Semiconductor Transducer Device with Multilayer Diaphragm and Method of Manufacturing a Semiconductor Transducer Device with Multilayer Diaphragm

Abstract

In an embodiment a semiconductor transducer device includes a semiconductor body and a diaphragm having a first layer and a second layer, wherein a main extension plane of the diaphragm is arranged parallel to a surface of the semiconductor body, wherein the diaphragm is suspended at a distance from the semiconductor body in a direction perpendicular to the main extension plane of the diaphragm, wherein the second layer comprises titanium and/or titanium nitride, wherein the first layer comprises a material that is resistant to an etchant comprising fluorine or a fluorine compound, and wherein the second layer is arranged between the semiconductor body and the first layer.

Claims

1-17. (canceled)

18. A semiconductor transducer device comprising: a semiconductor body; and a diaphragm having a first layer and a second layer, wherein a main extension plane of the diaphragm is arranged parallel to a surface of the semiconductor body, wherein the diaphragm is suspended at a distance from the semiconductor body in a direction perpendicular to the main extension plane of the diaphragm, wherein the second layer comprises titanium and/or titanium nitride, wherein the first layer comprises a material that is resistant to an etchant comprising fluorine or a fluorine compound, and wherein the second layer is arranged between the semiconductor body and the first layer.

19. The semiconductor transducer device according to claim 18, wherein an etch rate of the first layer is lower than an etch rate of the second layer regarding the etchant comprising the fluorine or the fluorine compound.

20. The semiconductor transducer device according to claim 18, wherein the first layer comprises at least one of tungsten, aluminum, aluminum oxide, silicon carbide or silicon-germanium.

21. The semiconductor transducer device according to claim 18, wherein the diaphragm further comprises a third layer that is in contact with the second layer, and wherein the third layer is arranged at a smaller distance from the semiconductor body than the second layer.

22. The semiconductor transducer device according to claim 21, wherein the diaphragm further comprises a fourth layer, wherein the fourth layer comprises titanium and/or titanium nitride, and wherein the fourth layer is arranged at a smaller distance from the semiconductor body than the third layer.

23. The semiconductor transducer device according to claim 21, wherein the third layer comprises a metal.

24. The semiconductor transducer device according to claim 18, wherein the semiconductor body further comprises an integrated circuit.

25. The semiconductor transducer device according to claim 18, further comprising: an electrode layer arranged between the semiconductor body and the diaphragm; vias interconnecting the electrode layer and the semiconductor body; and further vias interconnecting the diaphragm and the semiconductor body.

26. The semiconductor transducer device according to claim 25, further comprising a cover layer arranged between the semiconductor body and the electrode layer.

27. The semiconductor transducer device according to claim 18, further comprising an etch stop layer arranged between the semiconductor body and the diaphragm.

28. A pressure sensor comprising: the semiconductor transducer device according to claim 18.

29. A mobile device comprising: the pressure sensor according to claim 28.

30. A method of producing a semiconductor transducer device, the method comprising: providing a semiconductor body; forming a sacrificial layer above a surface of the semiconductor body; applying a diaphragm on the sacrificial layer; and removing the sacrificial layer, wherein applying the diaphragm comprises applying, patterning and structuring a first layer and a second layer, wherein applying the first layer comprises applying a material that is resistant to an etchant comprising fluorine or a fluorine compound, and wherein removing the sacrificial layer comprises introducing the etchant comprising the fluorine or the fluorine compound into openings of the diaphragm.

31. The method according to claim 30, wherein an etch rate of the material of the first layer is lower than an etch rate of the second layer regarding the etchant comprising the fluorine or the fluorine compound.

32. The method according to claim 30, wherein applying the second layer comprises applying titanium and/or titanium nitride, and wherein the first layer is applied on the second layer.

33. The method according to claim 30, wherein applying the diaphragm further comprises applying a third layer and a fourth layer, wherein the third layer is applied on the fourth layer, wherein applying the fourth layer comprises applying titanium and/or titanium nitride, and wherein the second layer is applied on the third layer.

34. The method according to claim 30, further comprising: applying an electrode layer between the semiconductor body and the diaphragm; forming vias interconnecting the electrode layer and the semiconductor body; and forming further vias interconnecting the diaphragm and the semiconductor body.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0034] The following description of figures of exemplary embodiments may further illustrate and explain aspects of the improved concept. Elements of the semiconductor transducer device with the same structure and the same effect, respectively, appear with equivalent reference symbols. Insofar as elements of the semiconductor transducer device correspond to one another in terms of their function in different figures, the description thereof is not repeated for each of the following figures.

[0035] FIG. 1 shows a cross section of an intermediate product of a semiconductor transducer device after arrangement of a diaphragm;

[0036] FIG. 2 shows a cross section according to FIG. 1 after the formation of openings in the diaphragm; and

[0037] FIG. 3 shows a cross section according to FIG. 2 after release of the diaphragm.

DETAILED DESCRIPTION OF ILLUSTRATIVE EMBODIMENTS

[0038] FIG. 1 is a cross section of an intermediate product of a semiconductor transducer device, which may for example be employed in a pressure sensor. The semiconductor transducer device in this embodiment comprises a semiconductor body 1 comprising a substrate 1A, which may be silicon, for instance. The semiconductor body 1 may also include an integrated circuit 14, which may in particular be a CMOS circuit with active and passive circuitry. Such integrated circuits are known per se, and details of the integrated circuit 14, which depend on an individual application, are not shown in the figures. The integrated circuit 14 may especially be provided for an evaluation of signals from the transducer, such as a capacitance of the transducer.

