Interbonded Components, Method for Detaching Components from Interbonded Components, and Method for Producing Interbonded Components

Abstract

In an embodiment a component assembly includes a plurality of components, a carrier, wherein the components are secured on the carrier by a connecting layer, wherein, for each component, the connecting layer forms at least one supporting structure at which the connecting layer is adjacent to the component, and a sacrificial layer arranged regionally between the components and the connecting layer, wherein one portion of the components is assigned to a first group, wherein a further portion of the components is assigned to a second group, and wherein the components of the first group are different than the components of the second group in respect of a coverage with the sacrificial layer.

Claims

1.-18. (canceled)

19. A component assembly comprising: a plurality of components; a carrier, wherein the components are secured on the carrier by a connecting layer, wherein, for each component, the connecting layer forms at least one supporting structure at which the connecting layer is adjacent to the component; and a sacrificial layer arranged regionally between the components and the connecting layer, wherein one portion of the components is assigned to a first group, wherein a further portion of the components is assigned to a second group, and wherein the components of the first group are different than the components of the second group in respect of a coverage with the sacrificial layer.

20. The component assembly as claimed in claim 19, wherein the components of the first group are arranged in a regular pattern.

21. The component assembly as claimed in claim 19, wherein at least some components of the first group only have nearest neighbors which do not belong to the first group of components along two mutually perpendicular spatial directions.

22. The component assembly as claimed in claim 19, wherein the components have a base area with a polygonal base shape and the nearest neighbors of a component of the first group along all edges of this component do not belong to the first group of components.

23. The component assembly as claimed in claim 19, wherein at least some components of the first group are surrounded along an entire circumference by nearest neighbors which do not belong to the first group of components.

24. The component assembly as claimed in claim 19, wherein the components of the first group and of the second group differ in respect of an average thickness of the sacrificial layer between the respective components and the carrier.

25. The component assembly as claimed in claim 19, wherein the sacrificial layer comprises a first partial layer with a first material composition and a second partial layer with a second material composition different to the first material composition, and wherein the components differ from one another in respect of a coverage with material of the first partial layer.

26. The component assembly as claimed in claim 25, further comprising an island formed by the first partial layer, the island being surrounded along its lateral circumference to at least 80% by the second partial layer.

27. A method for detaching components from the component assembly, the method comprising: providing the component assembly as claimed in claim 19; regionally removing material of the sacrificial layer; detaching at least one component of the first group; removing further material of the sacrificial layer; and detaching at least one component of the second group.

28. The method as claimed in claim 27, wherein the components of the second group cannot be detached after regionally removing the material of the sacrificial layer and before removing further material of the sacrificial layer with a detachment force which is exerted for detaching the at least one component.

29. The method as claimed in claim 27, wherein detaching of the at least one components comprises by a transfer body.

30. The method as claimed in claim 29, wherein the transfer body has a base area which is at least 20% larger than a base area of one of the detached components.

31. The method as claimed in claim 29, wherein a lateral principal extent axis of the transfer body is rotated with respect to a lateral principal extent axis of one of the detached components.

32. The method as claimed in claim 27, wherein the sacrificial layer comprises a first partial layer with a first material composition and a second partial layer with a second material composition different to the first material composition, and wherein regionally removing the material of the sacrificial layer comprises chemically removing the material of the sacrificial layer which is selective with respect to the first and second material compositions.

33. A method for producing a component assembly, the method comprising: providing a plurality of components; forming a sacrificial layer on the components, a coverage with the sacrificial layer for components of a first group differing from that for components of a second group; and securing the components on a carrier by a connecting layer.

34. The method as claimed in claim 33, wherein the connecting layer is at least partially fluid at a time of securing the components.

35. The method as claimed in claim 33, wherein the sacrificial layer is formed by a first partial layer and a second partial layer, the first partial layer being lithographically structured before the second partial layer is applied.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0053] Further configurations and expediencies may be found from the following description of the exemplary embodiments in conjunction with the figures, in which:

[0054] FIG. 1 shows an exemplary embodiment of a component assembly in a schematic sectional view;

[0055] FIGS. 2A to 2F show an exemplary embodiment of a method for detaching components with the aid of intermediate steps respectively represented in a schematic sectional view;

[0056] FIGS. 3A to 3D show an exemplary embodiment of a component assembly (FIG. 3A) and associated exemplary embodiments of a detachment method with the aid of an intermediate step, respectively in a schematic plan view;

[0057] FIG. 4 shows an exemplary embodiment of a component assembly and of an associated detachment method with the aid of an intermediate step in a schematic plan view;

