METHOD AND COMPUTER PROGRAM PRODUCT FOR OCT MEASUREMENT BEAM ADJUSTMENT

Abstract

A method determines translational and/or rotational deviations between the measurement coordinate system of a measurement mirror scanner and the processing coordinate system of a processing mirror scanner. A measurement beam reflected at a workpiece returns on a path of an incident measurement beam and is captured by a spatially resolving measurement sensor to ascertain spatially resolving information of the workpiece. The reflected measurement beam, in a sensor image of the measurement sensor, is imaged onto a previously known image position. This is accomplished by ascertaining a focal position deviation of the processing beam by scanning with the processing beam, evaluating a laser power detected at grid points, fixing the processing mirror scanner, capturing spatially resolving height information of the pinhole diaphragm by the measurement sensor, and determining a translational deviation between the processing and measurement coordinate systems based on the deviation.

Claims

1-10. (canceled)

11. A method for determining at least one of translational or rotational deviations between a measurement coordinate system of a measurement mirror scanner being tiltable about two axes and deflecting a measurement beam two-dimensionally, and a processing coordinate system of a processing mirror scanner being tiltable about two axes and deflecting both the measurement beam deflected by the measurement mirror scanner and a processing beam two-dimensionally onto a workpiece, the measurement beam reflected at the workpiece returning on a path of the incident measurement beam and being captured by a spatially resolving measurement sensor to ascertain spatially resolving information of the workpiece, and in a zero position of the measurement mirror scanner, the reflected measurement beam being imaged in a sensor image of the measurement sensor, onto a previously known image position, the method comprising at least one of: step a) ascertaining an x-y focal position deviation of the processing beam relative to a pinhole diaphragm center of a pinhole diaphragm detector disposed on a workpiece support plane by scanning the pinhole diaphragm with the processing beam deflected by the processing mirror scanner in an x-y grid and by evaluating a laser power detected at each of grid points, and by fixing the processing mirror scanner in a scan position having been corrected based on the ascertained x-y focal position deviation, the focal position of the processing beam in the scan position being situated in a predetermined position; capturing spatially resolving height information of the pinhole diaphragm, with the processing mirror scanner fixed in a corrected scan position, by using the measurement sensor to scan the pinhole diaphragm with the measurement beam deflected by the measurement mirror scanner; and determining a translational deviation between the processing and measurement coordinate systems based on a deviation, present in the sensor image of the measurement sensor, between the previously known image position corresponding to the focal position of the processing beam and the pinhole diaphragm center captured from the height information; or step b) deflecting the measurement beam by respective positive and negative fixed magnitudes in the workpiece support plane by tilting the processing mirror scanner about one, first tilt axis thereof and, with the processing mirror scanner fixed in the respective tilted scan positions, capturing a linear height edge disposed at the workpiece support plane by using the measurement sensor for a respective line scan of the measurement beam by deflecting the measurement mirror scanner about one, second tilt axis thereof, and ascertaining an axis of the processing coordinate system based on captured points of intersection of the two line scans with the height edge; deflecting the measurement beam by respective positive and negative fixed magnitudes in the workpiece support plane by tilting the measurement mirror scanner about the other, first tilt axis thereof and, with the measurement mirror scanner fixed in the respective tilted scan positions, capturing the height edge by using the measurement sensor for respective line scans of the measurement beam by deflecting the processing mirror scanner about the second tilt axis thereof, and ascertaining an axis of the measurement coordinate system based on the captured points of intersection of the two line scans with the height edge; and determining a rotational deviation between the processing and measurement coordinate systems based on the ascertained axes of the processing and measurement coordinate systems.

12. The method according to claim 11, which further comprises providing the predetermined position as the pinhole diaphragm center of the pinhole diaphragm detector.

13. The method according to claim 11, which further comprises providing each of the processing mirror scanner and the measurement mirror scanner with one respective mirror tiltable about two tilt axes or two mirrors each tiltable about one tilt axis.

14. The method according to claim 11, which further comprises in step placing the pinhole diaphragm detector on the workpiece support plane where the processing beam impinges on the workpiece support plane at right angles.

15. The method according to claim 11, which further comprises in step locating the previously known image position in an image center of the sensor image.

16. The method according to claim 11, which further comprises in step setting the positive and negative fixed magnitudes to be equal.

17. The method according to claim 11, which further comprises before step placing a component having the height edge on the workpiece support plane.

18. The method according to claim 11, which further comprises before step producing the height edge at a workpiece disposed on the workpiece support plane by material removal provided by the processing beam.

19. The method according to claim 11, which further comprises in step deflecting the measurement beam, reflected at the workpiece, between the measurement mirror scanner and a laser beam generator emitting the measurement beam in a direction of the measurement sensor.

20. The method according to claim 19, which further comprises providing a coherence tomography apparatus as the laser beam generator.

21. The method according to claim 11, which further comprises compensating for at least one of the determined translational or rotational deviation by position regulation of at least one of the processing mirror scanner or the measurement mirror scanner.

