MULTI-AXIS GRIPPER UNIT OF TURNTABLE TYPE PROBE PIN BONDING APPARATUS

Abstract

The present invention relates to a turntable-type probe pin laser bonding apparatus wherein a pin gripper mounted on four surfaces automatically laser-bonds a probe pin to a probe card while continuously rotating pin grippers in a turntable method. More particularly, the present invention relates to a multi-axis gripper unit of a turntable type probe pin laser bonding apparatus that can continuously process the pickup, dipping, and laser bonding of probe pins while freely moving linearly or rotationally in multi-axis directions, for example, the X-axis, Y-axis, Xθ-axis, Yθ-axis, and the gripper axis, with high precision in micrometer units by being applied to the laser bonding unit.

Claims

1. A multi-axis gripper unit of a turntable-type probe pin laser bonding apparatus comprising: a pickup unit that rotates 360 degrees on the horizontal line and transfers the probe pin placed on the tray after holding it with a pin gripper consisting of a pair of clamps; a dipping unit applies solder paste to the probe pin transferred by the pickup unit; and a laser bonding unit bonds the probe pins to the probe card by irradiating a laser beam onto the solder paste of the probe pins transferred from the dipping unit by the pickup unit, wherein, an X-axis and Y-axis linear transport module equipped at the end of the pickup unit to linearly transport the pin gripper in the X-axis or Y-axis direction; an Xθ-axis and Yθ-axis rotary transfer module equipped between the X-axis and Y-axis linear transfer module and the pin gripper to rotate the pin gripper in the Xθ-axis or Yθ-axis direction; a gripper axis linear transfer module equipped between the Xθ and Yθ axis rotary transfer module and the pin gripper to transport the pin gripper to narrow or widen the gap between the pin grippers so that the pin gripper can hold or release the probe pin.

2. The multi-axis gripper unit of a turntable-type probe pin laser bonding apparatus of claim 1, wherein the X-axis and Y-axis linear transfer modules, respectively, comprise: a base frame; a piezoelectric actuator disposed on the base frame in the X-axis or Y-axis direction; and a slide frame that is linearly transferred in the X-axis and Y-axis directions by the motion of the piezoelectric actuator.

3. The multi-axis gripper unit of a turntable-type probe pin laser bonding apparatus of claim 2, wherein the piezoelectric actuator is equipped to be inserted into the tube pin member, which is integrally coupled to the slide frame so that the tube pin member and the slide frame are linearly transferred in the X-axis or Y-axis direction by the motion of the piezoelectric actuator.

4. The multi-axis gripper unit of a turntable-type probe pin laser bonding apparatus of claim 2, wherein the scale bar and the encoder PCB are further added to the base frame and the slide frame, respectively, to control the rotational feed amount in the X-axis or Y-axis direction of the slide frame.

5. The multi-axis gripper unit of a turntable-type probe pin laser bonding apparatus of claim 2, wherein the Xθ-axis and Yθ-axis rotary transfer modules, respectively, comprise: a cover frame; a rotary block rotatably equipped between the cover frames; and a piezoelectric actuator that passes through the cover frame and rotates the rotary block in the Xθ axis or Yθ axis direction in a coupled state.

6. The multi-axis gripper unit of a turntable-type probe pin laser bonding apparatus of claim 5, wherein at least two or more plate springs are coupled to one side of the rotary axis of the rotary block, and a piezoelectric actuator is equipped in a state inserted between the plate springs, and by the motion of the piezoelectric actuator, the plate spring and the rotary block are rotationally transferred in the Xθ axis or Yθ axis direction.

7. The multi-axis gripper unit of a turntable-type probe pin laser bonding apparatus of claim 5, wherein the scale bar and the encoder PCB are further added to the cover frame and the rotary block, respectively, to control the rotational feed amount in the Xθ axis or Yθ axis direction of the rotary block.