[0058] FIGS. 5A to 5C show an exemplary embodiment of a method for detaching components with the aid of intermediate steps in a schematic plan view;

[0059] FIGS. 6A to 6C show an exemplary embodiment of a method for detaching components with the aid of intermediate steps in a schematic plan view;

[0060] FIGS. 7, 8, 9 and 10 respectively show an exemplary embodiment of a component assembly in a schematic sectional view;

[0061] FIGS. 11A to 11C show an exemplary embodiment of a method for detaching components with the aid of intermediate steps respectively represented in a schematic sectional view;

[0062] FIG. 12 shows an exemplary embodiment of a component assembly in a schematic sectional view;

[0063] FIGS. 13A to 13D show a method for producing a component assembly with the aid of intermediate steps respectively represented in a schematic sectional view; and

[0064] FIGS. 14A to 14D show a reference example of a method for detaching components.

[0065] Elements which are the same, or of the same type, or which have the same effect, are respectively provided with the same references in the figures.

[0066] The figures are respectively schematic representations and are therefore not necessarily true to scale. Rather, individual elements, and in particular layer thicknesses, may be represented as being exaggeratedly large for improved representation or for improved understanding.

DETAILED DESCRIPTION OF ILLUSTRATIVE EMBODIMENTS

[0067] FIG. 1 shows an exemplary embodiment of a component assembly 1 comprising a multiplicity of components 2. The figure shows a detail of the component assembly in a sectional view with four components 2, which are assigned by way of example to four groups of components. The components of a first group 2A, of a second group 2B, of a third group 2C and of a fourth group 2D are respectively secured on a carrier 5 of the component assembly by means of a connecting layer 4.

[0068] The connecting layer 4 respectively forms a supporting structure 41 for each component 2. The supporting structure 41 is arranged centrally with respect to the components 2, that is to say it overlaps with the respective centroid of the associated component 2 in a plan view of the component assembly 1.

[0069] The supporting structure 41 is respectively adjacent directly to the components 2. A sacrificial layer 3 is arranged locally between the connecting layer 4 and the components 2. The sacrificial layer 3 comprises a first partial layer 31 and a second partial layer 32. The first partial layer 31 and the second partial layer 32 overlap only locally with one another. This gives rise to regions in which the first partial layer 31 and the second partial layer are arranged above one another, for example between the components of the first group 2A and the carrier 5.

[0070] Only the first partial layer 3 of the sacrificial layer 3 is present between the component of the second group 2B and the carrier 5. Only the second partial layer 32 is present between the components of the fourth group 2D and the carrier 5. For the various components 2, this leads to a different coverage with the sacrificial layer 3 for the different groups of components in the form of different average layer thicknesses of the sacrificial layer 3. The first partial layer 31 and the second partial layer 32 are thus used, in particular, to form different average layer thicknesses below the various groups. The term “below” the components or the groups of components respectively refers to the region between the carrier and the corresponding components or groups of components.

[0071] The first partial layer 31 and the second partial layer 32 may, in this exemplary embodiment, be the same in respect of the material used.

[0072] For example, the sacrificial layer 3, the first partial layer 31 and/or the second partial layer 32 contain silicon, silicon nitride, silicon oxide, germanium, molybdenum or a spin-on-glass material.

[0073] In such a component assembly 1, the individual groups of components 2A, 2B, 2C, 2D may be configured to be detachable sequentially after one another.

[0074] This will become clear below with the aid of the exemplary embodiment described in FIGS. 2A to 2F. The provided component assembly 1 represented in FIG. 2A is configured as described in connection with FIG. 1. By the effect of a chemical method, for instance wet chemical or dry chemical etching, material erosion of the sacrificial layer 3 takes place starting from the intermediate spaces between the components 2. By lateral undercut etching of the components 2, the sacrificial layer adjacent to the components 2 is removed. When the etching process takes place in a diffusion-controlled fashion, the lateral undercut etching takes place commensurately faster when the thickness of the sacrificial layer 3 below the components 2 is greater. Accordingly, the components of the first group 2A are rid first of the sacrificial layer 3 on the side facing toward the carrier 5 and thereafter only bear on the supporting structure 41.

[0075] At this stage, the components of the first group 2A can be detached by means of a transfer body 7. For example, the transfer body 7 is a post 71 of a plunger 72. For example, polydimethylsiloxane is suitable as a material for the post.

[0076] In the following exemplary embodiments, one or more posts are respectively shown as examples of a transfer body. In principle, however, any other configuration of the transfer body is also suitable.

