MULTI-CHANNEL INFEROMETER-BASED OPTICAL SENSOR

Abstract

An optical sensor. The optical sensor comprises a substrate, a Fabry-Perot interferometer, and first and second photodetectors. The Fabry-Perot interferometer comprises a first mirror and a second mirror, and is mounted on the substrate such that light is transmitted through the interferometer to the substrate. The first and second photodetectors are configured to detect light transmitted through the etalon and the substrate. The first photodetector is sensitive to a first wavelength range, and the second photodetector is sensitive to a second wavelength range, and wherein the first and second wavelength ranges each correspond to a different mode of the interferometer.

Claims

1. An optical sensor comprising: a substrate; a Fabry-Perot interferometer comprising a first mirror and a second mirror and mounted on the substrate such that light is transmitted through the interferometer to the substrate; first and second photodetectors configured to detect light transmitted through the etalon and the substrate; wherein the first photodetector is sensitive to a first wavelength range, and the second photodetector is sensitive to a second wavelength range, and wherein the first and second wavelength ranges each correspond to a different mode of the interferometer.

2. An optical sensor according to claim 1, wherein the first photodetector comprises a photodiode formed from a first material, and the second photodetector comprises a photodiode formed from a second material which is different from the first material.

3. An optical sensor according to claim 1, wherein the first photodetector is transparent to the second wavelength range, and the second photodetector is located such that light transmitted by the interferometer passes through the first photodetector before reaching the second photodetector.

4. An optical sensor according to claim 1, wherein the first and second photodetector are formed on the same wafer, such that the first photodetector is located on the opposite side of the wafer from the second photodetector, and the wafer is arranged such that light transmitted by the interferometer passes through the first photodetector before reaching the second photodetector.

5. An optical sensor according to claim 1, wherein the first photodetector comprises an optical filter which blocks at least the second wavelength range and transmits the first wavelength range, and the second photodetector comprises an optical filter which blocks at least the first wavelength range and transmits the second wavelength range.

6. An optical sensor according to claim 5, wherein the first and second photodetectors are provided on the same die.

7. An optical sensor according to claim 1, wherein each mirror is formed from alternating layers of a first material and a second material, the first material having a refractive index which is greater than a refractive index of the second material.

8. An optical sensor according to claim 7, wherein the first material is silicon dioxide, SiO2, and the second material is poly-silicon, poly-Si.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0012] FIG. 1A shows an optical sensor;

[0013] FIG. 1B shows the wavelength range of the sensor of FIG. 1A;

[0014] FIG. 2A is a chematic illustration of an exemplary optical sensor;

[0015] FIG. 2B shows the wavelength range of the sensor of FIG. 2A;

[0016] FIG. 3 shows the wavelength-dependent reflectance of a first exemplary interferometer;

[0017] FIG. 4 shows the wavelength-dependent reflectance of a second exemplary interferometer;

[0018] FIG. 5 shows example wavelengths of interest in spectroscopy.

DETAILED DESCRIPTION

[0019] A idealised Fabry-Perot interferometer will have transmission peaks at certain wavelengths depending only on the distance between its mirrors. The transmission peaks satisfy the relationship λ=2d/m, where d is the distance between the mirrors and m is an integer called the “order of interference” or “optical mode”. Existing sensors such as that shown in FIG. 1A operate within a single optical mode—i.e. the sensor is configured to detect light only for a particular optical mode, and light corresponding to the transmission peaks in other modes is either filtered out, in a range which the detector is not sensitive to, or in a range which the interferometer does not transmit (e.g. due to reflection properties of the mirrors).

[0020] Operation in a single mode is sufficient for many applications. However, in some instances it would be useful to detect in multiple modes simultaneously—i.e. to simultaneously detect light of wavelength λ.sub.m=2d/m and of wavelength λ.sub.n=2d/n, where m and n are different optical modes. For example, in spectroscopy, it is often difficult to confirm whether a certain species has been detected without comparison across multiple wavelengths, and multiple overtones of that species' characteristic wavelength. An interferometer can be constructed where two of the modes line up with different overtones of the species' characteristic wavelength, allowing both measurements to be taken simultaneously, in principle. Alternatively, this may be used in other applications requiring simultaneous monitoring of two or more different wavelengths—e.g. color sensors, spectral sensors, or dual-frequency versions of proximity or “time of flight” sensors.

[0021] An example of a practical construction of such a sensor is shown in FIG. 2A. The sensor comprises an interferometer 201, which comprises a top mirror 202, a bottom mirror 203, and may comprise MEMS (micro-electro-mechanical system) elements 204 which are configured to control the spacing between the top and bottom mirrors. The interferometer is mounted on a substrate 205, and light which is transmitted by both the interferometer and the substrate is picked up by a first detector 206 and a second detector 207. As shown in FIG. 2B, the first and second detectors are each sensitive to a different wavelength range 211, 212. These wavelength ranges each correspond to different optical modes of the interferometer, so that in operation, the first detector detects the wavelengths transmitted by the first optical mode (maximum 213 and minimum 214 transmission peaks shown), and the second detector detects the wavelengths transmitted by the second optical mode (maximum 215 and minimum 216 transmission peaks shown).

