Spherical magnesium oxide and production method therefor

11180688 · 2021-11-23

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Inventors

Cpc classification

International classification

Abstract

Provided are: a spherical magnesium oxide having not only high sphericity but also smooth surface and having excellent moisture resistance and excellent filling properties, and a method producing the same. In the present invention, by controlling the boron and iron contents of the calcined magnesium oxide to be in the respective predetermined ranges, there is provided a spherical magnesium oxide having a volume-based cumulative 50% particle diameter (D50), as measured by a laser diffraction/scattering particle size distribution measurement, in the range of from 3 to 200 μm, which is the range for a relatively large particle diameter, and a high sphericity of 1.00 to 1.20, as measured from viewing a SEM photomicrograph, as well as smooth surface, and having excellent moisture resistance and excellent filling properties. A predetermined spherical magnesium oxide is provided by virtue of the synergies obtained from the boron content of 300 to 2,000 ppm and the iron content of 100 to 1,500 ppm.

Claims

1. A spherical magnesium oxide containing boron in an amount of 300 to 2,000 ppm and iron in an amount of 100 to 1,500 ppm, having a volume-based cumulative 50% particle diameter (D50) in the range of from 3 to 200 μm, as measured by a laser diffraction/scattering particle size distribution measurement, and having a sphericity of 1.00 to 1.20, as measured from viewing a SEM photomicrograph.

2. The spherical magnesium oxide according to claim 1, wherein the cumulative 50% particle diameter (D50) is in the range of from 25 to 150 μm.

3. The spherical magnesium oxide according to claim 1, which has a BET specific surface area of 0.01 to 1.00 m.sup.2/g.

4. The spherical magnesium oxide according to claim 1, which has an interparticle void volume of 0.1 to 0.8 cm.sup.3/g in a mercury intrusion pore distribution.

5. A thermally conductive filler containing the spherical magnesium oxide according to claim 1.

6. A resin composition containing the thermally conductive filler according to claim 5.

7. A method for producing the spherical magnesium oxide according to claim 1, the method comprising the steps of: 1) reacting an aqueous solution of magnesium chloride with an aqueous alkali solution to prepare a magnesium hydroxide slurry; 2) drying the magnesium hydroxide slurry and then calcining the dried slurry to prepare magnesium oxide particles; 3) subjecting the magnesium oxide particles in the form of a dispersion to wet grinding; 4) subjecting the resultant dispersion of the magnesium oxide to spray drying; and 5) calcining the resultant magnesium oxide, wherein, in any of the steps 1) to 4), the boron and iron contents are controlled so that the boron content and the iron content of the calcined magnesium oxide become 300 to 2,000 ppm and 100 to 1,500 ppm, respectively.

8. The spherical magnesium oxide according to claim 2, which has a BET specific surface area of 0.01 to 1.00 m.sup.2/g.

9. The spherical magnesium oxide according to claim 2, which has an interparticle void volume of 0.1 to 0.8 cm.sup.3/g in a mercury intrusion pore distribution.

10. The spherical magnesium oxide according to claim 8, which has an interparticle void volume of 0.1 to 0.8 cm.sup.3/g in a mercury intrusion pore distribution.

11. A thermally conductive filler containing the spherical magnesium oxide according to claim 2.

12. A thermally conductive filler containing the spherical magnesium oxide according to claim 3.

13. A thermally conductive filler containing the spherical magnesium oxide according to claim 4.

14. A thermally conductive filler containing the spherical magnesium oxide according to claim 8.

15. A thermally conductive filler containing the spherical magnesium oxide according to claim 9.

16. A resin composition containing the thermally conductive filler according to claim 11.

17. A resin composition containing the thermally conductive filler according to claim 12.

18. A resin composition containing the thermally conductive filler according to claim 13.

19. A resin composition containing the thermally conductive filler according to claim 14.

20. A resin composition containing the thermally conductive filler according to claim 15.

Description

BRIEF DESCRIPTION OF DRAWINGS

(1) FIG. 1 shows a SEM photomicrograph of the spherical magnesium oxide produced in Example 1.