8. The multi-axis gripper unit of a turntable-type probe pin laser bonding apparatus of claim 1, the gripper shaft linear transport module comprises; a gripper base frame; a piezoelectric actuator fitted to the gripper base frame in the X-axis direction; and a gripper slide frame that is linearly transferred in the X-axis direction by the motion of the piezoelectric actuator.

9. The multi-axis gripper unit of a turntable-type probe pin laser bonding apparatus of claim 8, wherein one of the left and right clamps of the pin gripper is fixed to the gripper base frame and the gripper slide frame, respectively, and the gap between the left and right clamps of the pin gripper is narrowed or widened so that the pin gripper can hold or release the probe pin according to the linear movement of the gripper slide frame in the X-axis direction.

10. The multi-axis gripper unit of a turntable-type probe pin laser bonding apparatus of claim 8, wherein the scale bar and the encoder PCB are further added to the base frame and the slide frame, respectively, to control the rotational feed amount in the X-axis or Y-axis direction of the slide frame.

Description

BRIEF DESCRIPTION OF DRAWINGS

[0048] FIG. 1 is a plan view showing the configuration of a conventional turntable-type probe pin laser bonding apparatus according to some embodiments.

[0049] FIG. 2 is a perspective view showing the pickup unit of FIG. 1 separated.

[0050] FIG. 3 is a full perspective view of the multi-axis gripper unit of the turntable-type probe pin laser bonding apparatus of the present invention according to some embodiments.

[0051] FIG. 4 is an exploded perspective view showing the main part in an enlarged view of the X-axis and Y-axis linear transfer module of FIG. 3.

[0052] FIG. 5 is an exploded perspective view showing the main part in an enlarged view of the Yθ axis rotary transfer module of FIG. 3.

[0053] FIG. 6 is an exploded perspective view showing the main part in an enlarged Xθ axis rotary transfer module of FIG. 3.

[0054] FIG. 7 is an exploded perspective view showing the main part of an enlarged gripper shaft linear transfer module of FIG. 3.

MODE(S) FOR CARRYING OUT THE INVENTION

[0055] The terminology herein describes particular embodiments only and is not intended to be limiting. As used herein, the singular forms “a, ” “an, ” and “the” are intended to include the plural forms, including “at least one, ” unless the content clearly indicates otherwise. It will be further understood that the terms “comprises, ” “comprising, ” “includes, ” and/or “including, ” when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof.

[0056] Unless otherwise defined in this specification, all terms used herein (including technical and scientific terms) have the same meaning as commonly understood by those skilled in the art.

[0057] It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and will not be interpreted in an ideal or excessively formal sense unless clearly defined in the present specification.

[0058] Hereinafter, the multi-axis gripper unit of the turntable-type probe pin laser bonding apparatus, according to some embodiments of the present invention, will be described in detail with reference to the accompanying FIGS. 3 to 7 as follows.

[0059] As described above with reference to FIGS. 1 and 2, a multi-axis gripper unit of a turntable-type probe pin laser bonding apparatus of the present invention comprising: a pickup unit that rotates 360 degrees on the horizontal line and transfers the probe pin placed on the tray after holding it with a pin gripper consisting of a pair of clamps; a dipping unit applies solder paste to the probe pin transferred by the pickup unit; and a laser bonding unit bonds the probe pins to the probe card by irradiating a laser beam onto the solder paste of the probe pins transferred from the dipping unit by the pickup unit.

[0060] FIG. 3 is a full perspective view of the multi-axis gripper unit of the turntable-type probe pin laser bonding apparatus of the present invention according to some embodiments.

[0061] Referring to FIG. 3, the multi-axis gripper unit of the present invention may be configured as a 5-axis module according to some embodiments.

[0062] First, as the first and second components of the 5-axis module, an X-axis and Y-axis linear transport module (1100: 1110, 1120) is equipped to linearly transport the pin gripper (112) in the X-axis or Y-axis direction at the end of the pickup unit (110) of the turntable-type probe pin laser bonding apparatus.

[0063] In addition, as the third and fourth components of the present invention, an Xθ-axis and Yθ-axis rotation transfer module (1200: 1210, 1220) is equipped to rotate the pin gripper (112) in the Xθ-axis or Yθ-axis direction between the X-axis and Y-axis linear transfer module (1100) and the pin gripper (112).

