OPTICAL MODULE
20210349260 · 2021-11-11
Inventors
- Toshiki Kishi (Tokyo, JP)
- Hitoshi Wakita (Tokyo, JP)
- Kota Shikama (Tokyo, JP)
- Shigeru Kanazawa (Tokyo, JP)
- Yuko Kawajiri (Tokyo, JP)
- Atsushi ARATAKE (Tokyo, JP)
Cpc classification
H01L2224/16225
ELECTRICITY
International classification
Abstract
The optical module includes an extension circuit board and a front end flip-chip mounted on the extension circuit board. The front end includes a semiconductor amplifier chip that executes signal processing, and an optical semiconductor chip that includes at least one of a light emitting element and a light receiving element and is flip-chip mounted on the semiconductor amplifier chip. The extension circuit board has a recessed portion that can accommodate at least a part of the optical semiconductor chip. The semiconductor amplifier chip is flip-chip mounted on the extension circuit board in the state where the surface mounting the optical semiconductor chip faces the surface of the extension circuit board, and at least a part of the optical semiconductor chip is accommodated in the recessed portion.
Claims
1.-7. (canceled)
8. An optical module comprising: a circuit board; and a front end structure flip-chip mounted on the circuit board, wherein the front end structure includes: a semiconductor amplifier chip configured to execute signal processing; and an optical semiconductor chip including a light emitting element or a light receiving element, the optical semiconductor chip being flip-chip mounted to a first surface of the semiconductor amplifier chip, wherein the circuit board has a recessed portion, wherein the semiconductor amplifier chip is flip-chip mounted on the circuit board such that the first surface of the semiconductor amplifier chip faces a second surface of the circuit board, and wherein at least a part of the optical semiconductor chip is disposed in the recessed portion of the circuit board.
9. The optical module according to claim 8, wherein: the semiconductor amplifier chip is rectangular in a top view; a width of at least one side of the semiconductor amplifier chip is larger than a width of the optical semiconductor chip and a width of the recessed portion of the circuit board; the semiconductor amplifier chip includes a first electrode for connection to the optical semiconductor chip, the first electrode being disposed on the first surface of the semiconductor amplifier chip; the semiconductor amplifier chip includes a second electrode for connection to the circuit board; the first electrode is connected to a third electrode on a third surface of the optical semiconductor chip via a bump; and the second electrode is connected to a fourth electrode disposed around the recessed portion of the circuit board via a bump.
10. The optical module according to claim 9, wherein: the circuit board further includes a solder ball electrically connected to the fourth electrode, the solder ball being disposed on a back surface of the circuit board opposite to a surface of the circuit board that faces the semiconductor amplifier chip.
11. The optical module according to claim 9, wherein: the circuit board further includes a fifth electrode wire bonded to the fourth electrode, the fifth electrode being electrically connected to the fourth electrode on a surface of the circuit board facing the semiconductor amplifier chip.
12. The optical module according to claim 8, wherein: the semiconductor amplifier chip further includes a dummy electrode on the first surface of the semiconductor amplifier chip facing the optical semiconductor chip; and a bump on the dummy electrode is in contact with a third surface of the optical semiconductor chip or the dummy electrode is connected to a dummy electrode on the third surface of the optical semiconductor chip via a bump.
13. The optical module according to claim 8, wherein: the recessed portion of the circuit board extends to an end face of the circuit board; and a fiber array is adhesively fixed to an end face of the optical semiconductor chip, the end face of the optical semiconductor chip being exposed from the circuit board, such that the optical semiconductor chip is optically coupled to fibers in the fiber array.
14. The optical module according to claim 13, wherein: the end face of the optical semiconductor chip is flush with the end face of the circuit board; and the fiber array is adhesively fixed to the end face of the optical semiconductor chip and the end face of the circuit board.
15. A method comprising: providing a circuit board; and flip-chip mounting a front end structure on the circuit board, wherein the front end structure includes: a semiconductor amplifier chip configured to execute signal processing; and an optical semiconductor chip including a light emitting element or a light receiving element, the optical semiconductor chip being flip-chip mounted to a first surface of the semiconductor amplifier chip, wherein the circuit board has a recessed portion, wherein the semiconductor amplifier chip is flip-chip mounted on the circuit board such that the first surface of the semiconductor amplifier chip faces a second surface of the circuit board, and wherein at least a part of the optical semiconductor chip is disposed in the recessed portion of the circuit board.
