Circuit board and manufacture method of the circuit board

Abstract

A circuit board is manufactured by mounting a first circuit layer, mounting a conductive bump on the first circuit layer, covering the first circuit layer with a first dielectric layer which exposes the conductive bump, mounting a second dielectric layer on the first dielectric layer with a second dielectric layer opening that exposes the conductive bump, and finally, mounting a second circuit layer on the surface of the second dielectric layer and in the second dielectric layer opening. Since the surface roughness of the second dielectric layer and the second dielectric layer opening is low, it is unlikely to form nano voids between the second dielectric layer and the second circuit layer, and the second circuit layer may be attached to the second dielectric layer firmly, which is an advantage for fine line circuit disposal.

Claims

1. A circuit board, comprising: a first circuit layer; a conductive bump, mounted on the first circuit layer; a first dielectric layer, covering the first circuit layer and exposing the conductive bump; a second dielectric layer, covering the first dielectric layer and having a second dielectric layer opening; wherein the second dielectric layer opening corresponds to the conductive bump and exposes the conductive bump; a second circuit layer, mounted on the second dielectric layer and in the second dielectric layer opening, and electrically connected to the conductive bump to be electrically connected to the first circuit layer through the conductive bump; wherein a surface of the first dielectric layer combined with the second dielectric layer has a higher roughness than a surface of the second dielectric layer combined with the second circuit layer and a wall in the second dielectric layer opening combined with the second circuit layer; wherein the roughness of the surface of the first dielectric layer combined with the second dielectric layer is 0.2-0.5 μm, and the roughness of the surface of the second dielectric layer combined with the second circuit layer and the roughness of the wall surface in the second dielectric layer opening combined with the second circuit layer are 0.02-0.05 μm.

2. The circuit board as claimed in claim 1, wherein the circuit board has a fine line mounting area and a thick line mounting area; the second dielectric layer is mounted in the fine line mounting area; wherein the circuit board further comprises: a third circuit layer, mounted on the first dielectric layer in the thick line mounting area.

3. The circuit board as claimed in claim 2, further comprising: a third dielectric layer, mounted on the second dielectric layer and the second circuit layer in the fine line mounting area, and on the first dielectric layer and the third circuit layer in the thick line mounting area; and a fourth circuit layer, mounted on the third dielectric layer.

4. The circuit board as claimed in claim 1, wherein the first circuit layer is mounted on a substrate.

5. The circuit board as claimed in claim 1, wherein the first circuit layer is buried in the first dielectric layer.

6. The circuit board as claimed in claim 1, wherein the second circuit layer is buried in the second dielectric layer.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) FIGS. 1A-1M are cross-sectional views of a circuit board manufacture method of the present invention.

(2) FIGS. 2A-2D are cross-sectional views of a first embodiment of the circuit board manufacture method of the present invention.

(3) FIGS. 3A-3C are cross-sectional views of a second embodiment of the circuit board manufacture method of the present invention.

(4) FIGS. 4A-4G are cross-sectional views of a conventional manufacture method of a multilayer circuit board.

(5) FIG. 5A is a partial enlargement drawing of the cross-sectional view in FIG. 4C.

(6) FIG. 5B is a partial enlargement drawing of the cross-sectional view in FIG. 4G.

DETAILED DESCRIPTION OF THE INVENTION

(7) With reference to FIGS. 1A-1L, the present invention provides a circuit board 10 and the manufacture method of the circuit board 10. The manufacture method includes the following steps: providing a substrate 11; mounting a first circuit layer 12 on the substrate 11; mounting a conductive bump 13 on the first circuit layer 12; mounting a first dielectric layer 14 on the substrate 11, wherein the first dielectric layer 14 covers the first circuit layer 12 and exposes the conductive bump 13; mounting a second dielectric layer 15 on the first dielectric layer 14, wherein the second dielectric layer 15 has a second dielectric layer opening 151; wherein the second dielectric layer opening 151 is formed by a lithography process and is disposed corresponding to the conductive bump 13, such that the conductive bump 13 is exposed in the second dielectric layer opening 151; and mounting a second circuit layer 16 on the second dielectric layer 15 and in the second dielectric layer opening 151, such that the second circuit layer 16 is electrically connected to the conductive bump 13 and electrically connected to the first circuit layer 12 through the conductive bump 13.

