Method for Configuring a Double- or Single-Sided Processing Machine, and Double- or Single-Sided Processing Machine

Abstract

A double- or single-sided processing machine and a method for configuring a double- or single-sided processing machine are described. A first working disk and a counter-bearing element are driven rotationally relative to each other. A working gap for processing of flat workpieces is formed between the first working disk and the counter-bearing element. A control apparatus actuates step-by-step or continuous deformation of the first working disk between a concave shape and a convex shape. During the deformation, the working gap width at two or more radially spaced apart locations of the first working disk is measured. The control apparatus determines measurement value averages from the measurement values. The control apparatus determines the minimum of the measurement value averages and, using the determined minimum, specifies a target value for deforming the first working disk as a starting value for the processing of a flat workpiece.

Claims

1. A method for configuring a double- or single-sided processing machine having a first working disk and a counter-bearing element, wherein the first working disk and the counter-bearing element can be driven rotationally relative to each other, and wherein a working gap for double-sided or single-sided processing of flat workpieces is formed between the first working disk and the counter-bearing element, the method comprising: deforming, step-by-step or continuously using a deforming actuator, the first working disk between a concave shape and a convex shape; obtaining, during the deforming of the first working disk, measurement values of a working gap width at two or more radially spaced apart locations of the first working disk; determining measurement value averages from the measurement values of the working gap width at the two or more radially spaced apart locations; determining a minimum of the measurement value averages; and specifying, based on the minimum, a target value for the deforming actuator as a starting actuation value for processing a flat workpiece in the double- or single-sided processing machine.

2. The method according to claim 1, comprising: identifying multiple measurement values of the measurement values that form the minimum of the measurement value averages; and specifying actuation values for the deforming actuator corresponding to the multiple measurement values.

3. The method according to claim 1, wherein the deforming the first working disk comprises generating at least one of a global deformation or a local deformation of the first working disk.

4. The method according to claim 1, comprising: generating at least one of a global deformation or a local deformation of the counter-bearing element.

5. The method according to claim 1, wherein the deforming the first working disk comprises generating a global deformation of the first working disk, the target value is a first target value, and the method comprises: generating, using the first target value for actuation, a local deformation of the first working disk or of the counter-bearing element; obtaining, during the generating the local deformation, second measurement values of the working gap width at the two or more radially spaced apart locations of the first working disk; determining second measurement value averages from the second measurement values; determining a minimum of the second measurement value averages; and specifying, based on the minimum of the second measurement values, a second target value for processing the flat workpiece in the double- or single-sided processing machine after processing the flat workpiece using the first target value.

6. The method according to claim 1, wherein the deforming the first working disk comprises generating a local deformation of the first working disk, the target value is a first target value, and the method comprises: generating, using the first target value for actuation, a global deformation of the first working disk or of the counter-bearing element; obtaining, during the generating the local deformation, second measurement values of the working gap width at the two or more radially spaced apart locations of the first working disk; determining second measurement value averages from the second measurement values; determining a minimum of the second measurement value averages; and specifying, based on the minimum of the second measurement values, a second target value for processing the flat workpiece in the double- or single-sided processing machine after processing the flat workpiece using the first target value.

7. The method according to claim 1, comprising: generating an axial relative movement between the first working disk and the counter-bearing element at least once so that the first working disk and the counter-bearing element are pressed against each other with their surfaces delimiting the working gap.

8. The method according to claim 1, wherein each of the first working disk and the counter-bearing element is annular.

9. A double- or single-sided processing machine, comprising: a first working disk; a counter-bearing element, wherein the first working disk and the counter-bearing element can be driven rotationally relative to each other, and a working gap for double-sided or single-sided processing of flat workpieces is formed between the first working disk and the counter-bearing element; a control apparatus configured to actuate a deforming actuator for step-by-step or continuous deformation of the first working disk between a concave shape and a convex shape; and measuring apparatuses configured to measure a working gap width at two or more radially spaced apart locations of the first working disk during the step-by-step or continuous deformation of the first working disk to generate measurement values and to give the measurement values to the control apparatus, wherein: the control apparatus is configured to determine measurement value averages from the measurement values; and the control apparatus is configured to determine a minimum of the measurement value averages and, using the minimum, specify a target value for the deforming actuator as a starting value for processing a flat workpiece in the double- or single-sided processing machine.

