COATINGS
20210355341 · 2021-11-18
Inventors
- Stephen Richard COULSON (Abingdon, GB)
- Delwyn EVANS (Abingdon, GB)
- Angeliki SIOKOU (Abingdon, GB)
- Clive TELFORD (Abingdon, GB)
Cpc classification
H01L21/02118
ELECTRICITY
C09D133/16
CHEMISTRY; METALLURGY
B05D5/08
PERFORMING OPERATIONS; TRANSPORTING
C09D5/00
CHEMISTRY; METALLURGY
H01L23/564
ELECTRICITY
B05D1/62
PERFORMING OPERATIONS; TRANSPORTING
B05D5/083
PERFORMING OPERATIONS; TRANSPORTING
International classification
C09D133/16
CHEMISTRY; METALLURGY
B05D1/00
PERFORMING OPERATIONS; TRANSPORTING
B05D5/08
PERFORMING OPERATIONS; TRANSPORTING
C09D5/00
CHEMISTRY; METALLURGY
Abstract
The present invention provides an electronic or electrical device or component thereof comprising a cross-linked polymeric coating on a surface of the electronic or electrical device or component thereof; wherein the cross-linked polymeric coating is obtainable by exposing the electronic or electrical device or component thereof to a plasma comprising a monomer compound and a crosslinking reagent for a period of time sufficient to allow formation of the cross-linked polymeric coating on a surface thereof,
wherein the monomer compound has the following formula:
##STR00001##
where R.sub.1, R.sub.2 and R.sub.4 are each independently selected from hydrogen, optionally substituted branched or straight chain C.sub.1-C.sub.6 alkyl or halo alkyl or aryl optionally substituted by halo, and R.sub.3 is selected from:
##STR00002##
where each X is independently selected from hydrogen, a halogen, optionally substituted branched or straight chain C.sub.1-C.sub.6 alkyl, halo alkyl or aryl optionally substituted by halo; and n.sub.1 is an integer from 1 to 27; and wherein the crosslinking reagent comprises two or more unsaturated bonds attached by means of one or more linker moieties and has a boiling point at standard pressure of less than 500° C.
Claims
1-91. (canceled)
92. An electronic or electrical device or component thereof comprising a protective cross-linked polymeric coating on a surface of the electronic or electrical device or component thereof; wherein the protective cross-linked polymeric coating is obtainable by exposing the electronic or electrical device or component thereof to a plasma comprising a monomer compound and a crosslinking reagent for a period of time sufficient to allow formation of the protective cross-linked polymeric coating on a surface thereof; wherein the monomer compound has the following formula: ##STR00039## where n is from 2 to 10; wherein the crosslinking reagent has a boiling point of less than 500° C. at standard pressure and has the following structure: ##STR00040## where Y.sub.1, Y.sub.2, Y.sub.3, Y.sub.4, Y.sub.5, Y.sub.6, Y.sub.7 and Y.sub.8 are each independently selected from hydrogen, optionally substituted cyclic, branched or straight chain C.sub.1-C.sub.6 alkyl or aryl, and L has the following formula: ##STR00041## where each Y.sub.9 is independently selected from, a bond, —O—, —O—C(O)—, —C(O)—O—, —Y.sub.11—O—C(O)—, —C(O)—O—Y.sub.11—, —OY.sub.11—, and —Y.sub.11O—, where Y.sub.11 is an optionally substituted cyclic, branched or straight chain C.sub.1-C.sub.8 alkylene, and Y.sub.10 is selected from optionally substituted cyclic, branched or straight chain C.sub.1-C.sub.8 alkylene and a siloxane group; and wherein the crosslinker is present in an amount of at least 40 (v/v) % based on the total amount of monomer and crosslinker in the coating.
93. An electronic or electrical device or component thereof according to claim 92, wherein the protective cross-linked polymeric coating is a physical barrier to mass and electron transport.
94. An electronic or electrical device or component thereof according to claim 92, wherein the protective cross-linked polymeric coating forms a liquid repellent surface defined by a static water contact angle (WCA) of at least 90°.
95. An electronic or electrical device or component thereof according to claim 92, wherein L has one of the following structures: ##STR00042##
96. An electronic or electrical device or component thereof according to claim 95, wherein L has one of the following structures: ##STR00043##
97. An electronic or electrical device or component thereof according to claim 92, wherein Y.sub.10 has the following formula: ##STR00044## wherein each Y.sub.12 and Y.sub.13 is independently selected from H, halo, optionally substituted cyclic, branched or straight chain alkyl, or —OY.sub.14, where Y.sub.14 is selected from optionally substituted branched or straight chain C.sub.1-C.sub.8 alkyl or alkenyl, and n is an integer from 1 to 10.
98. An electronic or electrical device or component thereof according to claim 97, wherein each Y.sub.12 is H and each Y.sub.13 is H.
99. An electronic or electrical device or component thereof according to claim 97, wherein each Y.sub.12 is fluoro and each Y.sub.13 is fluoro.