[0039] A cover layer 2, which may include a wiring embedded in an inter-metal dielectric layer and/or a passivation, for instance, is applied on a surface of the semiconductor body 1. The inter-metal dielectric layer may comprise silicon dioxide, and the passivation may comprise a combination of silicon dioxide and silicon nitride, for instance. The part of the semiconductor transducer device that includes the semiconductor body 1 and the cover layer 2 may be similar to a conventional semiconductor device with an integrated circuit. The semiconductor transducer device differs from such a semiconductor device by an arrangement of transducer elements on a surface of the cover layer 2 facing away from the semiconductor body 1.

[0040] An electrode layer 3 may be arranged on the surface of the cover layer 2 and patterned and structured, for example via lithography and etching, in order to form a first electrode of a transducer, especially a capacitive transducer, for instance. The first electrode of such a transducer may be referred to as the bottom electrode. An etch stop layer 4 is arranged on a surface of the structured electrode layer 3 facing away from the semiconductor body 1. A sacrificial layer 5 is arranged on a surface of the etch stop layer 4 facing away from the semiconductor body 1. The etch stop layer 4 is made of a material with a significantly lower etch rate regarding a fluorine-based etchant compared to a material of the sacrificial layer 5. For example, the etch stop layer 4 comprises silicon nitride, such as silicon-rich silicon nitride, while the sacrificial layer comprises silicon or silicon dioxide.

[0041] The diaphragm 10 is arranged on a surface the sacrificial layer 5 facing away from the semiconductor body 1. The diaphragm 10 comprises a sequence of layers and may particularly include a first layer 9, a second layer 8, a third layer 7 and a fourth layer 6. The fourth layer 6 may be provided as a barrier layer and/or may facilitate the arrangement of the diaphragm 10 on the sacrificial layer 5. A material of the fourth layer 6 may be characterized by a larger adhesion to the sacrificial layer 5 compared to a material of the third layer 7. The fourth layer 6 may for example comprise titanium, titanium nitride, TiN, or a combination of titanium and TiN.

[0042] The third layer 7 of the diaphragm 10 may comprise a metal, which may e.g. be tungsten. The third layer 7 may be a uniform or homogeneous layer or a sequence of at least two individual layers of different materials. The third layer 7 may be referred to as the main layer of the diaphragm 10, for example constituting an upper electrode of a capacitive transducer device. A second layer 8 is arranged on the third layer 7 for stress compensation. Like the fourth layer 6, the second layer 8 comprises titanium, TiN or a combination of titanium and TiN and may be configured as a barrier layer as a diffusion barrier and/or for stress compensation, for example.

[0043] A first layer 9 is arranged as the layer of the diaphragm 10 being arranged at the largest distance from the semiconductor body 1. The first layer 9 comprises a material that is resistant to an etchant comprising fluorine or a fluorine compound like hydrofluoric, HF, acid. Therefore, the first layer 9 may be referred to as a protection layer. A suitable material choice is tungsten, for example. Other suitable materials of the first layer 9 include aluminum, aluminum oxide, silicon carbide or silicon-germanium, for example.

[0044] Vertical electric interconnections 12 may be provided to connect the electrode layer 3 with terminals of circuitry of the semiconductor body 1. For example, these interconnections are realized by vias, such as through-substrate-vias, TSV. Further vertical electric interconnections 13 may be provided by further vias to interconnect the diaphragm 10, e.g. a top electrode formed by the third layer 7, with further terminals of circuitry of the semiconductor body 1.

[0045] FIG. 2 is a cross section according to FIG. 1 after the formation of openings in the diaphragm 10. Elements of the intermediate product shown in FIG. 2 that correspond to elements of the intermediate product shown in FIG. 1 are designated with the same reference numerals. FIG. 2 shows said openings 11 in the diaphragm 10. The openings 11 are provided for a subsequent etching step, wherein an etchant is introduced in the openings 11 to attack and remove the material of the sacrificial layer 5. If HF vapor is employed for etching, the first layer 9 acts as protection layer for the second layer 8 by preventing the production of residues like titanium fluoride in case the etchant attacks the second layer 8.

[0046] FIG. 3 is a cross section according to FIG. 2 after the removal of the sacrificial layer 5, i.e. the embodiment of FIG. 5 may be regarded as the finalized transducer device. Elements of the intermediate product shown in FIG. 3 that correspond to elements of the intermediate product shown in FIG. 2 are designated with the same reference numerals. The sacrificial layer 5 can completely be removed. Alternatively, residues of the sacrificial layer 5 remain in between the further vias 13. The etching process stops on the etch stop layer 4. FIG. 3 shows the transducer device with the major portion of the diaphragm 10 released, so that the diaphragm 10 is suspended above the semiconductor body 1 and is free to deflect in response to an external cause, in particular when a pressure is applied. The diaphragm 10 may be connected to the semiconductor body 1 only by means of the further vias 13. Alternatively, the diaphragm 10 may be connected to the semiconductor body 1 by means of a clamping structure, for example.

[0047] The embodiments shown in the FIGS. 1 to 3 as stated represent exemplary embodiments of the semiconductor transducer device, therefore they do not constitute a complete list of all embodiments according to the improved concept. Actual transducer device configurations may vary from the embodiments shown in terms of shape, size and materials, for example.