(8) The manufacture method will be further illustrated in details below.

(9) As shown in FIG. 1A, firstly, mounting the first circuit layer 12 on the substrate 11.

(10) With reference to FIGS. 1B-1D, the step of “mounting the conductive bump 13 on the first circuit layer 12” further includes the following sub-steps: as shown in FIG. 1B, mounting a first photoresist layer 11a on the substrate 11; as shown in FIG. 1C, patterning the first photoresist layer 11a to form a first photoelectric layer opening 11b and exposing part of the first circuit layer 12; as shown in FIG. 1D, mounting the conductive bump 13 in the first photoelectric layer opening, and removing the first photoresist layer 11a to accomplish the conductive bump 13. The conductive bump 13 may be mounted by an electroplating process, for example.

(11) With reference to FIGS. 1E-1F, the step of “mounting a first dielectric layer 14 on the substrate 11, having the first dielectric layer 14 covering the first circuit layer 12 and exposing the conductive bump 13” further includes the following sub-steps: as shown in FIG. 1E, mounting the first dielectric layer 14 on the substrate 11 and covering the first dielectric layer 14 and the conductive bump 13; as shown in FIG. 1F, performing a thinning process to the first dielectric layer 14, such that the first dielectric layer 14 exposes the conductive bump 13.

(12) Preferably, the thinning process of the first dielectric layer 14 is a plasma process utilizing CF.sub.4 or SF.sub.4 gas, a desmear process, a physical or chemical grinding process, etc.

(13) With reference to FIGS. 1G-1H, in the step of “mounting a second dielectric layer 15 on the first dielectric layer 14, wherein the second dielectric layer 15 has a second dielectric layer opening 151 wherein the second dielectric layer opening 151 is formed by a lithography process, and is disposed corresponding to the conductive bump 13, such that the conductive bump 13 is exposed in the second dielectric layer opening 151” further includes the following sub-steps: as shown in FIG. 1G, mounting the second dielectric layer 15 on the first dielectric layer 14, such that the second dielectric layer 15 covers the first dielectric layer 14 and the conductive bump 13; as shown in FIG. 1H, performing a lithography process to the second dielectric layer 15 to form the second dielectric layer opening 151.

(14) With reference to FIGS. 1I-1L, in the step of “mounting a second circuit layer 16 on the second dielectric layer 15 and in the second dielectric layer opening 151, such that the second circuit layer 16 is electrically connected to the conductive bump 13, and electrically connected to the first circuit layer 12 through the conductive bump 13” further includes the following sub-steps: as shown in FIG. 1I, mounting a seed layer 16a on the second dielectric layer 15 and in the second dielectric layer opening 151; as shown in FIG. 1J, mounting a second photoresist layer 15a on the seed layer 16a, wherein the second photoresist layer 15a has at least one second photoresist layer opening 15b that exposes part of the seed layer 16a and the second dielectric layer opening 151; as shown in FIG. 1K, mounting the second circuit layer 16 in the second photoresist layer opening 15b and the second dielectric layer opening 151; removing the second photoresist layer 15a, as shown in FIG. 1L, performing an etching process to the seed layer 16a and the second circuit layer 16 to separate circuits in the second circuit layer 16 and accomplish the second circuit layer 16.

