Process for the generation of metal-containing films

Abstract

A process including bringing a solid substrate in contact with a compound of general formula (I), (II), (III), or (IV) in the gaseous state ##STR00001##
where A is NR.sub.2 or OR with R being an alkyl group, an alkenyl group, an aryl group, or a silyl group,
E is NR or O,
n is 0, 1 or 2, m is 0, 1 or 2, and
R′ is hydrogen, an alkyl group, an alkenyl group, an aryl group, or a silyl group.

Claims

1. A compound of formula (Ia-2) ##STR00053##

Description

EXAMPLES

Example 1a: Synthesis of [2-(dimethylamino)ethyl](2-methoxyethyl)amine

(1) A mixture of 2-chloroethyl methyl ether (6.092 g, 0.063 mol), N,N-dimethylethylenediamine (19.382 g, 0.213 mol), and water (5 mL) was refluxed for 18 h in a 250 mL round bottomed flask. Hexane (15 mL) and water (10 mL) were added to the resultant solution at ambient temperature. The flask contents were transferred to a separatory funnel. The aqueous fraction was washed with hexane (14×15 mL) and the combined organic fractions were dried over anhydrous MgSO.sub.4. The solvent was evaporated under reduced pressure to yield an intense yellow oil (5.513 g, 59.8% yield).

(2) .sup.1H NMR (400 MHz, C.sub.6D.sub.6, δ in ppm): 2.04 (s, 6H), 2.29 (t, 2H), 2.60 (t, 2H), 2.71 (t, 2H), 3.09 (s, 3H), 3.32 (t, 2H). .sup.1H NMR (400 MHz, C.sub.6D.sub.6, δ in ppm):

(3) .sup.13C NMR (100 MHz, C.sub.6D.sub.6, δ in ppm): 45.91, 48.34, 50.35, 58.81, 60.08, 73.15.

Example 1 b: Synthesis of AlH.SUB.2.[CH.SUB.3.OCH.SUB.2.CH.SUB.2.NCH.SUB.2.CH.SUB.2.NMe.SUB.2.] (Ib-1)

(4) ##STR00051##

(5) A solution of AlCl.sub.3 (0.788 g, 5.9 mmol) in 30 mL of diethyl ether was cannulated into a stirred solution of LiAlH.sub.4 (0.708 g, 17.7 mmol) in 30 mL of diethyl ether at 0° C. in an ice bath. The resultant cloudy solution was warmed to room temperature, stirred for 40 min and re-cooled to −30° C. Then, a solution of [2-(dimethylamino)ethyl](2-methoxyethyl)amine (3.458 g, 23.6 mmol) in 45 mL of diethyl ether was added dropwise. The resultant mixture was stirred at ambient temperature for 18 h and was then filtered through a 2-cm plug of Celite on a coarse glass frit. The diethyl ether was evaporated from the filtrate under reduced pressure to collect the intense yellow colored, oily product (2.745 g, 66.7% yield). The crude product was purified by distillation at 74° C. under reduced pressure affording a colorless oil (1.645 g, 40% yield).

(6) .sup.1H NMR (400 MHz, C.sub.6D.sub.6, δ in ppm): 2.12 (s, 6H), 2.33 (t, 2H), 2.90 (t, 2H), 3.03 (t, 3H), 3.20 (s, 3H), 3.37 (t, 2H).

(7) .sup.13C NMR (100 MHz, C.sub.6D.sub.6, δ in ppm): 45.51, 47.85, 49.29, 57.91, 60.73, 74.19. IR: v.sub.AlH/cm.sup.−1 1764.

Example 2: Synthesis of H.SUB.2.Al[N(CH.SUB.2.CH.SUB.2.CH.SUB.2.NMe.SUB.2.).SUB.2.] (Ih-1)

(8) ##STR00052##

(9) A solution of AlCl.sub.3 (0.690 g, 5.2 mmol) in 40 mL of diethyl ether was cannulated into a stirred solution of LiAlH.sub.4 (0.621 g, 15.5 mmol) in 40 mL of diethyl ether at 0° C. in an ice bath. The resulting cloudy solution was warmed to room temperature, stirred for 40 min, and then cooled to −30° C. At this point, a solution of 3,3′-iminobis(N,N-dimethyl-propylamine) (4.003 g, 20.7 mmol) in 55 mL of diethyl ether was added dropwise. The resultant mixture stirred at ambient temperature for 18 h and was then filtered through a 2-cm pad of Celite on a coarse glass frit. The diethyl ether was evaporated from the filtrate under reduced pressure to obtain a colorless, oily product (4.003 g, 91% yield). A portion of resultant product (2.043 g) was distilled at 65° C. under reduced pressure to afford a colorless oil (1.604 g, 79% yield).

(10) .sup.1H NMR (400 MHz, C.sub.6D.sub.6, δ in ppm): 1.51 (p, 4H), 2.17 (s, 12H), 2.36 (t, 4H), 3.25 (t, 4H).

(11) .sup.13C NMR (100 MHz, C.sub.6D.sub.6, δ in ppm): 28.61, 46.76, 57.77, 60.69. IR: v.sub.AlH/cm.sup.−1 1691.