[0064] In addition, as the fifth component of the present invention, a gripper shaft linear transfer module (1300) is equipped to narrow or widen the gap between the pin grippers (112) so that the pin gripper (112) can hold or release a probe pin (not shown) between the Xθ axis and Yθ axis rotation transfer module (1200) and the pin gripper (112).

[0065] In addition, as shown in FIG. 3, a separate bracket (1500) may be further equipped for screwing and fixing the pin gripper (112) to the gripper shaft linear transfer module (1300)

[0066] FIG. 4 is an exploded perspective view showing the main part in an enlarged view of the X-axis and Y-axis linear transfer module of FIG. 3.

[0067] Referring to FIG. 4, the X-axis and Y-axis linear transfer modules (1110) (1120) respectively comprise a ‘’ shaped base frame (1111)(1121), the piezoelectric actuators (1114) (1124) positioned in the X-axis or Y-axis direction on the base frame and the slide frames (1112)(1122) are linearly transported in the X-axis or Y-axis direction by a motion such as vibration selectively applied as electrical energy is added to the piezoelectric actuators (1114) (1124).

[0068] The piezoelectric actuator may be, for example, a miniature piezoelectric actuator using a piezoelectric ceramic. The miniature piezoelectric actuator applies an electric field to the piezoelectric ceramic polarized in one direction so that a contraction or expansion motion occurs in the piezoelectric ceramic according to the polarization direction and the applied electric field direction. The moving body moves linearly by transmitting this bending vibration to the moving shaft.

[0069] In addition, the piezoelectric actuators (1114)(1124) are equipped in a state of being inserted into the tube pin members (1113)(1123) integrally coupled to the slide frames (1112)(1122) so that electric energy is added to the piezoelectric actuators (1112)(1122), a fine motion such as vibration is generated. And by the motion of the piezoelectric actuators (1112)(1122), the tube pin members (1113)(1123) and the slide frames (1112)(1122) are linearly transported very precisely in the X-axis or Y-axis direction.

[0070] In addition, as scale bars (1115)(1125) and encoder PCBs (1116)(1126) are further added to the base frames (1111)(1121) and the slide frames (1112)(1122), respectively, the amount of linear feed in the X-axis or Y-axis direction of the slide frames (1112)(1122) is precisely controlled.

[0071] Accordingly, by the configuration of the piezoelectric actuators (1112)(1122), the scale bars (1115)(1125), and the encoder PCBs (1116)(1126), the X-axis and Y-axis linear transfer modules (1110)(1120) linearly transport the slide frames (1112)(1122) very precisely in micrometer units.

[0072] FIG. 5 is an exploded perspective view showing the main part in an enlarged view of the Yθ axis rotary transfer module of FIG. 3.

[0073] Referring to FIG. 5, the Yθ axis rotation transfer module (1210) respectively comprises a pair of left and right cover frames (1211-L, 1211-R), a rotary block (1212) rotatably equipped between the cover frames (1211-L, 1211-R), a piezoelectric actuator (1214) that passes through the cover frames (1211-L, 1211-R) and rotates the rotary block (1212) in the Yθ axis direction in a coupled state.

[0074] As shown in FIG. 5, the rotary block (1212) is formed as a rotating bundle having a circular arc-shaped curved surface on the part of the rotation shaft according to some embodiments, and a pair of plate springs (1213) is coupled to the left and right sides of the round curved surface, respectively.

[0075] At this time, the plate spring (1213) is fixedly coupled to the rotary block (1212) in a state of being spaced apart from each other by a predetermined interval by at least one or more spacers (1217).

[0076] Subsequently, as the piezoelectric actuator (1214) is positioned in a state inserted between the pair of plate springs (1213), the plate spring (1213) and the rotary block (1212) are precisely rotationally transferred in the Yθ axis direction by minute motions such as vibration of the piezoelectric actuator (1214).