DESCRIPTION OF EMBODIMENTS

(2) The spherical magnesium oxide obtained in the present invention has a volume-based cumulative 50% particle diameter (D50), as measured by a laser diffraction/scattering particle size distribution measurement, in the range of from 3 to 200 jam, preferably 15 to 150 jam, more preferably more than 25 to 130 jam, which is the range for a relatively large particle diameter, and has not only high sphericity but also smooth surface and has excellent moisture resistance and excellent filling properties. The sphericity means a sphericity, as measured from viewing a SEM photomicrograph, and is 1.00 to 1.20, preferably 1.00 to 1.15, more preferably 1.00 to 1.10. Further, with respect to excellent smoothness and excellent moisture absorption properties, a BET specific surface area that affects the smoothness and moisture absorption properties can be 0.01 to 1.00 m.sup.2/g, preferably 0.05 to 0.80 m.sup.2/g, more preferably 0.10 to 0.50 m.sup.2/g.

(3) The excellent spherical magnesium oxide of the present invention can be produced by the following method which comprises:

(4) 1) reacting an aqueous solution mixed with magnesium chloride and water, with an aqueous alkali solution to obtain a magnesium hydroxide slurry,

(5) 2) then subjecting the slurry to filtration, washing with water, and drying, and then calcining the resultant material to obtain magnesium oxide particles,

(6) 3) subjecting the magnesium oxide particles in the form of a dispersion, preferably a dispersion in an organic solvent, to wet grinding, and then

(7) 4) subjecting the resultant dispersion to spray drying, and

(8) 5) calcining the thus obtained magnesium oxide to obtain an intended spherical magnesium oxide.

(9) In this method, before the final calcination, the boron and iron contents are controlled by, for example, mixing and/or adding a boron source and an iron source so that the boron content and the iron content of the finally calcined spherical magnesium oxide become 300 to 2,000 ppm and 100 to 1,500 ppm, respectively. Specifically, the boron content and iron content of the finally obtained spherical magnesium oxide are controlled by a) adding a boron source and/or an iron source to the magnesium chloride solution, b) adding a boron source and/or an iron source to the formed magnesium hydroxide slurry, c) mixing a boron source and/or an iron source into the magnesium oxide particles, or d) adding a boron source and/or an iron source to the magnesium oxide particles which are being subjected to wet grinding.

(10) With respect to the boron source, there is no particular limitation as long as it is a compound containing boron, but, for example, boric acid, boron oxide, boron hydroxide, boron nitride, boron carbide, ammonium borate and the like can be used. With respect to the iron source, there is no particular limitation as long as it is a compound containing iron, but, for example, iron(II) oxide, iron(III) oxide, triiron tetraoxide, iron hydroxide, iron chloride, iron nitride, iron bromide, iron fluoride and the like can be used.

(11) The reason that the boron source is controlled so that the boron content of the finally calcined spherical magnesium oxide becomes 300 to 2,000 ppm is as follows. When the boron content is less than 300 ppm, a smooth surface is not formed, so that the moisture resistance becomes poor. Further, when the boron content is more than 2,000 ppm, a depression is formed in part of the spherical surface or magnesium oxide in a doughnut-like shape is formed, so that a spherical magnesium oxide having high sphericity cannot be obtained. On the other hand, the reason that the iron source is controlled so that the iron content of the finally calcined spherical magnesium oxide becomes 100 to 1,500 ppm is as follows. When the iron content is less than 100 ppm, the moisture resistance becomes poor, or a depression is formed in part of the spherical surface, so that a spherical magnesium oxide having high sphericity cannot be obtained. Further, when the iron content is more than 1,500 ppm, a number of fine particles are formed on the surface of the spherical magnesium oxide, so that the moisture resistance becomes poor.

(12) The aqueous magnesium chloride solution to be used can be selected from magnesium chloride hexahydrate, magnesium chloride dihydrate, anhydrous magnesium chloride, bittern, sea water and the like, and a combination thereof.

(13) The aqueous alkali solution to be used can be selected from an aqueous sodium hydroxide solution, an aqueous calcium hydroxide solution, aqueous ammonia and the like, and a combination thereof.

(14) The obtained magnesium oxide particles are made to be in the form of a dispersion and subjected to wet grinding and spray drying. With respect to the solvent used here, there is no particular limitation, but, for example, a known organic solvent commonly used, such as methanol, ethanol, propanol, butanol, pentanol, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, propylene glycol monoethyl ether, diethylene glycol monomethyl ether, dipropylene glycol monoethyl ether, ethylene glycol, propylene glycol, diethylene glycol, triethylene glycol, glycerol, trimethylolpropane, pentaerythritol, acetone, formic acid, acetic acid, propionic acid, tetrahydrofuran, toluene and the like can be used.