[0077] By subsequent removal of further material of the sacrificial layer 3, the components of the second group 2B can be made detachable. This method stage is illustrated in FIG. 2B. The transfer body 7 in the form of the post 71 overlaps with the component of the second group 2B and can lift it off. At this time, the components of the first group 2A are already removed.

[0078] Expediently, a plurality of components of a group are detached simultaneously. For example, the plunger 72 comprises a multiplicity of posts, the posts respectively overlapping with components of precisely one group of components.

[0079] After detachment of all the components of the first group 2A and of the second group 2B, only the components of the third group 2C and of the fourth group 2D are still present (FIG. 2C). Residues of the sacrificial layer 3 are still located below these components, so that these components are not yet detachable.

[0080] In a subsequent etching step, further material of the sacrificial layer 3 is removed until no material of the sacrificial layer is present any longer below the components 2 of the third group 2C (FIG. 2D). There is, however, still material of the sacrificial layer 3 below the components of the fourth group 2D, so that these components are not yet detachable.

[0081] After the detachment of the components of the third group 2C, only the components of the fourth group 2D still remain (FIG. 2E). By a further etching step, the sacrificial layer 3 is also fully removed below the components of the fourth group 2D, so that the components of the fourth group are now detachable (FIG. 2F).

[0082] The removal of the sacrificial layer 3 is thus carried out in a multistep process, components of a group respectively being removed between two etching steps. Of course, an etching step may in this case comprise two or more substeps. In general, in the presence of n groups of components, n etching steps between which in particular components are respectively detached are thus carried out.

[0083] With the described method, the components may be configured to be detachable sequentially, so that the components to be detached are respectively surrounded at most by components which are not yet detachable at the respective method stage. This reduces the risk of maladjustment of the transfer body 7 in the transfer step accidentally leading to detachment of a neighboring component.

[0084] In comparison therewith, FIGS. 14A to 14D show a reference method starting with a reference assembly 10. In this reference assembly, the sacrificial layer 3 is configured identically below all the components 2. By etching of the sacrificial layer, schematically represented in FIG. 14B, uniform removal of the sacrificial layer 3 takes place over all the components 2, so that all the components 2 are detachable (FIG. 14C). In this case, a minor maladjustment of the post 7 may lead not only to the component actually intended being removed, but also to the neighboring component being taken up by the post 71.

[0085] FIG. 3A shows an exemplary embodiment of a component assembly 1 comprising a first group 2A and a second group 2B of components. The components are respectively arranged in a regular pattern. Exclusively components of the second group 2B are respectively adjacent to the components of the first group 2A along the edges 21. The components of the first group 2A and the components of the second group 2B thus form a checkerboard arrangement.

[0086] As represented in FIG. 3B, a base area 70 of the post 71 may have substantially the same size as the component to be detached of the first group 2A.

[0087] The transfer body may, however, also have a larger base area than the component to be detached if the transfer body overlaps only with precisely one detachable component. By means of enlarging the base area, the reliability of the detachment is increased, in particular for particularly small components.

[0088] In the exemplary embodiment represented in FIG. 3C, a lateral principal extent axis 75 of the post 71 is rotated in relation to a lateral principal extent axis 25 of the component of the first group 2A, for example by 45°. The base area of the transfer body may be approximately doubled by this rotation, without a transfer body simultaneously overlapping with two detachable components, for example two components of the first group 2A.

[0089] In the exemplary embodiment shown, the components 2 and the transfer bodies in the form of the posts 71 are respectively configured with a square base shape. Other base shapes may however also be employed, for example other polygonal base shapes, for instance triangular or quadrilateral or hexagonal base shapes, or regionally curved base shapes, for instance circular or elliptical base shapes. Furthermore, the base shapes for the transfer body 7 and the component 2 to be detached may be different to one another.

[0090] For example, FIG. 3D shows an exemplary embodiment in which the transfer body is configured in the form of a circular post 71. Compared with a square transfer body which is oriented relative to the components as shown in FIG. 3A, in this case the area of the transfer body is increased by the factor π/2.

[0091] In the exemplary embodiment shown in FIG. 4, the components of the component assembly 1 are assigned to a first group 2A, a second group 2B, a third group 2C and a fourth group 2D. Along every second row, the components of the first group 2A and of the second group 2B are arranged alternately. Along the rows between them, the components of the third group 2C and of the fourth group 2D are arranged alternately. This leads to an arrangement in which each component of a group, for example a component of the first group 2A, is surrounded exclusively by components which are assigned to other groups, for example the second group 2B, the third group 2C and the fourth group 2D. With such an arrangement, the base area of the transfer body 7, for example of the post 71, may be about nine times as large as the base area of the component to be detached of the first group 2A. Nevertheless, each post 71 overlaps only with one detachable component.

