Vacuum pumping system having multiple pumps

Abstract

A vacuum pumping system comprising: a high pressure getter pump configured to operate from an initial pressure of between 10 and 10.sup.−2 mbar to a second pressure between 10.sup.−3 mbar and 10.sup.−6 mbar and at least one high vacuum pump configured to operate at higher vacuums than the high pressure getter pump, the two pumps being mounted on a same flange, the flange being configured to mount the vacuum pumping system to a vacuum chamber.

Claims

1. A vacuum pumping system comprising: a flange configured to mount to a vacuum chamber wall; a high pressure getter pump configured to operate from an initial pressure of between 10 and 10.sup.−2 mbar to a second pressure between 10.sup.−3 mbar and 10.sup.−6 mbar, the high pressure getter pump comprising a source and a surface extending around the source wherein the surface extends through the vacuum chamber wall when the flange is mounted to the vacuum chamber wall; and at least one high vacuum pump configured to operate at higher vacuums than said high pressure getter pump, the high vacuum pump mounted on the flange.

2. The vacuum pumping system according to claim 1, wherein said high pressure getter pump comprises an evaporable getter pump that is powered with a pulsed Voltage.

3. The vacuum pumping system according to claim 1, wherein said at least one high vacuum pump comprises an ion getter pump.

4. The vacuum pumping system according to claim 1, wherein said at least one high vacuum pump comprises an evaporable getter pump.

5. The vacuum pumping system according to claim 1, wherein said at least one high vacuum pump comprises a non-evaporable getter pump.

6. The vacuum pumping system according to claim 1, wherein said at least one high vacuum pump comprises a sublimation pump.

7. The vacuum pumping system according to claim 6, wherein said high pressure getter pump and said sublimation pump are mounted on a same side of said flange.

8. The vacuum pumping system according to claim 7, wherein said sublimation pump comprises a titanium or tantalum sublimation filament configured on heating to cause said titanium to sublimate and deposit an active layer of titanium on the surface extending around the source.

9. The vacuum pumping system according to claim 1, wherein said high pressure getter pump is mounted on one side of said flange and at least one of said at least one high vacuum pump is mounted on the other side of the flange, such that said pumps are arranged in series, with an outlet from said high pressure getter pump connecting via an aperture within the flange to an inlet of said at least one high vacuum pump.

10. The vacuum pumping system according to claim 1, further comprising a power supply for providing a high Voltage to said pumps, a same power supply being arranged to supply power to said high pressure getter pump and said at least one high vacuum pump.

11. The vacuum pumping system according to claim 1, further comprising a controller for controlling operation of said pumps.

12. The vacuum pumping system according to claim 11, wherein said controller is configured to control operation of said high pressure getter pump by transmitting pulses of power to said high pressure getter pump to activate said pump and when a pressure has dropped to a predetermined value to transmit pulses of power to said sublimation pump.

13. The vacuum pumping system according to claim 1, further comprising a primary pump configured to evacuate said chamber to an initial pressure below 10 mbar prior to activation of said high pressure getter pump.

14. A vacuum pumping system comprising: a high pressure getter pump configured to operate from an initial pressure of between 10 and 10.sup.−2 mbar to a second pressure between 10.sup.−3 mbar and 10.sup.−6 mbar; and at least one high vacuum pump configured to operate at higher vacuums than said high pressure getter pump, said two pumps being mounted on a same flange, said flange being configured to mount said vacuum pumping system to a vacuum chamber; wherein said at least one high vacuum pump comprises an ion getter pump.

15. A vacuum pumping system comprising: a high pressure getter pump configured to operate from an initial pressure of between 10 and 10.sup.−2 mbar to a second pressure between 10.sup.−3 mbar and 10.sup.−6 mbar; and at least one high vacuum pump configured to operate at higher vacuums than said high pressure getter pump, said two pumps being mounted on a same flange, said flange being configured to mount said vacuum pumping system to a vacuum chamber; wherein said high pressure getter pump is mounted on one side of said flange and at least one of said at least one high vacuum pump is mounted on the other side of the flange, such that said pumps are arranged in series, with an outlet from said high pressure getter pump connecting via an aperture within the flange to an inlet of said at least one high vacuum pump.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) Embodiments of the present invention will now be described further, with reference to the accompanying drawings, in which:

(2) FIG. 1 shows a vacuum pumping system according to an embodiment;

(3) FIG. 2 shows a vacuum pumping system according to a further embodiment; and

(4) FIG. 3 shows a vacuum pumping system according to a yet further embodiment.

DETAILED DESCRIPTION

(5) Before discussing the embodiments in any more detail, an initial overview will be provided.

(6) Ion getter or sputter pumps are capture pumping mechanisms where titanium or tantalum is deposited to form an active continuously regenerated getter pumping surface. Their maximum starting pressures are sometimes stated to be 0.01 mbar, however in practise a maximum of 1×10.sup.−4 mbar is allowed for starting pressures. Continuous operating pressures are usually at 1×10.sup.−5 mbar with a linear degradation in lifetime versus operating pressure as the capture substance gets used up and becomes exhausted.