22. A non-transitory computer-readable medium with instructions stored thereon, that perform the steps of claim 11 when executed on a processor of a laser processing machine.

Description

[0027] The embodiments shown and described should not be understood as an exhaustive enumeration, but rather are of exemplary character for outlining the invention. In the figures:

[0028] FIG. 1 schematically shows a laser processing machine suitable for carrying out the method according to the invention for determining translational and/or rotational deviations between the coordinate systems of a processing mirror scanner and of a measurement mirror scanner;

[0029] FIGS. 2a, 2b show a pinhole diaphragm detector arranged on a workpiece support plane for ascertaining an x-y focal position deviation of a processing beam in a perspective view (FIG. 2a) and in a plan view (FIG. 2b);

[0030] FIG. 3 shows the sensor image of a spatially resolving measurement sensor for determining a translational deviation between the processing and measurement coordinate systems;

[0031] FIGS. 4a, 4b show a height edge arranged on a workpiece support plane for ascertaining the y-axis of a processing coordinate system (FIG. 4a) and for ascertaining the y-axis of a measurement coordinate system (FIG. 4b); and

[0032] FIG. 5 shows the sensor image of a spatially resolving measurement sensor for determining a rotational deviation between the processing and measurement coordinate systems.

[0033] The laser processing machine 1 shown in FIG. 1 serves for processing workpieces 2 by means of a (laser) processing beam 3.

[0034] The laser processing machine 1 comprises a laser beam generator 4 for generating the processing beam 3, a first deflection mirror 5, which deflects the processing beam 3 by e.g. 90°, an optional second deflection mirror 6, which deflects the processing beam 3 once again by e.g. 90°, and a processing mirror scanner 7 for deflecting the processing beam 3 two-dimensionally in the direction of a workpiece 2 arranged on a workpiece support plane 8. In the exemplary embodiment shown, the processing mirror scanner 7 is embodied as a mirror 9 tiltable about two tilt axes A, B, i.e. a biaxial mirror, but can alternatively also be formed by two mirrors each tiltable about only one tilt axis A, B, i.e. uniaxial mirrors. The processing coordinate system defined by the two tilt axes A, B is designated by 10.

[0035] The laser processing machine 1 furthermore comprises a coherence tomography apparatus as measurement beam generator 11 for generating an OCT (laser) measurement beam 12, illustrated in a dashed manner, and a measurement mirror scanner 13 for deflecting the measurement beam 12 two-dimensionally onto the first deflection mirror 5, which is transmissive to the measurement beam 12 on both sides. In the exemplary embodiment shown, the measurement mirror scanner 13 is embodied as a mirror 14 tiltable about two tilt axes C, D, i.e. a biaxial mirror, but can alternatively also be formed by two mirrors each tiltable about only one tilt axis C, D, i.e. uniaxial mirrors. The measurement coordinate system defined by the two tilt axes C, D is designated by 15. The tilt axes A and C run parallel to one another, in the X-direction in the exemplary embodiment shown, and the tilt axes B and D run parallel to one another, in the Y-direction in the exemplary embodiment shown.

[0036] In FIG. 1, both the processing scanner 7 and the measurement scanner 13 are shown in their so-called zero position. That is to say that the two axes A, B and C, D of the respective scanners 7, 13 each adopt a neutral reference position (zero position) shown in FIG. 1, in which position they do not effect targeted beam deflections. In the zero position of the measurement scanner 13, the measurement beam 12 is coupled into the processing beam 3 collinearly at the first deflection mirror 5. At the processing mirror scanner 7, both the processing beam 3 and the measurement beam 12 are then deflected two-dimensionally in the direction of the workpiece 2.

[0037] The laser processing machine 1 furthermore comprises a deflection mirror 16 arranged between measurement beam generator 11 and measurement mirror scanner 13, said deflection mirror being transmissive to the measurement beam 12 coming from the measurement beam generator 11. The measurement beam 12′ reflected at the workpiece 2 returns on the path of the incident measurement beam 12 and is deflected onto a spatially resolving measurement sensor 17 by the deflection mirror 16, which is non transmissive or partly transmissive in this direction. In the zero position of the measurement mirror scanner 13, the reflected measurement beam 12′, in the sensor image 18 (FIG. 3) of the measurement sensor 17, is imaged onto a previously known image position 19, merely by way of example the image center in FIG. 3.

[0038] In order to determine a translational deviation between the processing and measurement coordinate systems 10, 15, the following procedure is implemented:

[0039] As shown in FIGS. 2a, 2b, firstly an x-y focal position deviation of the processing beam 3 relative to the pinhole diaphragm center 20 of a pinhole diaphragm detector 21 arranged on the workpiece support plane 8 is ascertained according to the method known from DE 10 2011 006 553 A1. This is effected by scanning the pinhole diaphragm 22 with the processing beam 3 deflected by the processing mirror scanner 7 in an x-y grid and by evaluating the laser power detected at each of the grid points 23 by a detector area 24 downstream of the pinhole diaphragm 20. The processing mirror scanner 7 is then fixed in the scan position which has been corrected on the basis of the ascertained x-y focal position deviation, in which scan position the focal position of the processing beam 3 is situated exactly in the pinhole diaphragm center 18.