100. An electronic or electrical device or component thereof according to claim 97, wherein n is from 4 to 6.
101. An electronic or electrical device or component thereof according to claim 92, wherein Y.sub.10 has the following formula: ##STR00045## wherein each Y.sub.15 is independently selected from optionally substituted branched or straight chain C.sub.1-C.sub.6 alkyl.
102. An electronic or electrical device or component thereof according to claim 101, wherein each Y.sub.15 is methyl, and each Y.sub.9 is a bond.
103. An electronic or electrical device or component thereof according to claim 92, wherein Y.sub.10 has the following formula: ##STR00046## wherein Y.sub.16 to Y.sub.19 are each independently selected from H and optionally substituted branched or straight chain C.sub.1-C.sub.8 alkyl or alkenyl.
104. An electronic or electrical device or component thereof according to claim 103, wherein Y.sub.18 is H or vinylene, and Y.sub.16, Y.sub.17 and Y.sub.19 are each H.
105. An electronic or electrical device or component thereof according to claim 92, wherein the crosslinking reagent is selected from divinyl adipate (DVA), 1,4 butanediol divinyl ether (BDVE), 1,4 cyclohexanedimethanol divinyl ether (CDDE), 1,7-octadiene (17OD), 1,2,4-trivinylcyclohexane (TVCH), 1,3-divinyltetramethyldisiloxane (DVTMDS), diallyl 1,4-cyclohexanedicarboxylate (DCHD), 1,6-divinylperfluorohexane (DVPFH), 1H,1H,6H,6H-perfluorohexanediol diacrylate (PFHDA) and glyoxal bis (diallyl acetal) (GBDA).
106. An electronic or electrical device or component thereof according to claim 92, wherein the monomer is selected from 1H,1H,2H,2H-perfluorohexyl acrylate (PFAC4), 1H,1H,2H,2H-perfluorooctyl acrylate (PFAC6), 1H,1H,2H,2H-perfluorodecyl acrylate (PFAC8) and 1H,1H,2H,2H-perfluorododecyl acrylate (PFAC10).
107. An electronic or electrical device or component thereof according to claim 92, wherein the monomer is selected from 1H,1H,2H,2H-pefluorohexyl methacrylate (PFMAC4), 1H,1H,2H,2H-perfluorooctyl methacrylate (PFMAC6) and 1H,1H,2H,2H-perfluorodecyl methacrylate (PFMAC8).
108. An electronic or electrical device or component thereof according claim 92, wherein the electronic or electrical device or component thereof is selected from mobile phones, smartphones, pagers, radios, sound and audio systems such as loudspeakers, microphones, ringers and/or buzzers, hearing aids, personal audio equipment such as personal CD, tape cassette or MP3 players, televisions, DVD players including portable DVD players, video recorders, digi and other set-top boxes, computers and related components such as laptop, notebook, tablet, phablet or palmtop computers, personal digital assistants (PDAs), keyboards, or instrumentation, games consoles, data storage devices, outdoor lighting systems, radio antennae and other forms of communication equipment, and printed circuit boards.
Description
[0104] The present invention will now be further described with reference to the following non-limiting examples and the accompanying illustrative drawings, of which:
[0105]
[0106]
[0107]
[0108]
[0109]
[0110]
[0111]
EXAMPLE 1
Example of Plasma Polymerising PFAC6 with No Crosslinker in a 3 Litre Chamber
[0112] PFAC6 was polymerised in a 3 litre glass chamber using a continuous plasma process. In the experimental matrix, the continuous plasma was produced using RF power levels of 50, 100 and 200 Watts. The process pressure was run at 30, 60 and 90 mTorr and the monomer flow rate run at 50, 100 and 200 microlitres of liquid per minute. The duration of the process was either 10 or 40 minutes. The coated substrate was silicon wafer and whether the coating was tacky or not was determined by wiping the substrate with a finger and determining by eye if the coating had smeared. The results in
[0113] The same 3 litre chamber was used to also look at the effect of power to flow ratios with pulsed plasma polymerisation. In these experiments, the peak power was either 250 or 500 W. The RF power feed was pulsed with an on time of 35 microseconds and off times of 5.5 and 1 millisecond. Process pressure was either 20, 35, 60 or 80 mTorr. The monomer flow was either 50 or 200 microlitres of liquid per minute.