(7) Other pump combinations are required to prime these IGP to their starting pressure, these pump combinations include a primary pump in combination with a turbomolecular pump. The combination of pumps provided by embodiments require only a rough vacuum to activate them and thereafter can operate without a backing pump. Such a rough vacuum can be provided by a primary pump such as a diaphragm pump or a scroll pump. Once the pump has been primed continuous getter pumping operation can be provided from 5 to 10 mbars downwards. This is achieved by using a high pressure getter pump such as that disclosed in RU 2017126531 and which uses pulsed discharge of the getter material, the lengths of the pulses being controlled to adapt to the pressure allowing them to operate at higher pressure without becoming unduly exhausted. These high pressure getter pumps can be used in conjunction with other pumps that operate at a higher vacuum to provide ultrahigh vacuum or extremely high vacuum operation. Embodiments mount these combination of pumps on the same flange allowing for a convenient and effective vacuum pumping system that can provide the appropriate high vacuum for a particular vacuum chamber, the flange being adapted to be mounted on the vacuum chamber outlet.

(8) FIG. 1 shows an example of a first embodiment where the high pressure getter pump 10 is mounted on one side of flange 20 with an ion getter pump 30 mounted on the opposite side of the flange.

(9) The high pressure getter pump 10 comprises a source 12, of in this case titanium, which is pulsed with a current in order to activate the titanium and cause it to atomise and coat surfaces of a shield 8 mounted around the source. Control of the pulsing allows the amount of getter substance that is atomised to be controlled and depends on the pressure in the vacuum chamber. This high pressure getter pump 10 can operate from pressures of between 5 and 10 mbar and will evacuate the chamber down to 10.sup.−5 to 10.sup.−6 mbar. The pump 10 is mounted on flange 20 which will be connected to a vacuum chamber, pump 10 extending into the vacuum chamber. In this embodiment there is an ion getter pump 30 mounted on the other side of the flange 20 outside of the chamber and this receives gas from the chamber that has been evacuated by the high pressure getter pump 10 and this acts to further lower the pressure within vacuum chamber. The ion getter pump 30 is a conventional ion getter pump with magnets 32.

(10) The two pumps 10, 30 mounted on flange 20 are powered by a high voltage supply 40. High voltage supply 40 supplies power to the ion getter pump 30 and to the high pressure getter pump 10. The power sent to the high pressure pump 10 is sent via a pulsed rectifier 42. The power supply and pulsed rectifier are controlled by control circuitry 50, which controls the lengths of the pulses in dependence upon the pressure in the vacuum chamber which is measured by a pressure sensor not shown.

(11) FIG. 2 shows an alternative embodiment where the high pressure getter pump 10 is mounted on flange 20 alongside a titanium sublimation pump 62. Titanium sublimation pump has a filament 60 to which current is sent from power supply 40 controlled by control circuitry 50. In this embodiment the two sources of capture material of the two pumps 10 and 60 are mounted side by side on the same side of the flange 20 such that they act in parallel. The two sources are at least partially surrounded by shield 8 which acts as surface on which the capture material that is evaporated or sublimed from the two sources condenses. This material then acts as a capture material for molecules within the vacuum chamber.

(12) Initially control circuitry 50 sends power from power supply 40 to the high pressure getter pump 10 via the pulsed rectifier 42 to lower the pressure within vacuum chamber to 10.sup.−5 or 10.sup.−6 mbar. When the pressure has fallen sufficiently the titanium sublimation pump filament is made active and control circuitry 50 will send pulses of energy through switch 51 to this filament such that the titanium sublimes and forms a further capture material on the surface of the shield 8 within the vacuum chamber.

(13) FIG. 3 shows a further embodiment where in addition to the two pumps 10 and 62 there is a further ion getter pump 30 mounted on the opposite side of flange 20 such that three pumps are mounted on a single flange 20 and provide the ultra-high vacuum for the vacuum chamber without the need for a backing pump which is permanently operational as is required if a turbomolecular pump is used in the combination of pumps. In this regard an initial primary pump to get the pressure down to 5 to 10 mbar is required but as the high pressure getter pump can operate at pressures that are significantly higher than the pressures of operation of a more conventional getter pump a turbomolecular pump to provide a higher vacuum is not required. A diaphragm pump or a scroll pump may be used as the primary pump to provide the initial starting vacuum for the high pressure getter pump.

(14) In summary, embodiments provide a single flange getter pump mechanism to operate continuously from the region of 5 to 10 mbar. Once this pressure has been attained the pumps that operate to provide the higher vacuums require no moving parts so that the pump may be portable. Furthermore there are no cooling requirements, a common high voltage power supply such as is used for a standard ion getter pump may be used for the combination of pumps. A pumping capacity of the region of 10 l/s from the high pressure getter pump and 50 l/s from the ion getter pump would be typical pumping speeds for a 6 inch flange size pump.

(15) Although illustrative embodiments of the invention have been disclosed in detail herein, with reference to the accompanying drawings, it is understood that the invention is not limited to the precise embodiment and that various changes and modifications can be effected therein by one skilled in the art without departing from the scope of the invention as defined by the appended claims and their equivalents.

(16) Although elements have been shown or described as separate embodiments above, portions of each embodiment may be combined with all or part of other embodiments described above.

(17) Although the subject matter has been described in language specific to structural features and/or methodological acts, it is to be understood that the subject matter defined in the appended claims is not necessarily limited to the specific features or acts described above. Rather, the specific features and acts described above are described as example forms of implementing the claims.