10. The double- or single-sided processing machine according to claim 9, wherein the control apparatus is configured to identify the measurement values forming the minimum of the measurement value averages at the two or more radially spaced apart locations, and to specify actuation values for the deforming actuator corresponding to the measurement values forming the minimum.

11. The double- or single-sided processing machine according to claim 9, wherein the deforming actuator is configured to generate at least one of a global deformation or a local deformation of the first working disk.

12. The double- or single-sided processing machine according to claim 11, wherein the first working disk fastened to a first support disk, and comprising: a support ring on which the first support disk is suspended; and a radial force generator controllable by the control apparatus and arranged between the support ring and a ring portion of the first support disk lying radially outward from the support ring, wherein the radial force generator can apply a radial force to the first support disk over a circumference of the support ring.

13. The double- or single-sided processing machine according to claim 9, comprising: a second deforming actuator configured to at least one of globally deform or locally deform the counter-bearing element.

14. The double- or single-sided processing machine according to claim 13, wherein each of the deforming actuator and the second deforming actuator is actuated using hydraulic, pneumatic, or mechanical force.

15. The double- or single-sided processing machine according to claim 9, wherein: at least one of the first working disk is fastened to a first support disk or the counter-bearing element is fastened to a second support; and the deforming actuator comprises an annular pressure volume designed between the first support disk and the first working disk, which annular pressure volume is connected to a fluid supply that can be actuated by the control apparatus such that a pressure is built up in the annular pressure volume and generates a specified local deformation of the first working disk.

16. The double- or single-sided processing machine according to claim 9, wherein at least one of: the first working disk is fastened to a first support disk only in a region of its outer edge and in a region of its inner edge; or the counter-bearing element is fastened to a second support disk only in the region of its outer edge and in the region of its inner edge.

17. The double- or single-sided processing machine according to claim 9, wherein: the counter-bearing element is formed by a second working disk; the first working disk and the second working disk are arranged coaxially to each other and can be driven rotationally relative to each other; and the working gap for double-sided or single-sided processing of flat workpieces is formed between the first working disk and the second working disk.

18. The double- or single-sided processing machine according to claim 9, wherein to actuate the deforming actuator comprises to actuate the deforming actuator to generate a global deformation of the first working disk, the target value is a first target value, and the control apparatus is configured to: generate, using the first target value for actuation, a local deformation of the first working disk or of the counter-bearing element; obtain, during generation of the local deformation, second measurement values of the working gap width at the two or more radially spaced apart locations of the first working disk; determine second measurement value averages from the second measurement values; determine a minimum of the second measurement value averages; and specify, based on the minimum of the second measurement values, a second target value for processing the flat workpiece in the double- or single-sided processing machine after processing the flat workpiece using the first target value.

19. The double- or single-sided processing machine according to claim 9, wherein to actuate the deforming actuator comprises to actuate the deforming actuator to generate a local deformation of the first working disk, the target value is a first target value, and the control apparatus is configured to: generate, using the first target value for actuation, a global deformation of the first working disk or of the counter-bearing element; obtain, during generation of the global deformation, second measurement values of the working gap width at the two or more radially spaced apart locations of the first working disk; determine second measurement value averages from the second measurement values; determine a minimum of the second measurement value averages; and specify, based on the minimum of the second measurement values, a second target value for processing the flat workpiece in the double- or single-sided processing machine after processing the flat workpiece using the first target value.