[0077] In addition, a scale bar (1215) and an encoder PCB (1216) are further added to the left and right cover frames (1211-L, 1211-R) and the rotary block (1212), respectively, so that the rotational feed amount in the Xθ-axis or Yθ-axis direction of the rotary block (1212) is precisely controlled.

[0078] FIG. 6 is an exploded perspective view showing the main part in an enlarged Xθ axis rotary transfer module of FIG. 3.

[0079] FIG. 6 shows an embodiment of an Xθ-axis rotary transfer module. Unlike the configuration of the cover frame of FIG. 5, the cover frame (1221) of the Xθ-axis rotary transfer module of FIG. 6 may be integrally formed. The remaining components (1222, 1223, 1224, 1225, 1226, and 1227) may be applied in the same manner as the configuration of FIG. 5. Hereinafter, a description of the same configuration as that of FIG. 5 will be omitted.

[0080] FIG. 7 is an exploded perspective view showing the main part of an enlarged gripper shaft linear transfer module of FIG. 3.

[0081] Referring to FIG. 7, the gripper shaft linear transfer module (1300) comprises a gripper base frame (1301), a piezoelectric actuator (1303) fitted to the gripper base frame (1301) in the X-axis direction, a gripper slide frame (1302) linearly transported in the X-axis direction by the motion of the piezoelectric actuator (1303).

[0082] The piezoelectric actuator (1304) is inserted into the tube pin member (1303) coupled to the gripper slide frame (1302). When a minute motion such as vibration is generated in the piezoelectric actuator (1304), the tube pin member (1303) and the gripper slide frame (1302) are precisely linearly transferred in the X-axis direction on a micrometer scale.

[0083] At this time, as shown in FIG. 3, the left and right clamps (112-L, 112-R) of the pin gripper (112) are respectively fixed to the gripper base frame (1301) and the gripper slide frame (1302). The gap between the left and right clamps (112-L, 112-R) of the pin gripper (112) is operated to narrow or widen so that the pin gripper (112) can hold or release a probe pin (not shown) according to the linear movement of the gripper slide frame (1302) in the X-axis direction.

[0084] In addition, a scale bar (1305) and an encoder PCB (1306) are further added to the gripper base frame (1301) and the gripper slide frame (1302), respectively, so that the linear feed amount in the X-axis direction of the gripper slide frame (1302) is precisely controlled.

[0085] Therefore, the present invention is not limited only by the embodiments described above. It is possible to create the same effect even if the apparatus's detailed configuration or number and layout structure are changed, or the detailed steps are changed and added. It is possible to add, delete, and modify various configurations within the scope of the technical spirit of the present invention by those of ordinary skill in the art.

DESCRIPTION OF THE NUMERALS

[0086] 112 (112-L, 112-R): pin gripper(left. Right clamps) [0087] 1000: (the present invention) multi-axis gripper unit [0088] 1100: an X-axis and Y-axis linear transport module [0089] 1110: X-axis linear transport module [0090] 1120: Y-axis linear transport module [0091] 1111, 1121: base frame [0092] 1112, 1122: slide frame [0093] 1113, 1123: tube pin member [0094] 1114, 1124: piezoelectric actuator [0095] 1115, 1125: scale bar [0096] 1116, 1126: encoder PCB [0097] 1200: Xθ-axis and Yθ-axis rotation transfer module [0098] 1210: Yθ-axis rotation transfer module [0099] 1220: Xθ-axis rotation transfer module [0100] 1211: cover frame [0101] 1212, 1222: rotary block [0102] 1213, 1223: plate spring [0103] 1214, 1224: piezoelectric actuator [0104] 1215, 1225: scale bar [0105] 1216, 1226: encoder PCB [0106] 1217, 1227: spacer [0107] 1300: gripper shaft linear transfer module [0108] 1301: gripper base frame [0109] 1302: gripper slide frame [0110] 1303: tube pin member [0111] 1304: piezoelectric actuator [0112] 1305: scale bar [0113] 1306: encoder PCB