(15) The circuit board 10 with the first circuit layer 12 and the second circuit layer 16 are accomplished by the manufacture method described above. It should be emphasized that, the thinning process and the roughness of the first dielectric layer 14 are irrelevant to the quality and stability of the second circuit layer 16, because the seed layer 16a is not mounted directly on the first dielectric layer 14, but on the second dielectric layer 15 that covers the first dielectric layer 14. The second dielectric layer opening 151 for conduction is formed by a lithography process, and therefore the surface of the second dielectric layer 15 and the wall in the second dielectric layer opening 151 have a much lower surface roughness. The possibility of voids formed between the seed layer 16a and the second dielectric layer 15 or between the second circuit layer 16 and the seed layer 16a is lowered. The surface of the seed layer 16a is also smoother, which is an advantage for the attaching of the second circuit layer 16.

(16) Namely, a surface of the first dielectric layer 14 combined with the second dielectric layer 15 has a higher roughness than a surface of the second dielectric layer 15 combined with the second circuit layer 16 and a wall in the second dielectric layer opening 151 combined with the second circuit layer 16.

(17) With reference to FIG. 1L, the circuit board 10 of the present invention includes the first circuit layer 12, the conductive bump 13, the first dielectric layer 14, and the second dielectric layer 15. The conductive bump 13 is mounted on the first circuit layer 12. The first dielectric layer 14 covers the first circuit layer 12 and exposes the conductive bump 13. The second dielectric layer 15 covers the second circuit layer 16 and has a second dielectric layer opening 151, wherein the second dielectric layer opening 151 corresponds to the conductive bump 13 and exposes the conductive bump 13. The second circuit layer 16 is mounted on the second dielectric layer 15 and in the second dielectric layer opening 151, and electrically connected to the conductive bump 13 to be electrically connected to the first circuit layer 12 through the conductive bump 13.

(18) The circuit board 10 may include the substrate 11, that is, the first circuit layer 12 is mounted on the substrate 11 when the manufacture process is accomplished. With reference to FIG. 1M, in another embodiment, the first circuit layer 12 is a buried layer. That is, after mounting the first circuit layer 12 and the build-up circuit layer(s), the substrate 11 is removed, such that the first circuit layer 12 is buried in the first dielectric layer 14.

(19) Preferably, the material of the first dielectric layer 14 is a formulized compound including organic chemicals such as ABF (Ajinomoto Build-up Film), PP (Prepreg), BCB (Benzocylobuthene), BT (Bismaleimide Triazine), liquid crystal polymer, PI (Poly-imide), acrylic resin, polyurethane resin, epoxy resin, phenolic resin, and inorganic compounds such as talcum powder, Barium sulfate, Silicon dioxide, glass fiber, and other additives.

(20) The second dielectric layer 15 is a photosensitive layer. The material of the second dielectric layer 15 is a formulized compound including organic chemicals such as PP (Prepreg), BCB (Benzocylobuthene), BT (Bismaleimide Triazine), liquid crystal polymer, PI(Poly-imide), acrylic resin, polyurethane resin, epoxy resin, polyvinyl ether, (Poly (phenylene ether)), aramide, and other additives.

(21) With reference to FIG. 2A and FIG. 2B, in a first embodiment of the present invention, the surface of the second dielectric layer 15 has a patterned groove 152. The step of “mounting a second dielectric layer 15 on the first dielectric layer 14” includes the following sub-steps: as shown in FIG. 2A, mounting the second dielectric layer 15 on the first dielectric layer 14, such that the second dielectric layer 15 covers the first dielectric layer 14 and the conductive bump 13; as shown in FIG. 2B, performing the lithography process on the second dielectric layer 15 and forming the second dielectric layer opening 151 and the patterned groove 152.

(22) Further with reference to FIG. 2C and FIG. 2D, in the first embodiment, the step of “mounting a second circuit layer 16 on the second dielectric layer 15 and in the second dielectric layer opening 151, such that the second circuit layer 16 is electrically connected to the conductive bump 13, and electrically connected to the first circuit layer 12 through the conductive bump 13” includes the step of forming the second circuit layer 16 in the second dielectric layer opening 151 and the patterned groove 152. To be more specific, as shown in FIG. 2C, first, forming the second circuit layer 16 on the surface of the second dielectric layer 15, in the second dielectric layer opening 151, and in the patterned groove 152; then, as shown in FIG. 2D, removing part of the second circuit layer 16 at the surface to accomplish the second circuit layer 16 in the second dielectric layer opening 151 and the patterned groove 152. Wherein the second circuit layer 16 may be formed by chemical deposition of metal such as copper, or a process with similar outcome. The part of the second circuit layer 16 may be removed by a grinding process, an etching process or a metal thinning process with similar outcome.