20. The double- or single-sided processing machine according to claim 9, wherein, before the step-by-step or continuous deformation of the first working disk, the control apparatus is configured to cause an axial relative movement between the first working disk and the counter-bearing element at least once so that the first working disk and the counter-bearing element are pressed against each other with their surfaces delimiting the working gap.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0045] Embodiments of the invention are explained below in greater detail using figures.

[0046] FIG. 1 shows a double-sided processing machine in a partial depiction according to a first embodiment of the teachings herein.

[0047] FIG. 2 shows two operating states of the double-sided processing machine shown in FIG. 1.

[0048] FIG. 3 is a double-sided processing machine in a partial depiction in a sectional view according to another embodiment of the teachings herein.

[0049] FIG. 4 is the double-sided processing machine from FIG. 3 in another operating state.

[0050] FIG. 5 is the double-sided processing machine from FIG. 3 in another operating state.

[0051] FIG. 6 is a diagram for illustrating the configuring process of the double-sided processing machine shown in FIG. 1.

[0052] FIG. 7 is a diagram for illustrating the configuring process of the double-sided processing machine shown in FIG. 3.

DETAILED DESCRIPTION

[0053] The double-sided processing machine shown in FIG. 1, which can be, for example, a double-sided polishing machine, has an upper support disk 10 and a lower support disk 12. Each of the upper support disk 10 and the lower support disk 12 is connected to a shaft of a rotary drive (not shown in FIG. 1). A first working disk 14 is connected to the upper support disk 10, and a second working disk 16 is connected to the lower support disk 12. The first working disk 14 and the second working disk 16 are each designed annularly like the upper support disk 10 and the lower support disk 12 and form between them a working gap s. The first working disk 14 and the second working disk 16 can each have a working lining, for example a polishing cloth, on their surfaces delimiting the working gap s. The upper support disk 10 and the lower support disk 12 can also be provided with a suitable tempering channel system to cause a tempering, for example cooling, during operation by passing a tempering liquid, for example cooling water, through the channel system.

[0054] The upper support disk 10 has a ring portion 18 extending upwards approximately in the middle of the radial extension of the working surface of the ring portion 18. A support ring 20, which is connected to the upper shaft 24 of the rotary drive via arms 22 arranged in a star shape, is located inside the ring portion 18. Through means not shown in FIG. 1, the support disk 10 is suspended on the support ring 20 so that a rotation of the shaft 24 also causes a rotation of the first working disk 14.

[0055] A ring slot 26 is formed between the support ring 20 and the ring portion 18. The ring slot 26 is sealed and connected to the channel 28. The channel 28 is in connection with a pressure intensifier 30, which is supplied with variable pressure by a proportional valve 32. The depiction is only schematic. It is intended to indicate that it is possible with the aid of the pressure intensifier 30 and the proportional valve 32 to generate and maintain a specified pressure in the ring slot 26. The proportional valve 32 is actuated by a control apparatus 34, which receives measurement values of the working gap width of the working gap s, measured with the aid of a first sensor 42 and a second sensor 44 embedded in the first working disk 14 at two radially spaced apart measurement locations.

[0056] The control apparatus 34 can be or include a microprocessor, processor, or other computing component with input and output connections coupled to the components described herein. The control apparatus 34 is configured to perform the methods described herein. For example, the control apparatus 34 can be programmed to perform the methods described herein. The control apparatus 34 can include computer-readable instructions stored in a non-transitory storage medium that, when executed, causes the control apparatus 34 to perform the methods described herein. The control apparatus 34 can include a combination of hardware and software.

[0057] The left depiction in FIG. 2 shows how the upper, first working disk 14 takes on a convex shape by generating a suitable pressure in the ring slot 26. It is understood that the depiction is exaggerated. The convexity is in gap width differences in the μ-range in relation to the lower, second working disk 16. The right depiction in FIG. 2 shows how, due to the described deformation of the upper support disk 10 and thus of the first working disk 14, the first working disk 14 now takes on a concave shape.