(15) With respect to the method for spray drying, there is no particular limitation, but, for example, a spray drying method is preferably used, in which the obtained magnesium oxide dispersion after the wet grinding is sprayed from a rotating disc or a nozzle to obtain magnesium oxide particles. The concentration of the dispersion being subjected to wet grinding and spraying is preferably controlled so that the magnesium oxide concentration becomes 50 to 70 wt %.

(16) With respect to the conditions for calcination, there is no particular limitation as long as the magnesium oxide particles are sintered, but the temperature for calcination is preferably 1,000 to 1,800° C., more preferably 1,100 to 1,700° C., especially preferably 1,200 to 1,600° C. The calcination time varies depending on the calcination temperature, but is preferably 0.5 to 10 hours. When the calcination temperature is lower than 1,000° C., the magnesium oxide particles are not satisfactorily sintered, and, when the calcination temperature is higher than 1,800° C., the particles are sintered together to form a coarse aggregate. Therefore, the calcination temperature is controlled to be in the above-mentioned range.

(17) The spherical magnesium oxide of the present invention has a feature that it has a satisfactory moisture resistance without subjected to surface treatment, but the spherical magnesium oxide can be subjected to surface treatment using a known method for the purpose of further improving the moisture resistance. When the spherical magnesium oxide of the present invention is subjected to surface treatment, with respect to the surface treatment agent to be used, there is no particular limitation, but, for example, colloidal silica, a silane coupling agent, a titania sol, a titanate coupling agent, a phosphorus compound, an alumina sol, an aluminate coupling agent, a zirconium coupling agent and the like can be used.

(18) Examples of silane coupling agents include vinyltrichlorosilane, vinyltrialkoxysilane, glycidoxypropyltrialkoxysilane and methacryloxypropylmethyldialkoxysilane.

(19) Examples of titanate coupling agents include tetraisopropyl titanate, tetranormalbutyl titanate, tetraoctyl titanate, tetrastearyl titanate, isopropyltriisostearoyl titanate, tetraoctyl bis(ditridecyl phosphite)titanate and bis(dioctyl pyrophosphate)oxyacetate titanate.

(20) With respect to the phosphorus compound, there is no particular limitation as long as it is a compound which is capable of reacting with magnesium oxide to form a magnesium phosphate compound, but examples include phosphoric acid, phosphoric acid salts and alkyl acid phosphates. These may be used individually or in combination. Examples of acid phosphates include isopropyl acid phosphate, 2-ethylhexyl acid phosphate, oleyl acid phosphate, methyl acid phosphate, ethyl acid phosphate, propyl acid phosphate, butyl acid phosphate, lauryl acid phosphate and stearyl acid phosphate.

(21) Examples of aluminate coupling agents include aluminum isopropylate, mono-sec-butoxyaluminum diisopropylate, aluminum sec-butyrate, aluminum ethylacetoacetate diisopropylate, aluminum tris(ethylacetoacetate) and aluminum alkylacetoacetate diisopropylate.

(22) Examples of zirconium coupling agents include normalpropyl zirconate and normalbutyl zirconate.

(23) The spherical magnesium oxide of the present invention has an advantage in that it has high sphericity and exhibits excellent filling properties when filling a resin, and has smooth surface and high moisture resistance. Therefore, the spherical magnesium oxide can be advantageously incorporated as a filler into a resin, and is excellent as a thermally conductive filler. As a resin usable in the present invention, for example, there can be mentioned a thermosetting resin and a thermoplastic resin. With respect to the thermosetting resin, there is no particular limitation, but examples include a phenolic resin, an urea resin, a melamine resin, an alkyd resin, a polyester resin, an epoxy resin, a diallyl phthalate resin, a polyurethane resin and a silicone resin. With respect to the thermoplastic resin, there is no particular limitation, but examples include a polyamide resin, a polyacetal resin, a polycarbonate resin, a polybutylene terephthalate resin, a polysulfone resin, a polyamide-imide resin, a polyether imide resin, a polyarylate resin, a polyphenylene sulfide resin, a polyether ether ketone resin, a fluororesin and a liquid crystalline polymer.