[0092] The maximum size of the transfer body is thus no longer limited by the center spacing between neighboring components, but, by formation of a correspondingly large number of groups of components and suitable configuration of the sacrificial layer, may be significantly greater than the base area of the component to be detached, without the transfer body simultaneously overlapping with two detachable components.

[0093] In other words, the distance between detachable components lying closest together determines the maximum extent of the transfer body along this direction, rather than the center spacing of neighboring components per se.

[0094] The exemplary embodiment of a method for detaching components, which is represented in FIGS. 5A to 5C, corresponds substantially to the exemplary embodiment described in connection with FIGS. 2A to 2F. In contrast thereto, the components are assigned to a first group 2A, a second group 2B and a third group 2C. The components of a group are respectively placed in a hexagonal array. The components of the first group 2A, of the second group 2B and of the third group 2C are respectively configured with circular base areas. By partial removal of the sacrificial layer 3, the components of the first group 2A may be made detachable so that they can be detached by means of a post 71. The maximum radius of the post 71 is given by the center spacing between two components of the same group less the radius of the components. In this case as well, the base area of the post 71 may be significantly larger than the base area of the component to be detached, without a post simultaneously overlapping with two detachable components.

[0095] FIG. 5B shows a method stage in which, after removal of further material of the sacrificial layer, the components of the second group 2B are detachable and are detached by means of posts 71. After a further etching step, the components of the third group 2C can be detached (FIG. 5C).

[0096] The exemplary embodiment shown in FIGS. 6A to 6C corresponds substantially to the exemplary embodiment described in connection with FIGS. 5A to 5C. In contrast thereto, the transfer body 7 and the components 2 have different base shapes to one another. Thus, the transfer body 7 is configured by way of example with a triangular base area. The components 2 have, by way of example, a circular base area.

[0097] The exemplary embodiment of a component assembly 1, which is shown in FIG. 7, differs from the component assembly described in connection with FIG. 1 particularly in that the first partial layer 31 and the second partial layer 32 of the sacrificial layer 3 have different material compositions to one another.

[0098] For example, the first partial layer 31 contains silicon and the second partial layer 32 contains silicon nitride. By a chemical method which is selective with respect to the materials used, individual groups of components may be configured to be detachable with different ease. For example, silicon nitride is etched with a lower etching rate than silicon in a fluorine plasma or an XeF.sub.2 plasma.

[0099] In the exemplary embodiment represented in FIG. 7, there is predominantly material of the first partial layer 31 below the components of the first group 2A and the components of the second group 2B. The thickness of the sacrificial layer 3 is greater below the components of the first group 2A than below the components of the second group 2B, so that the components of the first group 2A can be detached first.

[0100] Between the components of the third group 2C and the carrier 5, there is likewise material of the first partial layer 31 and material of the second partial layer 32. A portion of the first partial layer 31 is configured as an island 35, which is fully enclosed in the lateral direction by material of the second partial layer 32. The material of the island 35 can therefore be removed only when the surrounding material of the second partial layer 32 is already eroded. The components of the third group 2C can therefore be detached only after the components of the second group 2B.

[0101] Below the components of the group 2D, there is almost exclusively material of the second partial layer 32. These components can therefore be detached only after an additional etching step.

[0102] The method according to this exemplary embodiment thus uses both different etching rates due to different layer thicknesses and different etching rates due to different materials.

[0103] The exemplary embodiment represented in FIG. 8 corresponds substantially to the exemplary embodiment described in connection with FIG. 7. In contrast thereto, the thickness of the sacrificial layer 3 is the same for all groups of components 2A, 2B, 2C, 2D. The groups of components differ from one another in respect of the coverage with material of the first partial layer 31. The greater the coverage with material of the first partial layer is, the earlier the components of the associated group can be detached.

[0104] The supporting structures 41 are respectively surrounded by material of the first partial layer 31 in the region adjacent to the components 2.

[0105] The exemplary embodiment represented in FIG. 9 corresponds substantially to the exemplary embodiment described in connection with FIG. 8. In contrast thereto, the supporting structures 41 are surrounded by material of the second partial layer 32. Again, the components of that group whose coverage with material of the first partial layer 31 is greatest, i.e. the components of the first group 2A, can be detached first.