[0058] To configure the double-sided processing machine, the control apparatus 34 controls the proportional valve 32 as part of the means for generating a global deformation of the first working disk 14 for step-by-step or continuously deforming the first working disk 14 between a global convex shape as shown in the left depiction in FIG. 2 and a global concave shape as shown in the right depiction in FIG. 2. During the step-by-step or continuous deformation of the first working disk 14, the width of the working gap s or, respectively, the distance between the surfaces of the first working disk 14 and the second working disk 16 delimiting the working gap, is measured at the two radially spaced apart locations of the first working disk 14 by the first sensor 42 and the second sensor 44 as measuring apparatuses and the measurement values are given to the control apparatus 34. From the measurement values of the working gap width at the two or more radially spaced apart locations, the control apparatus 34 determines a measurement value average in each case. The control apparatus 34 also determines the minimum of the measurement value averages. Based on the determined minimum, the control apparatus 34 specifies a target value for the means for deforming the first working disk 14 as a starting value for the processing of flat workpieces in the double-sided processing machine, in the present case a first target value for the proportional valve 32.

[0059] In FIGS. 3 to 5, a double-sided processing machine according to another embodiment is shown. In the embodiment according to FIGS. 3 to 5, means for generating a local deformation of the lower, second working disk 16 is provided. This embodiment can be combined with the embodiment according to FIGS. 1 and 2 such that the double-sided processing machine has both the means for generating a global deformation of the first working disk 14 shown in FIGS. 1 and 2 and the means for generating a local deformation of the second working disk 16 shown in FIGS. 3 to 5. The configuring process explained in the following for the double-sided processing machine according to FIGS. 3 to 5 can be performed accordingly independently of the configuring process explained above in reference to FIGS. 1 and 2. Alternatively, configuring process explained in the following for the double-sided processing machine according to FIGS. 3 to 5 can be performed in a second portion of the method after the configuring process explained above in reference to FIGS. 1 and 2 is completed as part of a first portion of the method. In the latter case, the control apparatus 34 actuates the means for generating the global deformation according to FIGS. 1 and 2 to the target value determined as explained above and keeps it constant during the configuring process in relation to FIGS. 3 to 5, as described below.

[0060] In FIGS. 3 to 5, some of the same reference signs are used as in FIGS. 1 and 2. In this respect, they are in principle functionally identical components, which can be combined as explained with the embodiment according to FIGS. 1 and 2.

[0061] As explained in relation to the embodiment according to FIGS. 1 and 2, the double-sided processing machine shown in FIGS. 3 and 5 also has a first annular, upper support disk 10 and a likewise second annular, lower support disk 12. An annular first working disk 14 is in turn fastened to the upper support disk 10 and an annular second working disk 16 is fastened to the lower support disk 12. Between the first working disk 14 and the second working disk 16, a likewise annular working gap s is in turn formed, in which flat workpieces, for example wafers, are processed on both sides during operation. The double-sided processing machine can be, for example, a polishing machine, a lapping machine, or a grinding machine, as in FIGS. 1 and 2.

[0062] The upper support disk 10 and with it the first working disk 14 and/or the lower support disk 12 and with it the second working disk 16 can be driven rotationally relative to each other by a suitable drive apparatus comprising, for example, an upper drive shaft and/or a lower drive shaft and at least one drive motor. Such a drive apparatus is known and is not shown in more detail for clarity reasons. In a manner that is also known, the workpieces to be processed can be held in the working gap s in a swimming manner in rotor disks. With a suitable kinematic system, for example a planetary kinematic system, it can be ensured that the rotor disks also rotate through the working gap s during the relative rotation of the upper support disk 10 and the lower support disk 12 or, respectively, the first working disk 14 and the second working disk 16. In the first working disk 14 or the upper support disk 10 and possibly also the second working disk 16 or the lower support disk 12, tempering channels can be designed through which a tempering fluid, for example, a tempering liquid such as cooling water, can be conducted during operation. This is also known and is not shown in more detail.