(23) In the present embodiment, the second circuit layer 16 is a buried circuit layer. Differential exposure is performed to the second dielectric layer 15 during the lithography process, with the purpose of forming the second dielectric layer opening 151 and the patterned groove 152 of different depths. The pattern of the second circuit layer 16 is set up with the forming of the patterned groove 152, and the forming of the buried second circuit layer 16 is done by mounting the material in the second dielectric layer opening 151 and the patterned groove 152.

(24) With reference to FIG. 3A and FIG. 3B, in a second embodiment of the present invention, the circuit board 10 has a fine line mounting area 10A and a thick line mounting area 10B, and the second dielectric layer 15 is mounted in the fine line mounting area 10A.

(25) In the present embodiment, after the mounting of the second dielectric layer 15 and the second circuit layer 16, the following steps are further included: as shown in FIG. 3A, mounting a third circuit layer 17 on the first dielectric layer 14 in the thick line mounting area 10B; as shown in FIG. 3B, mounting a third dielectric layer 18 on the first dielectric layer 14 in the fine line mounting area 10A and the thick line mounting area 10B, covering the second dielectric layer 15 and the second circuit layer 16 in the fine line mounting area, and covering the first dielectric layer 14 and the third circuit layer 17 in the thick line mounting area 10B; and mounting a fourth circuit layer 19 on the third dielectric layer 18.

(26) In the present embodiment, the circuit board 10 has the non-overlapping fine line mounting area 10A and thick line mounting area 10B. The second dielectric layer 15 is mounted in the fine line mounting area 10A. The circuit board 10 further includes the third circuit layer 17 that is mounted in the thick line mounting area 10B.

(27) With reference to FIG. 3C, in the present embodiment, the circuit board 10 further includes a third dielectric layer 18 and a fourth circuit layer 19. The third dielectric layer 18 is mounted on the second dielectric layer 15 and the second circuit layer 16 in the fine line mounting area 10A, and on the first dielectric layer 14 and the third circuit layer 17 in the thick line mounting area 10B. The fourth circuit layer 19 is mounted on the third dielectric layer 18.

(28) In the present embodiment, the second dielectric layer 15 is mounted in the fine line mounting area 10A with the second circuit layer 16 on top, wherein the phrase “fine line” refers to circuit structure with line spacing or diameter of second dielectric layer opening 151 under 10 μm. In the thick line mounting area 10B upon the first dielectric layer 14, the third circuit layer 17 may be mounted. Furthermore, the third dielectric layer 18 may be mounted in both the fine line mounting area 10A and the thick line mounting area 10B on the circuit board 10, and the fourth circuit layer 19 is mounted on the third dielectric layer 18. The mounting process of the fourth circuit layer 19 may utilize a conventional circuit layer build-up method, and the detail thereof is hereby omitted. As a result, the third dielectric layer 18 in the thick line mounting area 10B will be in direct contact and attached to the first dielectric layer 14. Since the surface of the first dielectric layer 14 has a higher roughness, the first dielectric layer 14 and the third dielectric layer 18 have a better interlayer coupling, thereby improving the stableness and structure solidness of the circuit board 10.

(29) Even though numerous characteristics and advantages of the present invention have been set forth in the foregoing description, together with details of the structure and function of the invention, the disclosure is illustrative only. Changes may be made in detail, especially in matters of shape, size, and arrangement of parts within the principles of the invention to the full extent indicated by the broad general meaning of the terms in which the appended claims are expressed.