(24) The amount of the spherical magnesium oxide incorporated into the resin composition of the present invention may be appropriately determined according to the properties required for the resin composition, and is not particularly limited. However, as an example, the spherical magnesium oxide may be used in an amount in the range of from 0.1 to 100 parts by mass, relative to 100 parts by mass of the resin.

(25) The resin composition containing the spherical magnesium oxide of the present invention can be utilized in various fields according to the properties of the resin. However, the spherical magnesium oxide of the present invention has excellent thermal conductivity, and therefore the resin composition of the present invention can be especially advantageously used for the application in which the resin composition is required to have heat dissipation properties. Further, the resin composition of the present invention can be utilized as a semiconductor encapsulation material having excellent thermal conductivity and excellent moisture resistance.

(26) [Evaluation Method]

(27) (1) Method for Measuring Boron and Iron Contents

(28) The measurement of boron and iron contents was conducted by ICP emission spectrometry.

(29) A measurement sample was added to 12 N hydrochloric acid (special grade reagent) and completely dissolved by heating, and then boron and iron contents were measured using an ICP measurement apparatus (PS3520 VDD, manufactured by Hitachi High-Tech Science Corporation).

(30) (2) Method for Measuring a BET Specific Surface Area

(31) Using a specific surface area measurement apparatus (Macsorb, manufactured by Mountech Co., Ltd.), a BET specific surface area was measured by a gas adsorption method (BET method) using nitrogen gas.

(32) (3) Volume-Based Cumulative 50% Particle Diameter (D50)

(33) 0.1×10.sup.−3 kg of a measurement sample was accurately weighed and dissolved in 40 mL of methanol, and subj ected to measurement using a laser diffraction/scattering particle size distribution measurement apparatus (MT3300, manufactured by Nikkiso Co., Ltd.).

(34) (4) Sphericity and Smoothness of the Surface, as Measured from Viewing a SEM Photomicrograph.

(35) A scanning electron microscope (SEM) (JSM6510LA, manufactured by JEOL LTD.) was used. With respect to 100 particles seen in the taken electron photomicrograph, lengths of a long diameter and a short diameter which pass through the center of each particle were measured, and a long diameter/short diameter ratio was determined, and an average of the ratio values was taken as a sphericity. Further, with respect to the spherical magnesium oxide viewed in the electron photomicrograph taken by the scanning electron microscope (SEM), the surface state was evaluated according the following criteria:

(36) a spherical magnesium oxide in which almost no fine particle is present on the surface and the surface is smooth is rated as “∘”;

(37) a spherical magnesium oxide in which a plurality of fine particles are present on the surface but the surface is smooth or in which almost no fine particle is present on the surface but the surface is uneven and not smooth is rated as “Δ”; and

(38) a spherical magnesium oxide in which a plurality of fine particles are present on the surface and the surface is uneven and not smooth is rated as “x”

(39) (5) Mercury Intrusion Pore Distribution

(40) An interparticle void volume obtained by mercury intrusion pore distribution measurement is a parameter that affects the filling properties of a spherical magnesium oxide, and was determined under the conditions described below. As a mercury intrusion pore distribution measurement apparatus, AutoPore IV 9510, manufactured by Micromeritics Instrument Company, was used to measure a pore distribution. As mercury, a mercury reagent of special grade having a purity of 99.5 mass % or more and a density of 15.5335×10.sup.3 kg/m.sup.3 was used. As a measurement cell, a cell for powdery sample having a cell internal volume of 5×10.sup.−6 m.sup.3 and a stem volume of 0.38×10.sup.−6 m.sup.3 was used. A measurement sample was accurately weighed in mass in the range of from 0.10×10.sup.−3 to 0.13×10.sup.3 kg, and the measurement cell was filled with the sample. The measurement cell was set in the apparatus, and then the inside of the cell was maintained in a reduced pressure state at a pressure of 50 μHg (6.67 Pa) or less. Then, the measurement cell was filled with mercury until the pressure reached 1.5 psia (10,342 Pa). Then, the mercury was intruded under a pressure in the range of from 2 psia (13,790 Pa) to 60,000 psia (413.7 MPa) to measure a pore distribution.