[0022] The materials of the first and second mirrors may be selected to ensure good transmission within the wavelength ranges of the first and second detectors. For example, for visible light, metal mirrors generally provide good transmission. In the near-infra red spectrum, mirrors made from alternating layers of two materials, where one material has a greater refractive index than the other, will provide good transmission. The materials may be silicon compounds. For example, FIG. 3 shows the reflectance curve for an interferometer comprising mirrors formed from alternating layers of Si.sub.3N.sub.4 and SiO.sub.2, with the main usable range 301 being between 1300 and 1800 nm (corresponding to the 4.sup.th optical mode for a 400-450 nm system). By contrast, FIG. 4 shows the reflectance curve for an interferometer comprising mirrors formed from “poly-Si” and SiO.sub.2, and the main usable range 401 is considerably larger—extending from around 1200 nm to over 2000 nm. In addition, both FIGS. 3 and 4 have a secondary usable range 302, 402 around 550 nm. When using these materials in the detector described with reference to FIG. 2, the first and second detectors may both have wavelength ranges within the main usable range, or one may have a wavelength range within the main usable range, and the other may have a wavelength range within the second usable range.

[0023] Further filters may be applied either before the interferometer, or between the interferometer and the detectors, to block light outside of the wavelength ranges of the detectors (thereby reducing interference).

[0024] In order to produce the different wavelength ranges, the first and second detectors may be implemented as: [0025] Two separate photodetectors, each with a different filter applied to them; [0026] Two photodetectors on the same die, each with a different filter applied to them; [0027] Two separate photodetectors, each made from a different material, optionally with different filters applied; [0028] Two photodetectors, formed at different depths within the same wafer; [0029] Two photodetectors, where one is formed on the upper side of the wafer, and one is formed on the lower side of the wafer.

[0030] Equivalent constructions may be used for more than two detectors.

[0031] While the sensor described above has many possible use cases, one particular use case is in spectroscopy. When detecting certain species in spectroscopy, each species has a characteristic set of “overtones”, i.e. harmonics of the base emission wavelength of that species. However, the relationship of the base wavelength to the overtones is not purely harmonic—several overtones may be stronger, weaker, wider, or narrower than would be expected for purely harmonic behaviour. This is shown in the example of FIG. 5, for several species (each row of the chart corresponds to a species or group of closely related species). Therefore, by measuring simultaneously in corresponding wavelengths in e.g. the first and second overtone region, it is possible to get a more accurate determination of which species are present in the sample.

[0032] Embodiments of the present disclosure can be employed in many different applications including spectroscopy, proximity or time of flight sensing, color measurement, etc, for example, in scientific apparatus, security, automation, food technology, and other industries.

LIST OF REFERENCE NUMERALS

[0033] 101 Interferometer [0034] 102 Top mirror [0035] 103 Bottom mirror [0036] 104 MEMS elements [0037] 105 Substrate [0038] 106 Detector [0039] 111 Wavelength range of detector [0040] 112 Minimum transmission peak [0041] 113 Maximum transmission peak [0042] 201 Interferometer [0043] 202 Top mirror [0044] 203 Bottom mirror [0045] 204 MEMS elements [0046] 205 Substrate [0047] 206 First detector [0048] 207 Second detector [0049] 211 Wavelength range of first detector [0050] 212 Wavelength range of second detector [0051] 213 Maximum transmission peak of first mode [0052] 214 Minimum transmission peak of first mode [0053] 215 Maximum transmission peak of second mode [0054] 216 Minimum transmission peak of second mode [0055] 301 Main usable range of interferometer [0056] 302 Secondary usable range of interferometer [0057] 401 Main usable range of interferometer [0058] 402 Secondary usable range of interferometer

[0059] The skilled person will understand that in the preceding description and appended claims, positional terms such as ‘above’, ‘along’, ‘side’, etc. are made with reference to conceptual illustrations, such as those shown in the appended drawings. These terms are used for ease of reference but are not intended to be of limiting nature. These terms are therefore to be understood as referring to an object when in an orientation as shown in the accompanying drawings.

[0060] Although the disclosure has been described in terms of preferred embodiments as set forth above, it should be understood that these embodiments are illustrative only and that the claims are not limited to those embodiments. Those skilled in the art will be able to make modifications and alternatives in view of the disclosure which are contemplated as falling within the scope of the appended claims. Each feature disclosed or illustrated in the present specification may be incorporated in any embodiments, whether alone or in any appropriate combination with any other feature disclosed or illustrated herein.