[0063] The double-sided processing machine shown in FIGS. 3 to 5 has in turn measuring apparatuses that measure the width of the working gap s at multiple, in the present case three, radially spaced apart locations. FIG. 3 show a first measuring apparatus 46, a second measuring apparatus 48, and a third measuring apparatus 50 by example. Like the first sensor 42 and the second sensor 44 in the embodiment according to FIGS. 1 and 2, the measuring apparatuses according to the embodiment of FIGS. 3 to 5 also measure the distance between the surfaces of the first working disk 14 and the second working disk 16 delimiting the working gap s. As can be seen, the first measuring apparatus 46 measures the distance between the first working disk 14 and the second working disk 16 in the region of the radially outer edge of the working gap s. The third measuring apparatus 50 measures the distance between the first working disk 14 and the second working disk 16 in the region of the radially inner edge of the working gap s. The second measuring apparatus 48 measures the distance between the first working disk 14 and the second working disk 16 in the middle of the working gap s. The measurement values of the working gap width obtained by the measuring apparatuses are in turn transmitted to the control apparatus 34.

[0064] In the present case, the second working disk 16 is fastened to the lower support disk 12 only in the regions of the outer edge and the inner edge of the second working disk 16, for example, screwed along a partial circle as illustrated in FIG. 1 as a first fastening location 52 and a second fastening location 54. In contrast, the second working disk 16 is not fastened to the lower support disk 12 between the first fastening location 52 and the second fastening location 54. Instead, between the first fastening location 52 and the second fastening location 54, an annular pressure volume 56 is located between the lower support disk 12 and the second working disk 16. The pressure volume 56 is connected to a pressure fluid reservoir, for example a liquid reservoir, in particular a water reservoir, via a dynamic pressure line 58. In the dynamic pressure line 58, a pump and a control valve can be arranged. The pump and/or the control valve can be actuated by the control apparatus 34 as the means for generating a local deformation of the second working disk 16. In this way, a desired pressure that acts on the second working disk 16 can be built up in the pressure volume 56 by fluid introduced into the pressure volume 56. The pressure prevailing in the pressure volume 56 can be measured by a pressure measuring apparatus. The measurement data of the pressure measuring apparatus can also be applied to the control apparatus 34 so that the control apparatus 34 can set a specified pressure in the pressure volume 56.

[0065] Due to its freedom of movement between the first fastening location 52 and the second fastening location 54, the second working disk 16 can be brought into a convex shape locally, as indicated in FIG. 4 by a dotted line depicting a convex deformation 60, by setting a sufficiently high pressure in the pressure volume 56. If one assumes a pressure p.sub.0 in the pressure volume 56 in the operating state of FIG. 3, in which the second working disk 16 has a planar shape, the convex deformation 60 of the second working disk 16 shown in FIG. 4 can be achieved by setting a pressure p.sub.1>p.sub.0. On the other hand, a local concave deformation of the second working disk 16 can be achieved by setting a pressure p.sub.2<p.sub.0 in the pressure volume 56, as illustrated in FIG. 5 by a dotted line depicting a concave deformation 62.

[0066] In this case, it can be seen that the second working disk 16 can take on a locally convex shape (FIG. 4) or, respectively, a locally concave shape (FIG. 5), viewed in the radial direction, between its inner edge, in the region of the first fastening location 52, and its outer edge, in the region of the second fastening location 54.