16. The method of claim 15, wherein: the semiconductor amplifier chip is rectangular in a top view; a width of at least one side of the semiconductor amplifier chip is larger than a width of the optical semiconductor chip and a width of the recessed portion of the circuit board; the semiconductor amplifier chip includes a first electrode for connection to the optical semiconductor chip, the first electrode being disposed on the first surface of the semiconductor amplifier chip; the semiconductor amplifier chip includes a second electrode for connection to the circuit board; the first electrode is connected to a third electrode on a third surface of the optical semiconductor chip via a bump; and the second electrode is connected to a fourth electrode disposed around the recessed portion of the circuit board via a bump.
17. The method according to claim 16, wherein: the circuit board further includes a solder ball electrically connected to the fourth electrode, the solder ball being disposed on a back surface of the circuit board opposite to a surface of the circuit board that faces the semiconductor amplifier chip.
18. The method according to claim 16, wherein: the circuit board further includes a fifth electrode wire bonded to the fourth electrode, the fifth electrode being electrically connected to the fourth electrode on a surface of the circuit board facing the semiconductor amplifier chip.
19. The method according to claim 15, wherein: the semiconductor amplifier chip further includes a dummy electrode on the first surface of the semiconductor amplifier chip facing the optical semiconductor chip; and a bump on the dummy electrode is in contact with a third surface of the optical semiconductor chip or the dummy electrode is connected to a dummy electrode on the third surface of the optical semiconductor chip via a bump.
20. The method according to claim 15, wherein: the recessed portion of the circuit board extends to an end face of the circuit board; and a fiber array is adhesively fixed to an end face of the optical semiconductor chip, the end face of the optical semiconductor chip being exposed from the circuit board, such that the optical semiconductor chip is optically coupled to fibers in the fiber array.
21. The method according to claim 20, wherein: the end face of the optical semiconductor chip is flush with the end face of the circuit board; and the fiber array is adhesively fixed to the end face of the optical semiconductor chip and the end face of the circuit board.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
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DETAILED DESCRIPTION OF ILLUSTRATIVE EMBODIMENTS
Principles of Embodiments of the Invention
[0034] A means for solving the problems described above include embodiments of the present invention, in which a driver and LD are flip-chip bonded, TIA and PD are flip-chip bonded, and a flip-chip bonded transmission and receiving front end is flip-chip bonded to the circuit board having a cavity structure. In this manner, according to embodiments of the present invention, the wiring length between the driver and the LD and the wiring length between the PD and the TIA become smaller as compared to the related-art wire bonding, thereby suppressing the band degradation of the optical modules (an optical transmission/reception module, an optical transmission module, and an optical reception module). In addition, the wire bonding structure is not necessary, which enables manufacturing of a compact optical module.
First Embodiment
[0035] Hereinafter, a first embodiment of the present invention will be described with reference to the drawings.
[0036] In the case of the optical transmission/reception module in the present embodiment, an LD (light emitting element, not illustrated) for transmission and a PD (light receiving element, not illustrated) for reception are mounted on an optical semiconductor chip 1. A driver (not illustrated) for driving the LD and a TIA (not illustrated) for amplifying a current signal output from the PD and converting the current signal into a voltage signal are mounted on a semiconductor amplifier chip 2 for signal processing. Surface electrodes 10 (the third electrode) connected to a circuit of the optical semiconductor chip 1 are formed on the surface of the optical semiconductor chip 1. Similarly, surface electrodes 20 (the first electrodes) and surface electrodes 21 (the second electrodes) that are connected to a circuit of the semiconductor amplifier chip 2 are formed on the surface of the semiconductor amplifier chip 2.
[0037] The optical semiconductor chip 1 is flip-chip mounted on a semiconductor amplifier chip 2. In other words, as illustrated in
[0038] Examples of the material for the surface electrodes 10 of the optical semiconductor chip 1 include Au. The surface electrodes 20, 21 of the semiconductor amplifier chip 2 are made of a material such as Au or Al. The bumps 3a are made of a material such as Au, Al, Cu, or Sn.
[0039] When the surface of the optical semiconductor chip 1, which forms the surface electrodes 10 thereon, is inverted (face-down) to flip-chip mount the optical semiconductor chip 1 on the semiconductor amplifier chip 2, it is necessary to prevent the optical semiconductor chip 1 from being inclined and mounted. For this reason, in addition to the surface electrodes 20, 21, dummy electrodes 22 for preventing the optical semiconductor chip 1 from being inclined are formed on the surface of the semiconductor amplifier chip 2. The dummy electrodes 22 are not connected to the internal circuit of the semiconductor amplifier chip 2.
