PNEUMATIC CHIPPING HAMMER

Abstract

A pneumatic chisel includes a housing having a double-acting pneumatic cylinder in which a piston including a chisel is movably arranged along a longitudinal axis. The cylinder has a work-side section and a return-side section. The return-side section includes a damping portion and a pressure-equalization opening. The work-side section includes an end-position damping member and a compressed air connection. A compressed air reservoir is connected to the return-side section of the cylinder. A chisel guide housing includes a sealing air chamber. The piston is constructed as one piece with the chisel.

Claims

1-15 (canceled)

16. A pneumatic chisel, in particular for comminuting polycrystalline silicon, comprising: a housing having a double-acting pneumatic cylinder in which a piston comprising a chisel is movably arranged along a longitudinal axis, wherein the cylinder has a work-side section and a return-side section, wherein the return-side section comprises a damping portion and a pressure-equalization opening and wherein the work-side section comprises an end-position damping member and a compressed air connection; a compressed air reservoir connected to the return-side section of the cylinder; and a chisel guide housing comprising a sealing air chamber, wherein the piston is constructed as one piece with the chisel.

17. The pneumatic chisel as claimed in claim 16, wherein the end-position damping member is a fluidic, in particular pneumatic, or mechanical end-position damping member.

18. The pneumatic chisel as claimed in claim 16, wherein the work-side section comprises a pressure-equalization opening.

19. The pneumatic chisel as claimed in claim 16, wherein the chisel and/or the piston are made of a material selected from the group comprising sintered material, metal, metal alloy and combinations thereof.

20. The pneumatic chisel as claimed in claim 16, wherein the chisel and/or the piston at least partially comprise a coating.

21. The pneumatic chisel as claimed in claim 16, wherein the chisel guide housing is sealed to the environment with a plastic.

22. An apparatus for comminuting at least one polycrystalline silicon rod, comprising: a rod cradle having a portion movable along an axis As and an immovable portion, wherein a first cradle surface of the movable portion and a second cradle surface of the immovable portion are arranged at an angle of 70° to 130° to one another; a sealable breaking chamber in which the rod cradle is arranged and which comprises a chisel feedthrough; and at least one pneumatic chisel as claimed in claim 16, which is mounted externally to the breaking chamber on a carrier running parallel to a longitudinal axis of the rod cradle.

23. The apparatus as claimed in claim 22, comprising 4 to 25 pneumatic chisels.

24. The apparatus as claimed in claim 22, wherein the pneumatic chisel is at least partially displaceably mounted on the carrier.

25. The apparatus as claimed in claim 22, wherein the carrier is movable relative to the rod cradle.

26. The apparatus as claimed in claim 22, wherein the rod cradle is movable relative to the carrier.

27. The apparatus as claimed in claim 22, wherein a conveying means for transporting away silicon chunks is arranged below the rod cradle.

28. The apparatus as claimed in claim 22, wherein a material receiver table is attached to the breaking chamber.

29. The apparatus as claimed in claim 22, wherein the breaking chamber is connected to at least one extractor.

Description

[0027] The object of the invention is further achieved by an apparatus for comminuting at least one polycrystalline silicon rod. The apparatus comprises [0028] a rod cradle having a portion movable along an axis A and an immovable portion, wherein a first cradle surface of the movable portion and a second cradle surface of the immovable portion are arranged at an angle of 70° to 130° to one another, [0029] a sealable breaking chamber in which the rod cradle is arranged and which comprises a chisel feedthrough and [0030] at least one described pneumatic chisel which is mounted externally to the breaking chamber on a carrier running parallel to a longitudinal axis of the rod cradle.

[0031] The first cradle surface of the movable portion and the second cradle surface of the immovable portion are preferably arranged at an angle of 80° to 120°, in particular of 85° to 110°, to one another. It is particularly preferable when the angle is about 90°.

[0032] The apparatus preferably comprises 4 to 10, particularly preferably 11 to 17, in particular 18 to 25 pneumatic chisels. The pneumatic chisels are preferably arranged in a row.

[0033] It is preferable when at least some of the pneumatic chisels are displaceably mounted on the carrier. This makes it possible to vary the distance between the chisels and optionally adjust the degree of comminution. It may further be provided that the pneumatic chisel(s) is/are pivotable transversely to its/their longitudinal axis.

[0034] The carrier may further be movable relative to the rod cradle. Said carrier is preferably movable in all spatial directions and optionally pivotable about its longitudinal axis.

[0035] The rod cradle is likewise preferably movable relative to the carrier. The rod cradle may for example also be displaceable only along its longitudinal axis and/or along a further axis, in particular perpendicularly to the longitudinal axis. It is particularly preferable when the rod cradle is movable in all spatial directions.

[0036] On the one hand, the mobility of the carrier and/or of the rod cradle makes it possible to precisely adjust the distance between the chisel(s) and the silicon rod to be comminuted. It is thus possible to always set an optimal position for various rod diameters. On the other hand, the impact point of the chisel on the rod surface can be precisely specified. This especially makes it possible to control the chunk size and the impact energy to be employed.

