SUBSTRATE CARRIER LATCHING STRUCTURE
20220013391 · 2022-01-13
Inventors
- MING-CHIEN CHIU (New Taipei City, TW)
- YUNG-CHIN PAN (New Taipei City, TW)
- WEI-CHIAN LIU (New Taipei City, TW)
Cpc classification
H01L21/67379
ELECTRICITY
International classification
Abstract
The invention discloses a substrate carrier latching structure, which mainly comprises a top portion, a cover and a detachable module. The top portion is disposed on the enclosure of a substrate carrier, and the cover is connected to the top portion via a detachable module. As such, the excessive stress on the substrate carrier is avoided to maintain the integrity of substrates stored in the inner portion of the substrate carrier.
Claims
1. A substrate carrier latching structure, comprising: a top portion, disposed on an enclosure; a cover, connected to the top portion via a detachable module, wherein the detachable module comprising: at least one first fastener, configured on the top portion or the cover, wherein a shield is disposed in a horizontal extension part of the at least one first fastener; at least one second fastener, configured on the top portion or the cover corresponding to the at least one first fastener, wherein the at least one second fastener is matched with the at least one first fastener; a positioning post, configured on the top portion or the cover; and an alignment member, configured on the top portion or the cover corresponding to the positioning post, wherein the alignment member matches with the positioning post.
2. The substrate carrier latching structure as claimed in claim 1, wherein at least one first latch portion and at least one second latch portion are installed on the top portion and the cover respectively, and the at least one first latch portion and the at least one second latch portion are connected with the top portion and the cover respectively.
3. The substrate carrier latching structure as claimed in claim 2, wherein the at least one second latch portion matches with the at least one first latch portion.
4. The substrate carrier latching structure as claimed in claim 1, wherein the at least one first fastener is arranged in a ring-shape.
5. The substrate carrier latching structure as claimed in claim 1, wherein the at least one first fastener further includes a stop portion, preventing the at least one second fastener from slipping on the at least one first fastener.
6. The substrate carrier latching structure as claimed in claim 1, wherein the shield holds the at least one second fastener in a position, preventing the at least one second fastener from rotating over a turning angle as the at least one second fastener matches with the at least one first fastener.
7. The substrate carrier latching structure as claimed in claim 1, wherein the at least one first fastener and the at least one second fastener further comprise a first mating portion and a second mating portion respectively, and the first mating portion engages with the second mating portion, forming a fixing structure.
8. The substrate carrier latching structure as claimed in claim 1, wherein the alignment member and the positioning post further comprise a first clinching portion and a second clinching portion respectively, and the first clinching portion engages with the second clinching portion.
9. The substrate carrier latching structure as claimed in claim 1, wherein the at least one second fastener further includes an edge, and the edge is a curved surface.
10. The substrate carrier latching structure as claimed in claim 5, wherein the at least one second fastener further includes an edge, and the edge is a curved surface.
11. The substrate carrier latching structure as claimed in claim 10, wherein the cover rotatably engages with the top portion through the curved surface.
12. The substrate carrier latching structure as claimed in claim 6, wherein the at least one second fastener further includes an edge, and the edge is a curved surface.
13. The substrate carrier latching structure as claimed in claim 12, wherein the cover rotatably engages with the top portion through the curved surface.
14. The substrate carrier latching structure as claimed in claim 7, wherein the at least one second fastener further includes an edge, and the edge is a curved surface.
15. The substrate carrier latching structure as claimed in claim 14, wherein the cover rotatably engages with the top portion through the curved surface.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
[0009]
[0010]
[0011]
[0012]
[0013]
DETAILED DESCRIPTION OF THE INVENTION
[0014] In order to understand the technical features and practical efficacy of the present invention and to implement it in accordance with the contents of the specification, hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.
[0015] Please refer to
[0016] In order to implement the embodiment, said substrate carriers include containers accommodating any other chips-like semiconductors, such as wafers and reticles. In other words, substrate carriers refer to SMIF Cassette, Front Opening Universal Pod (FOUP), Mask Package Pod, Reticle SMIF Pod (RSP), EUV Pod or other containers, and it is not intended to be exhaustive or to be limited to the precise forms disclosed. In the embodiment, the materials of the top portion 100, the cover 200 and the detachable module 300 are possibly selected from the organic chemicals group comprising Cycloolefin copolymer (COC) adding carbon nanotubes, Cycloolefin polymer (COP) adding carbon nanotubes, Cyclic Block Copolymer (CBC) or the combination thereof, or otherwise selected from the styrenic polymers group comprising Polybutylene terephthalate (PBT), the polyester compounds of PBT, Polystyrene (PS), High-impact polystyrene (HIPS), Acrylonitrile Butadiene Styrene (ABS), acrylonitrile-styrene copolymer (AS) or the combination thereof, and it is not intended to be exhaustive or to be limited to the precise forms disclosed.
[0017] Please refer to
[0018] In
[0019] In the embodiment, the detachable module 300 further includes several first latch portions 505 and several second latch portions 506. The first latch portions 505 protrudes from the first surface and the second latch portions 506 protrudes from the second surface corresponding with the first latch portions 505. With the above structure, the second latch portions 506 are able to match with the first latch portions 505 in order to fix well. Specifically, the second latch portions 506 connect with the first latch portions 505 by several screwing members, such as screws and bolts. Moreover, in the present embodiment, the number of the first latch portions 505 and the second latch portions 506 is four respectively (As shown in
[0020] Please refer to
[0021] In the embodiment, the shield 501 includes a first contact surface S1 which is shown in the cross-hatched portions of
[0022] Please further refer to
[0023]
[0024] Furthermore, the first fastener 301 in the present embodiment alternatively includes a stop portion 503. In the practical application, the stop portion 503 is disposed on the first fastener 301 against the side of the shield 501 to prevent the second fastener 302 mating with the first fastener 301 from slipping on the first fastener 301 along the opposite direction of the small arrow as shown in
[0025] Please refer to
[0026] Please remain to refer to
[0027] In the other embodiment of the present embodiment, the alignment member 304 further includes a first clinching portion (not shown in figures), and the positioning post 303 further includes a second clinching portion (not shown in figures). Wherein, the first clinching portion engages with the second clinching portion. As shown in
[0028] The ordinal numbers used in the detailed description and claims, such as “first” and “second” do not necessarily indicate their priority orders or up and down directions; on the contrary, they are merely intended to distinguish different elements. It will be apparent to those skilled in the art that various modifications and variations can be made to the structure of the present invention without departing from the scope or spirit of the invention. In view of the foregoing, it is intended that the present invention covers modifications and variations of this invention, provided they fall within the scope of the following claims.
[0029] As is understood by a person skilled in the art, the foregoing preferred embodiments of the present invention are illustrated of the present invention rather than limiting of the present invention. It is intended to cover various modifications and similar arrangements included within the spirit and scope of the appended claims, the scope of which should be accorded the broadest interpretation so as to encompass all such modifications and similar structure. While the preferred embodiment of the invention has been illustrated and described, it will be appreciated that various changes can be made therein without departing from the spirit and scope of the invention.