[0040]
[0041] When the surface of the optical semiconductor chip 1, which forms the surface electrodes 10 thereon, is inverted (face-down) to flip-chip mount the optical semiconductor chip 1 on the semiconductor amplifier chip 2, the bumps 3b on the dummy electrodes 22 are brought into contact with the surface of the optical semiconductor chip 1. As a result, the inclination of the optical semiconductor chip 1 can be prevented, so that the optical semiconductor chip 1 can be horizontally mounted on the semiconductor amplifier chip 2.
[0042] In the example in
[0043] In order to prevent the optical semiconductor chip 1 from being inclined, one or more dummy electrodes 22 are required to be disposed on both sides of the surface electrodes 20 for connection to the optical semiconductor chip 1 as illustrated in
[0044] In order to flip-chip mount a transmission/reception front end constituted of the semiconductor amplifier chip 2 and the optical semiconductor chip 1 that are bonded to each other in this manner on the extension circuit board 4, the extension circuit board 4 has a cavity structure having a recessed portion 40 that can accommodate the optical semiconductor chip 1. The extension circuit board 4 is configured of a dielectric substrate made of ceramic, resin, Si, or the like for example.
[0045] In order that the optical semiconductor chip 1 accumulated in the recessed portion 40 can hang from the semiconductor amplifier chip 2, the width of the recessed portion 40 (the dimension in the X direction in
[0046] The transmission/reception front end constituted of the semiconductor amplifier chip 2 and the optical semiconductor chip 1 is flip-chip mounted on the extension circuit board 4 in the state where the surface of the semiconductor amplifier chip 2 which forms the surface electrodes 20 thereon is inverted (face-down). In other words, as illustrated in
[0047] The surface electrodes 41 of the extension circuit board 4 are made of a material such as Au or Al. Similarly to the bumps 3a, 3b, the bumps 3c are made of a material such as Au, Al, Cu, or Sn.
[0048] In the case where the extension circuit board 4 does not have a cavity structure, it is necessary to connect the semiconductor amplifier chip 2 to the extension circuit board 4 via wires, or to add via structures that enable the semiconductor amplifier chip 2 to penetrate between the surface electrodes and back electrodes. In contrast, in the present embodiment, such via structure can be eliminated by providing the extension circuit board 4 with the cavity structure. The surface electrodes 20 of the semiconductor amplifier chip 2 are connected to the surface electrodes 10 of the optical semiconductor chip 1 by flip-chip bonding, such that the optical semiconductor chip 1 is accommodated in the recessed portion 40 of the extension circuit board 4. Furthermore, the surface electrodes 21 of the semiconductor amplifier chip 2 are connected to the surface electrodes 41 of the extension circuit board 4 by flip-chip bonding, achieving the smallest wiring length for connection.
[0049] Back electrodes 42 for ball grid array (BGA) is provided on the back surface of the extension circuit board 4. The back electrodes 42 are electrically connected to the respective surface electrodes 41 by via structures (not illustrated) in the extension circuit board 4. The back electrodes 42 are made of a material such as Au or Al.
[0050] A solder ball 44 can be mounted on the back electrode 42 using a conductive adhesive 43 (for example, cream solder). Providing the optical transmission/reception module with solder balls 44 facilitates mounting of the BGA on the board of the optical transmission/reception module.
[0051] Next, as illustrated in
[0052] As illustrated in the side view in
[0053] When the applied amount of the adhesive 6 is small, a flared fillet is formed from the light emitting/incident end face of the optical semiconductor chip 1 to the end face of the fiber array 5, and the fiber array 5 is adhesively fixed to the optical semiconductor chip 1.
[0054] As another example,
[0055] As yet another example,
[0056] As yet another example,
[0057] In addition, in the present embodiment, with respect to the light emitting/incident end face, the end face of the semiconductor amplifier chip 2 does not emerge from the end face of the optical semiconductor chip 1. Therefore, when the semiconductor amplifier chip 2 is adhered to the optical semiconductor chip 1 with an underfill agent or the like, the underfill agent can be prevented from flowing out to the end face of the optical semiconductor chip 1.
Second Embodiment
[0058] Next, a second embodiment of the present disclosure will be described.
[0059] In the optical transmission module in the present embodiment, an LD (not illustrated) is mounted on an optical semiconductor chip la, and a driver (not illustrated) for driving the LD is mounted to a semiconductor amplifier chip 2a.