[0067] As explained above in relation to FIGS. 1 and 2, an automatic configuring process is also performed by the control apparatus 34 in the embodiment according to FIGS. 3 to 5. For this purpose, the control apparatus 34 first actuates the means for step-by-step or continuously deforming the first working disk 14 between a locally concave shape and a locally convex shape, as shown in FIG. 4 as the convex deformation 60 and in FIG. 5 as the concave deformation 62. During the step-by-step or continuous deformation of the first working disk 14, the working gap width at, in the present case, three radially spaced apart locations of the first working disk 14 is measured step-by-step or continuously and the measurement values are given to the control apparatus 34. On this basis, the control apparatus 34 determines a measurement value average at each of the radially spaced apart locations. For example, the measurement values at the three different radial locations can be weighted in that the measurement values are included in the average determination with corresponding weighting factors. The control apparatus 34 furthermore determines the minimum of the measurement value averages and, based on the determined minimum, specifies a target value for the means for deforming the second working disk 16 as a starting value for the processing of flat workpieces in the double-sided processing machine. In particular, the control apparatus 34 controls the pressure in the pressure volume 56 for this purpose via the dynamic pressure line 58 according to the determined target value.

[0068] As explained, the method described for FIGS. 3 to 5 can be performed in particular in a second portion of the method after the first portion of the method described for FIGS. 1 and 2. In this way, a complete automatic configuration of the double-sided processing machine including the global and local working gap geometry that is optimal in each case for the processing can be specified and set by the control apparatus 34. However, it is also conceivable for the method explained for FIGS. 3 to 5 to be performed without the method explained for FIGS. 1 and 2, wherein, in this case, the second working disk 16 in FIGS. 3 to 5 can be a first working disk.

[0069] In the diagram shown in FIG. 6, the configuring process according to FIGS. 1 and 2 is explained in more detail. In particular, the working gap width shown as distance on the Y-axis is a function of time shown in the X-axis. The draft shows the relationship of these variables during a deformation of the first working disk 14 between a global concave shape and a global convex shape. The curve d.sub.outside shows the corresponding measurement values of the second sensor 44 measuring the working gap width at the radially outer location, and the curve d.sub.inside shows the corresponding measurement values of the first sensor 42 measuring at the radially inner location. The curve d.sub.evaluated is the associated series of averages, as determined by the control apparatus 34. The minimum of this series of averages d.sub.evaluated can now be taken as the ideal value. In the example shown, the minimum value corresponds largely to the crossover point between the groups d.sub.inside and d.sub.outside. The minimum can also be outside of the crossover point, depending on various parameters, such as the dressing formula or, respectively, wear of the polishing linings.

[0070] FIG. 7 shows a corresponding diagram for the configuring process according to FIGS. 3 to 5. In this case, the curve d.sub.outside shows the series of measurements during the local deformation of the second working disk 16 between a locally concave shape and a locally convex shape at the first measuring apparatus 46 in FIG. 3, meaning at the radially outer measurement location. The curve d.sub.inside shows the series of measurements at the radially inner third measuring apparatus 50. The curve d.sub.middle shows the measurement values in the middle region at the second measuring apparatus 48 in FIG. 3. The curve d.sub.evaluated in turn shows a series of averages for the series of measurements. The minimum can in turn be seen as an optimal value for the start of the processing process.

[0071] The following is a list of reference signs used in this specification and in the drawings. [0072] s Working gap [0073] d.sub.inside Curve [0074] d.sub.outside Curve [0075] d.sub.middle Curve [0076] d.sub.evaluated Curve [0077] 10 Upper support disk [0078] 12 Lower support disk [0079] 14 First working disk [0080] 16 Second working disk [0081] 18 Ring portion [0082] 20 Support ring [0083] 22 Arms [0084] 24 Upper shaft [0085] 26 Ring slot [0086] 28 Channel [0087] 30 Pressure intensifier [0088] 32 Proportional valve [0089] 34 Control apparatus [0090] 42 First sensor [0091] 44 Second sensor [0092] 46 First measuring apparatus [0093] 48 Second measuring apparatus [0094] 50 Third measuring apparatus [0095] 52 First fastening location [0096] 54 Second fastening location [0097] 56 Pressure volume [0098] 58 Dynamic pressure line [0099] 60 Convex deformation [0100] 62 Concave deformation