(41) The intrusion pressure for mercury was converted to a pore diameter using the following formula (I).
D=−(1/P).Math.4γ.Math.cos Ψ  (I)

(42) In the above formula:

(43) D: a pore diameter (m);

(44) P: the intrusion pressure (Pa) for mercury;

(45) γ: the surface tension (485 dyne.Math.cm.sup.−1 (0.485 Pa.Math.m)) of mercury; and

(46) Ψ: the angle of contact (130°=2.26893 rad) of mercury.

(47) (6) Evaluation of Moisture Resistance by a Temperature and Humidity Controlled Test

(48) The moisture resistance of a spherical magnesium oxide was evaluated using a weight increase ratio determined by a temperature and humidity controlled test.

(49) As a temperature and humidity controlled testing chamber, THN040FA, manufactured by Advantech Toyo Kabushiki Kaisha, was used. 10 g of a spherical magnesium oxide was allowed to stand in an environment at 85° C. and at 85% RH for 168 hours using the temperature and humidity controlled testing chamber, and then a weight increase ratio was determined from the resultant spherical magnesium oxide.

EXAMPLES

Examples and Comparative Examples

Example 1

(50) Anhydrous magnesium chloride (MgCl.sub.2) was dissolved in ion-exchanged water to prepare an about 3.5 mol/l aqueous solution of magnesium chloride. The MgCl.sub.2 solution and a 25% NaOH solution were individually fed to a reactor using metering pumps so that the reaction rate of MgCl.sub.2 became 90 mol %, performing a continuous reaction.

(51) Then, boric acid (manufactured by Kanto Chemical Co., Inc.; special grade reagent) and iron(II) oxide (manufactured by Hayashi Pure Chemical Ind., Ltd.) were added to the reaction mixture so that the boron content and the iron content of the finally obtained spherical magnesium oxide became 650 ppm and 350 ppm, respectively. Then, the resultant mixture was subjected to filtration, and washed with water and dried to obtain magnesium hydroxide. The obtained magnesium hydroxide was calcined at 900° C. for one hour to obtain magnesium oxide particles. An organic solvent was added to the obtained magnesium oxide particles so that the concentration became 60 wt %. Then, the resultant dispersion was subjected to wet grinding using a ball mill for 4 hours, and then subjected to spray drying by a spray drying method. The obtained magnesium oxide after the spray drying was calcined using an electric furnace at 1,600° C. for one hour to obtain an intended spherical magnesium oxide. The physical properties of the obtained spherical magnesium oxide were evaluated by the above-mentioned test methods. The results are shown in the table below.

Example 2

(52) A spherical magnesium oxide was obtained using substantially the same method as in Example 1 except that boric acid and iron(II) oxide were added to the reaction mixture so that the boron content and the iron content of the spherical magnesium oxide became 900 ppm and 350 ppm, respectively. The physical properties of the obtained spherical magnesium oxide were evaluated in the same manner as in Example 1.

Example 3

(53) A spherical magnesium oxide was obtained using substantially the same method as in Example 1 except that boric acid and iron(II) oxide were added to the reaction mixture so that the boron content and the iron content of the spherical magnesium oxide became 1,000 ppm and 350 ppm, respectively. The physical properties of the obtained spherical magnesium oxide were evaluated in the same manner as in Example 1.

Example 4

(54) A spherical magnesium oxide was obtained using substantially the same method as in Example 1 except that boric acid and iron(II) oxide were added to the reaction mixture so that the boron content and the iron content of the spherical magnesium oxide became 1,500 ppm and 350 ppm, respectively. The physical properties of the obtained spherical magnesium oxide were evaluated in the same manner as in Example 1.

Example 5

(55) A spherical magnesium oxide was obtained using substantially the same method as in Example 1 except that boric acid and iron(II) oxide were added to the reaction mixture so that the boron content and the iron content of the spherical magnesium oxide became 650 ppm and 800 ppm, respectively. The physical properties of the obtained spherical magnesium oxide were evaluated in the same manner as in Example 1.

Example 6

(56) A spherical magnesium oxide was obtained using substantially the same method as in Example 1 except that boric acid and iron(II) oxide were added to the reaction mixture so that the boron content and the iron content of the spherical magnesium oxide became 650 ppm and 1,300 ppm, respectively. The physical properties of the obtained spherical magnesium oxide were evaluated in the same manner as in Example 1.

