covered by the distribution medium are drain holes configured to drain off the process fluid relative to the substrate.

14. The distribution system according to claim 1, wherein the distribution medium covers the distribution body at least partially.

15. A manufacturing method for a distribution system for a process fluid for a chemical and/or electrolytic surface treatment of a substrate, comprising: providing a distribution body, wherein the distribution body comprises several openings for a process fluid and/or an electric current, and covering at least some openings of the distribution body by means of a distribution medium, wherein the distribution medium comprises a netted framework with passages to distribute the process fluid and/or the electric current from the distribution body.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0043] Exemplary embodiments of the disclosure will be described in the following with reference to the accompanying drawing:

[0044] FIG. 1 shows schematically and exemplarily an embodiment of a distribution system for a process fluid for a chemical and/or electrolytic surface treatment of a substrate according to the disclosure.

DETAILED DESCRIPTION OF EMBODIMENTS

[0045] FIG. 1 shows schematically and exemplarily an embodiment of a distribution system 10 for a process fluid for a chemical and/or electrolytic surface treatment of a substrate 20. The distribution system 10 comprises a distribution body 11 and a distribution medium 12.

[0046] The distribution body 11 is here a plate and in particular a high-speed plate (HSP) with a plurality of openings 13 for a process fluid and/or an electric current to direct the process fluid flow F (an electrolyte) and/or a current density distribution C towards the substrate 20. The distribution body 11 is arranged between an anode 21 and the substrate 20 forming a cathode. The distribution system 10 can be immersed into a tank containing the process fluid and at least the anode 21 and at least the substrate 20.

[0047] The openings 13 are through holes extending through the distribution body 11. The openings 13 have an outlet at a front surface of the distribution body 11 facing in the direction of the substrate 20 and the distribution medium 12. The openings 13 have an inlet at a rear surface of the distribution body 11 facing the anode.

[0048] Some of the openings 13 are jet holes 15 to direct the process fluid from the distribution body 11 to the substrate 20 and the distribution medium 12. Some of the openings 13 are drain holes 16 for a return flow of the process fluid to drain off the electric current back from the substrate 20 and the distribution medium 12 and through the distribution body 11. The drain holes 16 are arranged next to the jet holes 15. Each drain hole 16 is assigned to a jet hole. Preferably, there are more drain holes 16 than jet holes 15.

[0049] The distribution medium 12 is located on the front surface of the distribution body 11, which is facing the substrate 20. The distribution medium 12 covers the distribution body 11 and the openings 13 of the distribution body 11.

[0050] The distribution medium 12 can be understood as a perforated body, as porous, a foam, a sponge, a grid or the like. The distribution medium 12 comprises a netted framework with passages 14 to pass the process fluid and/or the electric current from the distribution body 11 and through the distribution medium 12 and to distribute the process fluid and/or the electric current away from the distribution medium 12 and towards the substrate 20.

[0051] The passages 14 enable the process fluid flow F and/or the electric current flow C from one side of the distribution medium 12 (here a first or rear surface facing the distribution body 11) to another side (here a second or front or opposite surface facing the substrate 20). The passages 14 in the distribution medium 12 can be randomly or non-randomly distributed in a bulk material. The passages 14 in the distribution medium 12 can form a sponge with randomly distributed passages 14; this means the passages 14 can be distributed like polymer chains. The passages 14 in the distribution medium 12 can form a grid with evenly distributed passages 14; this means, the passages 14 can be distributed like a checkered pattern.

[0052] The passages 14 are here interconnected, which means that a passage 14 is connected with at least another passage 14 to pass the process fluid flow F and/or the electric current flow C from one surface of the distribution medium 12 to the other surface of the distribution medium 12. The passages 14 may also form branches, junctions and/or bypasses.

[0053] The bulk material of the distribution medium 12 between the rather empty passages 14 can be understood as cells, pores, (honey) combs or the like. The netted framework here comprises several layers of cells and passages 14. This means that the distribution medium 12 has essentially a height (seen perpendicular to a surface of the distribution medium 12) of two and more layers, wherein the term layer is defined as one cell arranged next to one passage 14 without pile up. The stapled layers are displaced relative to each other, so that a first passage 14 of a first layer is not flush with a second passage 14 of a thereon laying second layer.

[0054] It has to be noted that embodiments of the disclosure are described with reference to different subject matters. In particular, some embodiments are described with reference to method type claims whereas other embodiments are described with reference to the device type claims. However, a person skilled in the art will gather from the above and the following description that, unless otherwise notified, in addition to any combination of features belonging to one type of subject matter also any combination between features relating to different subject matters is considered to be disclosed with this application. However, all features can be combined providing synergetic effects that are more than the simple summation of the features.

[0055] While the disclosure has been illustrated and described in detail in the drawings and foregoing description, such illustration and description are to be considered illustrative or exemplary and not restrictive. The disclosure is not limited to the disclosed embodiments. Other variations to the disclosed embodiments can be understood and effected by those skilled in the art in practicing a claimed disclosure, from a study of the drawings, the disclosure, and the dependent claims.

[0056] In the claims, the word “comprising” does not exclude other elements or steps, and the indefinite article “a” or “an” does not exclude a plurality. A single processor or other unit may fulfil the functions of several items re-cited in the claims. The mere fact that certain measures are re-cited in mutually different dependent claims does not indicate that a combination of these measures cannot be used to advantage. Any reference signs in the claims should not be construed as limiting the scope.