[0106] FIG. 10 shows an exemplary embodiment of a component assembly 1 in which the supporting structures 41 respectively overlap with at least two neighboring components 2. The supporting structures 41 in this case do not extend along the entire circumference of the components 2 in a plan view of the component assembly 41, so that the sacrificial layer 3 is regionally accessible for chemical material erosion in the intermediate spaces between neighboring components. With such a configuration of the supporting structure 41, the risk of tilting of the components 2 during the detachment by means of the transfer body may be substantially reduced. Expediently, each component overlaps with two or more mutually detached supporting structures.

[0107] Such a configuration of the supporting structures 41 may also be employed for the other exemplary embodiments.

[0108] FIGS. 11A to 11C show an exemplary embodiment of a method for detaching components, a component assembly as described in connection with FIG. 10 being provided. Starting from intermediate spaces between neighboring components 2, in a first step material of the sacrificial layer 3 is removed, namely material of the first partial layer 31. The components of the first group 2A therefore become detachable. The removal of the first partial layer 31 preferably takes place by means of a chemical method which does not attack the second partial layer 32, or attacks it at least only with a greatly reduced etching rate in comparison with the first partial layer 31.

[0109] After the detachment of the components of the first group 2A, in a further step further material of the sacrificial layer, namely the material of the second partial layer 32, may be removed. The components of the second group 2B can therefore be detached and can correspondingly be transferred (FIG. 11C).

[0110] This method is particularly insensitive to variations in the etching rate or the etching duration, since a duration of the first etching step which is too long per se does not cause significant material erosion of the second partial layer, so that the components of the second group 2B reliably remain nondetachable when the components of the first group 2A are already detachable.

[0111] The exemplary embodiment of a component assembly, which is represented in FIG. 12, corresponds substantially to the exemplary embodiment described in connection with FIG. 7. The groups of components 2A, 2B, 2C, 2D again differ in respect of their coverage with material of the first partial layer 31 and of the second partial layer 32. Between the components of the first group 2A and the connecting layer 4, there is only material of the first partial layer 31. Below the components of the second group 2B, there is an enclosing subregion 33 of the second partial layer 32, this subregion acting as a delay element. The enclosing subregion is, for example, configured in the form of a frame or in the form of a ring. While the material below the components of the first group 2A is being fully removed in a first etching step, the enclosing subregions 33 of the second partial layer below the components of the second group 2B, of the third group 2C and of the fourth group 2D can protect the laterally enclosed material of the first partial layer against material erosion, so that only the components of the first group can be detached. These enclosing components may subsequently be removed together with the material, adjacent thereto, of the first partial layer 31. In this way, the components of the second group 2B can be detached.

[0112] For the components of the third group 2C, there is a second enclosing subregion 331 within the enclosing subregion 33.

[0113] For the components of the fourth group 2D, there is a third enclosing subregion 332 within the second enclosing subregion.

[0114] By iterative repetition of the etching steps, these components may be configured to be detachable in succession.

[0115] With such an interleaving of structures which cannot be etched, or which can be etched only with difficulty, an order according to which the individual groups of components can be detached in succession may be defined reliably.

[0116] FIGS. 13A to 13D show an exemplary embodiment of a method for producing a component assembly, a component assembly as described in FIG. 1 being produced by way of example. The method is, however, also suitable in principle for the production of component assemblies according to the further exemplary embodiments. A multiplicity of components 2 are provided, for example on an initial carrier 29 (FIG. 13A).

[0117] A sacrificial layer 3 is formed on the components 2. In the exemplary embodiment shown, this is done by forming a first partial layer 31 and a second partial layer 32 of the sacrificial layer (FIGS. 13B and 13C). The sacrificial layer is in this case configured in such a way that a coverage with the sacrificial layer differs for components of a first group 2A from that for components of a second group 2B.

[0118] In particular, the first partial layer 31 is configured in a lithographically structured fashion before the second partial layer 32 is applied.

[0119] The sacrificial layer 3 is applied onto the components for example by means of evaporation or sputtering, in which case different deposition methods may also be employed for different partial layers.

[0120] The components with the sacrificial layer 3 are subsequently secured on a carrier 5 by means of a connecting layer 4. For example, the material for the connecting layer 4 is applied in the fluid state onto the sacrificial layer 3 and fills the intermediate spaces of the sacrificial layer. Subsequently, the connecting layer 4 may if required be cured, for example thermally. The initial carrier 29 may then be removed.

[0121] FIG. 13D shows the finished component carrier assembly 1.

[0122] The invention is not restricted by the description with the aid of the exemplary embodiments. Rather, the invention comprises any new feature and any combination of features, which in particular includes any combination of features in the patent claims, even if this feature or this combination itself is not explicitly specified in the patent claims or the exemplary embodiments.