[0037] Due to possible diameter differences over the silicon rod length the described separate positionability of the pneumatic chisel is very helpful and results in particularly homogenous breaking. It is also possible to employ diameter and position detection using contactless sensors via the fixing and orientation of the silicon rod in the rod cradle. Through appropriate evaluation each pneumatic chisel may be positioned according to the rod dimensions. Such sensors also make it possible to avoid so-called free hits and thus increase the service life of the apparatus.

[0038] The impact sequence of the pneumatic chisel is preferably freely choosable by means of a software-assisted program. In particular, the described sensors may be used to calculate an optimal impact sequence according to specified parameters.

[0039] The impact sequence may be varied in particular according to the type of the polysilicon to be comminuted and/or according to the desired chunk size.

[0040] In a preferred embodiment a conveying means, in particular a conveyor belt, for transporting away silicon chunks is arranged below the rod cradle. The conveying means preferably runs parallel to the longitudinal axis of the rod cradle. After the comminution operation the silicon chunks are located in the rod cradle. The rod cradle thus also serves as a chunk trough. By displacement of the portion of the rod cradle movable along the axis A (opening of the rod cradle) the chunks are transferred to the conveying means. Due to the avoidance of a tipping motion the potential energy of the chunk material is reduced. This results in a reduced drop height into the conveying means, thus avoiding undesired postcomminution and increasing the service life of lining materials (in particular silicon).

[0041] The two-piece configuration of the rod cradle further offers the possibility of comminuting with a slightly opened slot between the fixed and the movable part. This allows any contaminated dust present during the comminution operation to be discharged/extracted from the chunk trough. It is preferable when a controllable extractor is installed below the rod cradle.

[0042] Opening the rod cradle initiates dropping of the chunk material onto the conveying means. Opening is preferably initiated according to the fill level of the rod cradle. The amount of chunk material from the preceding comminution operation may be used. This makes it possible to avoid dropping onto previously broken polysilicon on the conveying means and thus undesired postcomminution.

[0043] It is preferable when the first cradle surface and/or the second cradle surface of the rod cradle comprises crossbraces (perpendicular to the longitudinal axis of the rod cradle). The crossbraces of the first cradle surface of the movable portion may be arranged offset relative to the crossbraces of the cradle surface of the immovable portion. This makes it possible to achieve better comminution.

[0044] It is preferable when in cross section the rod cradle has a hollow chamber profile which may be filled for example with concrete, in particular polymer concrete. This results in reduced natural oscillation and better damping properties.

[0045] In a further embodiment the breaking chamber is sealable with a sliding door, folding door or trapdoor to prevent ingress of dust. The breaking chamber is preferably sealed automatically before the comminution process is carried out.

[0046] The breaking chamber may further be connected to an extractor which is activated during the comminution process in particular.

[0047] The chisel feedthrough of the breaking chamber is preferably sealed with a plastic, in particular polyurethane. It may also be preferable to secure the breaking chamber from ingress of dust by generation of positive pressure.

[0048] Air circulation through the sealed breaking chamber may be specifically controlled. It is thus possible to extract contaminated dust stirred up during the comminution operation and avoid ingress of contamination from external sources.

[0049] In a further embodiment a material receiver table is attached to the breaking chamber. This is preferably separated from the breaking chamber by the sliding door, folding door or trapdoor. A new silicon rod may already be positioned on the material feed table during the comminution operation, thus allowing particularly efficient operation. A manual pre-comminution may optionally be carried out on the receiver table. The receiver table is preferably likewise enclosed with the exception of an access opening on one side and may optionally be equipped with an extractor.

[0050] All lining parts of the apparatus, in particular those coming into contact with the polysilicon, are preferably made of an abrasion resistant material such as for example hard metals, plastics (for example polyurethanes) or else silicon.

[0051] FIG. 1 shows a pneumatic chisel 10 according to the invention in cross section. The pneumatic chisel 10 comprises a housing 12 which at least partially surrounds a cylinder 14. The cylinder 14 may also be entirely surrounded by the housing 12. With a chisel 18, arranged in the cylinder 14 is a piston 16 movable along an axis A.sub.M. The piston 16 and the chisel 18 form one unit (one-piece construction) and are made from tungsten carbide. The cylinder 14 has a work-side section 20 pointing in the direction of the object to be comminuted and a return-side section 22 facing away therefrom. Arranged in the work-side section 22 is an end-position damping means 28 in the form of a Belleville washer. The work-side section 22 further comprises a compressed air connection 30 which also functions as a pressure-equalization opening. Located in the return-side section 22 is a damping washer as damping means 24. The return-side section 22 is further provided with a pressure-equalization opening 26 and connected via a connection piece 31 to a compressed air reservoir 32. Attached to the work-side section 22 of the cylinder is a chisel guide housing 34 comprising a sealing air chamber 36 and an opening 38.