[0040] With the processing mirror scanner 7 fixed in this way, the height of the pinhole diaphragm 22 is captured in a spatially resolving manner by means of the measurement sensor 17 by scanning the pinhole diaphragm 22 with the measurement beam 12 deflected by the measurement mirror scanner 13.

[0041] As shown in FIG. 3, on the basis of the deviation—present in the sensor image 18 of the measurement sensor 17—between the previously known image position 19 corresponding to the focal position of the processing beam 3 and the pinhole diaphragm center 20′ of the pinhole diaphragm 22′ captured in terms of height, a translational deviation Δx, Δy between the processing and measurement coordinate systems 10, 15 can be determined.

[0042] Preferably, the pinhole diaphragm detector 21 is arranged on the workpiece support plane 8 where the processing beam 3 impinges on the workpiece support plane 8 as far as possible at right angles.

[0043] In order to determine a rotational deviation about the Z-axis between the processing and measurement coordinate systems 10, 15, the following procedure is implemented:

[0044] As shown in FIG. 4a, firstly a component 25 having a linear height edge 26 is placed on the workpiece support plane 8, specifically at 27, where the measurement beam 12 impinges on the workpiece support plane 8 in the zero positions of the processing and measurement mirror scanners 7, 13. Instead of being formed on a separate component 25, the height edge 26 can also be formed on the pinhole diaphragm detector 21.

[0045] In a first step, as is furthermore shown in FIG. 4a, the measurement beam 12 is deflected in each case by a positive and a negative fixed magnitude +dy, −dy in the workpiece support plane 8 by tilting the processing mirror scanner 7 about the tilt axis A and, with the processing mirror scanner 7 fixed in each case in these tilted scan positions, the height edge 26 is captured by means of the measurement sensor 17 in each case by a line scan 28a, 28b of the measurement beam 12 by deflecting the measurement mirror scanner 13 about the tilt axis D. As shown in FIG. 5, the y.sub.BKS-axis of the processing coordinate system 10 can then be ascertained in the sensor image 18 of the measurement sensor 17 on the basis of the points of intersection 29a, 29b—imaged there—of the two line scans 28a, 28b with the height edge 26.

[0046] In a second step, as shown in FIG. 4b, the measurement beam 12 is deflected in each case by a positive and a negative fixed magnitude +dy, −dy in the workpiece support plane 8 by tilting the measurement mirror scanner 13 about the tilt axis C and, with the measurement mirror scanner 13 fixed in each case in these tilted scan positions, the height edge 26 is captured by means of the measurement sensor 17 in each case by a line scan 30a, 30b of the measurement beam 12 by deflecting the processing mirror scanner 7 about the tilt axis B. As likewise shown in FIG. 5, the y.sub.MKS-axis of the measurement coordinate system 15 can then be ascertained in the sensor image 18 of the measurement sensor 17 on the basis of the points of intersection 31a, 31b—imaged there—of the two line scans 30a, 30b with the height edge 26.

[0047] In a third step, as shown in FIG. 5, a rotational deviation Δα between the processing and measurement coordinate systems 10, 15 is determined on the basis of the angle of intersection of the ascertained axes y.sub.BKS, y.sub.MKS of the processing and measurement coordinate systems 10, 15.

[0048] The translational and rotational deviations Δx, Δy, Δa thus determined can be corrected for example by a machine controller of the laser processing machine 1 by displacement and rotation of the measurement mirror scanner 13.

[0049] Instead of the height edge 26 being provided on the component 25 or on the pinhole diaphragm detector 21, the linear height edge 26 can also be generated on a workpiece 2 situated on the workpiece support plane 8 directly by means of a laser removal process, for example parallel to the B, D axes.

[0050] The processing and measurement mirror scanners 7, 13 can also be embodied as 3D scanners, instead of as 2D scanners as described above, and so the respective laser focus can also be adjusted along the processing and measurement beams 3, 12, respectively, that is to say in the Z-direction. For this purpose, a collimation lens 32 is arranged in the beam path of the processing beam 3 between the laser beam generator 4 and the processing mirror scanner 7, here merely by way of example between the laser beam generator 4 and the first deflection mirror 5, said collimation lens being displaceable by means of a controlled axis 33 along the processing beam 3. A collimation lens 34 is arranged in the beam path of the measurement beam 12 between the measurement beam generator 11 and the measurement mirror scanner 13, here merely by way of example between the deflection mirror 16 and the measurement mirror scanner 13, said collimation lens being displaceable by means of a controlled axis 35 along the measurement beam 12.