[0060] The method of flip-chip mounting the optical semiconductor chip is on the semiconductor amplifier chip 2a is as described in the first embodiment with reference to
[0061] The details of the cavity structure of the extension circuit board 4, and the method of flip-chip mounting the transmission front end constituted of the semiconductor amplifier chip 2a and the optical semiconductor chip is on the extension circuit board 4 are as described in the first embodiment with reference to
[0062] The light emitting/incident end face of the optical semiconductor chip is exposed from the end face of the extension circuit board 4 is adhesively fixed to the fiber array 5 using the adhesive 6. As a result, optical coupling between an optical waveguide (not illustrated) exposed at the light emitting/incident end face of the optical semiconductor chip is and the fibers 50 of the fiber array 5 is realized, thereby realizing light output from the LD of the optical semiconductor chip is to the fibers 50.
[0063] In the example in
[0064] Next, as another example of the optical transmission module in the present embodiment,
[0065] To prevent the effect of external DC components on the transmission front end constituted of the semiconductor amplifier chip 2a and the optical semiconductor chip 1a, the capacitors 7 are mounted on the extension circuit board 4.
[0066] The electrode 70 of the capacitor 7 is bonded to the surface electrode 45 of the extension circuit board 4 using a conductive adhesive 8 (for example, a cream solder). In this bonding, a bump made of Au, Al, Cu, or the like may be used other than the cream solder. Thus, by mounting the capacitors 7 on the extension circuit board 4, the capacitors 7 are inserted in series into the signal line to the driver of the semiconductor amplifier chip 2a.
[0067] In the example in
Third Embodiment
[0068] Next, a third embodiment of the present invention will be described.
[0069] In the optical reception module in the present embodiment, a PD (not illustrated) is mounted on an optical semiconductor chip 1b, and a TIA (not illustrated) is mounted on a semiconductor amplifier chip 2b.
[0070] The method of flip-chip mounting the optical semiconductor chip 1b on the semiconductor amplifier chip 2b is as described in the first embodiment with reference to
[0071] The light emitting/incident end face of the optical semiconductor chip 1b exposed from the end face of the extension circuit board 4 is adhesively fixed to the fiber array 5 using the adhesive 6. As a result, optical coupling between an optical waveguide (not illustrated) exposed at the light emitting/incident end face of the optical semiconductor chip 1b and the fibers 50 of the fiber array 5 is realized, thereby realizing light input from the fibers 50 to the PD of the optical semiconductor chip 1b.
[0072] In the example in
[0073] Next, as another example of the optical reception module in the present embodiment,
[0074] To prevent the effect of external DC components on the reception front end constituted of the semiconductor amplifier chip 2b and the optical semiconductor chip 1b, the capacitors 7 are mounted on the extension circuit board 4.
[0075] As in the case in
[0076] In the example in
Fourth Embodiment
[0077] Next, a fourth embodiment of the present invention will be described. The optical transmission/reception module, the optical transmission module, and the optical reception module are BGA-mounted on the board in the first to third embodiments, respectively. Embodiments of the present invention are not limited to this, and the modules may be connected to the outside via a wire without using the BGA.
[0078] In the example in
[0079] While wire bonding is applied to the optical transmission/reception module in the first example, wire bonding may be applied to the optical transmission module in the second embodiment and the optical reception module in the third embodiment.
[0080] In the first to fourth embodiments, given that a shortest distance in the X direction between the surface electrode 20 and the surface electrode 21 of the semiconductor amplifier chip 2 (2a, 2b) is x as illustrated in
[0081] Given that thermal expansion coefficients of the optical semiconductor chip 1 (1a, 1b), the semiconductor amplifier chip 2 (2a, 2b), and the extension circuit board 4 are A, B, and C, respectively, when a difference between A and B, a difference between B and C, or a difference between A, B, and C is within ±5%, a change in the bump due to temperature changes can be sufficiently suppressed.
INDUSTRIAL APPLICABILITY
[0082] The present invention may be applied to optical modules used in the optical communications network.
REFERENCE SIGNS LIST
[0083] 1, 1a, 1b Optical semiconductor chip
[0084] 2, 2a, 2b Semiconductor amplifier chip
[0085] 3a, 3b, 3c Bump
[0086] 4 Extension circuit board
[0087] 5 Fiber array
[0088] 6 Adhesive
[0089] 7 Capacitor
[0090] 8, 43 Conductive adhesive
[0091] 9 Wire
[0092] 10, 20, 21, 41, 45, 46 Surface electrode
[0093] 22 Dummy electrode
[0094] 40 Recessed portion
[0095] 42 Back electrode
[0096] 44 Solder ball
[0097] 50 Fiber
[0098] 51 Fiber block.