[0114] The results from
EXAMPLE 2
Examples of Perfluoro Alkyl Acrylate Co-Polymerisation with Crosslinker to Show Improvements in Electrical Resistance
[0115] Perfluorooctyl acrylate monomer was mixed with a single crosslinker from the following list:
[0116] VINYL ESTERS: Divinyl adipate (DVA)
[0117] VINYL ETHERS: 1,4-Butanediol divinyl ether (BDVE); 1,4 Cyclohexanedimethanol divinyl ether (CDDE)
[0118] DI- or TRI-VINYLS: 1,7-Octadiene (1,7-OD); 1,2,4-Trivinylcyclohexane (TVCH); DI VINYL with alkyl fluoro group: 1,6-divinylperfluorohexane (DVPFH)
[0119] DI VINYL with silicon group: 1,3-Divinyl tetramethyldisiloxane (DVTMDS)
[0120] DI VINYL with cyclic ring and carboxylate groups: Diallyl 1,4-cyclohexanedicarboxylate (DCHC)
[0121] DI ACRYLATE: 1H1H,6H,6H-perfluorohexanediol diacrylate (PFHDA)
[0122] The crosslinker was mixed with the PFAC6 as a percentage by volume for the following percentages: 20, 40, 60, 80, and 100%.
[0123] Plasma initiated polymerisation reactions were carried out in a 3 litre glass plasma chamber.
[0124] The substrates were test circuit boards. The PFAC6/crosslinker mixture was introduced at a rate of 0.04-0.06 ul/min and the process pressure was 40 mTorr. The process plasma consisted of a 1 minute continuous plasma (CW) step of 50 W followed by 10-20 minute pulsed plasma (PW) step of 50 W and RF power being delivered by a pulse sequence with a duty cycle of 6.9%. The coated circuit boards were immersed in tap water and an 8V potential was applied for 13 minutes. The final current readings, together with coating thickness measurements, were used to calculate the electrical resistance per nm of coating.
EXAMPLE 3
Example of Crosslinker Concentration on Water Repellent Coating
[0125] Water repellent coatings were prepared in a 125 litre volume chamber using PFAC6 with different levels of divinyl adipate (DVA) and using helium as a carrier gas. The deposition process consisted of a 3 minute CW step with 300 W power and a pulsed step with 150 W power and an RF pulse duty cycle of 0.018%. Silicon wafer was used as the test substrates and the contact angle of the coated wafer was determined by applying a 3 ul drop of deionised wafer onto the coated wafer and measuring the contact angle using a VCA Optima (AST products) with image analysis software. The variation of contact angle with (v/v) % DVA crosslinker is shown in
[0126] Pulsed plasma polymerisation of perfluoro alkyl acrylate in the presence of divinyl adipate (DVA) was carried out in a 125 litre chamber.
EXAMPLE 4
Example of AFM Measurement of Monomer/Crosslinker Co-Polymer Coating
[0127] A barrier-style coating was prepared in a 22 litre volume chamber using PFAC6 with 10% DVA. The deposition process consisted of a 1 minute CW step with a CW power to flow ratio of 3.9 (W/microliter/min), and a pulsed step with a PW power/monomer flow ratio of 0.28 (W/microlitres/min).
EXAMPLE 5
Example of FTIR/ATR Measurement of Monomer/Crosslinker Co-Polymer Coating
[0128] Two barrier-style coatings were prepared in a 22 litre volume chamber using PFAC6 only and PFAC6 with 10% DVA as described in example 4. The deposition process consisted of a 1 minute CW step with a CW power to flow ratio of 3.9 (W/microliter/min), and a pulsed step with a PW power/monomer flow ratio of 0.28 (W/microlitres/min).
[0129] The FTIR/ATR intensity ratios of peaks attributed to stretching mode of CF.sub.3 and C═O groups, CF.sub.3/C═O, of the coating is indicative of sufficient cross linking in the coating to form a physical barrier. CF.sub.3 refers to the terminal groups in the side chain of PFAC6.
[0130] Formation of the barrier coatings is believed to be caused by a mixture of cross linking and controlled fragmentation of the monomers during polymerisation. Cross linking is believed to be predominantly via the CF2-CF3 chain, whilst fragmentation is thought to be predominantly through loss of the C═O group during polymerisation and to a lesser extent shortening of the CF2 chain. Cross linking effects the abundance of —CF3 groups in the coating and controlled fragmentation controls the amount of C═O groups in the coating. The ratio of these two functional groups is an indication that sufficient cross-linking and fragmentation has taken place and can be measured by the ratio of the intensities of the corresponding FTIR/ATR peaks.
[0131] It has been shown that coatings with reduced CF.sub.3/C═O ratios give higher resistance values in the electrical test, as described in Example 2, showing an improved coating performance on increased cross linking (for CF.sub.3) and fragmentation (for C═O). If the FTIR/ATR intensity ratio of the peaks attributed to —CF.sub.3 stretching and C═O stretching, CF.sub.3/C═O, is less than 0.6e.sup.−0.1 n (where n=6 for PFAC6) the resistance of the coating at the electrical test is expected to be higher than 8 MOhms.
[0132] The peak intensity ratio CF.sub.3/C═O the coating thickness and the final current readings during the electrical test are shown in table 2:
TABLE-US-00002 TABLE 2 Resistance in water CF.sub.3/C═O Thickness at 8 V ATR peak intensity (nm) (Ohms) ratio PFAC6 1480 2.1 × 10.sup.7 0.23 PFAC6 and 1450 9.2 × 10.sup.9 0.11 10% DVA (in volume)