Example 7

(57) A spherical magnesium oxide was obtained using substantially the same method as in Example 1 except that boric acid and iron(II) oxide were added to the reaction mixture so that the boron content and the iron content of the spherical magnesium oxide became 300 ppm and 400 ppm, respectively. The physical properties of the obtained spherical magnesium oxide were evaluated in the same manner as in Example 1.

Comparative Example 1

(58) A spherical magnesium oxide was obtained using substantially the same method as in Example 1 except that the boron source and iron source were not added. The physical properties of the obtained spherical magnesium oxide were evaluated in the same manner as in Example 1.

Comparative Example 2

(59) A spherical magnesium oxide was obtained using substantially the same method as in Example 1 except that boric acid and iron(II) oxide were added to the reaction mixture so that the boron content and the iron content of the spherical magnesium oxide became 2,100 ppm and 350 ppm, respectively. The physical properties of the obtained spherical magnesium oxide were evaluated in the same manner as in Example 1.

Comparative Example 3

(60) A spherical magnesium oxide was obtained using substantially the same method as in Example 1 except that boric acid and iron(II) oxide were added to the reaction mixture so that the boron content and the iron content of the spherical magnesium oxide became 650 ppm and 1,700 ppm, respectively. The physical properties of the obtained spherical magnesium oxide were evaluated in the same manner as in Example 1.

Comparative Example 4

(61) A spherical magnesium oxide was obtained using substantially the same method as in Example 1 except that boric acid and iron(II) oxide were added to the reaction mixture so that the boron content and the iron content of the spherical magnesium oxide became 500 ppm and 70 ppm, respectively. The physical properties of the obtained spherical magnesium oxide were evaluated in the same manner as in Example 1.

(62) With respect to Examples 1 to 7 and Comparative Examples 1 to 4, the measurement of a boron content, an iron content, and a 50% particle diameter D50, the measurement of a BET specific surface area, the pore distribution measurement by a mercury intrusion method (interparticle void volume), the measurement of a sphericity from a SEM image, and the evaluation of the surface state were conducted, and the results for Examples 1 to 7 are shown in Table 1 and the results for Comparative Examples 1 to 4 are shown in Table 2. From Tables 1 and 2, it is apparent that the spherical magnesium oxide having the boron content and iron content controlled to be in the respective predetermined ranges has a small interparticle void volume and hence has excellent filling properties, and further has excellent surface state and excellent moisture resistance.

(63) TABLE-US-00001 TABLE 1 Example 1 Example 2 Example 3 Example 4 Example 5 Example 6 Example 7 Sphericity 1.05 1.12 1.09 1.16 1.15 1.12 1.13 Surface state ∘ ∘ ∘ ∘ ∘ ∘ ∘ Boron content 660 880 1030 1460 632 604 308 (ppm) Iron content (ppm) 361 356 350 344 779 1253 406 D50 (μm) 60.08 58.66 66.09 58.15 55.16 58.67 117.0 BET Specific 0.09 0.09 0.09 0.12 0.11 0.11 0.07 surface area (m.sup.2/g) Interparticle void 0.25 0.27 0.28 0.27 0.28 0.29 0.57 volume (cm.sup.3/g) Moisture resistance 0.10 0.17 0.14 0.39 0.38 0.45 0.27 (Wight increase %)

(64) TABLE-US-00002 TABLE 2 Comparative Comparative Comparative Comparative Example 1 Example 2 Example 3 Example 4 Sphericity 1.1 1.31 1.08 1.39 Surface state x Δ x Δ Boron content <1 2030 580 520 (ppm) Iron content <1 330 1679 76 (ppm) D50 (μm) 49.79 60.58 56.77 60.76 BET Specific 3.06 0.15 0.12 0.16 surface area (m.sup.2/g) Interparticle 0.36 0.29 0.29 0.36 void volume (cm.sup.3/g) Moisture 10.67 0.57 0.63 0.63 resistance (Wight increase %)

INDUSTRIAL APPLICABILITY

(65) As apparent from the evaluation in the Examples and Comparative Examples, the spherical magnesium oxide obtained in the present invention has high sphericity and smooth surface, and has excellent moisture resistance and excellent filling properties. Therefore, the spherical magnesium oxide of the present invention is advantageously used as excellent thermally conductive filler.