[0052] In FIG. 1 the piston 16 is in a central position between a return position and an end position. At commencement of a comminution impact the piston 16 is typically at the stop of the damping means 24 (return position). The compressed air reservoir 32 is filled with a predetermined amount of compressed air according to the material to be comminuted. After achieving the target pressure a valve integrated into the compressed air reservoir 32 is opened, thus via the connecting piece 31 abruptly admitting the compressed air into the cylinder 14 and accelerating the piston 16 in the direction of the end-position damping means 28. The chisel 18 accordingly performs a single impact on the material to be comminuted. The piston 16 comes to rest in the end position at the stop of the end-position damping means 28. The excess compressed air can escape via the openings 30, 26. Any abrasion particles formed by the motion of piston 16 and chisel 18 are transported away via the opening 38 of the sealing air chamber 36 before they can reach the comminuted material.

[0053] For another impact a small amount of compressed air is introduced into the cylinder 14 via the compressed air connection 30 and brings the piston 16 back into the return position. The cylinder 14 is thus a double-acting pneumatic cylinder. Through precise timing of compressed air feeding from the reservoir 32 and the connection 30 the piston 16/chisel 18 may be set into an oscillating motion but without exhibiting the disadvantages of the hammer and chisel principle of comminutors hitherto known from the prior art.

[0054] FIG. 2 shows a cross section through an apparatus 100 according to the invention for comminuting polycrystalline silicon rods. The apparatus 100 comprises a rod cradle 102 comprising an immovable portion 106 and a movable portion 104 displaceable along the axis (or plane) As. The movable portion 104 has a first cradle surface 105 which is arranged at an angle α of 90° to a second cradle surface 107 of the immovable portion 106. The cradle surfaces 105, 107 form a hollow in which a polysilicon rod 103 having a longitudinal axis A.sub.P is arranged and fixed. The axis A.sub.P runs parallel to the longitudinal axis of the rod cradle 102. The silicon rod is located in a breaking chamber 108 which is sealable by a bulkhead 109.

[0055] Externally to the breaking chamber 108, 21 pneumatic chisels 10 (cf. FIG. 1) are mounted on a carrier 112 in a row (parallel to their longitudinal axes A.sub.M). An optimal distance between the pneumatic chisels 10 may be in the range from 5 and 15 cm (measured between the chisel ends). A wall 111 of the breaking chamber 108 has a chisel feedthrough 110 lined with a polyurethane plastic to prevent ingress of dust. Also opening into the wall 111 is an extractor 119.

[0056] Arranged below the rod cradle 102 are a conveying means 114 for transporting away silicon chunks and a further extractor 118. In order to prevent contamination the conveying means 114 is located in a housing 115.

[0057] Located in front of the bulkhead 109 sealing the breaking chamber 118 is a material receiver table 116. The entire apparatus 100 is surrounded by a housing 120 which is open on one access side 122.

[0058] To comminute silicon rods a silicon rod 103 is initially conveyed onto the material receiver table 116. This may be effected manually or with a crane. A pre-comminution may optionally be carried out on the receiver table 116. The rod 103 is then rolled into the rod cradle 102 with the bulkhead 109 open. The bulkhead 109 closes and the breaking chamber 108 is now substantially hermetically sealed. The material receiver table 116 now generally already receives the next rod 103.

[0059] With the aid of sensors (for example laser scan) the rod 103 is measured to establish the optimal position of the 21 pneumatic chisels 10. This depends in particular on the diameter of the rod but also on the desired degree of comminution and the type of silicon. The morphology of the silicon in particular plays a role here. For example, a distinction is made between porous silicon rods (solar standard) and compact rods (SEMI standard) which can have a high internal stress. The rod 103 is now moved up to the chisel 18 by displacing the rod cradle 102. A fine adjustment of each individual pneumatic chisel 10 may likewise be carried out. An optimal distance between the rod surface and a chisel 18 is typically in a range from 5 and 30 mm. It is particularly advantageously unnecessary for the chisel 18 to be in contact with the rod 103 before comminution. Furthermore, the amount of compressed air and thus the impact strength are adjusted according to the diameter, the desired degree of comminution and the type of silicon. Typical values are in the range from 150 Joule to 700 Joule here. Once the pneumatic chisels 10 have been activated, wherein a single impact of each pneumatic chisel 10 is generally sufficient, the movable portion 104 of the rod cradle 102 is opened and the comminuted silicon transferred into the conveying means 114. The extractors 119, 118 are in principle activated during the comminution operation. The comminuted silicon is transported away and typically supplied to a packaging apparatus. Immediately after the rod cradle 102 is closed again the bulkhead 109 opens to accommodate the next rod 103. Comminution of a rod 103 (measured from placement on the material receiver table 116 until reopening of the bulkhead 109) generally takes 10 to 40 seconds.